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Proceedings of the 3rd IEEE International Workshop on High Performance Electron Devices for Microwave and Optoelectronic Applications, EDMO 95最新文献

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Monolithic V-band high power and varactor tunable HEMT oscillators 单片v波段大功率变容可调谐HEMT振荡器
M. Schefer, U. Lott, B. Klepser, H. Meier, W. Patrick, W. Bachtold
The design, fabrication, and the measured results of V-band monolithically integrated fundamental oscillators are presented. The active device is a 0.2 /spl mu/m InP based HEMT with f/sub max/=200 GHz and f/sub t/=100 GHz. A basic V-band oscillator, a high power and a varactor tuned oscillator are compared. The resonance frequency of the basic oscillator is 54.333 GHz and the phase noise -70 dBc/Hz @ 1 MHz offset. The high power oscillator shows 83 dBm output power at 48 GHz For the varactor tunable oscillator an output power of 0 dBm at 63 GHz and a tuning range of 100 MHz are measured. The circuits were fabricated in coplanar technology.
介绍了v波段单片集成基频振荡器的设计、制造和测量结果。有源器件是基于0.2 /spl mu/m InP的HEMT, f/sub max/=200 GHz, f/sub t/=100 GHz。对基本v波段振荡器、大功率变容管调谐振荡器进行了比较。基本振荡器的谐振频率为54.333 GHz,相位噪声为-70 dBc/Hz @ 1 MHz偏移。该变容可调谐振荡器在63 GHz时的输出功率为0 dBm,调谐范围为100 MHz。电路采用共面工艺制作。
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引用次数: 3
On temperature and hot electron induced degradation in AlGaAs/InGaAs PM-HEMT's AlGaAs/InGaAs PM-HEMT的温度和热电子诱导降解研究
G. Meneghesso, E. De Bortoli, P. Cova, R. Menozzi
AlGaAs/InGaAs pseudomorphic HEMTs (PM-HEMTs) have been submitted to either hot electron or high temperature storage stress tests, A non-permanent increase of the drain current is observed after the tests and is correlated with the presence of deep levels in the devices, Trapping of holes generated by impact ionization (during the hot electron stress) or thermally activated electron detrapping (during the high temperature storage) are responsible for the observed shifts of the PM-HEMT's characteristics. We also present a new DC based investigation technique that gives information about the localization of the trapped/detrapped charge.
AlGaAs/InGaAs伪晶hemt (pm - hemt)已经进行了热电子或高温存储应力测试,测试后观察到漏极电流的非永久性增加,并且与器件中存在深电平相关。由冲击电离(在热电子应力期间)或热激活电子脱陷(在高温储存期间)产生的空穴捕获是PM-HEMT特性观察到的变化的原因。我们还提出了一种新的基于直流的调查技术,可以提供关于被捕获/被捕获电荷的定位信息。
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引用次数: 7
Characterization of Pd/Sn ohmic contacts on n-GaAs using electrical measurements, EDAX and SIMS 利用电测量、EDAX和SIMS表征n-GaAs上Pd/Sn欧姆接触
M.S. Islam, P. McNally, D. Cameron, P. Herbert
A non-alloyed Pd/Sn ohmic contact on n-GaAs has been developed. Metallization samples are: annealed at various temperatures and systematically characterized using Energy Dispersive Analysis of X-rays (EDAX), Secondary Ion Mass Spectrometry (SIMS) and current-voltage (I-V) measurements. Contact resistivities, /spl rho//sub c/, of the proposed metallization are measured utilizing a transmission line model (TLM) method. Annealing at 360/spl deg/C for 30 min yielded the lowest /spl rho//sub c/ of /spl sim/3.26/spl times/10/sup -5/ /spl Omega/-cm/sup 2/ on 2/spl times/10/sup 13/ cm/sup -3/ n-GaAs with a Pd(300 /spl Aring/)/Sn(1500 /spl Aring/) contact. The EDAX spectra show a correlation between Ga signal peaks and measured /spl rho//sub c/ values at various annealing temperatures. The contact depth profiles are analyzed by SIMS. The effect of metallization thickness on contact properties are also presented. The mass spectrometer analysis confirms the formation of PdGa and SnGa compounds at the lowest /spl rho//sub c/ condition.
在n-GaAs上制备了一种非合金Pd/Sn欧姆触点。金属化样品:在不同温度下退火,并使用x射线能量色散分析(EDAX),二次离子质谱(SIMS)和电流-电压(I-V)测量系统地表征。采用传输线模型(TLM)方法测量金属化的接触电阻率/spl rho//sub c/。在360/spl℃下退火30分钟,得到了Pd(300 /spl Aring/)/Sn(1500 /spl Aring/)接触的最低/spl rho//sub // // spl sim/3.26/spl times/10/sup -5/ /spl Omega/-cm/sup 2/ on / 2/spl times/10/sup 13/ cm/sup -3/ n-GaAs。EDAX光谱显示了不同退火温度下Ga信号峰值与测量值/spl rho//sub c/之间的相关性。利用SIMS对接触深度进行了分析。研究了金属化厚度对接触性能的影响。质谱分析证实PdGa和SnGa化合物在最低/spl rho//sub c/条件下生成。
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引用次数: 4
Nonlinear common source MESFET behaviour and model validation 非线性共源MESFET行为及模型验证
G. Passiopoulos, D. Webster, A. Parker, D. Haigh
In this paper we investigate the effect of bias conditions and load resistance on the nonlinear behaviour of a MESFET Common Source (CS) amplifier at medium frequencies. The distortion nulling effects observed in measured results provide a good criteria for assessing large signal model performance over a wide range of bias conditions. The Parker-Skellern model of the MESFET is used to simulate the MESFET circuit configuration for which the distortion measurements were performed. The model predicts the observed distortion structure.
本文研究了偏置条件和负载电阻对MESFET共源(CS)放大器中频非线性特性的影响。在测量结果中观察到的失真零化效应为在广泛的偏置条件下评估大信号模型的性能提供了一个很好的标准。MESFET的Parker-Skellern模型用于模拟MESFET电路配置,并对其进行失真测量。该模型预测了观测到的畸变结构。
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引用次数: 1
Manufacturability of quantum semiconductor devices 量子半导体器件的可制造性
V. A. Wilkinson, M. Kelly
A plethora of new device concepts have been established that exploit quantum confinement or tunnelling in semiconductor multilayers as the basis of their operation, and some device prototypes have given impressive performance figures-of-merit. These devices will never become commercial, however, until there is some confidence in designing to an I-V characteristic, and being able to grow and qualify the semiconductor multilayers with adequate confidence to undertake reverse engineering. A summary of tunnel device ideas is followed by a description of a project to determine whether even the simplest tunnel structure (a single tunnel barrier in an asymmetric doping environment-the ASPAT diode) can be considered manufacturable.
已经建立了大量的新器件概念,利用半导体多层中的量子限制或隧道效应作为其操作的基础,并且一些器件原型已经给出了令人印象深刻的性能指标。然而,这些器件永远不会商业化,除非在设计I-V特性方面有一定的信心,并且能够以足够的信心来进行逆向工程,从而能够生长和合格的半导体多层。隧道装置思想的总结之后,描述了一个项目,以确定是否甚至是最简单的隧道结构(在不对称掺杂环境中的单个隧道势垒- ASPAT二极管)可以被认为是可制造的。
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引用次数: 1
Strain-balanced quantum wells for power FET applications 用于功率场效应管的应变平衡量子阱
J.J. Harris, J. M. Roberts, R. Jaszek, M. Hopkinson
We report the use of strain-balanced quantum well structures to generate high carrier density, high mobility layers suitable for power FET applications. Current designs of modulation-doped heterojunctions (i.e. HEMTs) have a sheet carrier density limited to a maximum of /spl sim/3/spl times/10/sup 12/ cm/sup -2/, while doped channel devices (HFETs) allow higher densities, but with degraded mobility. We have investigated two techniques for giving improved properties, (a) strain-balanced AlAs/InAs/AlAs HEMTs grown on InP, where sheet densities of /spl sim/10/sup 13/ cm/sup -2/ have been generated, although with some evidence of mobility degradation, and (b) delta-doped, compositionally graded HFETs, again strain-balanced on InP, where excellent mobilities and saturation drift velocities have been obtained for sheet densities of 4-5/spl times/10/sup 12/ cm/sup -2/. This paper describes the growth techniques used to produce these samples, and presents the X-ray diffraction data and electrical properties of the layers.
我们报告了使用应变平衡量子阱结构来产生适合功率场效应晶体管应用的高载流子密度、高迁移率层。目前设计的调制掺杂异质结(即hemt)的载流子密度限制在最大/spl sim/3/spl乘以/10/sup 12/ cm/sup -2/,而掺杂通道器件(hfet)允许更高的密度,但迁移率降低。我们已经研究了两种改善性能的技术,(a)在InP上生长的应变平衡的AlAs/InAs/AlAs hemt,虽然有迁移率下降的证据,但已经产生了/spl sim/10/sup 13/ cm/sup -2/的片密度,以及(b) δ掺杂的,成分梯度的hfet,再次在InP上应变平衡,在4-5/spl倍/10/sup 12/ cm/sup -2/的片密度下获得了优异的迁移率和饱和漂移速度。本文介绍了用于生产这些样品的生长技术,并给出了x射线衍射数据和层的电学性质。
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引用次数: 2
Hot electron degradation effects in Al/sub 0.25/Ga/sub 0.75/As/In/sub 0.2/Ga/sub 0.8/As/GaAs PHEMTs Al/sub 0.25/Ga/sub 0.75/As/ in /sub 0.2/Ga/sub 0.8/As/GaAs PHEMTs的热电子降解效应
P. Cova, R. Menozzi, D. Lacey, Y. Baeyens, F. Fantini
This paper reports on hot electron stress experiments performed on 0.25 /spl mu/m AlGaAs/InGaAs/GaAs pseudomorphic HEMTs. Devices have been subjected to high drain bias stress cycles with drain voltages ranging between 5 and 8 V up to a cumulative stress time of 18 hours. The effect of the stress on the device DC characteristics is studied. In particular, stressed devices show an increase of the gate-drain breakdown voltage (breakdown walkout) and changes of the drain current in the saturation region that depend, both in magnitude and polarity, on the stress conditions: moderate stress bias and time yield an increase of the drain current, whereas more severe conditions tend to lower it.
本文报道了在0.25 /spl μ m AlGaAs/InGaAs/GaAs伪晶HEMTs上进行的热电子应力实验。器件承受高漏极偏置应力循环,漏极电压范围在5到8 V之间,累积应力时间为18小时。研究了应力对器件直流特性的影响。特别是,受应力的器件表现出栅极-漏极击穿电压(击穿失效)的增加和饱和区域漏极电流的变化,这取决于应力条件的大小和极性:适度的应力偏置和时间会产生漏极电流的增加,而更严重的条件往往会降低漏极电流。
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引用次数: 0
Longitudinal mode control in Fabry-Perot lasers 法布里-珀罗激光器的纵模控制
D. Kozlowski, J. Young, J. England, R. Plumb
Localised reflections within the lasing filament of Fabry-Perot lasers cause spectral perturbations. Focused Ga/sup +/ ion beam etching can be used to form steep walled pits of submicron size in the lasing filament which give rise to localised reflections with minimal rises in threshold current. Control of both position and depth enables one to sculpture the modal envelope so as to form singlemode Fabry-Perot lasers with 30 dB of mode suppression, temperature stable over 30/spl deg/C with an increase in threshold of a few milliamps. Modelling results show an effective reflectivity can be allocated to the etched pit and this is an order of magnitude below the cleaved facet reflectivity.
法布里-珀罗激光器激光灯丝内的局部反射引起光谱扰动。聚焦的Ga/sup +/离子束刻蚀可以在激光灯丝中形成亚微米大小的陡峭壁坑,产生局域反射,阈值电流的上升最小。对位置和深度的控制使人们能够雕刻模态包膜,从而形成具有30 dB模式抑制的单模法布里-珀罗激光器,温度稳定在30/spl度/C以上,阈值增加几毫安。模拟结果表明,蚀刻坑可以分配有效反射率,这比劈裂面反射率低一个数量级。
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引用次数: 1
General results of investigation of the excess noise in optoelectronic devices and their application for improving the device performance 光电器件中过量噪声研究的一般结果及其在提高器件性能中的应用
N. Lukyanchikova
The properties of the excess noise observed in a wide variety of optoelectronic devices based on homo- and heterojunctions in III-V and II-VI compounds are considered. It is shown that rather universal mechanism is responsible for this noise and its model is described. A number of technical applications of the results of measurements of this noise is presented and discussed.
考虑了基于III-V和II-VI化合物的同质结和异质结的各种光电器件中观察到的过量噪声的性质。结果表明,这种噪声的产生具有相当普遍的机理,并对其模型进行了描述。介绍并讨论了该噪声测量结果的一些技术应用。
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引用次数: 4
Technology for monolithic integration of GaInAs MSM photodetectors and AlGaAs/GaAs/AlGaAs-HEMT electronics GaInAs MSM光电探测器和AlGaAs/GaAs/AlGaAs- hemt电子器件的单片集成技术
N. Bronner, W. Benz, T. Fink, N. Grun, M. Haupt, V. Hurm, K. Kohler, M. Ludwig
A process suitable for the monolithic integration of 1.3 /spl mu/m MSM photodiodes and HEMT electronics is presented A new MBE growth concept has been implemented to improve the performance of GaInAs photodetectors grown on GaAs. Photodetectors fabricated on linear and step graded buffer layers as well as those grown on InP substrates have been compared. The measured responsivities at the wavelength of 1.3 /spl mu/m were 0.34 A/W and 0.33 A/W for detectors on linear graded buffers and on InP, respectively. A -3 dB bandwidth of more than 8 GHz was obtained from high frequency measurements, The spectral response of the photodetectors show nearly the same responsivity for a wavelength of 1.3 /spl mu/m as for 1.55 /spl mu/m. Taking into account the high yield and reliability of our HEMT process the presented integration concept together with the new detector structure is suitable for large scale production of high performance long wavelength photoreceivers.
提出了一种适合1.3 /spl mu/m MSM光电二极管与HEMT电子器件单片集成的工艺。为了提高在GaAs上生长的GaInAs光电探测器的性能,提出了一种新的MBE生长概念。比较了在线性和阶梯渐变缓冲层上制备的光电探测器以及在InP衬底上生长的光电探测器。在1.3 /spl mu/m波长下,线性梯度缓冲层和InP上的探测器的响应率分别为0.34 A/W和0.33 A/W。在波长为1.3 /spl mu/m和1.55 /spl mu/m时,光电探测器的光谱响应几乎相同。考虑到我们的HEMT工艺的高产率和可靠性,提出的集成概念以及新的探测器结构适合大规模生产高性能长波光电接收器。
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引用次数: 0
期刊
Proceedings of the 3rd IEEE International Workshop on High Performance Electron Devices for Microwave and Optoelectronic Applications, EDMO 95
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