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Proceedings of the 3rd IEEE International Workshop on High Performance Electron Devices for Microwave and Optoelectronic Applications, EDMO 95最新文献

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Non-local effects on the multiplication characteristics of thin GaAs p-i-n and n-i-p diodes 非局部效应对薄GaAs p-i-n和n-i-p二极管倍增特性的影响
S. Plimmer, J. David, T. Lee, G. Rees, P. Houston, P. Robson, R. Grey, D. Herbert, A. Higgs, D. Wight
Electron and hole multiplication characteristics have been measured on a series of GaAs p-i-n and n-i-p diodes in which the nominal i-region thicknesses, w, range from 1 /spl mu/m to 25 nm. Using the conventional analysis, where ionization is assumed to be uniform across the device, the effective electron and hole ionization coefficients (/spl alpha/ and /spl beta/ respectively) have been deduced. The results obtained from the w=1 /spl mu/m and 0.5 /spl mu/m structures agree with published data which was derived from thick devices. However, those observed in the thinner structures show device width dependence. By implementing semi-analytical techniques to solve Boltzmann's equation and to interpret these results, dead space effects are seen to reduce /spl alpha/ and /spl beta/ in short devices at low multiplication values but overshoot effects compensate when the electric field is increased.
测量了一系列GaAs p-i-n和n-i-p二极管的电子和空穴倍增特性,其中标称i区厚度w范围为1 /spl mu/m至25 nm。利用传统的分析,假设电离在整个装置上是均匀的,推导出有效电子和空穴电离系数(分别为/spl α /和/spl β /)。从w=1 /spl mu/m和0.5 /spl mu/m结构中得到的结果与已发表的厚器件数据一致。然而,在较薄的结构中观察到的那些显示出器件宽度依赖性。通过实施半解析技术来解决玻尔兹曼方程并解释这些结果,死区效应可以在低乘法值下降低短器件的/spl α /和/spl β /,但当电场增加时,超调效应会补偿。
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引用次数: 2
Monolithic V-band high power and varactor tunable HEMT oscillators 单片v波段大功率变容可调谐HEMT振荡器
M. Schefer, U. Lott, B. Klepser, H. Meier, W. Patrick, W. Bachtold
The design, fabrication, and the measured results of V-band monolithically integrated fundamental oscillators are presented. The active device is a 0.2 /spl mu/m InP based HEMT with f/sub max/=200 GHz and f/sub t/=100 GHz. A basic V-band oscillator, a high power and a varactor tuned oscillator are compared. The resonance frequency of the basic oscillator is 54.333 GHz and the phase noise -70 dBc/Hz @ 1 MHz offset. The high power oscillator shows 83 dBm output power at 48 GHz For the varactor tunable oscillator an output power of 0 dBm at 63 GHz and a tuning range of 100 MHz are measured. The circuits were fabricated in coplanar technology.
介绍了v波段单片集成基频振荡器的设计、制造和测量结果。有源器件是基于0.2 /spl mu/m InP的HEMT, f/sub max/=200 GHz, f/sub t/=100 GHz。对基本v波段振荡器、大功率变容管调谐振荡器进行了比较。基本振荡器的谐振频率为54.333 GHz,相位噪声为-70 dBc/Hz @ 1 MHz偏移。该变容可调谐振荡器在63 GHz时的输出功率为0 dBm,调谐范围为100 MHz。电路采用共面工艺制作。
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引用次数: 3
On temperature and hot electron induced degradation in AlGaAs/InGaAs PM-HEMT's AlGaAs/InGaAs PM-HEMT的温度和热电子诱导降解研究
G. Meneghesso, E. De Bortoli, P. Cova, R. Menozzi
AlGaAs/InGaAs pseudomorphic HEMTs (PM-HEMTs) have been submitted to either hot electron or high temperature storage stress tests, A non-permanent increase of the drain current is observed after the tests and is correlated with the presence of deep levels in the devices, Trapping of holes generated by impact ionization (during the hot electron stress) or thermally activated electron detrapping (during the high temperature storage) are responsible for the observed shifts of the PM-HEMT's characteristics. We also present a new DC based investigation technique that gives information about the localization of the trapped/detrapped charge.
AlGaAs/InGaAs伪晶hemt (pm - hemt)已经进行了热电子或高温存储应力测试,测试后观察到漏极电流的非永久性增加,并且与器件中存在深电平相关。由冲击电离(在热电子应力期间)或热激活电子脱陷(在高温储存期间)产生的空穴捕获是PM-HEMT特性观察到的变化的原因。我们还提出了一种新的基于直流的调查技术,可以提供关于被捕获/被捕获电荷的定位信息。
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引用次数: 7
Nonlinear common source MESFET behaviour and model validation 非线性共源MESFET行为及模型验证
G. Passiopoulos, D. Webster, A. Parker, D. Haigh
In this paper we investigate the effect of bias conditions and load resistance on the nonlinear behaviour of a MESFET Common Source (CS) amplifier at medium frequencies. The distortion nulling effects observed in measured results provide a good criteria for assessing large signal model performance over a wide range of bias conditions. The Parker-Skellern model of the MESFET is used to simulate the MESFET circuit configuration for which the distortion measurements were performed. The model predicts the observed distortion structure.
本文研究了偏置条件和负载电阻对MESFET共源(CS)放大器中频非线性特性的影响。在测量结果中观察到的失真零化效应为在广泛的偏置条件下评估大信号模型的性能提供了一个很好的标准。MESFET的Parker-Skellern模型用于模拟MESFET电路配置,并对其进行失真测量。该模型预测了观测到的畸变结构。
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引用次数: 1
Manufacturability of quantum semiconductor devices 量子半导体器件的可制造性
V. A. Wilkinson, M. Kelly
A plethora of new device concepts have been established that exploit quantum confinement or tunnelling in semiconductor multilayers as the basis of their operation, and some device prototypes have given impressive performance figures-of-merit. These devices will never become commercial, however, until there is some confidence in designing to an I-V characteristic, and being able to grow and qualify the semiconductor multilayers with adequate confidence to undertake reverse engineering. A summary of tunnel device ideas is followed by a description of a project to determine whether even the simplest tunnel structure (a single tunnel barrier in an asymmetric doping environment-the ASPAT diode) can be considered manufacturable.
已经建立了大量的新器件概念,利用半导体多层中的量子限制或隧道效应作为其操作的基础,并且一些器件原型已经给出了令人印象深刻的性能指标。然而,这些器件永远不会商业化,除非在设计I-V特性方面有一定的信心,并且能够以足够的信心来进行逆向工程,从而能够生长和合格的半导体多层。隧道装置思想的总结之后,描述了一个项目,以确定是否甚至是最简单的隧道结构(在不对称掺杂环境中的单个隧道势垒- ASPAT二极管)可以被认为是可制造的。
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引用次数: 1
Strain-balanced quantum wells for power FET applications 用于功率场效应管的应变平衡量子阱
J.J. Harris, J. M. Roberts, R. Jaszek, M. Hopkinson
We report the use of strain-balanced quantum well structures to generate high carrier density, high mobility layers suitable for power FET applications. Current designs of modulation-doped heterojunctions (i.e. HEMTs) have a sheet carrier density limited to a maximum of /spl sim/3/spl times/10/sup 12/ cm/sup -2/, while doped channel devices (HFETs) allow higher densities, but with degraded mobility. We have investigated two techniques for giving improved properties, (a) strain-balanced AlAs/InAs/AlAs HEMTs grown on InP, where sheet densities of /spl sim/10/sup 13/ cm/sup -2/ have been generated, although with some evidence of mobility degradation, and (b) delta-doped, compositionally graded HFETs, again strain-balanced on InP, where excellent mobilities and saturation drift velocities have been obtained for sheet densities of 4-5/spl times/10/sup 12/ cm/sup -2/. This paper describes the growth techniques used to produce these samples, and presents the X-ray diffraction data and electrical properties of the layers.
我们报告了使用应变平衡量子阱结构来产生适合功率场效应晶体管应用的高载流子密度、高迁移率层。目前设计的调制掺杂异质结(即hemt)的载流子密度限制在最大/spl sim/3/spl乘以/10/sup 12/ cm/sup -2/,而掺杂通道器件(hfet)允许更高的密度,但迁移率降低。我们已经研究了两种改善性能的技术,(a)在InP上生长的应变平衡的AlAs/InAs/AlAs hemt,虽然有迁移率下降的证据,但已经产生了/spl sim/10/sup 13/ cm/sup -2/的片密度,以及(b) δ掺杂的,成分梯度的hfet,再次在InP上应变平衡,在4-5/spl倍/10/sup 12/ cm/sup -2/的片密度下获得了优异的迁移率和饱和漂移速度。本文介绍了用于生产这些样品的生长技术,并给出了x射线衍射数据和层的电学性质。
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引用次数: 2
Hot electron degradation effects in Al/sub 0.25/Ga/sub 0.75/As/In/sub 0.2/Ga/sub 0.8/As/GaAs PHEMTs Al/sub 0.25/Ga/sub 0.75/As/ in /sub 0.2/Ga/sub 0.8/As/GaAs PHEMTs的热电子降解效应
P. Cova, R. Menozzi, D. Lacey, Y. Baeyens, F. Fantini
This paper reports on hot electron stress experiments performed on 0.25 /spl mu/m AlGaAs/InGaAs/GaAs pseudomorphic HEMTs. Devices have been subjected to high drain bias stress cycles with drain voltages ranging between 5 and 8 V up to a cumulative stress time of 18 hours. The effect of the stress on the device DC characteristics is studied. In particular, stressed devices show an increase of the gate-drain breakdown voltage (breakdown walkout) and changes of the drain current in the saturation region that depend, both in magnitude and polarity, on the stress conditions: moderate stress bias and time yield an increase of the drain current, whereas more severe conditions tend to lower it.
本文报道了在0.25 /spl μ m AlGaAs/InGaAs/GaAs伪晶HEMTs上进行的热电子应力实验。器件承受高漏极偏置应力循环,漏极电压范围在5到8 V之间,累积应力时间为18小时。研究了应力对器件直流特性的影响。特别是,受应力的器件表现出栅极-漏极击穿电压(击穿失效)的增加和饱和区域漏极电流的变化,这取决于应力条件的大小和极性:适度的应力偏置和时间会产生漏极电流的增加,而更严重的条件往往会降低漏极电流。
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引用次数: 0
Longitudinal mode control in Fabry-Perot lasers 法布里-珀罗激光器的纵模控制
D. Kozlowski, J. Young, J. England, R. Plumb
Localised reflections within the lasing filament of Fabry-Perot lasers cause spectral perturbations. Focused Ga/sup +/ ion beam etching can be used to form steep walled pits of submicron size in the lasing filament which give rise to localised reflections with minimal rises in threshold current. Control of both position and depth enables one to sculpture the modal envelope so as to form singlemode Fabry-Perot lasers with 30 dB of mode suppression, temperature stable over 30/spl deg/C with an increase in threshold of a few milliamps. Modelling results show an effective reflectivity can be allocated to the etched pit and this is an order of magnitude below the cleaved facet reflectivity.
法布里-珀罗激光器激光灯丝内的局部反射引起光谱扰动。聚焦的Ga/sup +/离子束刻蚀可以在激光灯丝中形成亚微米大小的陡峭壁坑,产生局域反射,阈值电流的上升最小。对位置和深度的控制使人们能够雕刻模态包膜,从而形成具有30 dB模式抑制的单模法布里-珀罗激光器,温度稳定在30/spl度/C以上,阈值增加几毫安。模拟结果表明,蚀刻坑可以分配有效反射率,这比劈裂面反射率低一个数量级。
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引用次数: 1
General results of investigation of the excess noise in optoelectronic devices and their application for improving the device performance 光电器件中过量噪声研究的一般结果及其在提高器件性能中的应用
N. Lukyanchikova
The properties of the excess noise observed in a wide variety of optoelectronic devices based on homo- and heterojunctions in III-V and II-VI compounds are considered. It is shown that rather universal mechanism is responsible for this noise and its model is described. A number of technical applications of the results of measurements of this noise is presented and discussed.
考虑了基于III-V和II-VI化合物的同质结和异质结的各种光电器件中观察到的过量噪声的性质。结果表明,这种噪声的产生具有相当普遍的机理,并对其模型进行了描述。介绍并讨论了该噪声测量结果的一些技术应用。
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引用次数: 4
The application of end point detection in the fabrication of optical and microwave devices 端点检测在光学和微波器件制造中的应用
M. Bourke, K. Hilton, M. Crouch, M. Kane, N. Borsing, T. Russell
Reactive ion etching is becoming increasingly widespread in the fabrication of III-V semiconductor devices. Particular applications include optical waveguides, heterojunction bipolar transistors (HBTs) and FET/HEMT type devices. Etch depth control is a critical issue in the fabrication of many devices. Optical waveguides require accurate etch depths for optical mode control whereas in the fabrication of HBTs there is a requirement to access a thin base layer. It is possible to fabricate devices using a "dead reckoning" method-however, this has proved not to be very accurate and a form of end point detection is required. A number of end point detection techniques are available and include optical emission spectroscopy, optical reflectometry and mass spectroscopy. This paper will compare all three methods and demonstrate weaknesses and strong points for each. Particular attention will be given to optical reflectometry and mass spectroscopy in the fabrication of HBTs.
反应离子蚀刻在III-V型半导体器件的制造中应用越来越广泛。特殊应用包括光波导、异质结双极晶体管(hbt)和FET/HEMT类型器件。蚀刻深度控制是许多器件制造中的一个关键问题。光波导需要精确的蚀刻深度来控制光模式,而在HBTs的制造中,需要访问薄的基材层。使用“航位推算”方法制造设备是可能的,然而,这种方法已被证明不是很准确,需要一种端点检测形式。一些终点检测技术是可用的,包括光学发射光谱,光学反射和质谱。本文将比较所有三种方法,并展示每种方法的优缺点。将特别注意光学反射法和质谱法在HBTs的制造。
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引用次数: 0
期刊
Proceedings of the 3rd IEEE International Workshop on High Performance Electron Devices for Microwave and Optoelectronic Applications, EDMO 95
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