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Fabrication of a gated resonant tunneling diode with a laterally adjustable quantum dot cross-section 具有横向可调量子点截面的门控共振隧道二极管的制造
W. Kinard, M. Weichold, W. Kirk
The authors report a novel technique used to place a rectifying contact at the well region of a unipolar Al/sub 0.3/Ga/sub 0.7/As/GaAs double barrier heterostructure. Application of a potential at this third terminal with respect to a common emitter depleted the vertical cross section, thereby decreasing the electrical size of the RTD (resonant tunneling diode). Transport measurements showed that at gate potentials less than 0.4 V, the gated RTD (GRTD) was effective in modulating current length through the RTD without appreciably affecting the resonant bias. It was shown that the tunneling cross section of the well region of a RTD can be electrically controlled, thereby suggesting the feasibility of in situ transition from a two-dimensional electron gas to a zero-dimensional quantum dot.<>
作者报道了一种用于在单极Al/sub 0.3/Ga/sub 0.7/As/GaAs双势垒异质结构的阱区放置整流触点的新技术。在这第三个终端对一个共发射极施加电位耗尽了垂直横截面,从而减小了RTD(谐振隧道二极管)的电尺寸。输运测量表明,当栅极电位小于0.4 V时,门控RTD (GRTD)可以有效地调制通过RTD的电流长度,而不会明显影响谐振偏置。结果表明,RTD阱区的隧穿截面是可以通过电气控制的,从而表明从二维电子气体到零维量子点的原位转变是可行的。
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引用次数: 0
Microwave applications of photonics circuits 光子电路的微波应用
A. Popa
Examples of the use of lightwave circuits to partition airborne systems are presented. The role of lightwave technology in future radar, communication, and electronic warfare system architectures is discussed, with particular reference to the fiber-optic guided missile and aircraft applications. The status of microwave bandwidth lightwave transmitter and receiver circuits operating 1 to 20 GHz is summarized. Laser-current-modulated transmitters are commercially available at 0.83 and 1.3 mu m for modulation frequencies <10 GHz with dynamic ranges >125 dB/Hz. LiNbO/sub 3/-based integrated optic modulators operating in the laboratory at 1.3 mu m can provide dynamic ranges >130 dB/Hz. Optical receivers are commercially available at 0.83 and 1.3 mu m with bandwidths to 10 GHz and dynamic range >130 dB/Hz. Laboratory receivers have operated to 20 GHz with similar performance. The noise floor of the optical portion of lightwave links is typically set by laser noise at a noise figure of about 40 dB. The cascaded noise figure of the link, including input and output amplifiers, is set by the gain and noise figure of the input amplifier, by the noise floor of the laser diode, and by the attenuation encountered through the active and passive optical components in the link.<>
给出了使用光波电路对机载系统进行分区的实例。讨论了光波技术在未来雷达、通信和电子战系统架构中的作用,特别提到了光纤制导导弹和飞机的应用。综述了工作频率为1 ~ 20ghz的微波带宽光波收发电路的现状。激光电流调制发射机在商用0.83和1.3 μ m调制频率125 dB/Hz。基于LiNbO/ sub3 /的集成光调制器在实验室工作在1.3 μ m,可以提供bb0 ~ 130 dB/Hz的动态范围。商用光学接收器为0.83和1.3 μ m,带宽为10 GHz,动态范围为>130 dB/Hz。实验室的接收器在20 GHz的频率下工作,具有类似的性能。光波链路的光学部分的噪声底通常由激光噪声设定为约40 dB的噪声系数。链路(包括输入和输出放大器)的级联噪声系数由输入放大器的增益和噪声系数、激光二极管的本底噪声以及通过链路中有源和无源光学元件所遇到的衰减来设定
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引用次数: 1
Electron-diffraction transistors 电子衍射的晶体管
G. Bernstein, A. Kriman
The design, fabrication, and applications of QUADFETs (quantum diffraction field effect transistors) are described. The QUADFETs will enable Fraunhofer diffraction to be demonstrated and exploited. These devices are high-electron-mobility transistors (HEMTs), in which the source and a specially formed drain perform the functions of the light source and viewing screen of an analogous optical system, respectively. Experimental results on QUADFETs are presented.<>
介绍了量子衍射场效应晶体管(quadfet)的设计、制造和应用。四场效应晶体管将使弗劳恩霍夫衍射得到证明和利用。这些器件是高电子迁移率晶体管(hemt),其中光源和特殊形成的漏极分别执行类似光学系统的光源和显示屏的功能。给出了四场效应晶体管的实验结果
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引用次数: 0
Integration of high-gain double heterojunction GaAs bipolar transistors with a LED for optical neural network application 用于光学神经网络应用的高增益双异质结砷化镓双极晶体管与LED的集成
S. Lin, J.H. Kim, J. Katz, D. Psaltis
A 10*10 array of optical neurons consisting of monolithically integrated DHPTs (double heterojunction phototransistors), DHBTs (double heterojunction bipolar transistors), and LEDs (light-emitting diodes) was fabricated in an AlGaAs/GaAs/AlGaAs double heterostructure. A single DHBT exhibited a current gain as high as 500 with an ideality factor of 1.4. A Darlington transistor pair showed a combined current gain of 4000. The power density of the LED was about 300 W/cm/sup 2/. The integrated structure, however, showed SCR (silicon controlled rectifier) characteristics, which was attributed to the coupling of a parasitic p-n-p transistor to the n-p-n DHBT. This problem was eliminated by first etching a groove in the semi-insulating substrate between the LED and the Darlington transistor pair and then employing metallization to provide proper connection. However, overall gains for the Darlington transistor pair were low, probably due to the leakage currents caused by surface contamination and the Zn diffusion process.<>
在AlGaAs/GaAs/AlGaAs双异质结构中制备了由单片集成双异质结光电晶体管DHPTs、双异质结双极晶体管dhbt和发光二极管led组成的10*10光神经元阵列。单个DHBT的电流增益高达500,理想系数为1.4。一对达林顿晶体管显示了4000的综合电流增益。LED的功率密度约为300 W/cm/sup / 2/。然而,集成结构显示出可控硅(可控硅)特性,这归因于寄生p-n-p晶体管与n-p-n DHBT的耦合。通过首先在LED和达林顿晶体管对之间的半绝缘衬底上蚀刻槽,然后采用金属化来提供适当的连接,消除了这个问题。然而,达灵顿晶体管对的总体增益很低,可能是由于表面污染和锌扩散过程引起的泄漏电流。
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引用次数: 4
Performance evaluation of GaAs based MODFETs 基于砷化镓的modfet的性能评价
E. Kohn, A. Lepore, H. Lee, M. Levy
Three key aspects of AlGaAs/InGaAs/GaAs MODFETs, namely current-handling capability, signal delay, and saturated output regime, are experimentally evaluated and correlated with the heterostructure configuration. Gate lengths down to 0.1 mu m and corresponding cutoff frequencies above 140 GHz are employed. The three aspects are found to be closely interrelated. By the incorporation of an InGaAs quantum well the two-dimensional-electron-gas (2DEG) density of the materials system can be considerably extended. However, this results in only limited improvement for the FET current-handling capability above a 2DEG density of 2*10/sup 12/ cm/sup -2/. The main effect on the MODFET current gain cutoff frequency is through the reduction of the input delay as demonstrated with 0.1- mu m-gate-length devices. Extracting the same intrinsic delay time means that the electron dynamics in the channel of AlGaAs/GaAs and pseudomorphic MODFETs is very comparable. This is consistent with the fact that there is no significant change in the effective electron mass, although changes in the intervalley scattering dynamics are still expected. Open-circuit voltage gain and output conductance are strongly related to the space-charge-layer configuration on top of the channel. This is related to the recess configuration; however, for a large voltage gain a high structural aspect ratio is generally needed.<>
实验评估了AlGaAs/InGaAs/GaAs modfet的三个关键方面,即电流处理能力、信号延迟和饱和输出状态,并将其与异质结构配置相关联。栅极长度小于0.1 μ m,相应的截止频率高于140 GHz。这三个方面是密切相关的。通过引入InGaAs量子阱,材料体系的二维电子-气体(2DEG)密度可以得到极大的扩展。然而,这只导致有限的改善,对于FET电流处理能力高于2DEG密度2*10/sup 12/ cm/sup -2/。对MODFET电流增益截止频率的主要影响是通过降低输入延迟,如0.1 μ m栅极长度器件所示。提取相同的本征延迟时间意味着AlGaAs/GaAs和伪晶modfet通道中的电子动力学非常相似。这与有效电子质量没有显著变化的事实是一致的,尽管谷间散射动力学的变化仍然是预期的。开路电压增益和输出电导与通道顶部的空间电荷层结构密切相关。这与隐窝结构有关;然而,对于大的电压增益,通常需要高的结构宽高比。
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引用次数: 8
The Auger transistor 俄歇晶体管
S. Tiwari, W.I. Wang, J. East
The authors describe the properties of a heterostructure bipolar transistor (HBT) that uses Auger generation to improve the high-frequency performance. An analytic model has been used to predict the device parameters as a function of characteristic Auger length. For devices with micron-size horizontal dimensions and 1000-AA base widths, the results indicate an improvement in the maximum frequency of oscillation of nearly 50% over that of a device incorporating no Auger process and operating as a conventional HBT. It is noted that the natural evolution of high-speed and high-frequency devices toward smaller bandgaps and lower temperatures raises the possibility of implementing Auger transistors in InAs and InSb.<>
介绍了一种利用俄歇产生提高高频性能的异质结构双极晶体管(HBT)的特性。用解析模型预测了装置参数随特征螺旋钻长度的变化。对于水平尺寸为微米、基宽为1000-AA的装置,结果表明,与不采用螺旋钻工艺、作为传统HBT运行的装置相比,最大振荡频率提高了近50%。值得注意的是,高速和高频器件向更小带隙和更低温度的自然演变提高了在InAs和InSb中实现俄歇晶体管的可能性。
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引用次数: 0
Low temperature MBE growth of GaAs and AlInAs for high speed devices 用于高速器件的GaAs和AlInAs的低温MBE生长
M. Delaney, A. Brown, Utkarsh Mishra, C. Chou, L. Larson, L. Nguyen, J. Jensen
Low-temperature GaAs buffer technology was used to fabricate high-performance 0.2- mu m-gate-length, spike-doped GaAs MESFETs. A 400.0-nm low-temperature GaAs buffer was grown by molecular beam epitaxy (MBE) at a substrate temperature of 300 degrees C. The substrate temperature was raised to 580 degrees C for a brief in situ anneal and followed by the growth of the active spike-doped GaAs MESFET structure. The peak extrinsic transconductance, g/sub m/, was 600 mS/mm with an average pinch-off voltage, V/sub po/, of -0.6 V. An output conductance, g/sub o/, of 24 mS/mm resulted in a voltage gain of 25. The extrapolated f/sub T/ of the devices was 79 GHz. Static SCFL (source-coupled FET logic) frequency dividers fabricated in this technology exhibit a maximum clock rate of 22 GHz. Low-temperature AlInAs buffer growth has been applied to GaInAs/AlInAs HEMT (high-electron-mobility transistor) devices on InP. A 250.0-nm AlInAs buffer was grown at a substrate temperature of 150 degrees C, followed by an anneal under arsenic overpressure and a GaInAs/AlInAs superlattice prior to the HEMT structure, which is grown at T=510 degrees C. Devices fabricated with 0.2- mu m gates had g/sub m/ of 670 mS/mm and g/sub o/ of 2.55 mS/mm, giving a voltage gain of 250.<>
采用低温GaAs缓冲技术制备了高性能的0.2 μ m栅极长度的掺峰GaAs mesfet。采用分子束外延法(MBE)在300℃的衬底温度下生长出400.0 nm的低温GaAs缓冲液,衬底温度升至580℃进行短暂的原位退火,随后生长出活性峰掺GaAs MESFET结构。外源跨导峰值g/sub - m/为600 mS/mm,平均截断电压V/sub - m/为-0.6 V。输出电导g/sub /为24 mS/mm时,电压增益为25。设备的外推f/sub T/为79 GHz。用这种技术制造的静态SCFL(源耦合场效应管逻辑)分频器的最大时钟速率为22 GHz。低温AlInAs缓冲生长已应用于InP上的GaInAs/AlInAs HEMT(高电子迁移率晶体管)器件。在150℃的衬底温度下生长250.0 nm的AlInAs缓冲液,然后在砷超压下退火,在T=510℃下生长HEMT结构之前形成GaInAs/AlInAs超晶格,用0.2 μ m栅极制备的器件的g/sub m/为670 mS/mm, g/sub o/为2.55 mS/mm,电压增益为250。
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引用次数: 4
Electron dynamics and device physics of short-channel HEMTs: transverse-domain formation, velocity overshoot, and short-channel effects 短通道hemt的电子动力学和器件物理:横畴形成、速度超调和短通道效应
Y. Awano, M. Kosugi, S. Kuroda, T. Mimura, M. Abe
The authors simulated the electron dynamics and physics in sub-quarter-micron-gate HEMTs (high electron mobility transistors) and fabricated devices for testing their theories on the short-channel effect. They confirmed near-ballistic electron transport under the gate and predicted transverse-domain formation. They introduce a parameter called the channel aspect ratio, which could serve as a design rule for determining the extent of the short-channel effect. Measurements show that the threshold voltage shift is almost negligible for gates as short as 0.14 mu m. Thus, within the range studied, HEMTs do require a special design that would limit their applications.<>
作者模拟了亚四分之一微米栅极高电子迁移率晶体管(hemt)的电子动力学和物理,并制作了器件来验证他们的短沟道效应理论。他们证实了栅极下的近弹道电子传递,并预测了横向畴的形成。他们引入了一个称为通道宽高比的参数,该参数可以作为确定短通道效应程度的设计规则。测量结果表明,对于短至0.14 μ m的栅极,阈值电压位移几乎可以忽略不计。因此,在所研究的范围内,hemt确实需要特殊的设计,这将限制其应用。
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引用次数: 3
Deposited SiO/sub 2/ as the insulator for GaInAs and InP MISFETs 沉积SiO/ sub2 /作为GaInAs和InP misfet的绝缘体
P. Gardner, S. Narayan
It is shown that low-temperature-deposited SiO/sub 2/ is a good insulator for InP and GaInAs MISFETs. Long-term (16-h) 300 degrees C H/sub 2/ anneals reduce interface state density, oxide fixed charge, and C-V hysteresis. D/sub it/ values of 10/sup 10/-10/sup 11/ cm/sup 2/ eV/sup -1/ (suitable for MISFET operation) are routinely obtained. It is concluded that the hysteresis results from charge trapping at the semiconductor-insulator interface, possibly in a thin native oxide layer formed during the SiO/sub 2/ deposition, and/or from P (As) vacancies in the InP (GaInAs) surface resulting from preferential oxidation of the InP. Ion-implanted, self-aligned-gate MISFETs showed drain current drifts of approximately 5% over 10/sup 3/ s at room temperature for InP, and <2% over a 74-h period at 50 degrees C for GaInAs. The use of surface modification techniques such as P overpressure and surface sulfidation holds promise for eliminating this problem. These results and the performance of MISFETs in microwave and gigabit-rate logic demonstrate that low-temperature-deposited SiO/sub 2/ is an excellent gate insulator for InP and GaInAs MISFETs, and that these materials have great potential for high performance microwave, millimeter-wave, and gigabit-rate logic circuit applications.<>
结果表明,低温沉积SiO/ sub2 /是一种良好的InP和GaInAs misfet绝缘体。长时间(16-h) 300℃/次退火可降低界面态密度、氧化物固定电荷和C- v滞回。D/sub /值为10/sup 10/-10/sup 11/ cm/sup 2/ eV/sup -1/(适用于MISFET操作)。结果表明,迟滞是由半导体-绝缘体界面的电荷捕获引起的,可能是在SiO/sub /沉积过程中形成的薄原生氧化层中,或者是由于InP (GaInAs)表面的P (As)空位导致的。离子注入的自对准栅misfet在室温下,InP的漏极电流漂移在10/sup /s范围内约为5%,而>
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引用次数: 0
Calculated high frequency performance of an npn Si/sub 1-x/Ge/sub x/ HBT 计算了npn Si/sub - 1-x/Ge/sub -x/ HBT的高频性能
M. Racanelli, D. Greve
The authors calculate the performance of an Si/sub 1-x/Ge/sub x//Si HBT (heterojunction bipolar transistor), including effects of major importance such as bandgap narrowing and collector high injection. A description of the mobility model used is included. The results indicate that very high performance is achievable in these devices, particularly with respect to figures of merit such as f/sub max/, which are strongly influenced by the base resistance. For devices with 1- mu m geometry, the authors predict f/sub max/=81 GHz and f/sub T/=71 GHz. Such devices should also offer excellent performance in digital circuits in which low base resistance is essential.<>
作者计算了Si/sub - 1-x/Ge/sub -x/ /Si HBT(异质结双极晶体管)的性能,包括带隙缩小和集电极高注入等重要影响。包括对所使用的移动性模型的描述。结果表明,在这些器件中可以实现非常高的性能,特别是在受基极电阻强烈影响的f/sub max/等优点数字方面。对于几何形状为1 μ m的器件,作者预测f/sub max/=81 GHz, f/sub T/=71 GHz。这种器件还应在数字电路中提供优异的性能,其中低基极电阻是必不可少的。
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引用次数: 1
期刊
Proceedings., IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits,
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