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Frontmatter
IF 1.8 Q3 Physics and Astronomy Pub Date : 2021-11-01 DOI: 10.1515/aot-2021-frontmatter4-5
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引用次数: 0
High-rate laser processing with ultrashort laser pulses by combination of diffractive elements with synchronized galvo scanning 衍射元件与同步激振扫描相结合的超短激光脉冲高速激光加工
IF 1.8 Q3 Physics and Astronomy Pub Date : 2021-10-25 DOI: 10.1515/aot-2021-0035
M. Gafner, S. Remund, M. Chaja, B. Neuenschwander
Abstract The combination of diffractive optical elements or spatial light modulators with fully synchronized galvo scanners offers a possibility to scale up machining processes with ultra-short pulses to several 100 W of average power with minimal thermal impact. This will be demonstrated with the high-rate applications multi-pulse drilling on the fly and material removal with special intensity distributions up to an average power of 162 W and a removal rate of 16.5 mm3/min. Based on the experimental results strategies to achieve drilling rates of several 10,000 holes/s or removal rates of multiple 10 mm3/min will be discussed.
衍射光学元件或空间光调制器与完全同步的galvo扫描仪的组合为将超短脉冲的加工过程扩展到平均功率为100 W的加工过程提供了可能,同时热影响最小。这将通过高速率多脉冲钻井和特殊强度分布的材料去除来证明,平均功率高达162 W,去除率为16.5 mm3/min。根据实验结果,将讨论实现数万孔/s的钻井速率或10 mm3/min以上的去除速率的策略。
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引用次数: 6
Ultrashort pulse lasers in high-rate laser micro processing – Quo vadis? 高速率激光微加工中的超短脉冲激光器——Quo vadis?
IF 1.8 Q3 Physics and Astronomy Pub Date : 2021-10-25 DOI: 10.1515/aot-2021-0049
J. Schille, U. Loeschner
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引用次数: 8
High-power ultrafast thin-disk multipass amplifiers for efficient laser-based manufacturing 用于高效激光制造的高功率超快薄板多通放大器
IF 1.8 Q3 Physics and Astronomy Pub Date : 2021-10-15 DOI: 10.1515/aot-2021-0047
M. Abdou Ahmed, Christoph Roecker, A. Loescher, F. Bienert, Daniel Holder, R. Weber, V. Onuseit, T. Graf
Abstract Thin-disk multipass amplifiers represent one of the most powerful approaches to scale the average and peak powers of ultrafast laser systems. The present paper presents the amplification of picosecond and femtosecond pulses to average powers exceeding 2 and 1 kW, respectively. Second-harmonic generation in lithium-triborate crystals with powers higher than 1.4 kW and 400 W at a wavelength of 515 nm with picosecond and femtosecond pulse durations, respectively, are also reported. Furthermore, third-harmonic generation was demonstrated with output powers exceeding 250 W at a wavelength of 343 nm. Finally, processing of silicon, metals, and polycrystalline diamond with fs pulses at an average power of 1 kW is presented to demonstrate removal rates that are improved by orders of magnitude as compared to state-of-the-art techniques.
薄型圆盘多通放大器是测量超快激光系统平均功率和峰值功率的最有效方法之一。本文介绍了皮秒和飞秒脉冲的放大,使其平均功率分别超过2千瓦和1千瓦。在功率高于1.4 kW和400 W的三硼酸锂晶体中,在515 nm波长下,脉冲持续时间分别为皮秒和飞秒,也报道了二次谐波的产生。此外,在343 nm波长处,以超过250 W的输出功率证明了三次谐波的产生。最后,以平均功率为1kw的fs脉冲处理硅、金属和多晶金刚石,以证明与最先进的技术相比,去除率提高了几个数量级。
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引用次数: 3
High-power ultrafast fiber lasers for materials processing 用于材料加工的高功率超快光纤激光器
IF 1.8 Q3 Physics and Astronomy Pub Date : 2021-10-14 DOI: 10.1515/aot-2021-0033
T. Eidam, S. Breitkopf, O. Herrfurth, F. Stutzki, M. Kienel, S. Hädrich, C. Gaida, J. Limpert
Abstract State-of-the-art fiber-laser systems can deliver femtosecond pulses at average powers beyond the kilowatt level and multi-mJ pulse energies by employing advanced large-mode-area fiber designs, chirped-pulse amplification, and the coherent combination of parallel fiber amplifiers. By using sophisticated coherent phase control, one or even several output ports can be modulated at virtually arbitrary power levels and switching speeds. In addition, an all-fiber setup for GHz-burst generation is described allowing to access an even wider range of laser parameters. The combination of all these approaches together with the robustness, efficiency, and excellent beam quality inherent to fiber-laser technology has the potential to strongly improve existing materials-processing applications.
摘要:通过采用先进的大模区光纤设计、啁啾脉冲放大和并联光纤放大器的相干组合,最先进的光纤激光系统可以提供平均功率超过千瓦级的飞秒脉冲和多mJ脉冲能量。通过使用复杂的相干相位控制,可以以几乎任意的功率电平和开关速度调制一个甚至多个输出端口。此外,描述了用于GHz突发生成的全光纤设置,允许访问更宽范围的激光参数。将所有这些方法与光纤激光技术固有的稳健性、效率和优异的光束质量相结合,有可能大大改善现有的材料加工应用。
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引用次数: 2
Effect of laser beam truncation (pinhole), (ordered) dithering, and jitter on residual smoothness after poly(methyl methacrylate) ablations, using a close-to-Gaussian beam profile 使用接近高斯光束轮廓的聚甲基丙烯酸甲酯烧蚀后,激光束截断(针孔)、(有序)抖动和抖动对残余平滑度的影响
IF 1.8 Q3 Physics and Astronomy Pub Date : 2021-10-14 DOI: 10.1515/aot-2021-0040
Shwetabh Verma, J. Hesser, S. Arba-Mosquera
Abstract Smoother surfaces after laser vision correction have been widely accepted as a factor for improving visual recovery regardless of the used technique (PRK, LASIK, or even SMILE). We tested the impact of laser beam truncation, dithering (expressing a continuous profile on a basis of lower resolution causing pixels to round up/down the number of pulses to be placed), and jitter (a controlled random noise (up to ±20 µm in either direction) added to the theoretical scanner positions) on residual smoothness after Poly(methyl methacrylate) (PMMA) ablations, using a close-to-Gaussian beam profile. A modified SCHWIND AMARIS system has been used providing a beam profile with the following characteristics: close-to-Gaussian beam profile with full width at half maximum (FWHM) of 540 µm, 1050 Hz. Laser parameters have been optimized following Invest. Ophthalmol. Vis. Sci., vol. 58, no. 4, pp. 2021–2037, 2017, the pulse energy has been optimized following Biomed. Opt. Express vol. 4, pp. 1422–1433, 2013. For the PMMA ablations, two configurations (with a 0.7 mm pinhole and 0.75 mJ and without pinhole and 0.9 mJ (for fluences of 329 mJ/cm2 and 317 mJ/cm2 and corneal spot volumes of 174 and 188 pl)) were considered, along with two types of lattices (with and without ordered dithering to select the optimum pulse positions), and two types of spot placement (with and without jitter). Real ablations on PMMA (ranging from −12D to +6D with and without astigmatism of up to 3D) completed the study setup. The effect of the 2 × 2 × 2 different configurations was analyzed based on the roughness in ablation estimated from the root mean square error in ablation. Truncation of the beam is negatively associated to a higher level of residual roughness; ordered dithering to select the optimum pulse positions is positively associated to a lower level of residual roughness; jitter is negatively associated to a higher level of residual roughness. The effect of dithering was the largest, followed by truncation, and jitter had the lowest impact on results. So that: Dithering approaches help to further minimize residual roughness after ablation; minimum (or no) truncation of the beam is essential to minimize residual roughness after ablation; and jitter shall be avoided to minimize residual roughness after ablation. The proposed model can be used for optimization of laser systems used for ablation processes at relatively low cost and would directly improve the quality of results. Minimum (or no) truncation of the beam is essential to minimize residual roughness after ablation. Ordered dithering without jitter helps to further minimize residual roughness after ablation. Other more complex dithering approaches may further contribute to minimize residual roughness after ablation.
摘要激光视力矫正后更光滑的表面已被广泛接受为改善视觉恢复的一个因素,无论使用何种技术(PRK、LASIK甚至SMILE)。我们测试了激光束截断、抖动(在较低分辨率的基础上表达连续轮廓,导致像素向上/向下舍入要放置的脉冲数量)和抖动(添加到理论扫描仪位置的受控随机噪声(在任一方向上高达±20µm))对聚甲基丙烯酸甲酯(PMMA)烧蚀后残余平滑度的影响,使用接近高斯光束轮廓。使用了一种改进的SCHWIND AMARIS系统,提供了具有以下特性的光束轮廓:接近高斯光束轮廓,半峰全宽(FWHM)为540µm,1050 Hz。激光参数已在投资后进行了优化。眼科。Vis。Sci。,第58卷,第4期,第2021–20372017页,在Biomed之后对脉冲能量进行了优化。选择《快报》第4卷,第1422-1433页,2013年。对于PMMA消融,考虑了两种配置(具有0.7mm针孔和0.75mJ,没有针孔和0.9mJ(对于329mJ/cm2和317mJ/cm2的通量以及174和188pl的角膜斑点体积)),以及两种类型的晶格(具有和不具有有序抖动以选择最佳脉冲位置)和两种类型(具有和没有抖动)的斑点放置。PMMA上的真实消融(范围从−12D到+6D,有和没有高达3D的散光)完成了研究设置。基于由消融中的均方根误差估计的消融粗糙度,分析了2×2×2不同配置的影响。光束的截断与较高水平的残余粗糙度负相关;选择最佳脉冲位置的有序抖动与较低水平的残余粗糙度正相关;抖动与较高水平的残余粗糙度负相关。抖动的影响最大,其次是截断,抖动对结果的影响最小。因此:抖动方法有助于进一步减少消融后的残余粗糙度;波束的最小(或无)截断对于最小化消融后的残余粗糙度至关重要;并且应避免抖动以最小化消融后的残余粗糙度。所提出的模型可用于以相对低的成本优化用于消融过程的激光系统,并将直接提高结果的质量。光束的最小(或无)截断对于最小化消融后的残余粗糙度至关重要。没有抖动的有序抖动有助于进一步最小化消融后的残余粗糙度。其他更复杂的抖动方法可以进一步有助于最小化消融后的残余粗糙度。
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引用次数: 1
The challenges of productive materials processing with ultrafast lasers 用超快激光加工生产材料的挑战
IF 1.8 Q3 Physics and Astronomy Pub Date : 2021-10-14 DOI: 10.1515/aot-2021-0038
R. Weber, T. Graf
Abstract Materials processing with ultrafast lasers with pulse durations in the range between about 100 fs and 10 ps enable very promising and emerging high-tech applications. Moreover, the average power of such lasers is steadily increasing; multi kilowatt systems have been demonstrated in laboratories and will be ready for the market in the next few years, allowing a significantly increase in productivity. However, the implementation of ultrafast laser processes in applications is very challenging due to fundamental physical limitations. In this paper, the main limitations will be discussed. These include limitations resulting from the physical material properties such as the ablation depth and the optimal fluence, from processing parameters such as air-breakdown and heat accumulation, from the processing system such as thermal focus shift, and from legal regulations due to the potential emission of soft X-rays.
摘要利用脉冲持续时间在约100fs至10ps之间的超快激光器进行材料加工,能够实现非常有前景和新兴的高科技应用。此外,这种激光器的平均功率正在稳步增加;多千瓦系统已经在实验室中进行了演示,并将在未来几年内投入市场,从而显著提高生产力。然而,由于基本的物理限制,超快激光工艺在应用中的实施非常具有挑战性。本文将讨论其主要局限性。这些限制包括由物理材料特性(如消融深度和最佳注量)、处理参数(如空气击穿和热量积聚)、处理系统(如热焦点偏移)以及由于软X射线的潜在发射而产生的法律法规造成的限制。
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引用次数: 5
GHz femtosecond processing with agile high-power laser 敏捷高功率激光GHz飞秒处理
IF 1.8 Q3 Physics and Astronomy Pub Date : 2021-09-03 DOI: 10.1515/aot-2021-0029
É. Audouard, G. Bonamis, C. Hönninger, E. Mottay
Abstract Bursts of GHz repetition rate pulses can significantly improve the ablation efficiency of femtosecond lasers. Depending on the process conditions, thermal mechanisms can be promoted and controlled. GHz ablation therefore combines thermal and non-thermal ablation mechanisms. With an optimal choice of the burst duration, the non-thermal ablation can be highly enhanced by a heating phase due to the first pulses in the burst. The GHz burst mode can be considered as a key function for the “agility” of new high-power lasers.
摘要GHz重复频率脉冲的爆发可以显著提高飞秒激光器的烧蚀效率。根据工艺条件,可以促进和控制热机制。因此,GHz消融结合了热消融和非热消融机制。通过对突发持续时间的最佳选择,由于突发中的第一脉冲,可以通过加热阶段来高度增强非热消融。GHz突发模式可以被认为是新型高功率激光器“灵活性”的关键功能。
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引用次数: 4
Multi beam microprocessing for printing and embossing applications with high power ultrashort pulsed lasers 用于高功率超短脉冲激光印刷和压花应用的多光束微处理
IF 1.8 Q3 Physics and Astronomy Pub Date : 2021-07-19 DOI: 10.1515/aot-2021-0025
S. Bruening, A. Gillner, K. Du
Abstract Micro structuring of surfaces is of great interest for various applications, e.g. for the tooling industry, the printing industry and for consumer goods. In suitable mass production applications, such as injection molding or roll-to-roll processing for various markets, the final product could be equipped with new properties, such as hydrophilic behavior, adjustable gloss level, soft-touch behavior, light management properties etc. To generate functionalities at reasonable cost, embossing dies can be augmented with additional micro/nano-scale structure using laser ablation technologies. Despite the availability of ultrashort pulsed (USP) high power lasers (up to several hundred watts), it is still a challenge to structure large areas, as required on embossing rolls, in an acceptable processing time for industrial production. In terms of industrial implementation, direct digital transfer is a limiting factor for ultrahigh resolution. Shorter machining times by further increasing spot or workpiece motion are limited. Enlarging the ablation diameter, and thus the tool diameter, delivers a higher ablation rate with the comparable ablation quality, but entails a reduction in resolution. While maintaining the achieved state-of-the-art performance, upscaling of single modulated lasers provides a less demanding way to increase productivity. In the processing of steel surfaces, an increase in material removal can also be achieved by using pulse burst. In this work, the parallel process of single modulated multi laser sources is compared with a laser source split by diffractive optical elements (DOE) for applications in a cylinder micro patterning system. A newly developed highly compact ps laser with repetition rates up to 8 MHz and an average power of 300 or 500 W was divided into 8 or 16 parallel beamlets by a DOE. The ablation rate of each approach was investigated by typical microstructures on copper surfaces. At surface speeds of 10 m/s and a resolution of 5080 dpi, an ablation rate of up to 27 mm³/min was achieved. Different functional surface geometries were realized on an embossing roll as master, which is used for replication of the structures in roll-to-roll processes. Functional structures, such as friction reduction, improved soft touch or light guiding elements on large surfaces are demonstrated.
表面的微观结构对各种应用都有很大的兴趣,例如工具工业,印刷工业和消费品。在合适的批量生产应用中,例如针对各种市场的注塑或卷对卷加工,最终产品可以配备新的性能,如亲水性,可调光泽度,柔软的触感,光管理性能等。为了以合理的成本产生功能,压花模具可以使用激光烧蚀技术增加额外的微/纳米级结构。尽管有超短脉冲(USP)高功率激光器(高达几百瓦)的可用性,但在工业生产的可接受的加工时间内,按照压花辊的要求构造大面积仍然是一个挑战。在工业实现方面,直接数字传输是超高分辨率的限制因素。通过进一步增加点或工件运动来缩短加工时间是有限的。扩大烧蚀直径,从而扩大工具直径,可以提供更高的烧蚀率和相当的烧蚀质量,但需要降低分辨率。在保持最先进性能的同时,单调制激光器的升级提供了一种要求较低的提高生产率的方法。在钢表面的加工中,也可以通过脉冲爆发来提高材料的去除率。本文将单调制多激光源的并行过程与衍射光学元件(DOE)分离激光源的并行过程进行了比较。一个新开发的重复频率高达8mhz,平均功率为300或500 W的高度紧凑的ps激光器被DOE分成8或16个平行光束。通过铜表面的典型显微组织研究了每种方法的烧蚀速率。在表面速度为10 m/s,分辨率为5080 dpi的情况下,烧蚀速率可达27 mm³/min。以压花辊为母辊,实现了不同的功能表面几何形状,用于卷对卷工艺结构的复制。功能结构,如摩擦减少,改善软触感或大表面上的导光元件。
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引用次数: 4
Pulse-on-demand laser operation from nanosecond to femtosecond pulses and its application for high-speed processing 从纳秒到飞秒脉冲的按需脉冲激光操作及其在高速加工中的应用
IF 1.8 Q3 Physics and Astronomy Pub Date : 2021-07-14 DOI: 10.1515/aot-2021-0020
J. Petelin, Luka Černe, Jaka Mur, V. Agrež, Jernej Jan Kočica, J. Schille, U. Loeschner, R. Petkovšek
Abstract In this manuscript we present a true pulse-on-demand laser design concept using two different approaches. First, we present a fiber master oscillator power amplifier (MOPA) based quasi-continuous wave (CW) laser, working at high modulation bandwidths, for generation of nanosecond pulses. Second, we present a hybrid chirped pulse amplification (CPA)-based laser, combining a chirped-pulse fiber amplifier and an additional solid-state amplifier, for generation of femtosecond pulses. The pulse-on-demand operation is achieved without an external optical modulator/shutter at high-average powers and flexible repetition rates up to 40 MHz, using two variants of the approach for near-constant gain in the amplifier chain. The idler and marker seed sources are combined in the amplifier stages and separated at the out using either wavelength-based separation or second harmonic generation (SHG)-generation-based separation. The nanosecond laser source is further applied to high throughput processing of thin film materials. The laser is combined with a resonant scanner, using the intrinsic pulse-on-demand operation to compensate the scanner’s sinusoidal movement. We applied the setup to processing of indium tin oxide (ITO) and metallic films on flexible substrates.
摘要在这份手稿中,我们提出了一个真正的脉冲按需激光设计概念,使用了两种不同的方法。首先,我们提出了一种基于光纤主振荡功率放大器(MOPA)的准连续波(CW)激光器,工作在高调制带宽下,用于产生纳秒脉冲。其次,我们提出了一种基于混合啁啾脉冲放大(CPA)的激光器,将啁啾脉冲光纤放大器和附加的固态放大器相结合,用于产生飞秒脉冲。脉冲按需操作在没有外部光调制器/快门的情况下以高平均功率和高达40MHz的灵活重复率实现,使用放大器链中接近恒定增益的方法的两种变体。惰轮和标记种子源在放大器级中组合,并使用基于波长的分离或基于二次谐波产生(SHG)的分离在输出处分离。纳秒激光源进一步应用于薄膜材料的高通量加工。激光器与共振扫描仪相结合,使用固有脉冲按需操作来补偿扫描仪的正弦运动。我们将该装置应用于柔性基板上的氧化铟锡(ITO)和金属膜的加工。
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引用次数: 2
期刊
Advanced Optical Technologies
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