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A unified ternary-mechanism model for the calibration of cutting force coefficients and prediction of ploughing-based process damping in flank milling process 用于校准切削力系数和预测侧面铣削过程中基于犁的加工阻尼的统一三元机制模型
IF 3.4 3区 工程技术 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2024-03-21 DOI: 10.1007/s00170-024-13307-2

Abstract

Exciting ternary-mechanism model considers the effects of flank shearing, flank ploughing and bottom ploughing and suits for the calibration of cutting force coefficients with a relatively lower axial depth of cuts in which the cutting force proportion of bottom edge gradually increases. Since the vibration velocities are not formulated in the empirical rubbing formulae, the process damping effect in chatter stability can not be modelled. In order to simultaneously guarantee the calibration accuracy of the cutting force coefficients and solve the chatter stability with process damping, a unified ternary-mechanism model is established in this article. First, the ploughing forces corresponding to the flank edge and bottom edge are formulated as the function of the indented area and the corresponding proportion factors based on Hertz contact theory. And the static and dynamic ternary cutting forces are explicitly formulated. Second, with the aid of the static equilibrium equation together with the expression of small disturbance, the dynamic model including ploughing-based process damping is established. Third, a fast procedure to calibrate the real-time cutting force coefficients is also derived based on the inverse process of static cutting force modelling. A series of test platforms are built to verify the correctness of the calibration method and the ploughing-based process damping model. Good consistency between the predicted and experimental results in both static cutting forces and dynamic chatter tests proves that above models have better accuracy.

摘要 激励三元机理模型考虑了侧刃剪切、侧犁和底犁的影响,适用于校准底刃切削力比例逐渐增大的相对较低轴向切削深度的切削力系数。由于在经验摩擦公式中没有规定振动速度,因此无法模拟颤振稳定性中的过程阻尼效应。为了同时保证切削力系数的标定精度和解决带有过程阻尼的颤振稳定性问题,本文建立了统一的三元机制模型。首先,根据赫兹接触理论,将侧刃和底刃对应的犁削力分别表述为压痕面积和相应比例系数的函数。并明确了静态和动态三元切削力。其次,借助静态平衡方程和小扰动表达式,建立了包括基于犁耕过程阻尼的动态模型。第三,基于静态切削力建模的逆过程,得出了校准实时切削力系数的快速程序。为了验证校准方法和基于犁耕的过程阻尼模型的正确性,建立了一系列测试平台。静态切削力和动态颤振测试的预测结果与实验结果之间的良好一致性证明了上述模型具有更好的准确性。
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引用次数: 0
Investigation of interactions between fiber lasers and Si3N4 sheets for drilling square microholes with multi-ring strategy 研究光纤激光器与 Si3N4 片材之间的相互作用,利用多环策略钻凿方形微孔
IF 3.4 3区 工程技术 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2024-03-21 DOI: 10.1007/s00170-024-13383-4
Shih-Feng Tseng, Guan-Lin Chen, Chien-Yao Huang, Donyau Chiang, Chil-Chyuan Kuo

A high pulsed fiber laser was utilized to drill square microholes in Si3N4 sheets in an atmospheric environment. Various processing parameters including scan spacing, number of scan passes, and number of multi-ring paths with a multi-ring strategy were adjusted to laser-drill Si3N4 sheets. The geometric characteristics of laser-drilled square microholes with shoulder height, taper angle, and corner radius were measured using a laser scanning microscope. X-ray diffraction was applied to examine the residual stress of the Si3N4 sheets before and after laser drilling. Moreover, the heat-affected zone and element content were examined using a scanning electron microscope. The experimental results exhibited that the optimal shoulder height of the square microhole drilled with the multi-ring strategy was 6.67 ± 0.21 μm, which was approximately 77% lower than that of 29.05 ± 10.95 μm for the square microhole drilled with the single-ring strategy. Moreover, the residual stresses of the original Si3N4 sheet and the square microholes laser-drilled by single-ring and multi-ring strategies were − 181.2 ± 41, 164.5 ± 31.9, and 104.6 ± 7.8 MPa, respectively. The proposed laser drilling technology with the multi-ring strategy can be widely used in the semiconductor industry for probe cards.

利用高脉冲光纤激光器在大气环境下在 Si3N4 片材上钻出方形微孔。调整了各种加工参数,包括扫描间距、扫描次数和采用多环策略的多环路径数,以对 Si3N4 片材进行激光钻孔。使用激光扫描显微镜测量了激光钻出的方形微孔的几何特征,包括肩高、锥角和角半径。用 X 射线衍射法检测了激光钻孔前后 Si3N4 片材的残余应力。此外,还使用扫描电子显微镜检查了热影响区和元素含量。实验结果表明,采用多环策略钻出的方形微孔的最佳肩高为 6.67 ± 0.21 μm,比采用单环策略钻出的方形微孔的 29.05 ± 10.95 μm 低约 77%。此外,原始 Si3N4 板材和采用单环和多环策略激光钻孔的方形微孔的残余应力分别为 - 181.2 ± 41、164.5 ± 31.9 和 104.6 ± 7.8 MPa。所提出的多环激光钻孔技术可广泛应用于半导体行业的探针卡。
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引用次数: 0
Multiscale basis modeling of 3D melt-pool morphological variations for manufacturing process monitoring 用于制造过程监控的三维熔池形态变化多尺度基础建模
IF 3.4 3区 工程技术 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2024-03-21 DOI: 10.1007/s00170-024-13377-2

Abstract

Laser powder bed fusion is a key technology of additive manufacturing that enables the fabrication of metal parts with complex geometry through a multilayer process. Despite its great promise in design flexibility, wide application of this technology is hindered by a lack of quality assurance in fabrication parts. Melt-pool morphological characteristics are eminent indicators for manufacturing process stability and part quality. However, existing studies on melt-pool morphology focused on key geometric properties (e.g., length, width, size) extracted from melt-pool images for characterizing its variations, and tend to overlook 3D morphological variations of melt pools and ejected spatters. In this paper, we develop a multiscale modeling framework to represent, characterize, and monitor melt-pool variations through 3D morphological features, including multiscale basis function modeling of 3D melt-pool morphology and an iterative search of predominant components for sparse representation of morphological variations in melt-pool images. A case study with real-world experimental data shows that the proposed framework effectively characterizes 3D melt-pool morphological variations and provides salient features for tracking process variations, predicting melt-pool sizes, and detecting spatters. This framework is generally flexible for a wide variety of additive manufacturing (AM)applications such as melt-pool simulation, process monitoring, and anomaly detection.

摘要 激光粉末床熔融技术是增材制造的一项关键技术,可通过多层工艺制造几何形状复杂的金属零件。尽管该技术在设计灵活性方面大有可为,但由于缺乏制造零件的质量保证,该技术的广泛应用受到阻碍。熔池形态特征是衡量制造工艺稳定性和零件质量的重要指标。然而,现有的熔池形态研究侧重于从熔池图像中提取关键几何属性(如长度、宽度、尺寸)来表征其变化,往往忽略了熔池和喷射飞溅物的三维形态变化。在本文中,我们建立了一个多尺度建模框架,通过三维形态特征来表示、表征和监测熔池的变化,包括三维熔池形态的多尺度基函数建模和迭代搜索主要成分,以稀疏表示熔池图像中的形态变化。利用真实世界实验数据进行的案例研究表明,所提出的框架能有效描述三维熔池形态变化,并为跟踪过程变化、预测熔池大小和检测喷溅物提供显著特征。该框架具有广泛的灵活性,适用于熔池模拟、过程监控和异常检测等各种增材制造(AM)应用。
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引用次数: 0
Review on preparation technology and properties of spherical powders 球形粉末的制备技术和特性综述
IF 3.4 3区 工程技术 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2024-03-21 DOI: 10.1007/s00170-024-13442-w
Shuo Yu, Yugang Zhao, Guoyong Zhao, Qian Liu, Baicheng Yao, Hao Liu

With the continuous evolution of additive manufacturing technology, the production of spherical powders has become increasingly vital. Various studies suggest that factors such as the preparation process, powder materials, and sphericity are crucial in determining product performance. This paper provides a comprehensive review of the principles, advantages, and disadvantages of three widely used preparation technologies for spherical powders: gas atomization (GA), plasma rotating electrode process (PREP), and radio frequency plasma (RFP). Next, we identify the current research gaps in the preparation process for spherical powders and analyze the techniques for controlling particle size, sphericity, and purity during powder production. Finally, we proposed the development trend of spherical powder preparation technology, which provides crucial insights for optimizing the preparation process.

随着增材制造技术的不断发展,球形粉末的生产变得越来越重要。各种研究表明,制备工艺、粉末材料和球形度等因素是决定产品性能的关键。本文全面综述了三种广泛使用的球形粉末制备技术:气体雾化(GA)、等离子体旋转电极工艺(PREP)和射频等离子体(RFP)的原理、优缺点。接着,我们指出了目前球形粉末制备工艺的研究空白,并分析了粉末生产过程中的粒度、球形度和纯度控制技术。最后,我们提出了球形粉末制备技术的发展趋势,为优化制备工艺提供了重要启示。
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引用次数: 0
Determination of quality classes for material extrusion additive manufacturing using image processing 利用图像处理确定材料挤压增材制造的质量等级
IF 3.4 3区 工程技术 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2024-03-21 DOI: 10.1007/s00170-024-13269-5
Alexander Oleff, Benjamin Küster, Ludger Overmeyer

Tools for implementing a systematic quality management are necessary for the use of material extrusion as an additive manufacturing process for products with high quality requirements. Well-defined quality classes are crucial for ensuring that the requirements for a product can be communicated transparently and that the existing properties can be evaluated. Furthermore, there is a lack of capable measurement equipment for the acquisition of process data during the production process. To address these challenges, the present paper introduces an image processing system that determines quality indicators for individual layers in terms of imperfect surface percentages and the number of imperfections. The central element of the hardware is an adaptive darkfield illumination, which leads to high-contrast images. In addition, five types of layer subareas are identified in a segmentation step. Unsupervised machine learning methods are then used to detect imperfections in each layer subarea. In the segmentation, the current layer can be distinguished from irrelevant image background regions with an F-measure of 0.981. For the layer-wise measurement of the quality indicators, relative measurement errors with standard deviations of 25 to 76.1% are found. After evaluating the capabilities of the image processing system, a proposal for limits of quality classes is derived by monitoring several material extrusion processes. For this purpose, three quality classes for each of the five layer subareas are deduced from the process scatter measured by the image processing system. The results are an important contribution to the industrialization of material extrusion in safety–critical areas such as medical technology or the aerospace industry.

要将材料挤压作为一种快速成型制造工艺用于具有高质量要求的产品,就必须有实施系统质量管理的工具。定义明确的质量等级对于确保透明地传达产品要求和评估现有特性至关重要。此外,在生产过程中还缺乏用于采集工艺数据的测量设备。为了应对这些挑战,本文介绍了一种图像处理系统,该系统可根据表面瑕疵百分比和瑕疵数量确定各层的质量指标。硬件的核心部件是自适应暗场照明,可生成高对比度图像。此外,在分割步骤中还识别了五种类型的层子区域。然后使用无监督机器学习方法检测每个层子区域的瑕疵。在分割过程中,当前图层可以与无关的图像背景区域区分开来,F-measure 为 0.981。在对质量指标进行分层测量时,发现相对测量误差的标准偏差为 25%至 76.1%。在对图像处理系统的能力进行评估后,通过监测几个材料挤压过程,得出了质量等级限制的建议。为此,从图像处理系统测量到的工艺散射推导出五个层子区域中每个区域的三个质量等级。这些结果为医疗技术或航空航天工业等安全关键领域的材料挤压工业化做出了重要贡献。
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引用次数: 0
Spindle unit thermal error modeling and compensation based on digital twin 基于数字孪生的主轴单元热误差建模与补偿
IF 3.4 3区 工程技术 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2024-03-21 DOI: 10.1007/s00170-024-13445-7

Abstract

The thermal error in the spindle unit is substantial and necessitates mitigation. Current models, being predominantly static in nature, have limited efficacy in error control. Integrating digital twin technology for modeling and controlling spindle unit thermal error holds promise in enhancing the machining accuracy of machine tools. Yet, the notion of a digital twin system specifically tailored for spindle unit thermal characteristics remains uncharted territory. To navigate these challenges, this study introduces a novel digital twin system tailored for spindle unit thermal characteristics. This system is poised to revolutionize thermal error modeling and compensation by harnessing the capabilities of digital twin technology. Within this digital twin framework, both the thermal error control model and the analytical thermal characteristic model are seamlessly integrated. The control model is devised as an exponential function, utilizing operational time, inherent time constants, and both initial and equilibrium thermal errors as parameters. Delving deeper, the analytical thermal characteristic model for the spindle system is rooted in a thermal resistance network approach. This leads to a closed-loop thermal characteristic modeling process, culminating in the derivation of a steady-state thermal error. Intricate heat transfer dynamics between spindle components are dissected, and a comprehensive thermal equilibrium equation set is formulated for the spindle unit. This equation set comprehensively accounts for dynamic variations in key parameters such as preload, lubricant viscosity, thermal load intensity, thermal contact resistance, and convective coefficients. To ascertain the time constant, a meticulously designed set of thermal characteristic experiments is executed. Subsequently, the digital twin system embarks on predictive modeling of thermal errors across varied operational conditions. This prediction then forms the foundation for thermal error compensation. With the integration of the present model into the digital twin system, the results are impressive: the absolute average and maximum deviations in thermal elongation, post-error control, stand at approximately 0.40 μm and 1.24 μm, respectively.

摘要 主轴装置的热误差很大,必须加以缓解。目前的模型主要是静态模型,在误差控制方面效果有限。利用数字孪生技术对主轴单元热误差进行建模和控制,有望提高机床的加工精度。然而,专为主轴单元热特性量身定制的数字孪生系统这一概念仍是未知领域。为了应对这些挑战,本研究介绍了一种专为主轴单元热特性定制的新型数字孪生系统。通过利用数字孪生技术的能力,该系统有望彻底改变热误差建模和补偿。在数字孪生框架内,热误差控制模型和热特性分析模型实现了无缝集成。控制模型设计为指数函数,利用运行时间、固有时间常数以及初始和平衡热误差作为参数。更深入地说,主轴系统的热特性分析模型植根于热阻网络方法。这导致了一个闭环热特性建模过程,最终推导出稳态热误差。对主轴组件之间错综复杂的热传递动力学进行了剖析,并为主轴单元制定了全面的热平衡方程组。该方程组全面考虑了预紧力、润滑油粘度、热负荷强度、热接触电阻和对流系数等关键参数的动态变化。为确定时间常数,执行了一套精心设计的热特性实验。随后,数字孪生系统开始对不同运行条件下的热误差进行预测建模。这种预测为热误差补偿奠定了基础。将本模型集成到数字孪生系统后,结果令人印象深刻:误差控制后,热伸长率的绝对平均偏差和最大偏差分别约为 0.40 μm 和 1.24 μm。
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引用次数: 0
Multi-scale modeling reveals microstructural and mechanical evolution in GH4169 and DD5 nickel-based superalloys during grinding 多尺度建模揭示 GH4169 和 DD5 镍基超合金在磨削过程中的微观结构和力学演变
IF 3.4 3区 工程技术 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2024-03-20 DOI: 10.1007/s00170-024-13419-9
Minghui Chen, Ming Cai, Yadong Gong, Qiang Gong, Tao Zhu, Minglei Zhang

This study delves into the grinding-induced microstructural and mechanical evolution in high-entropy nickel-based superalloys GH4169 and DD5, underscoring their distinct behaviors under varying machining conditions. Leveraging “Random Substitution” in Material Studio, the research developed intricate atomic models to accurately depict the complex chemical compositions and microstructures of these superalloys. Neper software was employed for multi-scale modeling, specifically analyzing the unit cells of GH4169. A critical focus was placed on the effects of key grinding parameters—depth, spindle speed, and feed rate—on the crystallographic deformation of GH4169, contrasting it with the response of DD5. The study highlighted a notable transition in GH4169’s material removal mechanism from plastic flow to chip spallation at enhanced grinding depths and feed rates, while maintaining lattice integrity at higher grinding speeds. GH4169 consistently demonstrated greater tangential and normal forces during grinding compared to DD5, reflecting intricate machining complexities. The differential crystal orientations between these superalloys significantly impacted the grinding force distribution and heat dissipation during the process. This comprehensive analysis provides pivotal insights into the micro-level grinding process parameters, enriching both theoretical and practical understanding of material machinability in advanced manufacturing contexts. The study’s novelty lies in its application of detailed atomic models and multi-scale modeling to uncover subtle microstructural and mechanical dynamics during the grinding of superalloys.

本研究深入探讨了高熵镍基超合金 GH4169 和 DD5 研磨引起的微结构和机械演变,强调了它们在不同加工条件下的独特行为。利用 Material Studio 中的 "随机替代 "功能,研究人员开发了复杂的原子模型,以准确描述这些超合金的复杂化学成分和微观结构。多尺度建模采用了 Neper 软件,特别是分析了 GH4169 的单元格。研究重点放在关键磨削参数深度、主轴转速和进给量对 GH4169 结晶变形的影响上,并将其与 DD5 的反应进行对比。 研究强调了 GH4169 的材料去除机制,即在磨削深度和进给量增加时,材料从塑性流动到切屑剥落的显著转变,同时在磨削速度提高时保持晶格完整性。与 DD5 相比,GH4169 在磨削过程中始终表现出更大的切向力和法向力,反映出复杂的加工复杂性。这些超合金之间不同的晶体取向极大地影响了磨削过程中的磨削力分布和散热。这项综合分析为微观层面的磨削工艺参数提供了重要见解,丰富了在先进制造背景下对材料可加工性的理论和实践理解。这项研究的新颖之处在于它应用了详细的原子模型和多尺度建模来揭示超耐热合金磨削过程中微观结构和机械动力学的微妙变化。
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引用次数: 0
Machining behavior and experimental investigation of ultrasonic vibration assisted belt flapwheel flexible polishing 超声波振动辅助带瓣轮柔性抛光的加工行为和实验研究
IF 3.4 3区 工程技术 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2024-03-20 DOI: 10.1007/s00170-024-13380-7

Abstract

The integral blisk has been widely used in aerospace, and its structural performance is inextricably linked to the blade surface quality. To improve the surface integrity of polished surface, ultrasonic vibration assisted belt flapwheel flexible polishing (UBFP) is proposed. In this study, the polishing principle of UBFP and the effects of vibration on surface generation are investigated, and kinematic analyses and trajectory simulations are performed. Furthermore, the influences of the main processing parameters on the polishing force and surface roughness in UBFP are explored experimentally, and the sensitivity of the main parameters is distinguished by multi-parameter relative sensitivity analysis based on Monte Carlo simulation. The results show that the ultrasonic vibration contributes to the polishing process primarily through kinematic state changing and trajectories interlacing of abrasives. Compared with conventional belt flapwheel flexible polishing, the polishing force decreases by 15.72% and the surface roughness decreases by 17.39%. The compression depth is the most sensitive parameter in the process of UBFP. This study demonstrates the feasibility of UBFP and provides a theoretical and experimental reference for improving the polishing surface quality of the blisk blade.

摘要 整体叶盘已广泛应用于航空航天领域,其结构性能与叶片表面质量密不可分。为了提高抛光表面的完整性,提出了超声波振动辅助带瓣轮柔性抛光(UBFP)。本研究探讨了 UBFP 的抛光原理和振动对表面生成的影响,并进行了运动学分析和轨迹模拟。此外,还通过实验探讨了 UBFP 中主要加工参数对抛光力和表面粗糙度的影响,并通过基于蒙特卡罗模拟的多参数相对灵敏度分析区分了主要参数的灵敏度。结果表明,超声波振动主要通过运动状态变化和磨料轨迹交错来促进抛光过程。与传统的皮带轮柔性抛光相比,抛光力降低了 15.72%,表面粗糙度降低了 17.39%。压缩深度是 UBFP 过程中最敏感的参数。这项研究证明了 UBFP 的可行性,并为改善刀片抛光表面质量提供了理论和实验参考。
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引用次数: 0
Full cycle numerical simulation during the pulsed laser cladding process considering the interaction between laser and powder 考虑到激光与粉末之间的相互作用,对脉冲激光熔覆过程进行全周期数值模拟
IF 3.4 3区 工程技术 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2024-03-20 DOI: 10.1007/s00170-024-13455-5
Han Sun, Chang Li, Xing Han

During the pulsed laser cladding process, complex thermal accumulation occurs between powder and beam due to the pulsed laser periodic change. The selection of process parameters affects the cladding layer quality, and the correlation between the parameters is high. It is of great significance to obtain high quality cladding layer to determine the influence of the powder-carrying gas nitrogen velocity, powder feeding port diameter, and powder feeding angle on the powder flow, as well as the optimal powder shading rate and the mechanism of powder interaction with pulsed laser beam. In this paper, a gas–solid coupling model during the pulsed laser cladding process of three-beam coaxial powder feeder was established, and the rotating Gaussian heat source function of pulsed laser was written to calculate the temperature, flow velocity, and concentration distribution considering the interaction between laser and powder. The orthogonal test method was used to optimize the process parameters in order to reduce the shading rate of powder and improve the laser energy utilization. On this basis, a full cycle three-dimensional multi-field coupling numerical model for pulsed laser cladding process was established, and the temperature, flow, stress fields, and multi-component heat and mass transfer behaviors were calculated under different powder shading rates. The flow temperature of powder was collected by infrared thermometer and compared with the numerical results, the reliability of the model was verified. This study provides a significant theoretical basis for the full-cycle optimization of process parameters and the improvement of cladding layer quality during pulsed laser cladding.

在脉冲激光熔覆过程中,由于脉冲激光的周期性变化,粉末和光束之间会产生复杂的热积累。工艺参数的选择会影响熔覆层的质量,而且参数之间的相关性很高。确定载粉气体氮气速度、送粉口直径、送粉角度对粉末流动的影响,以及最佳粉末遮挡率和粉末与脉冲激光束的相互作用机理,对获得高质量熔覆层具有重要意义。本文建立了三束同轴送粉机脉冲激光熔覆过程中的气固耦合模型,并编写了脉冲激光的旋转高斯热源函数,计算了考虑激光与粉末相互作用的温度、流速和浓度分布。采用正交试验法优化工艺参数,以降低粉末遮光率,提高激光能量利用率。在此基础上,建立了脉冲激光熔覆过程的全循环三维多场耦合数值模型,计算了不同粉末遮挡率下的温度场、流场、应力场以及多组分传热传质行为。通过红外测温仪采集了粉末的流动温度,并与数值结果进行了对比,验证了模型的可靠性。该研究为脉冲激光熔覆过程中工艺参数的全周期优化和熔覆层质量的改善提供了重要的理论依据。
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引用次数: 0
Understanding the mechanism of ultrasonic vibration-assisted drilling (UVAD) for micro-hole formation on silicon wafers using numerical and analytical techniques 利用数值和分析技术了解超声波振动辅助钻孔(UVAD)在硅晶片上形成微孔的机理
IF 3.4 3区 工程技术 Q2 AUTOMATION & CONTROL SYSTEMS Pub Date : 2024-03-20 DOI: 10.1007/s00170-024-13412-2
Rendi Kurniawan, Shuo Chen, Moran Xu, Hanwei Teng, Jielin Chen, Saood Ali, Pil-Wan Han, Gandjar Kiswanto, Sundaresan Thirumalai Kumaran, Tae Jo Ko

This study investigated the mechanism of UVAD using numerical and analytical techniques. Silicon wafers possess challenging cutting properties due to their inherent brittleness and susceptibility to cracking along specific crystal orientation. Hence, non-traditional cutting methods like UVAD hold promise for precision micro-hole drilling in silicon wafers. In order to comprehend the mechanism of UVAD, the numerical technique utilized a direct brittle micro-cracking model within a 2D finite element (FE) method. This facilitated a comparative analysis between conventional drilling (CD) and UVAD, with a specific focus on understanding the micro-cracking mechanisms during the mechanical process. This study examined primarily the cutting force, micro-fracture analysis, and cutting energy. The numerical technique effectively predicted micro-cracks within the brittle regime, a task that is challenging to accomplish using analytical methods alone. In parallel, an analytical technique was developed to predict brittle-ductile transition (BDT) lines by analyzing the thrust force and specific cutting energy (SCE), combined with the numerical technique. Various feed rates per revolution were tested to validate the analytical force predictions. The analytical results demonstrate that the force profile corresponds to the transient cutting depth, while the numerical results indicated that the direct brittle micro-cracking model effectively demonstrated the fracture mechanisms, particularly at greater depths of cut. The SCE graph can predict the formation of a ductile regime on the cutting surface of the drilled micro-hole, although predicting micro-fractures on the side edges of the drilled micro-holes remains challenging. Additionally, UVAD demonstrated a reduction in micro-fractures on the sides of drilled micro-holes, particularly at very low feed rates per revolution.

本研究利用数值和分析技术研究了 UVAD 的机理。硅晶片因其固有的脆性和沿特定晶体取向的易开裂性而具有极具挑战性的切割特性。因此,UVAD 等非传统切割方法有望在硅晶片上实现精密微孔钻孔。为了理解 UVAD 的机理,数值技术利用了二维有限元(FE)方法中的直接脆性微裂纹模型。这有助于对传统钻孔(CD)和 UVAD 进行比较分析,重点是了解机械过程中的微裂纹机制。这项研究主要考察了切削力、微裂纹分析和切削能量。数值技术有效地预测了脆性体系中的微裂纹,而这是仅使用分析方法难以完成的任务。与此同时,还开发了一种分析技术,通过分析推力和特定切削能量 (SCE),结合数值技术来预测脆性-韧性转变 (BDT) 线。测试了各种每转进给量,以验证分析力预测。分析结果表明,力曲线与瞬时切割深度相对应,而数值结果表明,直接脆性微裂纹模型有效地展示了断裂机制,尤其是在切割深度较大时。SCE 图形可以预测钻孔微孔切割面上韧性机制的形成,不过预测钻孔微孔侧缘的微断裂仍具有挑战性。此外,UVAD 显示钻过的微孔侧边的微裂纹有所减少,特别是在每转进给量很低的情况下。
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引用次数: 0
期刊
International Journal of Advanced Manufacturing Technology
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