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Online extraction of power MOSFET junction temperature using calculated turn-off time 利用计算的关断时间在线提取功率MOSFET结温
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-12 DOI: 10.1016/j.microrel.2025.115951
Weiwei Wei , Shilin Liu , Guoqing Xu , Hongtao Liu
Junction temperature (Tj) is a key parameter to judge the reliability of power MOSFET. However, extracting the junction temperature of a power MOSFET in real-time remains a challenge. To address this challenge, this manuscript proposes an online method to extract the junction temperature of a power MOSFET using calculated turn-off time (tcoff). This manuscript makes three main contributions: 1) The influence of junction temperature on the turn-off process of power MOSFET is analyzed. The calculated turn-off time is proposed as a temperature-sensitive electrical parameter (TSEP) to extract the junction temperature. 2) The high-frequency response of the circuit parasitic parameters caused by the switching process of the power MOSFET is analyzed. An online calculated turn-off time measurement method is proposed. 3) Experiments confirm that calculated turn-off time, as TSEP, offers advantages such as high sensitivity and good linearity. Additionally, the effectiveness of the online measurement method for calculated turn-off time was verified, and an experiment was conducted to extract the junction temperature online.
结温(Tj)是判断功率MOSFET可靠性的关键参数。然而,实时提取功率MOSFET的结温仍然是一个挑战。为了解决这一挑战,本文提出了一种使用计算关断时间(tcoff)提取功率MOSFET结温的在线方法。本文的主要贡献有三:1)分析了结温对功率MOSFET关断过程的影响。计算出的关断时间作为温度敏感电参数(TSEP)来提取结温。2)分析了功率MOSFET开关过程引起的电路寄生参数的高频响应。提出了一种在线计算关断时间测量方法。3)实验证实,计算关断时间作为TSEP具有灵敏度高、线性好等优点。验证了关断时间在线测量方法的有效性,并进行了结温在线提取实验。
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引用次数: 0
Research on hygrothermal reliability of double-sided molded power modules 双面成型电源模块热湿可靠性研究
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-08 DOI: 10.1016/j.microrel.2025.115946
Danni Cao , Ping Wu , Linjie Liao , Zhen Liu , Yiou Qiu , Linzheng Fu , Wenhui Zhu , Liancheng Wang
With the rapid development of artificial intelligence, cloud computing, 5G, and new energy industries, power modules face multiple technical challenges including increasing power density, higher integration levels, and long-term reliability. To meet miniaturization requirements, industry has developed technologies such as double-sided plastic encapsulation and component-on-package (CoP) to enhance integration. Although system-in-package (SiP) technology enables compact size and high performance for power modules, it introduces interfacial reliability degradation under harsh environmental conditions (e.g., humidity and thermal cycling). To address this issue, this study combined finite element analysis (FEA) with reliability testing conducted according to JEDEC standards to systematically evaluate failure mechanisms under complex operating conditions. Testing revealed that after MSL1 moisture absorption treatment, extensive delamination occurred during three reflow soldering processes. Through establishing three physical models—85 °C/85 % RH hygrothermal diffusion model, reflow desorption model, and peak-temperature vapor pressure model—the stress distribution and crack propagation under thermo-hygro-vapor pressure coupling were elucidated. Key findings include: Moisture diffusion exhibited low concentration gradients within 100 h due to inorganic material barrier effects; Moisture loss rate during reflow demonstrated nonlinear growth with temperature, reaching maximum at peak temperature; Equivalent coefficient of thermal expansion (CTE) analysis quantified stress ratios as 1:1.07:0.84 (thermal-hygro-vapor), revealing that crack propagation is primarily driven by shear stress-dominated GII mode. Notably, the strain energy release rate (SERR) under multi-field coupling exceeded the linear superposition values of individual fields by 304 %, demonstrating that synergistic effects significantly accelerate interfacial delamination failure risks.
随着人工智能、云计算、5G、新能源等产业的快速发展,功率模块面临着不断提高功率密度、更高集成度、长期可靠性等多重技术挑战。为了满足小型化的要求,业界已经开发了双面塑料封装和组件上封装(CoP)等技术来提高集成度。虽然系统级封装(SiP)技术可以实现功率模块的紧凑尺寸和高性能,但它在恶劣环境条件下(例如湿度和热循环)会导致接口可靠性下降。为了解决这一问题,本研究将有限元分析(FEA)与根据JEDEC标准进行的可靠性测试相结合,系统地评估复杂工况下的失效机制。测试表明,在MSL1吸湿处理后,在三个回流焊接过程中发生了广泛的分层。通过建立85°C/ 85% RH湿热扩散模型、回流解吸模型和峰值温度蒸汽压模型三种物理模型,分析了热-湿-蒸汽压耦合作用下的应力分布和裂纹扩展。主要发现包括:由于无机材料屏障效应,水分在100 h内呈低浓度梯度扩散;回流过程中的水分损失率随温度呈非线性增长,在峰值温度时达到最大值;等效热膨胀系数(CTE)分析将应力比量化为1:1.07:0.84(热-湿-汽),表明裂纹扩展主要受剪切应力主导的GII模式驱动。值得注意的是,多场耦合下的应变能释放率(SERR)比单个场的线性叠加值高出304%,表明协同效应显著加速了界面分层破坏风险。
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引用次数: 0
SnO2 quantum dots under mechanical bending: Modeling and application in flexible sensors 机械弯曲下的SnO2量子点:建模及其在柔性传感器中的应用
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-08 DOI: 10.1016/j.microrel.2025.115950
Shweta, Sunil Jadav
In response to the growing need for flexible and wearable electronics, multifunctional sensing films have been developed. For ensuring the reliability of the sensing films on flexible substrate, the bending analysis becomes highly significant. This research presents the bending analysis of SnO2 Quantum dots (QDs) to assess their suitability as gas and strain sensors. Determining the mechanical durability and failure lifespan of flexible devices thus requires a precise assessment of bending-induced strain and the associated resistance change. The impact of various bending factors such as bending radius, substrate thickness, and film thickness on strain is examined. The findings demonstrate that thinner substrates and films may withstand greater strain without experiencing structural failure, which qualifies them for flexible gas sensing applications. The reverse design approach is also specified that will help the researchers to optimize the design structure as per performance requirement. Furthermore, the resistance changes of SnO2 QDs with strain is modeled using a calibration-based technique, utilizing reference data from carbon nanocoil (CNC) and single-walled carbon nanotube (SWCNT) film and the observed results are validated with experimental data of SnO2 QDs. With a consistent response value of 0.96 for SnO2 QDs throughout bending radii between 2 mm and 40 mm, the modeled sensor validates the feasibility of SnO2 QDs for flexible and wearable gas sensor applications and demonstrates that gas sensing performance is strain-insensitive.
为了响应对柔性和可穿戴电子产品日益增长的需求,多功能传感薄膜已经开发出来。为了保证传感膜在柔性基板上的可靠性,弯曲分析变得非常重要。本研究提出了SnO2量子点(QDs)的弯曲分析,以评估其作为气体和应变传感器的适用性。因此,确定柔性装置的机械耐久性和失效寿命需要对弯曲引起的应变和相关电阻变化进行精确评估。考察了弯曲半径、基材厚度、薄膜厚度等不同弯曲因素对应变的影响。研究结果表明,更薄的衬底和薄膜可以承受更大的应变而不会经历结构破坏,这使它们有资格用于柔性气敏应用。本文还提出了逆向设计方法,以帮助研究人员根据性能要求对设计结构进行优化。此外,利用碳纳米线圈(CNC)和单壁碳纳米管(SWCNT)薄膜的参考数据,采用基于校准的技术对SnO2量子点的电阻随应变的变化进行了建模,并与SnO2量子点的实验数据进行了验证。在2 mm到40 mm的弯曲半径范围内,SnO2量子点的响应值一致为0.96,验证了SnO2量子点用于柔性和可穿戴气体传感器的可行性,并证明了气体传感性能是应变不敏感的。
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引用次数: 0
Terahertz pulse time-domain reflection for accurate detection of wire voids in integrated circuits: A simulation and experimental validation 太赫兹脉冲时域反射用于集成电路中导线空隙的精确检测:仿真与实验验证
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-05 DOI: 10.1016/j.microrel.2025.115945
Zhen Xu , Man Luo , Jining Li , Kai Chen , Longhai Liu , Chao Yan , Degang Xu , Jianquan Yao
With the advancement of technology, integrated circuit technology is developing towards smaller feature sizes, higher integration levels, and lower power consumption. The issue of wire voids has become increasingly prominent, and traditional detection methods can no longer meet the growing demand for accurate detection. This study utilizes the time-domain pulse reflection technology combined with experimental testing, theoretical calculations, and simulations to locate and detect wire voids of different sizes and positions in integrated circuit wires with different parameters. The research results show that with the size of the void increasing, the reflected signal lags slightly behind compared to that of a smaller void. When the size of the wire void is 100 μm, the test error for a substrate dielectric constant of 2.2 is greater than that for a dielectric constant of 3. When the void size is 150 μm, the test error for a substrate dielectric constant of 2.2 is smaller than that for a dielectric constant of 3. When the dielectric constant of the substrate is 2.2 and the void size is 150 μm, the minimum distance test deviation is only 34.819 μm, and the position error is only 0.35 %. The farther the void position is from the test point, the greater the error. This study utilizes terahertz pulse time - domain reflection technology to detect tiny voids and fault locations in integrated circuits, which is of great significance for ensuring the quality of integrated circuits and promoting the sustainable development of electronic technology.
随着技术的进步,集成电路技术正朝着特征尺寸更小、集成度更高、功耗更低的方向发展。线材空洞的问题日益突出,传统的检测方法已不能满足日益增长的精确检测需求。本研究利用时域脉冲反射技术,结合实验测试、理论计算和仿真,对不同参数的集成电路导线中不同尺寸和位置的导线空隙进行定位和检测。研究结果表明,随着空腔尺寸的增大,反射信号相对于较小空腔的反射信号略有滞后。当线隙尺寸为100 μm时,衬底介电常数为2.2时的测试误差大于介电常数为3时的测试误差。当孔隙尺寸为150 μm时,衬底介电常数为2.2时的测试误差小于介电常数为3时的测试误差。当衬底介电常数为2.2,空穴尺寸为150 μm时,最小距离测试偏差仅为34.819 μm,位置误差仅为0.35%。空泡位置离测试点越远,误差越大。本研究利用太赫兹脉冲时域反射技术检测集成电路中的微小空隙和故障位置,对于保证集成电路的质量,促进电子技术的可持续发展具有重要意义。
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引用次数: 0
Mechanism analysis and single event effect simulation of p-GaN HEMT devices under substrate bias conditions 衬底偏置条件下p-GaN HEMT器件的机理分析及单事件效应模拟
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-05 DOI: 10.1016/j.microrel.2025.115942
Shi-Jin Liu , Ying Wang , Cheng-Hao Yu , Hao-Min Guo
This article investigates the influence mechanism of substrate bias on the electrical characteristics of p-GaN HEMT devices, and uses the Sentaurus Technology Computer Aided Design (Sentaurus TCAD) and Stopping and Range of Ions in Matter (SRIM) joint simulation method to simulate the single-event effects (SEE) of devices under different substrate biases. Research has found that the device's threshold voltage is more stable under a positive substrate bias, and the vertical leakage current is lower. Furthermore, based on experimental testing, a Sentaurus TCAD and SRIM joint simulation was conducted to analyze the impact mechanism of different substrate biases on the device's SEE. Compared with the substrate-free electrode structure, the gate and drain currents are significantly reduced, reducing the possibility of device burnout at the drain and gate. In addition, the increase in source current and substrate current accelerates charge collection. Therefore, by designing and applying substrate bias reasonably, the stability and reliability of the device in both radiation and non-radiation environments can be effectively improved.
本文研究了衬底偏置对p-GaN HEMT器件电特性的影响机理,并采用Sentaurus Technology Computer Aided Design (Sentaurus TCAD)和物质中离子的停止和范围(SRIM)联合模拟方法,模拟了不同衬底偏置下器件的单事件效应(SEE)。研究发现,该器件的阈值电压在衬底正偏压下更稳定,垂直泄漏电流更低。在实验测试的基础上,进行了Sentaurus TCAD和SRIM联合仿真,分析了不同衬底偏置对器件SEE的影响机理。与无衬底电极结构相比,栅极和漏极电流显著降低,降低了器件在漏极和栅极烧毁的可能性。此外,源电流和衬底电流的增加加速了电荷的收集。因此,通过合理设计和应用衬底偏压,可以有效地提高器件在辐射和非辐射环境下的稳定性和可靠性。
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引用次数: 0
Source-connected and gate-connected field-plate influence on thermal resistance of AlGaN/GaN HEMT with varying passivation thickness and field-plate length 不同钝化厚度和场板长度下,源接和栅接场板对AlGaN/GaN HEMT热阻的影响
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-04 DOI: 10.1016/j.microrel.2025.115947
Vaidehi Vijay Painter , Raphael Sommet , Jean-Christophe Nallatamby , P. Vigneshwara Raja
A comprehensive investigation into the electrothermal behaviour of AlGaN/GaN high-electron mobility transistor (HEMT) is presented in this work, by means of validated physics-based TCAD simulations. The focus is on the impact of different field-plate (FP) architectures, including source-connected field-plate (SC-FP), gate-connected field-plate (GC-FP), and without FP structures, on the thermal resistance (RTH) of the HEMT. A key finding is the identification of multiple RTH regions in the field-plated HEMT, a direct consequence of the primary hotspot dynamically evolving from the gate-edge, to a dual-hotspot configuration, and finally migrating to the FP edge with increasing power levels; in contrast to the single RTH of the HEMT without FP. This multi-RTH characteristic is consistent in both SC-FP and GC-FP structures. Moreover, the channel temperature profile is nearly identical in both FPs. The influence of passivation thickness (tSiN) and field-plate length (LFP), on RTH is systematically investigated. The results reveal a critical design trade-off; thicker passivation improves electrical insulation but thermally decouples the FP effect, while thinner tSiN increases the electric field at the FP edge. The increased LFP leads to a corresponding reduction in the RTH. Hence, integrated electrothermal co-design is a fundamental prerequisite for optimizing the performance and reliability of the HEMTs.
本文通过基于物理验证的TCAD模拟,对AlGaN/GaN高电子迁移率晶体管(HEMT)的电热行为进行了全面的研究。重点是不同场板(FP)架构的影响,包括源连接场板(SC-FP),栅极连接场板(GC-FP),以及没有FP结构,对HEMT的热阻(RTH)。一个关键的发现是在场镀HEMT中发现了多个RTH区域,这是主热点从栅极边缘动态演变到双热点配置的直接结果,最后随着功率水平的增加迁移到FP边缘;与不含FP的HEMT的单一RTH相比。这种多rth特征在SC-FP和GC-FP结构中是一致的。此外,两种FPs的通道温度分布几乎相同。系统地研究了钝化厚度(tSiN)和场板长度(LFP)对RTH的影响。结果揭示了一个关键的设计权衡;较厚的钝化改善了电绝缘性,但热去耦了FP效应,而较薄的tSiN增加了FP边缘的电场。LFP的增加导致RTH相应的降低。因此,集成电热协同设计是优化hemt性能和可靠性的基本前提。
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引用次数: 0
Thermal and electrical characterization of flexible microheaters: Influence of material choice and geometry 柔性微加热器的热和电特性:材料选择和几何形状的影响
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-11-04 DOI: 10.1016/j.microrel.2025.115944
Shweta , Sunil Jadav
Microheaters are necessary for a variety of applications, including biomedical implants, wearable sensor systems, and portable electronics that require low-power, quick thermal actuation. This research compares three widely used microheater materials namely silver, copper, and platinum placed on a polyimide (PI) substrate using a thorough electro-thermo-mechanical simulation performed using COMSOL Multiphysics. Thermo-mechanical analysis confirmed that the microheater's structural integrity is maintained since the generated stresses are less than the yield strength of the component materials. The paper also examines the effect of various parameters such as heater width, thickness, voltage, and number of turns on temperature distribution, power dissipation, and resistance. The results of various statistical indicators such as normalized uniformity index and coefficient of variation as well as graph of voltage vs ΔT revealed that platinum provides excellent thermal uniformity as compared to other two materials. The simulation results are validated against analytical calculations, showing good agreement with an average deviation of approximately 7 % across all materials, thereby confirming the accuracy of the modelling approach. With its useful design insights and material-specific trade-offs, this research offers designers creating next-generation flexible heating elements for gas sensors, wearable sensors, and biomedical systems.
微加热器是各种应用所必需的,包括生物医学植入物、可穿戴传感器系统和需要低功耗、快速热致动的便携式电子设备。本研究比较了三种广泛使用的微加热器材料,即放置在聚酰亚胺(PI)衬底上的银、铜和铂,使用COMSOL Multiphysics进行了彻底的电热机械模拟。热力学分析证实,由于产生的应力小于部件材料的屈服强度,因此保持了微加热器的结构完整性。本文还考察了加热器宽度、厚度、电压和匝数等参数对温度分布、功耗和电阻的影响。标准化均匀性指数、变异系数以及电压vs ΔT等统计指标的结果表明,与其他两种材料相比,铂具有优异的热均匀性。通过分析计算验证了模拟结果,所有材料的平均偏差约为7%,从而证实了建模方法的准确性。凭借其有用的设计见解和特定材料的权衡,该研究为设计人员提供了用于气体传感器、可穿戴传感器和生物医学系统的下一代柔性加热元件。
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引用次数: 0
Reliability assessment of graphene channel vertical TFET: Role of trap-assisted tunneling 石墨烯通道垂直TFET的可靠性评估:陷阱辅助隧道的作用
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-10-31 DOI: 10.1016/j.microrel.2025.115943
Vanshika Ghai , Sidhartha Dash , Guru Prasad Mishra
This paper proposes a graphene channel-based Vertical Tunnel Field Effect Transistor (V-TFET) and analyzes its reliability using Trap-Assisted Tunneling (TAT). The Graphene Channel V-TFET (GC V-TFET) improves device performance because of graphene's two-dimensional honeycomb structure enhancing electron tunneling. Compared to ordinary V-TFETs, this GC V-TFET offers over one decade of improvement in drain current, a two-decade increase in the ION/IOFF ratio, a higher electric field, a lower energy bandgap width, and a one-fold improvement in transconductance. The Silvaco ATLAS TCAD tool compares the simulations of V-TFET and GC V-TFET. To assess reliability, the impact of TAT on the GC V-TFET has been investigated. The results showed an increase of about one decade in the IOFF value, increase in electric field of approximately 3.0 × 104 V/cm, decrease in potential of about 0.04 V, an upward shift in energy bands of about 0.02 eV, increased transconductance of 1.5 × 10−6 S, electron concentration at source side is reduced by 4 × 1016 cm−3, hole concentration at channel region decreases by approximately 20 %, electron current density is increased by three and two orders at channel and drain region respectively, hole current density is increased by approximately four orders at source region and decrease in the recombination rate of 4.2 × 104 cm−1 s−1.
本文提出了一种基于石墨烯沟道的垂直隧道场效应晶体管(V-TFET),并利用陷阱辅助隧道(TAT)分析了其可靠性。石墨烯通道V-TFET (GC V-TFET)由于石墨烯的二维蜂窝结构增强了电子隧穿,从而提高了器件性能。与普通的V-TFET相比,这种GC V-TFET提供了超过十年的漏极电流改善,离子/IOFF比增加了二十年,更高的电场,更低的能量带隙宽度,跨导性提高了一倍。Silvaco ATLAS TCAD工具比较了V-TFET和GC V-TFET的模拟结果。为了评估可靠性,研究了TAT对GC V-TFET的影响。结果表明:IOFF值增加约10年,电场增加约3.0 × 104 V/cm,电势下降约0.04 V,能带向上移动约0.02 eV,跨导增加1.5 × 10−6 S,源侧电子浓度降低4 × 1016 cm−3,沟道区空穴浓度降低约20%。通道区和漏极区电子电流密度分别提高了3个和2个数量级,源区空穴电流密度提高了约4个数量级,复合速率为4.2 × 104 cm−1 s−1。
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引用次数: 0
A temperature-invariant and ML-resilient, RO PUF design with improved security and performance metrics 具有温度不变和ml弹性的RO PUF设计,具有更高的安全性和性能指标
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-10-31 DOI: 10.1016/j.microrel.2025.115941
Nitish Kumar , Aditya Antil , Himanshu Kesarwani , Dhirendra Kumar , Kavindra Kandpal , Manish Goswami
Physically Unclonable Functions (PUFs) represent a modern hardware approach for achieving authentication and secure key generation. The PUF uses the intrinsic, numerous, unpredictable, and unavoidable variances in the semiconductor manufacturing process to enhance hardware and software security. The inherent process variations in semiconductor technology are exploited in PUF circuits to generate unique and unclonable device identifiers. In the proposed design, integrating a Current-Starved (CS) inverter, metastable circuit, and LFSR enhances reliability from 91.06% to 98.96%. The design achieves 49.24% uniqueness, 50.27% uniformity, and 49.87% bit aliasing across a wide temperature range (−40 °C to 120 °C). Power consumption is reduced by about 2.14× compared to a conventional RO PUF. Prelayout and postlayout simulations report delays of 1.11 ns and 2.3 ns, respectively, while NIST tests confirm randomness. FPGA implementation on a Basys-3 Artix-7 using Vivado requires minimal hardware and achieves an 80 Mb/s bit generation rate. Furthermore, the design resists ML-based modeling attacks, limiting prediction accuracy to 45%–65%.
物理不可克隆函数(puf)代表了实现身份验证和安全密钥生成的现代硬件方法。PUF利用半导体制造过程中固有的、大量的、不可预测的和不可避免的差异来增强硬件和软件的安全性。在PUF电路中利用半导体技术中固有的工艺变化来产生唯一的和不可克隆的设备标识符。在提出的设计中,集成电流耗尽(CS)逆变器、亚稳电路和LFSR将可靠性从91.06%提高到98.96%。该设计在宽温度范围(- 40°C至120°C)内实现了49.24%的唯一性、50.27%的均匀性和49.87%的位混叠。与传统的RO PUF相比,功耗降低了约2.14倍。布局前和布局后的模拟分别报告了1.11 ns和2.3 ns的延迟,而NIST测试证实了随机性。使用Vivado的Basys-3 Artix-7上的FPGA实现需要最少的硬件,并实现80 Mb/s的比特生成速率。此外,该设计抵抗基于ml的建模攻击,将预测精度限制在45%-65%。
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引用次数: 0
Thermomechanical stress optimization in flip-chip packages: Impacts of copper pillar geometry on ultra-low-k layer reliability 倒装封装中的热机械应力优化:铜柱几何形状对超低k层可靠性的影响
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2025-10-30 DOI: 10.1016/j.microrel.2025.115940
Danting Li , Kai Zhao , Ruiwang Yu , Hao Wei , Yudi Zhao , Shuying Ma
Thermo-mechanical stress at ultra-low-k (ULK) dielectric interfaces has emerged as a critical challenge for flip-chip package reliability, stemming from the inherent brittleness of ULK materials, significant coefficient of thermal expansion (CTE) mismatch in chip-package systems, and the high modulus of copper interconnects. This study develops a multiscale finite element analysis framework that integrates global-submodel coupling methodology with temperature-dependent material properties to systematically investigate stress evolution during 25-260-25 °C reflow processes. Simulation results demonstrate that geometric optimization of copper pillar bumps can effectively reduce interfacial stresses across the solder/Ni/ULK multilayer interfaces while establishing design guidelines, including adopting passivation-covered PI openings, decreasing the PI opening-to-pillar diameter ratio for ULK interfacial stress redistribution, and reducing bump height while increasing PI thickness to ensure effective stress buffering. This research breaks through the limitations of traditional single-parameter optimization approaches, providing critical design insights for minimizing chip-package interfacial fracture failures.
由于ULK材料固有的脆性、芯片封装系统中显著的热膨胀系数(CTE)失配以及铜互连的高模量,超低k (ULK)介电界面上的热机械应力已成为倒装封装可靠性的关键挑战。本研究开发了一个多尺度有限元分析框架,将全局子模型耦合方法与温度相关的材料特性集成在一起,系统地研究了25-260-25°C回流过程中的应力演化。仿真结果表明,铜柱凸点的几何优化可以有效降低焊料/Ni/ULK多层界面上的界面应力,同时建立设计准则,包括采用钝化覆盖的PI开口,减小PI开口与ULK界面应力重分布的柱径比,降低凸点高度同时增加PI厚度以确保有效的应力缓冲。该研究突破了传统单参数优化方法的局限性,为最大限度地减少芯片封装界面断裂故障提供了关键的设计见解。
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引用次数: 0
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