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Extrapolation of the degradation on FinFET FPGA: Comparison between 20,000 h of measurement and model FinFET FPGA退化的外推:20,000 h测量与模型的比较
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-02-11 DOI: 10.1016/j.microrel.2026.116048
J. Sobas , F. Marc
Most of the time, ageing model for digital circuit are based on short time and high stress measurements. Then, ageing is extrapolated in time and for operational condition of use. Does the model correctly predict ageing after several years of use under normal temperature and voltage conditions? This paper presents ageing and measurements of degradation made during more than 20,000 h on an optimized test bench on nine FPGA including 567 ring oscillators each, with different temperature and voltage stresses. In our knowledge, this is the longer ageing test performed on digital circuit. Based on these measures, we compare semi-empirical modelling made with high temperature stresses and short ageing time (1000 h) with low temperature stresses and long ageing time (20,000 h).
大多数情况下,数字电路的老化模型是基于短时间和高应力的测量。然后,根据使用的操作条件及时推断老化。在正常温度和电压条件下使用几年后,模型是否正确预测老化?本文介绍了在一个优化的试验台上,在不同的温度和电压应力下,在9个FPGA(每个FPGA包括567个环形振荡器)上进行了超过20,000小时的老化和退化测量。据我们所知,这是在数字电路上进行的较长的老化测试。基于这些措施,我们比较了高温应力和短时效时间(1000 h)与低温应力和长时效时间(20,000 h)的半经验模型。
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引用次数: 0
In-situ TEM investigation of thermomechanical fatigue of thick copper metallizations 厚铜金属化层热机械疲劳的原位透射电镜研究
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-02-11 DOI: 10.1016/j.microrel.2026.116050
L. Karanja , S. Moser , M. Reisinger , M. Legros
We investigate the thermomechanical behaviour of thick copper metallization on polyheaters which are chips dedicated for stressing the thick copper metallizations found in high-end power electronic devices. The degradation mechanisms of these metallizations are known to span from surface roughening to crack formation, but the underlying elemental plastic deformation mechanisms (dislocation activity, stress-assisted diffusion, …) remain elusive. Here, we have combined post-mortem TEM observations of such polyheaters that underwent ultra-fast 300 K heating cycles and in-situ TEM heating experiments up to 480 °C. Both approaches converge to establish that the dislocation microstructure inside the grains is only slightly modified over these cycles and thus that dislocation-based plasticity cannot explain the crack formation and propagation, along with surface roughening observed in these Cu metallizations.
我们研究了厚铜金属化在多加热器上的热力学行为,多加热器是用于在高端电力电子设备中发现的厚铜金属化的专用芯片。已知这些金属化的降解机制从表面粗化到裂纹形成,但潜在的元素塑性变形机制(位错活动、应力辅助扩散等)仍然难以捉摸。在这里,我们结合了对这种多加热器进行超快300 K加热循环的死后TEM观察和高达480°C的原位TEM加热实验。这两种方法都表明,在这些循环过程中,晶粒内部的位错微观结构只有轻微的改变,因此,基于位错的塑性不能解释裂纹的形成和扩展,以及在这些Cu金属化过程中观察到的表面粗化。
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引用次数: 0
Optimal bonding of 4H-SiC parallel diodes in a single TO-247 package for improved surge current robustness: experimental investigation 在单一TO-247封装中优化4H-SiC并联二极管的键合,以提高浪涌电流稳健性:实验研究
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-02-09 DOI: 10.1016/j.microrel.2026.116049
Vincenzo Terracciano , Alessandro Borghese , Carlo Ceresa , Vincenzo d'Alessandro , Andrea Irace
In this study, the surge current capability of a 60 A–1200 V 4H-SiC diode fabricated by paralleling two 30 A dies is experimentally evaluated. Three bond wire configurations are investigated using a non-repetitive surge current test at 25 °C and 110 °C. The results reveal that the stitch configuration, which employs 3 × 20 mil bonding wires, significantly outperforms the alternative 4 × 15 mil and 4 × 12 mil counterparts in terms of maximum surge current robustness. An extensive analysis is also conducted to identify key differences in the failure mechanisms among the three configurations during surge current stress.
在本研究中,实验评估了由两个30a二极管并联而成的60 a - 1200 V 4H-SiC二极管的浪涌电流能力。在25°C和110°C下使用非重复浪涌电流测试对三种键合线配置进行了研究。结果表明,在最大浪涌电流稳健性方面,采用3 × 20 mil键合线的针迹配置明显优于4 × 15 mil和4 × 12 mil对应的针迹配置。还进行了广泛的分析,以确定三种配置在浪涌电流应力下失效机制的关键差异。
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引用次数: 0
A junction-engineered SCR-based ESD protection device for radio-frequency and high-speed serial link interface circuits 一种用于射频和高速串行链路接口电路的结设计基于scr的ESD保护装置
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-02-07 DOI: 10.1016/j.microrel.2026.116040
Chen-Yu Liang, Ming-Dou Ker
With the continuous increase in operating frequency of RF integrated circuits (RF ICs) and high-speed serial link (HSSL), optimizing electrostatic discharge (ESD) protection robustness per unit capacitance has become critical. Traditional solutions, such as dual diodes, stacked diodes, and silicon-controlled rectifier (SCR), face limitations including high parasitic capacitance, elevated conduction resistance, and difficulties in maintaining low trigger voltages (Vt1) and sufficiently high holding voltages (Vh) above the latch-up threshold. These challenges render them less effective for high-frequency applications.
In this work, a P-type diode integrated with a P-type ESD (P-ESD) implantation layer is first fabricated and characterized. Building upon this, an enhanced diode-triggered SCR (DTSCR) incorporating the P-ESD implantation layer is proposed and implemented in 28-nm CMOS technology. The proposed DTSCR exhibits improved ESD performance, including reduced Vt1, lowered Vh, and enhanced human-body model (HBM) robustness normalized by the product of conduction resistance and parasitic capacitance. These results demonstrate the potential of the DTSCR with P-ESD implantation as a promising solution for parasitic capacitance efficiency and high-robustness ESD protection in RF ICs and HSSL applications.
随着射频集成电路(RF ic)和高速串行链路(HSSL)工作频率的不断提高,优化单位电容静电放电(ESD)保护鲁棒性变得至关重要。传统的解决方案,如双二极管、堆叠二极管和可控硅(SCR),面临的限制包括高寄生电容、高传导电阻,以及难以维持低触发电压(Vt1)和保持电压(Vh)高于锁存阈值。这些挑战使得它们在高频应用中效果较差。本文首次制备了一种集成了p型ESD (P-ESD)注入层的p型二极管,并对其进行了表征。在此基础上,提出了一种包含P-ESD注入层的增强型二极管触发可控硅(DTSCR),并在28纳米CMOS技术中实现。提出的DTSCR具有更好的ESD性能,包括降低Vt1,降低Vh,增强人体模型(HBM)的鲁棒性(由传导电阻和寄生电容的乘积归一化)。这些结果表明,P-ESD植入的DTSCR在射频集成电路和HSSL应用中具有提高寄生电容效率和高鲁棒性ESD保护的潜力。
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引用次数: 0
Real-time detection of fracture mode at the direct bonded Chevron-notch Si chip via acoustic emission 基于声发射技术的直接键合菱形缺口硅片断裂模式实时检测
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-02-06 DOI: 10.1016/j.microrel.2026.116042
Sangmin Lee , Chuantong Chen , Masahiko Nishijima , Akihiro Katsura , Takuya Nakagiri , Juno Kim , Jung Shin Lee , Minwoo Daniel Rhee , Katsuaki Suganuma
In this study, the bonding strength and fracture behavior of wafer-to-wafer (W2W) bonding chip-scale Chevron-notch (CN) Si specimen was investigated using the tensile test with real-time acoustic emission (AE) monitoring. Fracture analysis could be identified into two failure modes, “interface open type” and “matrix crack type”. The bonding strength of the interface open type was slightly higher (6.41 J/m2) than the matrix crack type (6.12 J/m2). On the other hand, the interface open type exhibited higher AE absolute energy (4.0 × 107 aJ), 2.7 s of signal detection duration, and more detected signals (14.7 counts) compared to the matrix crack type, 2.3 × 107 aJ, 1.6 s, and 10.4 counts, respectively. Conventionally, both bonding strength measurement and microstructural analysis were required to classify fracture types, but AE monitoring enabled real-time identification during the tensile test.
本研究采用实时声发射(AE)监测的拉伸试验方法,研究了晶片对晶片(W2W)键合芯片级chevron缺口(CN) Si试样的键合强度和断裂行为。断裂分析可识别为“界面张开型”和“基体裂纹型”两种破坏模式。界面开放型的结合强度(6.41 J/m2)略高于基体裂纹型(6.12 J/m2)。界面开放型的声发射绝对能量为4.0 × 107 aJ,信号检测持续时间为2.7 s,检测信号数量为14.7次,分别高于基体裂纹型的2.3 × 107 aJ、1.6 s和10.4次。通常,需要结合强度测量和显微组织分析来分类断裂类型,但声发射监测可以在拉伸试验期间实时识别。
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引用次数: 0
Mechanism and performance optimization of diethylenetriamine in selectivity ratios for silicon and copper removal during TSV back-side CMP 二乙基三胺对TSV背面CMP脱硅、脱铜选择性比的影响机理及性能优化
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-02-04 DOI: 10.1016/j.microrel.2026.116038
Zhe Liang , Yu Zhu , Ru Wang , Zhanjie Du , Yang Chen , Peng Yang , Yunhui Shi
This study aimed to optimize the backside chemical mechanical polishing (CMP) process of silicon through-hole (TSV) wafers by investigating diethylenetriamine (DETA). The study reveals DETA's synergistic mechanism through electrochemical analysis, characterization (FESEM/XPS), and density-functional theory (DFT) calculations. Under optimized conditions (1.5 wt% SiO2, 0.05 wt% SDBS and 0.25 wt% DETA), a high Si-to-Cu removal rate ratio of 16.7 is achieved, with a Si removal rate exceeding 1 μm/min. This ensures efficient Cu pillar exposure. Furthermore, surface roughness is significantly improved: Si Sq decreases from 1.790 nm to 0.825 nm and Cu Sq from 3.190 nm to 1.540 nm. The total thickness variation (TTV) meets industry standards. The findings provide a viable process optimization scheme and theoretical support for high-precision TSV polishing.
本研究以二乙烯三胺(DETA)为研究对象,对硅通孔(TSV)晶圆背面化学机械抛光(CMP)工艺进行优化。该研究通过电化学分析、表征(FESEM/XPS)和密度泛函理论(DFT)计算揭示了DETA的协同机理。在优化条件(1.5 wt% SiO2、0.05 wt% SDBS和0.25 wt% DETA)下,硅铜去除率高达16.7,Si去除率超过1 μm/min。这确保了有效的铜柱暴露。表面粗糙度显著提高:Si Sq从1.790 nm降至0.825 nm, Cu Sq从3.190 nm降至1.540 nm。总厚度变化(TTV)符合行业标准。研究结果为高精度TSV抛光提供了可行的工艺优化方案和理论支持。
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引用次数: 0
Research on the degradation mechanism of the electrical properties of hydrogen-terminated diamond MOS devices under X-ray irradiation x射线辐照下端氢金刚石MOS器件电性能退化机理研究
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-02-03 DOI: 10.1016/j.microrel.2026.116026
Kejia Wang , Zhendong Zhang , Fugui Zhou , Genhao Liang , Yuwei Fan , Lishan Zhao , Yaqing Chi
Hydrogen-terminated diamond MOS devices exhibit significant potential for space electronics applications due to their ultra-wide bandgap and radiation resistance. However, the degradation mechanism of device performance under X-ray total ionizing dose (TID) effects remains unclear. This study employed TCAD simulations to systematically investigate the influence of X-ray irradiation doses ranging from 0 to 50 MGy on the transport properties of the two-dimensional hole gas (2DHG) and electrical characteristics of the devices. Results indicated that with increasing irradiation dose, the saturation drain current and leakage current decreased, while the threshold voltage shifted negatively. This phenomenon is primarily attributed to trapped charges generated by TID effects, which impair the unique 2DHG transport properties in hydrogen-terminated diamond devices. Under high-dose conditions, hydrogen-terminated diamond MOS devices demonstrate superior radiation resistance compared to Si-based and other wide-bandgap semiconductor devices. This research provides a critical theoretical foundation for radiation-hardened design of aerospace-grade diamond devices.
氢端金刚石MOS器件由于其超宽带隙和抗辐射性能,在空间电子应用中表现出巨大的潜力。然而,在x射线总电离剂量(TID)效应下,器件性能的退化机制尚不清楚。本研究采用TCAD模拟系统地研究了0 ~ 50 MGy x射线辐照剂量对二维空穴气体(2DHG)输运性质和器件电特性的影响。结果表明,随着辐照剂量的增加,饱和漏极电流和泄漏电流减小,阈值电压负移;这种现象主要是由于TID效应产生的捕获电荷破坏了端氢金刚石器件中独特的2DHG输运性质。在高剂量条件下,与硅基和其他宽带隙半导体器件相比,氢端金刚石MOS器件表现出优越的抗辐射能力。该研究为航空级金刚石器件的抗辐射硬化设计提供了重要的理论基础。
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引用次数: 0
Analytical reliability performance maps for bond wire interfaces in power modules under cyclic thermomechanical loads 循环热机械载荷下电源模块键合线接口分析可靠性性能图
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-02-02 DOI: 10.1016/j.microrel.2026.116027
Clément Chedozeau , Merouane Ouhab , Natasha Vermaak , Nicolas Degrenne , François Hild
Reliability of power modules based on Insulated Gate Bipolar Transistors (IGBTs) is majorly challenged by thermomechanical fatigue, especially at the wirebond–chip interface where lift-off failure mechanisms commonly occur. This paper introduces a novel analytical model tailored to the geometry and material properties of the wirebond–chip interface to rapidly predict reliability performance maps highlighting different zones of expected elastoplastic behaviors under thermomechanical cycling. The model integrates a thermomechanical stress formulation with a Dugdale Cohesive Zone Model to capture plastic zone development at the interface and applies the Lower Bound Shakedown Theorem to identify elastoplastic behaviors without having to perform full cyclic incremental finite element simulations. The proposed analysis enables classification of cyclic behaviors into elastic, shakedown, and alternating plasticity regimes, providing a deeper understanding of the transition to low cycle fatigue at the shakedown/alternating plasticity boundary. Analytical predictions are compared to 2D finite element analyses, which confirm the ability of the model to capture key features like plastic strain evolution and its stabilization. The proposed modular model serves as a rapid and adaptable tool for early-stage reliability assessment as a function of geometric, material, and loading parameters.
基于绝缘栅双极晶体管(igbt)的功率模块的可靠性主要受到热机械疲劳的挑战,特别是在线-片界面上,这种失效机制经常发生。本文介绍了一种针对线键-芯片界面的几何形状和材料特性量身定制的新型分析模型,用于快速预测热机械循环下不同预期弹塑性行为区域的可靠性性能图。该模型将热机械应力公式与Dugdale内聚区模型相结合,以捕捉界面处的塑性区发展,并应用下界稳定定理来识别弹塑性行为,而无需进行全循环增量有限元模拟。所提出的分析可以将循环行为分类为弹性、安定性和交替塑性,从而更深入地理解安定性/交替塑性边界向低周疲劳的过渡。分析预测与二维有限元分析相比较,证实了模型捕捉塑性应变演化及其稳定性等关键特征的能力。提出的模块化模型作为一种快速和适应性强的工具,用于早期可靠性评估,作为几何、材料和加载参数的函数。
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引用次数: 0
Reinforcement learning-based weighting factors auto-tuning for thermal management in assembled inverters 基于强化学习的组合逆变器热管理加权因子自动调谐
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-02-02 DOI: 10.1016/j.microrel.2026.116039
Cen Chen, Junping Wei, Chenyi Wang, Kaiwen Xiao, Zhenning Zhou, Haodong Wang
For three phase inverters, power semiconductor device MOSFET is the most sensitive component to failure which affects the reliability of the inverters directly. Through previous research on failure physical models, the junction temperature swing will mainly affect the remaining useful life of the MOSFET. Active thermal management is an effective way to control the temperature swing of control components. This paper proposes an optimized model predictive control for thermal management, which is achieved by suppressing overall system losses and focusing on vulnerable components, effectively suppressing the maximum junction temperature swing of the system. Afterwards, the reinforcement learning is used for weighting factors auto-tuning. The proposed method verified through experiment can effectively achieve balanced optimization of inverter life and performance and improve the reliability of the inverter system.
对于三相逆变器来说,功率半导体器件MOSFET是最敏感的失效元件,直接影响逆变器的可靠性。通过对失效物理模型的研究,结温摆动主要影响MOSFET的剩余使用寿命。主动热管理是控制控制元件温度波动的有效方法。本文提出了一种优化的热管理模型预测控制,通过抑制系统整体损耗和关注易损件,有效地抑制了系统的最大结温摆动。然后利用强化学习对权重因子进行自整定。通过实验验证,所提出的方法可以有效地实现逆变器寿命和性能的平衡优化,提高逆变器系统的可靠性。
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引用次数: 0
Degradation mechanisms of gate oxide reliability in SiC Power MOSFETs under different energy proton irradiation 不同能量质子辐照下SiC功率mosfet栅极氧化物可靠性的退化机理
IF 1.9 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2026-01-29 DOI: 10.1016/j.microrel.2026.116035
Binrui Xue , Ying Wei , Mingzhu Xun , Dan Zhang , Xiaowen Liang , Jiaxing Wang , Jingyi Xu , Jie Feng , Xuefeng Yu , Lin Wen , Qi Guo , Yudong Li
This study investigates the gate oxide reliability of silicon carbide (SiC) power MOSFETs irradiated by protons of three different energies, without inducing SEB. The results show that proton irradiation-induced latent damage in the gate oxide leads to a significant decrease in gate oxide breakdown voltage. As proton energy increases, the degradation of the device's gate oxide breakdown characteristics becomes more severe. After 300 MeV proton irradiation, the gate oxide breakdown voltage of the device approaches the gate's rated voltage. Monte Carlo simulations were used to calculate the equivalent Total Ionizing Dose (TID) and Displacement Damage Dose (DDD) for protons of different energies, along with the types, energies, and Linear Energy Transfer (LET) of the generated secondary particles. The analysis suggests that the latent damage in the SiC MOSFET gate oxide is primarily caused by secondary particles. Higher proton energy results in greater LET and range of secondary particles, leading to more severe latent damage within the device's gate oxide layer and, consequently, more significant degradation of gate oxide reliability.
本研究研究了三种不同能量的质子辐照下碳化硅(SiC)功率mosfet的栅极氧化物可靠性。结果表明,质子辐照引起的栅极氧化物的潜在损伤导致栅极氧化物击穿电压显著降低。随着质子能量的增加,器件栅极氧化物击穿特性的退化变得更加严重。300 MeV质子辐照后,器件栅极氧化物击穿电压接近栅极额定电压。利用蒙特卡罗模拟计算了不同能量质子的等效总电离剂量(TID)和位移损伤剂量(DDD),以及产生的二次粒子的类型、能量和线性能量传递(LET)。分析表明,SiC MOSFET栅极氧化物的潜在损伤主要是由二次粒子引起的。较高的质子能量导致更大的LET和二次粒子范围,导致器件栅氧化层内更严重的潜在损伤,从而导致栅氧化可靠性的更显著降低。
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引用次数: 0
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Microelectronics Reliability
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