首页 > 最新文献

Nanofabrication最新文献

英文 中文
Patterning of Quantum Dots by Dip-Pen and Polymer Pen Nanolithography 浸笔和聚合物笔纳米光刻的量子点图像化
IF 2.9 Q3 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2015-05-06 DOI: 10.1515/nanofab-2015-0002
Soma Biswas, Falko Brinkmann, Michael Hirtz, H. Fuchs
Abstract We present a direct way of patterning CdSe/ ZnS quantum dots by dip-pen nanolithography and polymer pen lithography. Mixtures of cholesterol and phospholipid 1,2-dioleoyl-sn-glycero-3 phosphocholine serve as biocompatible carrier inks to facilitate the transfer of quantum dots from the tips to the surface during lithography. While dip-pen nanolithography of quantum dots can be used to achieve higher resolution and smaller pattern features (approximately 1 μm), polymer pen lithography is able to address intermediate pattern scales in the low micrometre range. This allows us to combine the advantages of micro contact printing in large area and massive parallel patterning, with the added flexibility in pattern design inherent in the DPN technique.
摘要提出了一种利用浸笔纳米光刻和聚合物笔光刻直接制取CdSe/ ZnS量子点的方法。在光刻过程中,胆固醇和磷脂- 1,2-二油基-sn-甘油-3磷酸胆碱的混合物作为生物相容性载体墨水,促进量子点从尖端转移到表面。虽然量子点的浸笔纳米光刻技术可以实现更高的分辨率和更小的图案特征(大约1 μm),但聚合物笔光刻技术能够解决低微米范围内的中间图案尺度。这使我们能够结合大面积微接触印刷和大规模平行图案的优势,以及DPN技术固有的图案设计灵活性。
{"title":"Patterning of Quantum Dots by Dip-Pen and Polymer Pen Nanolithography","authors":"Soma Biswas, Falko Brinkmann, Michael Hirtz, H. Fuchs","doi":"10.1515/nanofab-2015-0002","DOIUrl":"https://doi.org/10.1515/nanofab-2015-0002","url":null,"abstract":"Abstract We present a direct way of patterning CdSe/ ZnS quantum dots by dip-pen nanolithography and polymer pen lithography. Mixtures of cholesterol and phospholipid 1,2-dioleoyl-sn-glycero-3 phosphocholine serve as biocompatible carrier inks to facilitate the transfer of quantum dots from the tips to the surface during lithography. While dip-pen nanolithography of quantum dots can be used to achieve higher resolution and smaller pattern features (approximately 1 μm), polymer pen lithography is able to address intermediate pattern scales in the low micrometre range. This allows us to combine the advantages of micro contact printing in large area and massive parallel patterning, with the added flexibility in pattern design inherent in the DPN technique.","PeriodicalId":51992,"journal":{"name":"Nanofabrication","volume":"2 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2015-05-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1515/nanofab-2015-0002","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"67056433","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 19
Transport characteristics of focused beam deposited nanostructures 聚焦束沉积纳米结构的输运特性
IF 2.9 Q3 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2015-02-18 DOI: 10.1515/nanofab-2015-0001
A. Ballestar, P. Esquinazi
Abstract We review the transport properties of different nanostructures produced by ion- and electron-beam deposition, as prepared as well as after certain treatments. In general, the available literature indicates that the transport properties are determined by conduction processes typical for disordered metallic grains embedded in a carbon-rich matrix, including intergrain tunneling and variable range hopping mechanisms. Special emphasis is given to the superconducting behavior found in certain Tungsten-Carbide nanostructures that, in a certain field and temperature range, is compatible with that of granular superconductivity. This granular superconductivity leads to phenomena like magnetic field oscillations as well as anomalous hysteresis loops in the magnetoresistance.
摘要本文综述了离子束和电子束沉积制备和处理后的不同纳米结构的输运性质。总的来说,现有的文献表明,输运性质是由嵌入在富碳基体中的无序金属晶粒的典型传导过程决定的,包括晶粒间隧道和可变范围跳变机制。特别强调了某些碳化钨纳米结构的超导行为,这些结构在一定的场和温度范围内与颗粒超导行为相容。这种粒状超导性导致磁场振荡和磁阻中的异常磁滞回线等现象。
{"title":"Transport characteristics of focused beam deposited nanostructures","authors":"A. Ballestar, P. Esquinazi","doi":"10.1515/nanofab-2015-0001","DOIUrl":"https://doi.org/10.1515/nanofab-2015-0001","url":null,"abstract":"Abstract We review the transport properties of different nanostructures produced by ion- and electron-beam deposition, as prepared as well as after certain treatments. In general, the available literature indicates that the transport properties are determined by conduction processes typical for disordered metallic grains embedded in a carbon-rich matrix, including intergrain tunneling and variable range hopping mechanisms. Special emphasis is given to the superconducting behavior found in certain Tungsten-Carbide nanostructures that, in a certain field and temperature range, is compatible with that of granular superconductivity. This granular superconductivity leads to phenomena like magnetic field oscillations as well as anomalous hysteresis loops in the magnetoresistance.","PeriodicalId":51992,"journal":{"name":"Nanofabrication","volume":"2 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2015-02-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1515/nanofab-2015-0001","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"67056179","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Lipid nanotube networks: Biomimetic Cell-to-Cell Communication and Soft-Matter Technology 脂质纳米管网络:仿生细胞间通讯和软物质技术
IF 2.9 Q3 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2015-01-08 DOI: 10.1515/nanofab-2015-0003
Irep Gözen, A. Jesorka
The exchange of information on the molecular level is a vital task in metazoan organisms. Communication between biological cells occurs through chemical or electrical signals in order to initiate, regulate and coordinate diverse physiological functions of an organism [1]. Typical chemical modes of signaling and communication are cell-to-cell interaction in the form of release of small molecules by one, and receptor-controlled uptake by another cell, also transport of molecules through gapjunctions [2], and transport via exosome carriers [3]. During the last decade a new mode of intercellular crosstalk has been discovered, and over time firmly established [4]. Thin tubular structures composed of lipid membrane material and actin polymer, which facilitate the selective transfer of membrane vesicles and organelles, have been identified as cell-bridging channels between cells [5]. The structures, known as membrane nanotubes, or tunneling nanotubes (TNT), have become the focus of a growing research field which generated significant results, as it became apparent that these interconnecting conduits are involved in fundamental mechanism of cell-to-cell communication [6,7]. TNTs have been identified in a variety of cells, including immune cells and neurons. Nanotubes between cells have been shown to form in different ways, for example through membrane protrusions originating from one cell and connecting to another, adjacent cell. The discovery of the membrane nanotubes in vitro in 2004 Mini-Review Article
在后生动物中,分子水平上的信息交换是一项至关重要的任务。生物细胞之间通过化学或电信号进行交流,以启动、调节和协调生物体的各种生理功能。信号和通讯的典型化学模式是细胞间的相互作用,其形式是一个细胞释放小分子,另一个细胞通过受体控制的摄取,也包括分子通过间隙连接[2]的运输,以及通过外泌体载体[3]的运输。在过去的十年中,发现了一种新的细胞间串扰模式,并随着时间的推移,[4]被牢固地建立起来。由脂质膜材料和肌动蛋白聚合物组成的细管状结构促进了膜囊泡和细胞器的选择性转移,已被确定为细胞间的细胞桥接通道。这种被称为膜纳米管或隧道纳米管(TNT)的结构已经成为一个日益发展的研究领域的焦点,并产生了重要的结果,因为很明显,这些相互连接的管道参与了细胞间通信的基本机制[6,7]。已经在多种细胞中发现了tnt,包括免疫细胞和神经元。细胞间的纳米管以不同的方式形成,例如,通过一个细胞的膜突起连接到另一个相邻的细胞。膜纳米管在体外的发现,发表于2004年的一篇综述文章
{"title":"Lipid nanotube networks: Biomimetic Cell-to-Cell Communication and Soft-Matter Technology","authors":"Irep Gözen, A. Jesorka","doi":"10.1515/nanofab-2015-0003","DOIUrl":"https://doi.org/10.1515/nanofab-2015-0003","url":null,"abstract":"The exchange of information on the molecular level is a vital task in metazoan organisms. Communication between biological cells occurs through chemical or electrical signals in order to initiate, regulate and coordinate diverse physiological functions of an organism [1]. Typical chemical modes of signaling and communication are cell-to-cell interaction in the form of release of small molecules by one, and receptor-controlled uptake by another cell, also transport of molecules through gapjunctions [2], and transport via exosome carriers [3]. During the last decade a new mode of intercellular crosstalk has been discovered, and over time firmly established [4]. Thin tubular structures composed of lipid membrane material and actin polymer, which facilitate the selective transfer of membrane vesicles and organelles, have been identified as cell-bridging channels between cells [5]. The structures, known as membrane nanotubes, or tunneling nanotubes (TNT), have become the focus of a growing research field which generated significant results, as it became apparent that these interconnecting conduits are involved in fundamental mechanism of cell-to-cell communication [6,7]. TNTs have been identified in a variety of cells, including immune cells and neurons. Nanotubes between cells have been shown to form in different ways, for example through membrane protrusions originating from one cell and connecting to another, adjacent cell. The discovery of the membrane nanotubes in vitro in 2004 Mini-Review Article","PeriodicalId":51992,"journal":{"name":"Nanofabrication","volume":"2 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2015-01-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1515/nanofab-2015-0003","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"67056605","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Identifying the crossover between growth regimes via in-situ conductance measurements in focused electron beam induced deposition 通过原位电导测量在聚焦电子束诱导沉积中识别生长机制之间的交叉
IF 2.9 Q3 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2014-12-15 DOI: 10.2478/nanofab-2014-0009
M. Winhold, P. Weirich, C. Schwalb, M. Huth
Abstract Focused electron beam induced deposition presents a promising technique for the fabrication of nanostructures. However, due to the dissociation of mostly organometallic precursor molecules employed for the deposition process, prepared nanostructures contain organic residues leading to rather low conductance of the deposits. Post-growth treatment of the structures by electron irradiation or in reactive atmospheres at elevated temperatures can be applied to purify the samples. Recently, an in-situ conductance optimization process involving evolutionary genetic algorithm techniques has been introduced leading to an increase of conductance by one order of magnitude for tungsten-based deposits using the precursor W(CO)6. This method even allows for the optimization of conductance of nano-structures for which post-growth treatment is not possible or desirable. However, the mechanisms responsible for the observed enhancement have not been studied in depth. In this work, we identified the dwell-time dependent change of conductivity of the samples to be the major contributor to the change of conductance. Specifically, the chemical composition drastically changes with a variation of dwelltime resulting in an increase of the metal content by 15 at% for short dwell-times. The relative change of growth rate amounts to less than 25 % and has a negligible influence on conductance. We anticipate the in-situ genetic algorithm optimization procedure to be of high relevance for new developments regarding binary or ternary systems prepared by focused electron or ion beam induced deposition.
聚焦电子束诱导沉积是一种很有前途的纳米结构制备技术。然而,由于大多数用于沉积过程的有机金属前体分子的解离,制备的纳米结构含有有机残留物,导致沉积物的电导率很低。通过电子辐照或在高温反应气氛中对结构进行生长后处理可用于纯化样品。最近,引入了一种基于进化遗传算法的原位电导优化方法,该方法可以将钨基沉积层的电导提高一个数量级,并使用W(CO)6作为前驱体。这种方法甚至可以优化纳米结构的电导,而这种纳米结构的电导是不可能或不需要生长后处理的。然而,造成观测到的增强的机制尚未得到深入研究。在这项工作中,我们确定了样品电导率的驻留时间依赖性变化是电导率变化的主要贡献者。具体地说,化学成分随着停留时间的变化而急剧变化,导致金属含量在短停留时间内增加15%。生长速率的相对变化量小于25%,对电导的影响可以忽略不计。我们预计原位遗传算法优化程序将与聚焦电子或离子束诱导沉积制备的二元或三元体系的新发展高度相关。
{"title":"Identifying the crossover between growth regimes via in-situ conductance measurements in focused electron beam induced deposition","authors":"M. Winhold, P. Weirich, C. Schwalb, M. Huth","doi":"10.2478/nanofab-2014-0009","DOIUrl":"https://doi.org/10.2478/nanofab-2014-0009","url":null,"abstract":"Abstract Focused electron beam induced deposition presents a promising technique for the fabrication of nanostructures. However, due to the dissociation of mostly organometallic precursor molecules employed for the deposition process, prepared nanostructures contain organic residues leading to rather low conductance of the deposits. Post-growth treatment of the structures by electron irradiation or in reactive atmospheres at elevated temperatures can be applied to purify the samples. Recently, an in-situ conductance optimization process involving evolutionary genetic algorithm techniques has been introduced leading to an increase of conductance by one order of magnitude for tungsten-based deposits using the precursor W(CO)6. This method even allows for the optimization of conductance of nano-structures for which post-growth treatment is not possible or desirable. However, the mechanisms responsible for the observed enhancement have not been studied in depth. In this work, we identified the dwell-time dependent change of conductivity of the samples to be the major contributor to the change of conductance. Specifically, the chemical composition drastically changes with a variation of dwelltime resulting in an increase of the metal content by 15 at% for short dwell-times. The relative change of growth rate amounts to less than 25 % and has a negligible influence on conductance. We anticipate the in-situ genetic algorithm optimization procedure to be of high relevance for new developments regarding binary or ternary systems prepared by focused electron or ion beam induced deposition.","PeriodicalId":51992,"journal":{"name":"Nanofabrication","volume":"1 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.2478/nanofab-2014-0009","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"69237665","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Nanofabrication techniques of highly organized monolayers sandwiched between two electrodes for molecular electronics 分子电子学中夹在两个电极之间的高组织单层纳米制造技术
IF 2.9 Q3 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2014-12-15 DOI: 10.2478/nanofab-2014-0010
P. Cea, L. Ballesteros, S. Martín
Abstract It is expected that molecular electronics, i.e., the use of molecules as critical functional elements in electronic devices, will lead in the near future to an industrial exploitable novel technology, which will open new routes to high value-added electronic products. However, despite the enormous advances in this field several scientific and technological challenges should be surmounted before molecular electronics can be implemented in the market. Among these challenges are the fabrication of reliable, robust and uniform contacts between molecules and electrodes, the deposition of the second (top) contact electrode, and development of assembly strategies for precise placement of molecular materials within device structures. This review covers advances in nanofabrication techniques used for the assembly of monomolecular films onto conducting or semiconducting substrates as well as recent methods developed for the deposition of the top contact electrode highlighting the advantages and limitations of the several approaches used in the literature. This contribution also aims to define areas of outstanding challenges in the nanofabrication of monomolecular layers sandwiched between two electrodes and opportunities for future research and applications.
分子电子学,即利用分子作为电子器件中的关键功能元件,有望在不久的将来成为一种工业可开发的新技术,为高附加值电子产品开辟新的途径。然而,尽管在这一领域取得了巨大的进步,但在分子电子学在市场上实施之前,还需要克服一些科学和技术挑战。这些挑战包括在分子和电极之间制造可靠、坚固和均匀的接触,第二(顶部)接触电极的沉积,以及在器件结构中精确放置分子材料的组装策略的开发。这篇综述涵盖了用于在导电或半导体衬底上组装单分子薄膜的纳米制造技术的进展,以及最近开发的用于沉积顶部接触电极的方法,突出了文献中使用的几种方法的优点和局限性。这一贡献还旨在定义夹在两个电极之间的单分子层纳米制造的突出挑战领域,以及未来研究和应用的机会。
{"title":"Nanofabrication techniques of highly organized monolayers sandwiched between two electrodes for molecular electronics","authors":"P. Cea, L. Ballesteros, S. Martín","doi":"10.2478/nanofab-2014-0010","DOIUrl":"https://doi.org/10.2478/nanofab-2014-0010","url":null,"abstract":"Abstract It is expected that molecular electronics, i.e., the use of molecules as critical functional elements in electronic devices, will lead in the near future to an industrial exploitable novel technology, which will open new routes to high value-added electronic products. However, despite the enormous advances in this field several scientific and technological challenges should be surmounted before molecular electronics can be implemented in the market. Among these challenges are the fabrication of reliable, robust and uniform contacts between molecules and electrodes, the deposition of the second (top) contact electrode, and development of assembly strategies for precise placement of molecular materials within device structures. This review covers advances in nanofabrication techniques used for the assembly of monomolecular films onto conducting or semiconducting substrates as well as recent methods developed for the deposition of the top contact electrode highlighting the advantages and limitations of the several approaches used in the literature. This contribution also aims to define areas of outstanding challenges in the nanofabrication of monomolecular layers sandwiched between two electrodes and opportunities for future research and applications.","PeriodicalId":51992,"journal":{"name":"Nanofabrication","volume":"1 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2014-12-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.2478/nanofab-2014-0010","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"69237676","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 14
Magnetic properties of cobalt microwires measured by piezoresistive cantilever magnetometry 用压阻式悬臂磁强计测量钴微细线的磁性能
IF 2.9 Q3 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2014-09-19 DOI: 10.2478/nanofab-2014-0008
G. Tosolini, J. Michalik, R. Córdoba, J. D. de Teresa, F. Pérez-Murano, J. Bausells
Abstract We present the magnetic characterization of cobalt wires grown by focused electron beam-induced deposition (FEBID) and studied using static piezoresistive cantilever magnetometry. We have used previously developed high force sensitive submicron-thick silicon piezoresistive cantilevers. High quality polycrystalline cobalt microwires have been grown by FEBID onto the free end of the cantilevers using dual beam equipment. In the presence of an external magnetic field, the magnetic cobalt wires become magnetized, which leads to the magnetic field dependent static deflection of the cantilevers. We show that the piezoresistive signal from the cantilevers, corresponding to a maximum force of about 1 nN, can be measured as a function of the applied magnetic field with a good signal to noise ratio at room temperature. The results highlight the flexibility of the FEBID technique for the growth of magnetic structures on specific substrates, in this case piezoresistive cantilevers.
摘要本文介绍了聚焦电子束诱导沉积(FEBID)生长的钴丝的磁性特征,并利用静态压阻悬臂式磁强计对其进行了研究。我们已经使用了先前开发的高力敏亚微米厚硅压阻悬臂梁。利用双梁设备在悬臂梁的自由端生长出高质量的多晶钴微丝。在存在外部磁场的情况下,磁性钴线被磁化,这导致了依赖于磁场的悬臂梁的静态偏转。我们证明了悬臂梁的压阻信号,对应于大约1nn的最大力,可以作为外加磁场的函数来测量,在室温下具有良好的信噪比。结果突出了FEBID技术在特定基板上生长磁性结构的灵活性,在这种情况下是压阻悬臂。
{"title":"Magnetic properties of cobalt microwires measured by piezoresistive cantilever magnetometry","authors":"G. Tosolini, J. Michalik, R. Córdoba, J. D. de Teresa, F. Pérez-Murano, J. Bausells","doi":"10.2478/nanofab-2014-0008","DOIUrl":"https://doi.org/10.2478/nanofab-2014-0008","url":null,"abstract":"Abstract We present the magnetic characterization of cobalt wires grown by focused electron beam-induced deposition (FEBID) and studied using static piezoresistive cantilever magnetometry. We have used previously developed high force sensitive submicron-thick silicon piezoresistive cantilevers. High quality polycrystalline cobalt microwires have been grown by FEBID onto the free end of the cantilevers using dual beam equipment. In the presence of an external magnetic field, the magnetic cobalt wires become magnetized, which leads to the magnetic field dependent static deflection of the cantilevers. We show that the piezoresistive signal from the cantilevers, corresponding to a maximum force of about 1 nN, can be measured as a function of the applied magnetic field with a good signal to noise ratio at room temperature. The results highlight the flexibility of the FEBID technique for the growth of magnetic structures on specific substrates, in this case piezoresistive cantilevers.","PeriodicalId":51992,"journal":{"name":"Nanofabrication","volume":"1 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2014-09-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.2478/nanofab-2014-0008","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"69237624","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Practical precursor aspects for electron beam induced deposition 电子束诱导沉积的实用前驱体方面
IF 2.9 Q3 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2014-08-07 DOI: 10.2478/nanofab-2014-0007
J. Mulders
Abstract The purity of a structure made with electron beam induced deposition (EBID) is a the major concern when creating micro and nano-scale functionalities, for example for rapid prototyping. Substantial research focuses on the improvements of the purity using chemical vapor deposition (CVD) based precursors. However, from a practical point of view, many other aspects of a precursor are very relevant in the design of a process and the actual use of a tool for EBID. To a large extent, these precursorrelated characteristics will determine whether or not a precursor can successfully be applied. Some of these characteristics include: vapor pressure range, transition behavior, chemical stability, pyrolitic thresholds, release of corrosive ligands during deposition, toxicity, commercial availability, compatibility with the instrument and operator safety. These characteristic are discussed in more detail here in order to understand what an ideal EBID precursor may be. Although some parameters such as toxicity or flammability seem less important, in practice they can be a road block for application unless the main instrument, such as a regular scanning electron microscope (SEM), is adapted accordingly.
摘要电子束诱导沉积(EBID)结构的纯度是创建微纳米级功能时的主要关注点,例如用于快速成型。大量的研究集中在利用化学气相沉积(CVD)为基础的前驱体来提高纯度。然而,从实际的角度来看,前体的许多其他方面在工艺设计和EBID工具的实际使用中是非常相关的。在很大程度上,这些与前体相关的特性将决定前体能否成功应用。这些特性包括:蒸汽压范围、转变行为、化学稳定性、火成岩阈值、沉积过程中腐蚀性配体的释放、毒性、商业可用性、与仪器的兼容性和操作人员的安全性。为了了解理想的EBID前体可能是什么,这里将更详细地讨论这些特性。尽管一些参数,如毒性或可燃性似乎不太重要,但在实践中,它们可能成为应用的障碍,除非对主要仪器,如常规扫描电子显微镜(SEM)进行相应的调整。
{"title":"Practical precursor aspects for electron beam induced deposition","authors":"J. Mulders","doi":"10.2478/nanofab-2014-0007","DOIUrl":"https://doi.org/10.2478/nanofab-2014-0007","url":null,"abstract":"Abstract The purity of a structure made with electron beam induced deposition (EBID) is a the major concern when creating micro and nano-scale functionalities, for example for rapid prototyping. Substantial research focuses on the improvements of the purity using chemical vapor deposition (CVD) based precursors. However, from a practical point of view, many other aspects of a precursor are very relevant in the design of a process and the actual use of a tool for EBID. To a large extent, these precursorrelated characteristics will determine whether or not a precursor can successfully be applied. Some of these characteristics include: vapor pressure range, transition behavior, chemical stability, pyrolitic thresholds, release of corrosive ligands during deposition, toxicity, commercial availability, compatibility with the instrument and operator safety. These characteristic are discussed in more detail here in order to understand what an ideal EBID precursor may be. Although some parameters such as toxicity or flammability seem less important, in practice they can be a road block for application unless the main instrument, such as a regular scanning electron microscope (SEM), is adapted accordingly.","PeriodicalId":51992,"journal":{"name":"Nanofabrication","volume":"1 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2014-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.2478/nanofab-2014-0007","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"69237614","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 16
Focused Ion Beam Processing of Superconducting Junctions and SQUID Based Devices 聚焦离子束处理超导结和基于SQUID的器件
IF 2.9 Q3 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2014-07-07 DOI: 10.2478/nanofab-2014-0005
D. Cox, J. Gallop, L. Hao
Abstract Focused ion beam (FIB) has found a steady and growing use as a tool for fabrication, particularly in the length-scale of micrometres down to nanometres. Traditionally more commonly used for materials characterisation, FIB is continually finding new research areas in a growing number of laboratories. For example, over the last ten years the number of FIB instruments in the U.K. alone has gone from single figures, largely supplied by a single manufacturer, to many tens of instruments supplied by several competing manufacturers. Although the smaller of the two research areas, FIB fabrication has found itself to be incredibly powerful in the modification and fabrication of devices for all kinds of experimentation. Here we report our use of FIB in the production of Superconducting QUantum Interference Devices (SQUIDs) and other closely related devices for metrological applications. This is an area ideally suited to FIB fabrication as the required precision is very high, the number of required devices is relatively low, but the flexibility of using FIB means that a large range of smallbatch, and often unique, devices can be constructed quickly and with very short lead times.
聚焦离子束(FIB)作为一种制造工具,特别是在微米到纳米的长度尺度上,已经得到了稳定和日益增长的应用。传统上更常用于材料表征,FIB在越来越多的实验室中不断寻找新的研究领域。例如,在过去十年中,仅在英国,FIB仪器的数量就从主要由一家制造商提供的个位数,发展到由几家相互竞争的制造商提供的数十种仪器。虽然这是两个研究领域中较小的一个,但FIB制造已经发现自己在各种实验设备的修改和制造方面具有难以置信的强大功能。在这里,我们报告了我们在生产超导量子干涉器件(squid)和其他密切相关的计量应用器件中使用FIB。这是一个非常适合FIB制造的领域,因为所需的精度非常高,所需设备的数量相对较低,但使用FIB的灵活性意味着大范围的小批量,通常是独特的,设备可以在很短的交货时间内快速构建。
{"title":"Focused Ion Beam Processing of Superconducting Junctions and SQUID Based Devices","authors":"D. Cox, J. Gallop, L. Hao","doi":"10.2478/nanofab-2014-0005","DOIUrl":"https://doi.org/10.2478/nanofab-2014-0005","url":null,"abstract":"Abstract Focused ion beam (FIB) has found a steady and growing use as a tool for fabrication, particularly in the length-scale of micrometres down to nanometres. Traditionally more commonly used for materials characterisation, FIB is continually finding new research areas in a growing number of laboratories. For example, over the last ten years the number of FIB instruments in the U.K. alone has gone from single figures, largely supplied by a single manufacturer, to many tens of instruments supplied by several competing manufacturers. Although the smaller of the two research areas, FIB fabrication has found itself to be incredibly powerful in the modification and fabrication of devices for all kinds of experimentation. Here we report our use of FIB in the production of Superconducting QUantum Interference Devices (SQUIDs) and other closely related devices for metrological applications. This is an area ideally suited to FIB fabrication as the required precision is very high, the number of required devices is relatively low, but the flexibility of using FIB means that a large range of smallbatch, and often unique, devices can be constructed quickly and with very short lead times.","PeriodicalId":51992,"journal":{"name":"Nanofabrication","volume":"1 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2014-07-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.2478/nanofab-2014-0005","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"69237563","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Mechanical magnetometry of Cobalt nanospheres deposited by focused electron beam at the tip of ultra-soft cantilevers 超软悬臂顶端聚焦电子束沉积钴纳米球的机械磁强计
IF 2.9 Q3 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2014-04-02 DOI: 10.2478/nanofab-2014-0006
Hugo Lavenant, V. Naletov, O. Klein, G. de Loubens, L. Casado, J. D. de Teresa
Abstract Using focused-electron-beam-induced deposition, Cobalt magnetic nanospheres with diameter ranging between 100 nm and 300 nm are grown at the tip of ultra-soft cantilevers. By monitoring the mechanical resonance frequency of the cantilever as a function of the applied magnetic field, the hysteresis curve of these individual nanospheres are measured. This enables the evaluation of their saturation magnetization, found to be around 430 emu/cm3 independent of the size of the particle, and to infer that the magnetic vortex state is the equilibrium configuration of these nanospheres at remanence. SEM image of a 200 nm Co nanosphere grown at the tip of an ultra-soft cantilever by focus electron beam induced deposition.
采用聚焦电子束诱导沉积的方法,在超软悬臂梁顶端生长出直径在100 ~ 300 nm之间的钴磁性纳米球。通过监测悬臂梁的机械共振频率随外加磁场的变化,测量了单个纳米球的磁滞曲线。这使得他们的饱和磁化的评估,发现大约430 emu/cm3独立于粒子的大小,并推断磁涡流状态是这些纳米球的剩余物的平衡配置。聚焦电子束诱导沉积在超软悬臂顶端生长的200 nm Co纳米球的SEM图像。
{"title":"Mechanical magnetometry of Cobalt nanospheres deposited by focused electron beam at the tip of ultra-soft cantilevers","authors":"Hugo Lavenant, V. Naletov, O. Klein, G. de Loubens, L. Casado, J. D. de Teresa","doi":"10.2478/nanofab-2014-0006","DOIUrl":"https://doi.org/10.2478/nanofab-2014-0006","url":null,"abstract":"Abstract Using focused-electron-beam-induced deposition, Cobalt magnetic nanospheres with diameter ranging between 100 nm and 300 nm are grown at the tip of ultra-soft cantilevers. By monitoring the mechanical resonance frequency of the cantilever as a function of the applied magnetic field, the hysteresis curve of these individual nanospheres are measured. This enables the evaluation of their saturation magnetization, found to be around 430 emu/cm3 independent of the size of the particle, and to infer that the magnetic vortex state is the equilibrium configuration of these nanospheres at remanence. SEM image of a 200 nm Co nanosphere grown at the tip of an ultra-soft cantilever by focus electron beam induced deposition.","PeriodicalId":51992,"journal":{"name":"Nanofabrication","volume":"1 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2014-04-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.2478/nanofab-2014-0006","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"69237606","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 25
FEBID fabrication and magnetic characterization of individual nano-scale and micro-scale Co structures 纳米级和微米级Co结构的FEBID制备和磁性表征
IF 2.9 Q3 NANOSCIENCE & NANOTECHNOLOGY Pub Date : 2014-01-01 DOI: 10.2478/nanofab-2014-0003
O. Idigoras, E. Nikulina, J. Porro, P. Vavassori, A. Chuvilin, A. Berger
Abstract This work gives an illustration of the viability of FEBID to fabricate magnetic nano- and micro-structures and it demonstrates that by means of a combination of MOKE microscopy and MFM, one is able to analyze the size and shape effects in individual magnetic cobalt structures. With the help of our magnetic and functional study, we are able to demonstrate that by using FEBID, cobalt of uniform thickness and magnetic response can be deposited over several micron-size areas, establishing a most crucial ingredient of reliable structure and device fabrication. Furthermore, we show the suitability of FEBID to fabricate functional and complex 3-dimensional magnetic structures. The issue of unintended secondary deposits in FEBID is discussed, and a Xe-ion milling posttreatment for its removal is proposed and demonstrated as a successful pathway towards the fabrication of functionally independent magnetic nano-structures.
摘要:本文论证了FEBID制备磁性纳米和微观结构的可行性,并证明了通过MOKE显微镜和MFM相结合的方法,可以分析单个磁性钴结构的尺寸和形状效应。在我们的磁性和功能性研究的帮助下,我们能够证明,通过使用FEBID,均匀厚度和磁响应的钴可以沉积在几个微米大小的区域,建立可靠结构和器件制造的最关键成分。此外,我们还证明了FEBID在制造功能复杂的三维磁性结构方面的适用性。讨论了FEBID中意外的二次沉积问题,并提出了一种去除其的xe离子铣削后处理方法,并证明了这是制造功能独立的磁性纳米结构的成功途径。
{"title":"FEBID fabrication and magnetic characterization of individual nano-scale and micro-scale Co structures","authors":"O. Idigoras, E. Nikulina, J. Porro, P. Vavassori, A. Chuvilin, A. Berger","doi":"10.2478/nanofab-2014-0003","DOIUrl":"https://doi.org/10.2478/nanofab-2014-0003","url":null,"abstract":"Abstract This work gives an illustration of the viability of FEBID to fabricate magnetic nano- and micro-structures and it demonstrates that by means of a combination of MOKE microscopy and MFM, one is able to analyze the size and shape effects in individual magnetic cobalt structures. With the help of our magnetic and functional study, we are able to demonstrate that by using FEBID, cobalt of uniform thickness and magnetic response can be deposited over several micron-size areas, establishing a most crucial ingredient of reliable structure and device fabrication. Furthermore, we show the suitability of FEBID to fabricate functional and complex 3-dimensional magnetic structures. The issue of unintended secondary deposits in FEBID is discussed, and a Xe-ion milling posttreatment for its removal is proposed and demonstrated as a successful pathway towards the fabrication of functionally independent magnetic nano-structures.","PeriodicalId":51992,"journal":{"name":"Nanofabrication","volume":"1 1","pages":""},"PeriodicalIF":2.9,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.2478/nanofab-2014-0003","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"69237547","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
期刊
Nanofabrication
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1