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Experimental Study of Uniaxial-Stress Effects on DC Characteristics of nMOSFETs 单轴应力对nmosfet直流特性影响的实验研究
Pub Date : 2010-05-18 DOI: 10.1109/TCAPT.2010.2045378
M. Koganemaru, T. Ikeda, N. Miyazaki, H. Tomokage
Stress-induced shifts of the direct current characteristics on n-type metal oxide semiconductor field effect transistors (nMOSFETs) were investigated experimentally. The stress sensitivities of nMOSFET characteristics were measured by the 4-point bending method, and the gate-length dependence of transconductance shifts caused by uniaxial stress was evaluated. As a result, it is shown that the gate-length dependence of transconductance shifts is attributed to parasitic resistance of the nMOSFETs. Also, this paper verified the electron-mobility model proposed in the previous study that includes stress effects in comparison with the experimental results. As a result, several improvements for the electron-mobility model are proposed in this paper. We describe the change of the conduction-band energy induced by the shear deformation of silicon. The shear deformation with a uniaxial stress along the direction of silicon should be considered in the change of the conduction-band energy.
对n型金属氧化物半导体场效应晶体管(nmosfet)直流特性的应力诱发位移进行了实验研究。采用4点弯曲法测量了nMOSFET特性的应力敏感性,并评估了单轴应力引起的跨导位移对栅极长度的依赖性。结果表明,跨导位移的栅极长度依赖于nmosfet的寄生电阻。同时,通过与实验结果的对比,验证了前人提出的包含应力效应的电子迁移率模型。因此,本文提出了对电子迁移率模型的若干改进。我们描述了硅的剪切变形引起的导带能量的变化。导带能量的变化应考虑沿硅方向单轴应力作用下的剪切变形。
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引用次数: 9
Evaluation of the Heat Transfer Coefficient in Microcircuits From the Frequency Analysis of the Thermal Transient Response 从热瞬态响应的频率分析评估微电路的传热系数
Pub Date : 2010-05-18 DOI: 10.1109/TCAPT.2010.2046326
T. Świa̧tczak, B. Vermeersch, G. De Mey, B. Więcek, J. Banaszczyk, M. Felczak
In this paper, it is outlined how thermal AC measurements can be carried out on a resistor deposited on an electronic substrate. The AC approach enables us to limit ourselves to phase measurements which can be carried out with a much higher precision than amplitude measurements. It will also be demonstrated how the phase measurements at a well-chosen frequency can be used to measure the heat transfer coefficient.
在本文中,概述了如何在沉积在电子衬底上的电阻器上进行热交流测量。交流方法使我们能够将自己限制在相位测量上,相位测量可以比幅度测量精度高得多。还将演示如何在选定的频率下进行相位测量以测量传热系数。
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引用次数: 10
Prediction of Electromigration Induced Voids and Time to Failure for Solder Joint of a Wafer Level Chip Scale Package 晶圆级晶片规模封装焊点电迁移诱导空洞及失效时间预测
Pub Date : 2010-05-10 DOI: 10.1109/TCAPT.2010.2042717
Y. Liu, Yuanxing Zhang, L. Liang
This paper proposes a new prediction method for electromigration (EM) induced void generation of solder bumps in a wafer level chip scale package. The methodology is developed based on discretized weighted residual method in a user-defined finite element analysis framework to solve the local ME governing equation with the variable of atomic concentration. The local solution of atomic concentration is incorporated in the multiphysics environment for electrical, thermal and stress in both sub-model and global model. The new method takes the advantage of solving the variable of atomic density, it avoids directly solving the divergences of the atomic flux, which includes the atomic density gradient items and is very hard and challenging to get the solution by traditional method. Comparison of the atomic density distributions with and without considering the atomic density gradient for representive nodes is investigated. The simulation results for voids and time to failure (TTF) are discussed and correlated with previous test results. Finally, the analysis of the impact of under ball metallurgy and solder bump geometry on the void generation and TTF is presented.
本文提出了一种新的预测晶圆级芯片封装中电迁移(EM)引起的焊料凸起空化的方法。在自定义有限元分析框架下,采用离散加权残差法求解以原子浓度为变量的局部ME控制方程。在子模型和全局模型中,原子浓度的局部解被纳入了电、热、应力的多物理场环境。该方法利用了求解原子密度变量的优势,避免了直接求解包含原子密度梯度项的原子通量散度,这是传统方法难以求解的。比较了考虑和不考虑代表性节点的原子密度梯度时的原子密度分布。讨论了孔隙度和失效时间的模拟结果,并与以往的试验结果进行了对比。最后,分析了球下冶金和凸点几何形状对空泡产生和热场的影响。
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引用次数: 19
Electro-Thermal Analysis of In-Plane Micropump 平面内微泵的电热分析
Pub Date : 2010-05-03 DOI: 10.1109/TCAPT.2010.2040737
S. Karajgikar, Smitha M. N. Rao, J. Sin, D. Agonafer, J. Chiao, D. Popa, H. Stephanou
This paper describes the modeling for a packaged in-plane micropump developed at the Automation and Robotics Research Institute, The University of Texas, Arlington, TX. Amongst the family of micro-electro-mechanical system (MEMS) devices, thermal actuators are important owing to their capability to deliver a large force and displacement. Due to fabrication and cost-savings advantages, these actuators are now commonly used in several applications, such as optical-communication switches, micro-assembly, and micro-positioners. The proposed micropump design is based on these actuators fabricated by a one-step deep reactive ion etching process and packaged for protection and appropriate thermal dissipation. In the current ongoing research, the thermal actuator forms an integral part of an in-plane micropump. The flow rate is controlled by the variations in actuator displacement and corresponding force generated. Flow rates of several micro-liters per minute can be obtained making this pump suitable for drug delivery applications. Actuation is caused by application of voltage and resulting joule heating effect of the MEMS chevron beams. This results in displacement of the beams (actuator) which is proportional to the difference in temperature. Some of the parameters governing the displacement include the applied voltage, resistivity of the device, substrate thickness, and air gap between the device and the substrate. In this paper, the proposed micro-pump was analyzed for its thermal performance, pumping force, and the corresponding flow rate. The analysis was performed at device, die, and package levels. Thermal analysis showed that there exists a linear relationship between the applied voltage and the resulting temperature. Maximum temperature was always noted at the center of the chevron beams. The analysis also showed that force generated by the thermal actuators mainly depends on the average temperature of the chevron beams. Maximum force of 3.73 mN was noted for the packaged micropump at 23 V. This corresponded to an average beam temperature of 453°C and a flow rate of 11.2 μl/min. Performance assessment of the pump showed that for every 5 kPa increase in backpressure, flow rate reduced approximately by 5%.
本文描述了德克萨斯州阿灵顿市德克萨斯大学自动化与机器人研究所开发的封装平面内微泵的建模。在微机电系统(MEMS)器件家族中,热致动器因其能够提供大的力和位移而非常重要。由于制造和节省成本的优势,这些执行器现在通常用于光通信开关,微组装和微定位器等几种应用中。提出的微泵设计是基于这些执行器,通过一步深反应离子蚀刻工艺制造,并封装保护和适当的散热。在目前正在进行的研究中,热致动器是平面内微泵的组成部分。流量由执行机构位移的变化和产生的相应力来控制。流速可达每分钟几微升,使该泵适用于药物输送应用。驱动是由施加电压和由此产生的MEMS v形光束的焦耳热效应引起的。这导致梁(致动器)的位移与温度的差异成正比。控制位移的一些参数包括施加的电压、器件的电阻率、衬底厚度以及器件和衬底之间的气隙。本文对所提出的微型泵的热性能、泵送力和相应的流量进行了分析。分析是在器件、芯片和封装级别进行的。热分析表明,施加的电压与产生的温度之间存在线性关系。最高温度总是记录在v形梁的中心。分析还表明,热致动器产生的力主要取决于槽型梁的平均温度。封装微泵在23 V时的最大作用力为3.73 mN。平均光束温度为453℃,流速为11.2 μl/min。泵的性能评估表明,背压每增加5kpa,流量减少约5%。
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引用次数: 14
Parametric Design and Numerical Simulation of the Axial-Flow Fan for Electronic Devices 电子设备轴流风机参数化设计与数值模拟
Pub Date : 2010-05-03 DOI: 10.1109/TCAPT.2010.2040069
Zhou Jian-hui, Yang Chun-xin
The procedure of the parametric design and numerical simulation is developed to enhance greatly fan design efficiency, which can generate high quality hexahedral mesh automatically. The numerical simulation can be performed automatically and the aerodynamic performance of the fan can be characterized without using any other tools. The developed procedure can be employed to the optimization design of the fan. Based on the procedure of the parametric design and numerical simulation, the influences of various design parameters on the aerodynamic performance of the fan are investigated deeply. Such influences can provide physical insight into the flow characteristics of the fan. The multiparameter constrained optimization procedure based on the combination algorithms of design of experiments, response surface models, genetic algorithm, and mixed integer optimization, is carried out aiming at the fan to maximize its coefficient of flow rate over the operating range rather than at a single operating point with parallel computational fluid dynamics. Results show that the aerodynamic average flow rate coefficient of the optimal fan is increased by 14.5% compared to the initially designed fan. This paper demonstrates the potential of the proposed procedure to be applied widely in industry for the purpose of improving work efficiency among engineers.
开发了参数化设计和数值模拟的方法,大大提高了风机的设计效率,可自动生成高质量的六面体网格。数值模拟可以自动进行,无需使用任何其他工具即可对风机的气动性能进行表征。所开发的程序可用于风机的优化设计。在参数化设计和数值模拟的基础上,深入研究了各种设计参数对风机气动性能的影响。这种影响可以提供对风机流动特性的物理洞察。基于实验设计、响应面模型、遗传算法和混合整数优化相结合的多参数约束优化过程,以风机在整个工况范围内而不是在单个工况点上的流量系数最大化为目标,采用并行计算流体力学方法进行了多参数约束优化。结果表明,优化后的风机气动平均流量系数比初始设计的风机提高了14.5%。本文论证了该程序在工业中广泛应用的潜力,以提高工程师的工作效率。
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引用次数: 15
Integrated Design and Manufacturing of Flat Miniature Heat Pipes Using Printed Circuit Board Technology 平板微型热管的印刷电路板集成设计与制造
Pub Date : 2010-05-03 DOI: 10.1109/TCAPT.2010.2041929
W. Wits, T. Vaneker
A novel, integrated approach in thermal management of electronic products, based on two-phase cooling, is presented. A flat miniature heat pipe, integrated inside the laminated structure of a printed circuit board (PCB) has been developed, based on mainstream PCB fabrication processes. Hot spots on the PCB, caused by heat dissipating components, can be cooled with relatively small temperature gradients across the board. An analytical model is presented to predict the behavior of the embedded heat pipe for various geometries, orientations, and operating temperatures. Experimental verification has shown successful heat pipe operation. The heat pipe exhibited a measured equivalent thermal conductivity more than seven times higher than solid copper. Low-thermal resistance values establish this concept as a promising thermal management solution for future electronic products. As mainstream manufacturing techniques are applied, thin PCBs with integrated cooling support can be produced at low-cost.
提出了一种基于两相冷却的电子产品热管理新方法。基于主流印刷电路板制造工艺,研制了一种集成在印刷电路板层合结构内部的扁平微型热管。由散热元件引起的PCB上的热点可以用相对较小的温度梯度来冷却。提出了一个分析模型来预测不同几何形状、方向和工作温度下嵌入式热管的行为。实验验证表明热管运行成功。热管的测量等效导热系数比固体铜高7倍以上。低热阻值确立了这一概念作为一个有前途的热管理解决方案为未来的电子产品。随着主流制造技术的应用,集成冷却支持的薄pcb可以以低成本生产。
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引用次数: 25
On the Heat Transfer Characteristics of Heat Sinks: With and Without Vortex Generators 带与不带涡发生器的散热器传热特性研究
Pub Date : 2010-05-03 DOI: 10.1109/TCAPT.2010.2044412
Kai-Shing Yang, Jhih-Hao Jhong, Yur-Tsai Lin, K. Chien, Chi-Chuan Wang
This paper examines the airside performance of heat sinks having fin patterns of delta, semi-circular vortex generators, plain fin and their combinations. Test results indicate that the heat transfer performance is strongly related to the developing and fully developed flow characteristics. The augmentations via vortex generator are relatively effective when the flow is in the developing region whereas they become quite less effective in the fully developed region. This is especially pronounced when the fin pitch is small or operated at a lower frontal velocity. Actually, the plain fin geometry outperforms most of the fin patterns at the fully developed region. This is because a close spacing prevented the formation of vortex, and the presence of interrupted surface may also suffer from the degradation by constriction of conduction path. The results suggest that the vortex generators operated at a higher frontal velocity and at a larger fin pitch are more beneficial than that of plain fin geometry. The semi-circular vortex generator possesses the highest heat transfer coefficients and pressure drops at developing region, suggesting the mechanism of blockage of conduction path cannot be overlooked. The performance of dense or loose vortex generator is moderate either in a developing or fully developed region. In association with the VG-1 criteria (same pumping power and same heat transfer capacity), the asymmetric design (VG+plain) reveals the best results. The design could reduce 31.1% required heat dissipation area at a frontal velocity of 5 m/s within a developing region. Yet, it is still applicable in a fully developed region with an area reduction of 1.8-11.5% at a frontal velocity 3-5 m/s.
本文研究了三角翅片、半圆形涡发生器、平面翅片及其组合散热片的空侧性能。试验结果表明,换热性能与流动特性的发展和充分发展密切相关。通过涡发生器进行的增流在气流发育区时相对有效,而在气流完全发育区时效果较差。当尾翼俯仰较小或在较低的前缘速度下操作时,这一点尤其明显。实际上,在经济完全发达的地区,平面的鳍形结构比大多数鳍形结构都要好。这是因为较近的间距阻止了涡流的形成,并且由于传导路径的收缩,中断表面的存在也会导致传导路径的退化。结果表明,在较高的前缘速度和较大的桨距下工作的涡发生器比在平面桨距下工作的涡发生器更有利。半圆形涡发生器在发展区域具有最高的换热系数和压降,表明传导路径的阻塞机制不容忽视。不论是在欠发达地区还是在完全发达地区,密集涡发生器和松散涡发生器的性能都是中等的。与VG-1标准(相同的泵送功率和相同的传热能力)相关联,不对称设计(VG+平原)揭示了最好的结果。在发展中地区,当锋面速度为5 m/s时,该设计可使所需散热面积减少31.1%。在锋面速度为3 ~ 5 m/s时,该方法在完全发达地区仍然适用,面积减小1.8 ~ 11.5%。
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引用次数: 30
The Thermal Stability of Alkanethiol Self-Assembled Monolayers on Copper for Fluxless Soldering Applications 铜表面烷硫醇自组装单层的热稳定性研究
Pub Date : 2010-05-03 DOI: 10.1109/TCAPT.2010.2041779
S. Ebbens, D. Hutt, Changqing Liu
The ability of alkanethiol monolayers deposited on copper to prevent surface oxidation has suggested their application as preservatives for fluxless soldering. However, the utility of such coatings for this purpose will critically depend on their ability to continue to preserve the substrate during exposure to elevated temperatures throughout the electronics manufacturing process. Consequently, the aim of this paper is to systematically determine the effect of storage temperature and duration on the ability of alkanethiol coated copper samples to undergo fluxless soldering. Similarly, the effect of pre-heating copper immediately prior to soldering is also investigated. The effect of reducing atmospheric oxygen concentration during storage and soldering is also considered as a potential route to improve the thermal resilience of the coatings. Parallel to ascertaining these industrially relevant performance parameters, a quantitative correlation between surface chemistry and solder wetting is established, and the temperature dependence of the kinetics of surface oxidation through an alkanethiol barrier layer is discussed.
沉积在铜上的烷硫醇单分子层防止表面氧化的能力表明它们可以作为无焊剂焊接的防腐剂。然而,这种涂层在这方面的效用将主要取决于它们在整个电子制造过程中暴露在高温下继续保护基底的能力。因此,本文的目的是系统地确定储存温度和持续时间对烷硫醇涂层铜样品进行无焊剂焊接的能力的影响。同样,在焊接之前立即预热铜的效果也进行了研究。在储存和焊接过程中降低大气氧浓度的影响也被认为是提高涂层热弹性的潜在途径。在确定这些工业相关性能参数的同时,建立了表面化学和焊料润湿之间的定量关联,并讨论了通过烷硫醇阻挡层的表面氧化动力学的温度依赖性。
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引用次数: 8
On the Conduction and Convection Heat Transfer From Lightweight Advanced Heat Sinks 轻型先进散热器的传导和对流传热研究
Pub Date : 2010-04-26 DOI: 10.1109/TCAPT.2009.2039794
M. Dogruoz, M. Arik
Seamless advancements in the electronics industry lead to high heat fluxes from very limited thermal real estates. Use of natural convection air cooling is of interest to meet some of the low flux cooling needs, while active cooling techniques via liquid or forced convection are the methods of choice. In natural convection heat transfer applications, the components used for cooling may represent a significant portion of the overall weight of the system. Consequently, advanced materials are of interest in such applications, as they may substantially reduce the total size and weight of the system. Many of these advanced materials have anisotropic thermophysical properties, hence the control of thermal conductivity is crucial. This paper is motivated to address the lack of understanding of the use of anisotropic advanced materials in natural convection environments. Numerical simulations are carried out to test the performance of heat sinks made of such materials and comparisons are made with the heat sinks of traditional engineering materials under the same conditions. The results demonstrate that the total weight of the system may be reduced drastically with the use of advanced materials relative to the most commonly used heat sink materials at the same thermal performance. A figure of merit (FOM) is proposed to compare the thermal performance of different heat sinks. Total resistance, conduction and convection resistances, and performance-related FOM values for each heat sink are presented. It is shown that the conduction thermal resistance is dominant at lower fin thicknesses for sparse heat sinks while it is negligible for dense heat sinks. Pyrolytic graphite-based heat sinks demonstrate the best thermal performance, while carbon-foam heat sinks produce the highest FOM values due to the material's low density.
电子工业的无缝进步导致非常有限的热房地产产生高热流。使用自然对流空气冷却是有兴趣的,以满足一些低通量冷却需求,而主动冷却技术,通过液体或强制对流是选择的方法。在自然对流传热应用中,用于冷却的组件可能占系统总重量的很大一部分。因此,先进材料在这种应用中很有意义,因为它们可以大大减小系统的总尺寸和重量。许多先进的材料具有各向异性的热物理性质,因此热导率的控制至关重要。本文的动机是解决在自然对流环境中使用各向异性先进材料缺乏理解的问题。通过数值模拟测试了该材料散热器的性能,并在相同条件下与传统工程材料散热器进行了比较。结果表明,在相同的热性能下,与最常用的散热器材料相比,使用先进材料可以大大减轻系统的总重量。提出了一种比较不同散热器热性能的优值。给出了每个散热器的总电阻、传导和对流电阻以及与性能相关的FOM值。研究结果表明,对于稀疏型散热器,传导热阻在低翅片厚度处占主导地位,而对于密集型散热器,传导热阻可以忽略不计。热解石墨基散热器表现出最佳的热性能,而碳泡沫散热器由于材料的低密度而产生最高的FOM值。
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引用次数: 20
Heat Transfer Analysis in a Rectangular Duct Without and With Cross-Flow and an Impinging Synthetic Jet 无和有横流及碰撞合成射流矩形管道的传热分析
Pub Date : 2010-03-25 DOI: 10.1109/TCAPT.2010.2042716
M. Chaudhari, B. Puranik, A. Agrawal
A synthetic jet is a zero-net-mass-flux device, which synthesizes stagnant air to form a jet, and is potentially useful for cooling. Due to the inherent suction and ejection processes in a synthetic jet, its utility in a confined enclosure is not obvious. The synthetic jet impingement heat transfer characteristics inside a rectangular duct are studied in this paper. In addition, the effect of cross-flow created using either fans or another synthetic jet on its heat dissipation capability is examined. Experiments are conducted for different jet Reynolds numbers (Re), in the range of 950-4000, at different offset positions of the synthetic jet with respect to a heated block flush mounted on one surface of the duct. The height of the duct is the same (25 mm) for all measurements while the width is varied between 110 mm and 330 mm in order to examine the effect of confinement on the heat transfer coefficient. The change in the width of the duct is found to have a negligible effect on heat transfer. The heat transfer coefficient is found to be more with synthetic jet direct impingement (150 W/m2 · K) than with combined flow (both impingement and cross-flow) (134 W/m2 · K) or with only cross-flow (45 W/m2 · K) in the duct. The offset of the synthetic jet from the center of the heated block is found to drastically reduce the heat transfer. These results are expected to be useful for designing synthetic jet-based cooling solutions.
合成射流是一种零净质量通量装置,它将停滞的空气合成成射流,并可能用于冷却。由于合成射流固有的吸射过程,其在密闭环境中的应用并不明显。研究了矩形管道内合成射流冲击换热特性。此外,还研究了风扇或其他合成射流产生的交叉流对其散热能力的影响。实验对不同的射流雷诺数(Re),在950-4000范围内,在合成射流的不同偏移位置相对于安装在管道表面的加热块冲洗。在所有测量中,管道的高度是相同的(25毫米),而宽度在110毫米到330毫米之间变化,以便检查约束对传热系数的影响。发现管道宽度的变化对传热的影响可以忽略不计。综合射流直接冲击的换热系数(150 W/m2·K)高于混合流动(冲击和横流)(134 W/m2·K)或仅横流(45 W/m2·K)的换热系数。合成射流与受热块中心的偏移量大大减少了传热。这些结果有望为设计基于射流的合成冷却解决方案提供帮助。
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引用次数: 22
期刊
IEEE Transactions on Components and Packaging Technologies
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