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Design, modeling, and experimental verification of reversed exponentially tapered multimodal piezoelectric energy harvester from harmonic vibrations for autonomous sensor systems 反指数锥形多模态压电能量采集器的设计、建模和实验验证,用于自主传感器系统的谐波振动
IF 3.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-05-02 DOI: 10.1007/s10999-023-09657-6
V. Raja, M. Umapathy, G. Uma, R. Usharani

Energy harvesting from multiple modes using piezoelectricity ensures the harvesting of energy from the varied ambient, wideband vibration sources for wireless autonomous sensor systems. In the reported studies, a piezoelectric energy harvester (PEH) with high strain concentration and multimodal characteristics plays an important role in enhancing the harvester's vibration amplitude, performance, and frequency bandwidth. This paper proposes a novel multimodal piezoelectric energy harvester by taking advantage of multimodal techniques consisting of a reversed exponentially tapered beam (Primary beam) and six branched beams (Secondary beam) attached to the primary beam’s free end with a proper flange. This design provides wideband with closely placed vibration modes while the reversed exponentially tapered beam attached to the secondary beams configuration provides higher strain distribution and hence improved harvested power. The harvester is subjected to continuous transverse vibrations due to vertical sinusoidal base excitation of varying frequencies and acceleration ranges. As a result, the primary beam with the piezoelectric patch continually deforms and generates electrical energy. The harvester’s theoretical model was developed and derived from the Euler–Bernoulli beam theory. The proposed harvester was fabricated, and its performance evaluated through experimentation at frequencies ranging from 8 to 30 Hz. Experimental results and numerical simulations using COMSOL Multiphysics confirmed the accuracy of the proposed theoretical model. As ambient vibrations were available in a band of frequencies, the proposed multimodal harvester had the potential to capture energy from wideband ambient vibration sources and hence was advantageous over conventional single-mode harvesters in sourcing low-power autonomous sensors. An energy management system designed after investigating the charging behavior of the capacitor with the harvester revealed that the proposed harvester was suitable for source wireless autonomous sensor systems.

利用压电从多种模式收集能量,确保从各种环境中收集能量,无线自主传感器系统的宽带振动源。压电能量采集器(PEH)具有高应变集中和多模态特性,对提高能量采集器的振幅、性能和频率带宽具有重要作用。利用多模态技术,提出了一种新型的多模态压电能量收集器,该收集器由一个反向指数锥形梁(主梁)和六个分支梁(次梁)组成,该分支梁以适当的法兰连接在主梁的自由端。这种设计提供了宽带和紧密放置的振动模式,而连接到二次梁配置的反向指数锥形梁提供了更高的应变分布,从而提高了收获功率。由于不同频率和加速度范围的垂直正弦基础激励,收割机受到连续的横向振动。因此,带有压电贴片的主梁不断变形并产生电能。收割机的理论模型是由欧拉-伯努利光束理论发展而来的。所提出的收割机制造,并通过实验评估其性能在8至30赫兹的频率范围内。实验结果和COMSOL Multiphysics的数值模拟证实了理论模型的准确性。由于环境振动在一个频带内可用,因此所提出的多模态收割机有可能从宽带环境振动源捕获能量,因此在采购低功耗自主传感器方面比传统的单模收割机更具优势。在研究了电容器与收集器的充电行为后,设计了能量管理系统,表明所提出的收集器适用于源无线自主传感器系统。
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引用次数: 0
Damage evolution of the coating/substrate system TiN/X2CrNi18-9 under high indentation loads: experimental and numerical study 高压痕载荷下涂层/基底系统 TiN/X2CrNi18-9 的损伤演变:实验和数值研究
IF 2.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-04-24 DOI: 10.1007/s10999-023-09658-5
Amir Bahri, Manel Ellouz, Michaela Klöcker, Khaled Elleuch, Thomas Kordisch

Hard coatings, in particular TiN, are widely used as coatings for cutting tools and in the agri-food industry. In the literature, however, few characterizations of hard coatings can be found which define the minimum applied load when the coating starts to fail. In the present study TiN coating was deposited on stainless steel X2CrNi18-9. Vickers and Brinell indentation tests with a wide load range were performed. The main results revealed that the increase of the applied load in Vickers and Brinell indentation influenced the coating and coating/substrate damage evolution. SEM investigation of the Vickers indentation area shows five modes of damage: inclined cracks, radial cracks, lateral cracks, edge cracks, and shear steps. Each damage mode occurs at a specific load range. Parallel cracks already appeared at the edges of the indents at the lowest load of 2 N. For Brinell indentation, cracks start in the coating only at loads higher than F = 307 N. The SEM examinations present damage modes such as circumferential cracks in the border and additional circular cracks in the center of the indent, creating a crack network. Numerical simulations of Brinell indentation were carried out in order to determine the stress distribution in the indent. The comparison of the numerical simulation results with the experimental findings revealed that the coating started to fail at a stress range above 5735 MPa which corresponds to a normal load range of higher than 307 N in Brinell indentation tests. At a load of 613 N cracks were observed.

硬涂层,特别是 TiN,被广泛用作切削工具和农业食品工业的涂层。然而,在文献中,很少有关于硬涂层特性的研究能确定涂层开始失效时的最小外加载荷。本研究在不锈钢 X2CrNi18-9 上沉积了 TiN 涂层。进行了大载荷范围的维氏和布氏压痕测试。主要结果表明,维氏硬度和布氏压痕中施加载荷的增加会影响涂层和涂层/基体损伤的演变。对维氏硬度压痕区域的扫描电子显微镜调查显示了五种损坏模式:倾斜裂纹、径向裂纹、横向裂纹、边缘裂纹和剪切阶梯。每种损坏模式都出现在特定的载荷范围内。扫描电子显微镜(SEM)的检测结果显示了多种损坏模式,如边缘的圆周裂纹和压痕中心的附加圆形裂纹,从而形成了裂纹网络。为了确定压痕中的应力分布,对布氏压痕进行了数值模拟。将数值模拟结果与实验结果进行比较后发现,涂层在应力范围超过 5735 兆帕时开始失效,这与布氏压痕测试中高于 307 牛顿的正常载荷范围相对应。在 613 N 的载荷下观察到了裂纹。
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引用次数: 0
A novel 3D-printable tensegrity-inspired metamaterial enabling dynamic attenuation 一种新颖的3d打印受张拉整体启发的超材料,能够实现动态衰减
IF 3.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-04-13 DOI: 10.1007/s10999-023-09656-7
Hao Zeng, Ruinan Mu, Keyan Huo, Haifeng Zhao, Ke Wang, Anping Wang

Dynamic attenuation is a major concern in many engineering fields, and excessive energy inputs may cause fatal damages to the key devices. Therefore, there is always a demand to pursue a novel structure with the energy attenuation capacity. A metamaterial with periodic lattice-disc unit cells inspired by the tensegrity topological configuration is proposed in this study. Both theoretical and numerical modeling are conducted to examine the effects of geometrical dimensions on the bandgaps. Two types of chains are compared, including monoatomic and diatomic ones. With the increase of the number of unit cells, the dynamic attenuation effect of the bandgaps becomes prominent. This tensegrity-inspired metamaterial is 3D-printable by additive manufacturing technology. Both frequency sweep experiment and low-speed impact test are conducted. The torsional vibration mode is identified, which is decoupled with the axial vibration mode. Both improved spring-mass model and finite element model to describe the dual modes are developed to match well with the experiments. The behaviors of metamaterial bandgaps are fully verified by both numerical simulation and experiments. This study provides a novel idea for the design of additively-manufactured metamaterials for energy dissipation.

动态衰减是许多工程领域关注的焦点,过多的能量输入可能会对关键器件造成致命的损伤。因此,追求具有能量衰减能力的新型结构一直是一种需求。本文提出了一种受张拉整体拓扑结构启发的具有周期性格盘单元胞的超材料。通过理论和数值模拟研究了几何尺寸对带隙的影响。比较了两种链,包括单原子链和双原子链。随着单元胞数的增加,带隙的动态衰减效应变得突出。这种受张力整体启发的超材料可以通过增材制造技术进行3d打印。进行了扫频试验和低速冲击试验。确定了系统的扭转振动模态,并与轴向振动模态解耦。提出了改进的弹簧-质量模型和描述双模态的有限元模型,与实验结果吻合较好。通过数值模拟和实验验证了超材料带隙的行为。本研究为增材制造耗能超材料的设计提供了一种新的思路。
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引用次数: 2
Small scale thermal analysis of piezoelectric–piezomagnetic FG microplates using modified strain gradient theory 基于修正应变梯度理论的压电-压磁FG微板的小尺度热分析
IF 3.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-04-04 DOI: 10.1007/s10999-023-09651-y
P. T. Hung, P. Phung-Van, Chien H. Thai

Free vibration and buckling analyses of the magneto-electro-elastic functionally graded (MEE FG) microplates in thermal environment are investigated for the first time. The MEE FG microplate is composed of two phases: piezoelectric (barium titanate) and piezomagnetic (cobalt ferrite) materials, which are distributed across the thickness direction based on the power law model. To satisfy Maxwell’s equation in the quasi-static approximation, the electric and magnetic fields are assumed a combination of trigonometric and linear functions across the plate thickness. To capture small effects on microstructures, the modified strain gradient theory (MSGT), including three length scale parameters combined with the generalized higher-order shear deformation theory (HSDT), is presented. The equilibrium equations for free vibration and buckling analyses of MEE FG microplates are derived by using Hamilton’s principle. Through those equations, the natural frequency and critical buckling load of MEE FG microplates are computed by using isogeometric analysis (IGA). Based on the Non-uniform rational B-splines (NURBs) basic functions, which achieve any desired degree of continuity of basis functions, the IGA easily satisfy the MSGT model’s higher-order derivatives. The advantage and accuracy of the proposed model are demonstrated through comparisons between the present results and those provided in the literature. The effect of the electric voltage, magnetic potential, power index, geometrical parameter and length scale parameters on the dimensionless frequencies and critical buckling loads of the MEE FG microplates is fully reported. The article’s results can be considered as benchmark solutions for the vibration and buckling of MEE FG microplates and they are helpful for manufacturing sensors, actuators, stability control, etc.

首次研究了磁电弹性梯度微板在热环境下的自由振动和屈曲分析。MEE FG微板由压电材料(钛酸钡)和压磁材料(钴铁氧体)两相组成,根据幂律模型沿厚度方向分布。为了满足准静态近似下的麦克斯韦方程,假设电场和磁场是沿板厚方向的三角函数和线性函数的组合。为了捕获对微观组织的微小影响,提出了包含三个长度尺度参数的修正应变梯度理论(MSGT),并结合广义高阶剪切变形理论(HSDT)。利用Hamilton原理推导了微微板自由振动和屈曲分析的平衡方程。利用这些方程,利用等几何分析方法计算了微孔微板的固有频率和临界屈曲载荷。基于非均匀有理b样条(nurb)基函数,可以实现任意程度的基函数连续性,IGA可以很容易地满足MSGT模型的高阶导数。通过将目前的结果与文献中提供的结果进行比较,证明了所提出模型的优势和准确性。充分报道了电压、磁势、功率指数、几何参数和长度尺度参数对MEE FG微板无量纲频率和临界屈曲载荷的影响。本文的研究结果可作为MEE FG微板振动和屈曲的基准解,对传感器、执行器、稳定性控制等的制造具有指导意义。
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引用次数: 3
NURBS based thermoelastic behaviour of thin functionally graded sigmoidal (TFGS) porous plate resting on variable Winkler's foundation 基于NURBS的变Winkler地基上功能梯度s形薄多孔板的热弹性行为
IF 3.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-03-31 DOI: 10.1007/s10999-023-09654-9
Anand Prakash, Pawan Kumar, V. H. Saran, S. P. Harsha

In this current study, thermoelastic static and vibration analysis of the thin functionally graded sigmoidal porous plate subjected using higher-order NURBS-based Isogeometric analysis has been performed. The variation of thermomechanical material properties of this plate is using modified power and sigmoid law. To formulate the mathematical model for plate the Kirchhoff–Love theory-based displacement fields with the virtual work principle and high-order continuity of the NURBS basis functions based isogeometric analysis are employed. Convergence and assessment study has been done to verify the effectiveness and precision of the current approach. The effect of the porosity index, material gradient index, boundary conditions, thermal loading and geometry on the deflection, vibration frequency and detailed investigation of mode shapes. From the analysis, it has been noted that normalized frequency decreases and normalized central deflection increase when the gradient index of the material rises. The findings of this analysis can be utilized for members with extremely less thickness, such as turbine plates and blades, nuclear reactor vessels, and many other machine components made of porous functionally graded material materials.

在本研究中,采用基于高阶nurbs的等高几何分析方法对薄功能梯度s型多孔板进行了热弹性静态和振动分析。用修正幂次法和s型定律计算了该板的材料热力学性能的变化。采用基于虚功原理的Kirchhoff-Love理论位移场和基于NURBS基函数的高阶连续性等几何分析,建立了板的数学模型。通过收敛和评估研究验证了该方法的有效性和准确性。孔隙率指数、材料梯度指数、边界条件、热载荷和几何形状对挠度、振动频率和模态振型的影响。分析表明,随着材料梯度指数的升高,归一化频率减小,归一化中心挠度增大。该分析结果可用于厚度极低的构件,如涡轮板和叶片,核反应堆容器,以及许多其他由多孔功能梯度材料制成的机器部件。
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引用次数: 3
Editorial: message from the editor-in-chief 社论:主编留言
IF 3.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-03-29 DOI: 10.1007/s10999-023-09638-9
Shaker A. Meguid
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引用次数: 0
Anchor quality factor improvement of a piezoelectrically-excited MEMS resonator using window-like phononic crystal strip 利用窗状声子晶体条改善压电激励MEMS谐振器的锚定品质因子
IF 3.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-03-15 DOI: 10.1007/s10999-023-09652-x
Thi Dep Ha

Owning a superior quality factor (Q) helps contribute to the advantages of microelectromechanical systems (MEMS) resonators due to its impact on the performance of MEMS technology-based oscillators and filters in IoTs and radio frequency applications. Anchor quality factor ((Q_{textrm{anchor}})), which measures the anchor energy loss from the MEMS resonators into their substrate, is one of the main parameters in determining Q. In this paper, a window-like phononic crystal (PnC) strip, namely W-PnC, is proposed to act as a barrier of elastic wave propagation in the support tethers of an Aluminium Nitride (ALN)-on-Silicon (Si) resonator. As a result, the resonator (Q_{textrm{anchor}}) is boosted highly. This W-PnC generates a bandgap (BG) with a width of 24.11 MHz. which covers the 152.5 MHz resonant frequency of the resonator. Three traditional support structures, including phononic crystal without hole (WH-PnC), phononic crystal with circle stub (C-PnC), and quarter wavelength (L-tether), are the counterparts of the W-PnC in the comparison of the (Q_{textrm{anchor}}) improvement. By changing the dimensional parameters of the W-PnC, the variation of the BG formation in its band structures is evaluated to provide a platform for the designers in choosing the optimal BGs. The numerical results show that (Q_{textrm{anchor}}) of the resonator with the W-PnC is superior to its counterparts. Specifically, the (Q_{textrm{anchor}}) of the resonator investigated with the two unit cell W-PnC increases 510.90%, 1771.70%, and 1048.51% over the WH-PnC, C-PnC, and L-tether, respectively. The W-PnC demonstrates its high effectiveness over other counterparts in reducing/eliminating the anchor dissipation energy source of the resonator. In addition, the BG properties of the W-PnC, such as gap width and gap location, depend on its dimensional parameters. The finite element analysis based numerical simulation method in this work is performed in COMSOL Multiphysics. The MATLAB scripts then solve the posting process of these simulations.

拥有卓越的质量因子(Q)有助于促进微机电系统(MEMS)谐振器的优势,因为它对物联网和射频应用中基于MEMS技术的振荡器和滤波器的性能产生影响。锚定品质因子((Q_{textrm{anchor}}))是测量MEMS谐振器到衬底的锚定能量损失的主要参数之一,是确定q的主要参数之一。在本文中,提出了一种窗口状声子晶体(PnC)条,即W-PnC,作为弹性波传播的屏障,在硅基氮化铝(ALN)谐振器的支撑系索中。因此,谐振器(Q_{textrm{anchor}})被高度提升。该W-PnC产生24.11 MHz宽度的带隙(BG)。它覆盖了谐振器的152.5 MHz谐振频率。在(Q_{textrm{anchor}})改进的对比中,无孔声子晶体(WH-PnC)、带圆短段声子晶体(C-PnC)和四分之一波长声子晶体(L-tether)三种传统支撑结构与W-PnC相对应。通过改变W-PnC的尺寸参数,评估了其带结构中BG形成的变化,为设计人员选择最佳BG提供了平台。数值结果表明,W-PnC谐振腔的(Q_{textrm{anchor}})性能优于同类谐振腔。具体来说,采用双单元W-PnC所研究的谐振腔的(Q_{textrm{anchor}})增加了510.90%, 1771.70%, and 1048.51% over the WH-PnC, C-PnC, and L-tether, respectively. The W-PnC demonstrates its high effectiveness over other counterparts in reducing/eliminating the anchor dissipation energy source of the resonator. In addition, the BG properties of the W-PnC, such as gap width and gap location, depend on its dimensional parameters. The finite element analysis based numerical simulation method in this work is performed in COMSOL Multiphysics. The MATLAB scripts then solve the posting process of these simulations.
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引用次数: 1
A new radial basis function active learning method based on distance constraint for structural reliability analysis 基于距离约束的径向基函数主动学习方法在结构可靠性分析中的应用
IF 3.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-03-09 DOI: 10.1007/s10999-023-09644-x
Yuming Zhang, Juan Ma, Wenyi Du

Strongly nonlinear structural systems exhibit high computational errors when dependability is calculated using conventional approaches such as the primary second-order method of moments and the secondary second-order method of moments. The combination of the proxy model and Monte Carlo simulation is an effective method to solve the structural failure probability problem. However, existing studies on the active learning methods of proxy models for reliability calculation mainly focus on the kriging model, while for radial basis interpolation, the existing research results are relatively few. Based on the above analysis, this paper proposes to combine the cross-validation method with multiple kernel functions to evaluate the uncertainty at the prediction points. The mathematical expression of the active learning function considering three factors is proposed: the linear combination of the distance from the surface of limit state and the uncertainty of the predicted value of the proxy model as the optimization objective function, and the distance between the sample to be selected and the initial sample point as the constraint condition. Meanwhile, using the idea of the penalty function, the constrained problem is transformed into the unconstrained problem to get the final active learning function PLF. Finally, the efficiency, accuracy, and robustness of the PRBFM method are verified by classical cases and compared with other methods. It provides a new method and a new idea for the reliability analysis of complex structures.

强非线性结构系统的可靠性计算采用传统的二阶矩法和二阶矩法计算时存在较大的计算误差。代理模型与蒙特卡罗模拟相结合是求解结构失效概率问题的有效方法。然而,现有的可靠性计算代理模型主动学习方法的研究主要集中在kriging模型上,而对于径向基插值的研究成果相对较少。基于以上分析,本文提出将交叉验证法与多核函数相结合,对预测点的不确定性进行评估。提出了考虑三个因素的主动学习函数的数学表达式:以到极限状态表面的距离与代理模型预测值的不确定性的线性组合作为优化目标函数,以待选样本与初始样本点之间的距离作为约束条件。同时,利用罚函数的思想,将约束问题转化为无约束问题,得到最终的主动学习函数PLF。最后,通过经典实例验证了PRBFM方法的有效性、准确性和鲁棒性,并与其他方法进行了比较。为复杂结构的可靠性分析提供了一种新方法和新思路。
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引用次数: 1
Numerical investigation on a bistable vibro-impact dielectric elastomer generator mounted on a vibrating structure with ultra-low natural frequency 超低固有频率振动结构上介电弹性体双稳态振动冲击发生器的数值研究
IF 3.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-03-02 DOI: 10.1007/s10999-023-09646-9
J. W. Zhang, Z. H. Lai

Harvesting vibration energy arising from the vibrating structures with ultra-low natural frequencies such as bicycle or automobile body vibrations, human body vibrations, wind turbine oscillations, etc. has always been a challenge, but could enable many potential self-powered sensing applications. To address this issue, a bistable vibro-impact dielectric elastomer generator (BVI DEG) is designed and mounted on a vibrating structure with ultra-low natural frequency to scavenge vibration energy transferred from the vibrating structure. The designed BVI DEG mainly consists of a vibro-impact (VI) DEG, two identical pre-compressed springs, two identical unstretched elastic strings, and a lightweight cuboid shell. The dynamical analysis model of the vibrating structure with the attached BVI DEG and the electrical analysis model of the BVI DEG are developed. The dynamical behaviors of the BVI DEG are numerically analyzed under the harmonic excitation and its rich dynamical behaviors including chaotic and periodic motions are revealed. The energy harvesting (EH) performance under the harmonic excitation is studied for diverse parameters, including the excitation amplitude and frequency, the natural frequency of the vibrating structure, the mass ratio, the impact distance and the different bistable potential wells. The research results show that the EH performance can be significantly improved by appropriately setting these parameters. Moreover, a further comparative study demonstrates the superiority of the BVI DEG operating in the wider excitation frequency range. This work can help guide the design of the BVI DEG mounted on the vibrating structure to enhance the EH performance of the BVI DEG.

收集超低固有频率振动结构产生的振动能量,如自行车或汽车车身振动、人体振动、风力涡轮机振动等,一直是一个挑战,但可以实现许多潜在的自供电传感应用。为了解决这一问题,设计了一种双稳态振动冲击介质弹性体发生器(BVI DEG),并将其安装在超低固有频率的振动结构上,以清除振动结构传递的振动能量。设计的BVI DEG主要由一个振动冲击(VI) DEG、两个相同的预压缩弹簧、两个相同的未拉伸弹性弦和一个轻质长方体外壳组成。建立了带有BVI DEG的振动结构的动力学分析模型和BVI DEG的电气分析模型。数值分析了谐波激励下BVI DEG的动力学行为,揭示了其丰富的动力学行为,包括混沌运动和周期运动。研究了不同激励幅值和频率、振动结构固有频率、质量比、冲击距离和不同双稳势阱等参数对谐波激励下能量收集性能的影响。研究结果表明,适当设置这些参数可以显著提高EH性能。此外,进一步的对比研究表明,BVI DEG在更宽的激励频率范围内工作的优势。该工作可以指导安装在振动结构上的BVI DEG的设计,以提高BVI DEG的EH性能。
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引用次数: 3
On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation 基于突变分岔的压阻式质量开关非线性动力学研究
IF 3.7 3区 材料科学 Q2 ENGINEERING, MECHANICAL Pub Date : 2023-02-14 DOI: 10.1007/s10999-023-09650-z
Saber Azizi, Hadi Madinei, Hamed Haddad Khodaparast, Shirko Faroughi, Michael I. Friswell

This research investigates the feasibility of mass sensing in piezoresistive MEMS devices based on catastrophic bifurcation and sensitivity enhancement due to the orientation adjustment of the device with respect to the crystallographic orientation of the silicon wafer. The model studied is a cantilever microbeam at the end of which an electrostatically actuated tip mass is attached. The piezoresistive layers are bonded to the vicinity of the clamped end of the cantilever and the device is set to operate in the resonance regime by means of harmonic electrostatic excitation. The nonlinearities due to curvature, shortening and electrostatic excitation have been considered in the modelling process. It is shown that once the mass is deposited on the tip mass, the system undergoes a cyclic fold bifurcation in the frequency domain, which yields a sudden jump in the output voltage of the piezoresistive layers; this bifurcation is attributed to the nonlinearities governing the dynamics of the response. The partial differential equations of the motion are derived and discretized to give a finite degree of freedom model based on the Galerkin method, and the limit cycles are captured in the frequency domain by using the shooting method. The effect of the orientation of the device with respect to the crystallographic coordinates of the silicon and the effect of the orientation of the piezoresistive layers with respect to the microbeam length on the sensitivity of the device is also investigated. Thanks to the nonlinearity and the orientation adjustment of the device and piezoresistive layers, a twofold sensitivity enhancement due to the added mass was achieved. This achievement is due to the combined amplification of the sensitivity in the vicinity of the bifurcation point, which is attributed to the nonlinearity and maximizing the sensitivity by orientation adjustment of the anisotropic piezoresistive coefficients.

本研究探讨了基于灾难性分岔的压阻式MEMS器件质量传感的可行性,以及由于器件相对于硅片晶体取向的取向调整而提高的灵敏度。所研究的模型是一个悬臂微梁,其末端附着一个静电驱动的尖端质量。压阻层粘接在悬臂的夹紧端附近,并且通过谐波静电激励将装置设置为在谐振状态下工作。在建模过程中考虑了曲率、缩短和静电激励等非线性因素。结果表明,当质量块沉积在尖端质量块上时,系统在频域发生循环褶皱分岔,导致压阻层输出电压突然跳变;这种分岔归因于控制响应动力学的非线性。基于伽辽金方法,导出了运动的偏微分方程,并对其进行离散,得到了一个有限自由度的运动模型,并利用射击法在频域捕获了极限环。研究了器件的取向与硅晶体坐标的关系以及压阻层的取向与微束长度的关系对器件灵敏度的影响。由于器件和压阻层的非线性和方向调整,由于增加的质量,灵敏度提高了两倍。这一成就是由于在分岔点附近的灵敏度的综合放大,这是由于非线性和通过各向异性压阻系数的取向调整来最大化灵敏度。
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引用次数: 1
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International Journal of Mechanics and Materials in Design
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