Classical thermoelastic-diffusion theories are inadequate at micro- and nanoscales because they assume instantaneous local response of heat and mass fluxes, predict infinite propagation speeds, and completely neglect long-range microstructural interactions. This paper introduces the first thermodynamically consistent theoretical framework that simultaneously overcomes all three limitations: it extends the Lord–Shulman generalized theory by incorporating nonlocal heat conduction of Guyer–Krumhansl type with its own thermal length scale, a newly proposed nonlocal mass-diffusion law governed by an independent diffusive length scale, and separate phase-lag relaxation times for thermal and chemical-potential gradients. The model is analytically solved for an infinite isotropic solid containing a traction-free spherical cavity subjected to a pulsed thermal shock and an exponentially decaying chemical potential at the inner surface. Numerical results for copper reveal three striking physical effects that are entirely absent in all previous local and single-nonlocality models: temperature and concentration disturbances penetrate far deeper into the material while their spatial gradients become remarkably smoother; peak displacements and thermoelastic stresses are reduced by more than half; and the coupled thermo-elasto-diffusive waves experience significantly stronger attenuation throughout the medium. These distinctive size-dependent phenomena originate from long-range interactions among energy carriers and diffusing species. The proposed framework therefore enables accurate performance prediction and deliberate microstructural tailoring in modern nanoscale devices, offering substantially improved reliability for MEMS thermal actuators, faster hydrogen charging in metallic microspheres, safer laser-triggered drug-release nanocapsules, and reduced thermoelastic losses in high-frequency nanoresonators.
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