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Reliability Study of Interconnect Structures in IC Packages 集成电路封装互连结构可靠性研究
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1643948
Y. Liu, Yumin Liu, S. Irving, T. Luk, D. Desbiens, Zhen Zhang, Z. Suo
This paper will focus on reliability study of interconnect structure for two areas. The first area is reliability of interconnect structure in thermal cycling test. Major work includes the fundamental study of ratcheting for passivation cracking. By combination with the upper limit of stress intensity factor for a finite crack in the passivation and the ratcheting failure mechanism, the life of passivation in thermal cycling can be obtained in terms of the lower bound of critical number of cycles of the crack initiation. The passivation crack criterion is established to identify the failure modes: no cracking and delayed cracking. Another area is the reliability of bond paid over active (BPOA) with copper bond pads. Major work includes stress analysis of the dielectric layer under probing with different parameters such as the thickness of the copper bond pad, dielectric, metallization and the passivation under different probing loads. The elastic plastic model in copper bond pad and metal lines are introduced. Finally comparison of the results between copper bond pad and aluminum bond pad will be presented
本文将从两个方面对互连结构的可靠性进行研究。首先是热循环试验中互连结构的可靠性问题。主要工作包括棘轮钝化开裂的基础研究。结合钝化过程中有限裂纹的应力强度因子上限和棘轮破坏机理,可以用裂纹起裂临界循环次数下界来计算热循环过程中钝化的寿命。建立了钝化裂纹判据来识别无裂纹和延迟裂纹两种失效模式。另一个问题是带有铜键垫的主动支付键(BPOA)的可靠性。主要工作包括在不同的探测载荷下,对铜键垫厚度、介电介质、金属化和钝化等参数下的探测介质层进行应力分析。介绍了铜键垫和金属线的弹塑性模型。最后对铜键垫和铝键垫的结果进行了比较
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引用次数: 3
The Reliability Impact of Highly Temperature-Dependent Underfill Material to the Lead-Free Flip Chip Package 高温度依赖性底填材料对无铅倒装芯片封装可靠性的影响
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1643968
C. Chiu, Chung-Jung Wu, C. Peng, C. Chou, K. Chiang, T. Ku, K. Cheng
Since today's trend is toward `green' products, manufacturers are moving toward lead-free schemes. The flip chip package, which has been widely utilized in high-performance products, also faces this challenge. In addition, the underfill material in the flip chip package has a specific characteristic, glass transition (Tg) temperature, and the properties of the underfill material changes drastically when it experiences temperature difference containing its Tg. With a highly temperature-dependent feature, the underfill may have an impact on the reliability of the packaging. A methodology combining the verified finite element method and factorial analysis is established to estimate this effect in this study. In factorial analysis, the CTE and Young's modulus of the underfill at temperatures above and below its T g are selected. In addition to the four above mentioned factors, the Tg temperature of the underfill is also chosen as a design factor. As for the response, die cracking is a concerned failure mode to the lead-free flip chip package, and hence the first principal stress is chosen as the response in factorial analysis. Aside from these, the solder fatigue life is also discussed. This study reveals that the Tg temperature is the most sensitive factor to the reliability of both die cracking and solder fatigue life. However, the lead-free flip chip package using the underfill material with a higher Tg temperature has a better solder fatigue life but has the larger stress which may likely lead to the die crack
由于今天的趋势是走向“绿色”产品,制造商正在转向无铅方案。在高性能产品中得到广泛应用的倒装芯片封装也面临着这一挑战。此外,倒装芯片封装中的下填充材料具有特定的玻璃化转变(Tg)温度,当下填充材料经历含Tg的温差时,其性能会发生剧烈变化。由于高度依赖温度的特性,下填料可能会对包装的可靠性产生影响。在本研究中,建立了一种结合验证有限元法和析因分析的方法来估计这种影响。在析因分析中,选择温度高于和低于其T g的下填土的CTE和杨氏模量。除上述四个因素外,还选择下填土的Tg温度作为设计因素。对于响应,模裂是无铅倒装封装关注的失效模式,因此在析因分析中选择第一主应力作为响应。除此之外,还讨论了焊料的疲劳寿命。研究表明,Tg温度是影响模具开裂可靠性和焊料疲劳寿命的最敏感因素。然而,使用Tg温度较高的下填充材料的无铅倒装芯片封装具有较好的焊料疲劳寿命,但具有较大的应力,可能导致模具裂纹
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引用次数: 2
Lead-Free Solder Cyclic Plasticity Characterization for Drop Test Simulations 跌落试验模拟的无铅焊料循环塑性表征
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1644023
E. Bonnaud, P. Gudmundson
Mechanical behaviour of lead-free solder has been investigated experimentally and thereafter modelled analytically. Material test specimens subjected to uniaxial cyclic loadings at different strain rates exhibit noticeable properties: viscoplasticity, nonlinear mixed hardening within each cycle and hardening followed by softening between consecutive cycles. To accurately describe these behaviours, a modified Armstrong and Fredrick model was combined to the Perzyna viscoplastic evolution equation. The set of parameters was determined by both curve-fitting and use of analytical relations
对无铅焊料的力学行为进行了实验研究,并建立了分析模型。不同应变率单轴循环加载下的材料试件表现出明显的粘塑性、循环内非线性混合硬化、循环间先硬化后软化等特性。为了准确地描述这些行为,将一个改进的Armstrong和Fredrick模型与Perzyna粘塑性演化方程结合起来。参数集是通过曲线拟合和利用解析关系确定的
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引用次数: 3
Using ElectroMechanical Buckling for Measuring Residual Stress 利用机电屈曲法测量残余应力
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1643991
S. Abu-Salih, D. Elata
In this work, a new test structure and method for measuring residual stress is presented. The test structure is a single clamped-clamped beam with electrodes symmetrically positioned along both sides of the beam. The electromechanical buckling response is used to measure the residual stress. It is shown that a single test structure of the proposed design may be used to measure both compressive and tensile residual stresses in a continuous wide range
本文提出了一种新的残余应力测试结构和方法。测试结构是一个单夹紧-夹紧的梁,电极沿梁的两侧对称地定位。利用机电屈曲响应测量残余应力。结果表明,所设计的单一测试结构可以在连续的大范围内测量压缩和拉伸残余应力
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引用次数: 2
Characterization Method for Mechanical Properties of Thin Freestanding Metal Films for RF-MEMS RF-MEMS金属薄膜机械性能表征方法
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1644039
V. Burg, J. den Toonder, A. van Dijken, J. Hoefnagels, M. Geers
A method for the characterization of mechanical properties of freestanding thin metal film materials used in RF-MEMS is evaluated. Freestanding beam structures are manufactured from a sputtered layer of AlCu(1wt%) on top of a wafer using an industrialized RF-MEMS manufacturing process. The methods of examining micro structure and geometry are studied. It is shown that these methods are promising for extracting the desired information about the material. Simple bending experiments are carried out on micro-scale beams of varying length and thickness using an indenter device. Elastic material properties are extracted from the results, using finite element technology combined with elastic theory, removing the necessity of extensive finite element simulations. It is shown that the beam length and indenter positioning play a crucial role. The obtained results show agreement with expected values for longer beams, but no obvious relation with the film thickness is found within the experimental range addressed
评价了一种表征RF-MEMS中独立金属薄膜材料力学性能的方法。采用工业化RF-MEMS制造工艺,从晶圆顶部的AlCu(1wt%)溅射层制造独立梁结构。研究了微观结构和几何形状的检测方法。结果表明,这些方法在提取所需的材料信息方面是有希望的。利用压头装置对不同长度和厚度的微尺度梁进行了简单的弯曲实验。从结果中提取材料的弹性特性,采用有限元技术结合弹性理论,消除了大量有限元模拟的必要性。结果表明,梁的长度和压头的位置起着至关重要的作用。所得结果与较长光束的期望值一致,但在实验范围内与薄膜厚度没有明显的关系
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引用次数: 10
Effect of Chemistry on Viscoelastic Properties of Moulding Compounds 化学对模塑材料粘弹性的影响
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1644066
K. Jansen, L. Ernst, H. Bressers
The present state-of-the-art in simulation of stresses in electronic packages is to model the moulding compound as a viscoelastic material. That means that stresses during packaging and subsequent thermomechanical loading are allowed to relax partially. Such an approach was seen to improve thermomechanical predictions considerably compared to the previously used temperature dependent elastic models. Therefore viscoelastic simulations are now becoming the standard for the modelling of packaging stresses and viscoelastic characterization of new moulding compound materials is now routinely being performed by most of the companies involved with packaging of electronic components. A problem is, however, that the viscoelastic data of moulding compounds turns out to be quite sensitive to variations in the compound chemistry and that this chemistry may vary slightly from batch to batch. Since these variations do not have a large effect on the room temperature properties (like the modulus) they often remain undetected by the standard quality tests. In order to anticipate to these problems it is desirable to develop a fundamental understanding of what parameters influence the viscoelastic properties of thermosets. A quantitative model, such as will be presented in this paper, has the additional advantage that it can be used for the selection of moulding compounds with optimized viscoelastic properties
目前电子封装应力模拟的最新技术是将成型化合物作为粘弹性材料进行建模。这意味着在包装和随后的热机械加载过程中的应力被允许部分放松。与以前使用的依赖温度的弹性模型相比,这种方法被认为大大改善了热力学预测。因此,粘弹性模拟现在已成为包装应力建模的标准,而新成型复合材料的粘弹性特性现在已被大多数涉及电子元件包装的公司常规执行。然而,一个问题是,成型化合物的粘弹性数据对化合物化学成分的变化非常敏感,而且这种化学成分可能在批次之间略有不同。由于这些变化对室温性能(如模量)没有很大影响,因此标准质量测试通常无法检测到它们。为了预测这些问题,需要对影响热固性材料粘弹性的参数有一个基本的了解。定量模型,如将在本文中提出,具有额外的优势,它可以用于选择具有优化粘弹性性能的成型化合物
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引用次数: 1
Measuring In-Thickness Mechanical Properties of Sub Micron Polymer Dielectric Films 亚微米聚合物介电薄膜厚度机械性能的测量
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1644030
M. van Soestbergen, L. Ernst, K. Jansen, W. V. van Driel, M. Bartek, A. Polyakov
The ongoing miniaturization of microelectronics has led to low-K polymer dielectric films with a thickness of several tens of nanometers. These thin polymer films generally show time dependent material properties, that are different in lateral directions and in-thickness direction. Most techniques available for measuring the mechanical properties of thin films are only capable of obtaining the in-plane modulus. To have an in-situ measurement of the in-thickness viscoelastic modulus, a parallel plate capacitor under hydrostatic pressure is used. An interdigitated electrode is used to capture the change in dielectric constant under pressure. As a first estimation, a BCB (benzocyclobutene) film was used. The in-thickness elastic modulus and change in permittivity for a 1.3 mum thick BCB (Cyclotenetrade 4022) film sandwiched between two alumina electrodes on a silicon wafer are reported to be 4.76plusmn0.42, 3.81plusmn0.26 and 3.16plusmn0.15 GPa for 20deg;, 50 deg; and 70deg; C respectively
微电子技术的不断小型化导致了厚度为几十纳米的低钾聚合物介电膜的出现。这些聚合物薄膜通常表现出随时间变化的材料特性,这些特性在横向和厚度方向上是不同的。大多数用于测量薄膜力学性能的技术只能获得面内模量。为了在现场测量厚度内粘弹性模量,采用了静水压力下的平行板电容器。用交叉指状电极捕捉压力下介电常数的变化。作为初步估计,使用了BCB(苯并环丁烯)薄膜。在硅片上,夹在两个氧化铝电极之间的1.3 μ m厚BCB (Cyclotenetrade 4022)薄膜在20°、50°、20°时的厚度弹性模量和介电常数变化分别为4.76plusmn0.42、3.81plusmn0.26和3.16plusmn0.15 GPa。和70度;C分别
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引用次数: 2
Reliability Analysis of a New Soldering Process For Automotive Power Modules Application 一种新型汽车电源模块焊接工艺的可靠性分析
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1643973
R. Mathieu, W. Eric, A. Stephane
This paper presents a reliability study of power assemblies based on the correlation of finite element simulations and experimental results. For these power modules, a new process was used to solder bare dice on a copper lead frame with a local heating source. The reliability methodology we are using is based on the evaluation of the strain energy density accumulated in the solder joint during the lifetime of the assembly. The study was also carried out on various types of solder. Two series of simulations have been carried out in parallel. The first series was the simulation of a classical reflow process with a uniform temperature of 300degC in the whole assembly. The second one was the simulation of the new process with localized heating. The comparison of the results of the simulations allowed concluding that this new process does not introduce more strain than a normal process. In order to evaluate the lifetime of the assembly, ageing tests have been carried out on representative test vehicles. By correlation between simulations and ageing tests, we have evaluated the lifetime of the assembly under operation conditions
本文在有限元仿真与实验结果相结合的基础上,对动力总成的可靠性进行了研究。对于这些电源模块,采用了一种新的工艺,在带有局部热源的铜引线框架上焊接裸片。我们使用的可靠性方法是基于在装配寿命期间焊点累积的应变能密度的评估。对不同类型的焊料也进行了研究。两组模拟并行进行。第一个系列是模拟一个经典的回流过程,整个组件的均匀温度为300摄氏度。第二部分是局部加热新工艺的模拟。通过对模拟结果的比较,可以得出这样的结论:这种新工艺并不比普通工艺引入更多的应变。为了评估该总成的寿命,在具有代表性的试验车上进行了老化试验。通过仿真与老化试验的关联,我们评估了该组件在运行条件下的寿命
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引用次数: 2
Complete elastic characterization of a silica layer by Brillouin scattering 用布里渊散射完成硅层的弹性表征
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1644025
G. Signoriello, M. Beghi, A. Rusconi Clerici, G. Spinola
Brillouin scattering, the scattering of light by ultrasonic waves, offers the possibility to probe the velocity of acoustic modes at sub-micrometric wavelength. From the acoustic properties the elastic properties can be derived. In the case of transparent films both bulk and surface acoustic waves can be measured. Brillouin scattering has been exploited to characterize a silica layer of micrometric thickness, thermally grown on a silicon substrate. The observation of different scattering geometries allowed to measure both the Young modulus and Poisson's ratio of the silica film, together with its refractive index
布里渊散射,超声波对光的散射,提供了在亚微米波长探测声模式速度的可能性。从声学性质可以推导出弹性性质。在透明薄膜的情况下,体声波和表面声波都可以测量。布里渊散射已经被用来表征微米厚度的硅层,热生长在硅衬底上。通过对不同散射几何形状的观察,可以测量二氧化硅薄膜的杨氏模量和泊松比,以及它的折射率
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引用次数: 0
Sequentially-Coupled Finite Element Transient Analysis with Hygroscopic Swelling 含吸湿膨胀的序列耦合有限元瞬态分析
Pub Date : 2006-04-24 DOI: 10.1109/ESIME.2006.1644028
Jiang Zhou
The characterization of the hygroscopic property for the packaging materials presents unique challenges, which are not adequately addressed in current methods. One of those challenges is the impact of non-uniform moisture distribution across the specimen. Our recent studies have shown that the current averaged approach might overestimate the coefficient of hygroscopic swelling as much as 250%. In our previous analysis, however, the hygroscopic stress induced deformation has not been taken into consideration. As a matter of fact, due to non-uniform moisture distribution during the test, the total measured deformation includes the hygroscopic swelling itself, and the hygroscopic stress induced deformation. In this paper, a comprehensive study is performed on the impacts of non-uniform moisture distribution and the effect of hygroscopic stress by using sequentially coupled moisture diffusion and hygroscopic stress modeling approach. The results show that the hygroscopic stress induced displacement is relatively small, although the elastic strain caused by the hygroscopic stress accounts for about one third of the total strain. The results in our previous study are proved to be acceptably accurate, even through the hygroscopic stress induced elastic deformation has been neglected
包装材料吸湿特性的表征提出了独特的挑战,这在目前的方法中没有充分解决。其中一个挑战是不均匀的水分分布在整个试样的影响。我们最近的研究表明,目前的平均方法可能高估吸湿膨胀系数高达250%。然而,在我们之前的分析中,没有考虑到吸湿应力引起的变形。实际上,由于试验过程中水分分布不均匀,因此,总测量变形包括吸湿膨胀本身和吸湿应力引起的变形。本文采用连续耦合的水分扩散和吸湿应力建模方法,对非均匀水分分布的影响和吸湿应力的影响进行了全面的研究。结果表明,虽然吸湿应力引起的弹性应变占总应变的三分之一左右,但吸湿应力引起的位移相对较小。即使忽略了吸湿应力引起的弹性变形,我们之前的研究结果也被证明是可以接受的
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引用次数: 10
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微纳电子与智能制造
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