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2008 International Conference on Electronic Packaging Technology & High Density Packaging最新文献

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Novel low-temperature micro-insert bonding technology for 3D package 新型3D封装低温微插入键合技术
Po Xu, A. Hu, Zhuo Chen, Ming Li, D. Mao
In this paper, a novel low-temperature micro-insert bonding technology for 3D package has been reported. Nickel microcone arrays (MCA) fabricated on the bonding pad was used as the under bump metallization (UBM). The bonding temperature is below the melting point of the solder. At certain temperature and pressure, the MCA inserted into the lead-free Sn-Ag-Cu solder bumps to achieve a good adhesion. The bonding of the joint is realized by the mechanical interlocking and the diffusion between the MCA and the solder. The nickel microcone arrays were prepared by directional electrodeposition (DEP) method on the Cu substrates in the solution with inorganic additives. And then hundreds of bumps were bonded on the substrates at different temperatures (150deg-210degC) and different bonding pressure (450, 560, 750 gf/p). Subsequently, ball shear testings were performed to evaluate the mechanical reliability and failure mode of the solder joints. After the shear testings, the microstructures of the fracture interfaces were investigated by SEM.
本文报道了一种用于三维封装的新型低温微插入键合技术。采用在焊盘上制备的镍微锥阵列(MCA)作为凹凸下金属化(UBM)。接合温度低于焊料的熔点。在一定的温度和压力下,将MCA插入无铅Sn-Ag-Cu钎料中,达到良好的附着力。接头的连接是通过MCA与焊料之间的机械联锁和扩散来实现的。采用定向电沉积法(DEP)在Cu基体上制备了镍微锥阵列。然后在不同的温度(150℃~ 210℃)和不同的键合压力(450、560、750 gf/p)下,在衬底上键合数百个凸点。随后,进行了球剪试验,以评估焊点的机械可靠性和破坏模式。剪切试验结束后,利用扫描电镜对断裂界面的微观组织进行了研究。
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引用次数: 1
Reliability study of flexible display module by experiments 柔性显示模块可靠性实验研究
Q. Chen, Leon Xu, A. Salo, Gustavo Neto, Germano Freitas
Flexible display module reliability were investigated herein with experiments, such as bending, twisting and ball drop. The pretests of all the three experiments were carried out firstly to primarily understand the flexibility and mechanical behavior of the display. Based on the pretest results, the corresponding fatigue test setup method and process were put forward. Then, the fatigue tests were executed. At last, through the failure analysis, the flexibility and reliability of the flexible display in different use cases were evaluated. Suggestions about how to use the display and improve the reliability through change the design were given also.
通过弯曲、扭曲、落球等实验,对柔性显示模块的可靠性进行了研究。首先进行了三个实验的预测试,初步了解了显示器的柔性和力学性能。根据预试结果,提出了相应的疲劳试验设置方法和流程。然后进行了疲劳试验。最后,通过故障分析,对柔性显示器在不同用例下的灵活性和可靠性进行了评估。并对如何使用显示器和通过改变设计来提高可靠性提出了建议。
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引用次数: 17
Parametric study on board-level electronic test device subjected to JEDEC vibration loads JEDEC振动载荷下板级电子测试装置的参数化研究
Chang-Lin Yeh, Y. Lai, Ching-Chun Wang
We derive in this paper equations of motion of board-level IC packages subjected to swept sine vibration loads following the support excitation scheme. Harmonic analysis is performed based on the argument such that at each loading state over the swept sine process, hysteresis responses of solder joints following the isotropic hardening rule vanish fairly quickly so that plasticity is fully developed. Computed and measured acceleration response spectra of a board-level test vehicle are benchmarked. Stress-based failure indices as well as elastoplastic responses and strain rates of solder joints are examined for the test vehicle subjected to swept sine vibration tests of different acceleration levels with vibration frequencies up to 2 kHz.
本文推导了支撑激励方案下板级集成电路封装在扫频正弦振动载荷作用下的运动方程。谐波分析基于这样的论点:在扫频正弦过程的每个加载状态下,遵循各向同性硬化规则的焊点的滞后响应消失得相当快,从而使塑性得到充分发展。对一台板级试验车的计算和实测加速度响应谱进行了基准测试。在振动频率高达2khz的不同加速度水平下,对试验车辆的应力失效指标、焊点弹塑性响应和应变率进行了测试。
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引用次数: 3
A design for increasing the immunity to RFI of protection IC of lithium-ion battery 一种提高锂离子电池保护IC抗射频干扰能力的设计
Dongfang Cheng, Jue Zhang, Xiaohui Li, Jiongming Wang
Illustrated by the case of a lithium-ion battery protection IC, the paper focuses on the design of internal immunity to RFI. With analysis of the chippsilas three major elements of electromagnetic compatibility (EMC), the qualitative and quasi-quantitative analysis results of RFI influence to the chip are given out. By using a simple filter circuit and available material physical construction which can isolate, absorb and consume the RFI energy, the protection ICpsilas electromagnetic susceptibility has been reduced effectively. The simulation of the devised structure in the time domain is gained by Winspice, and tool IC_EMC makes it possible of the conversion from time domain to frequency domain in which the spectrum analysis is completed. The design has passed the simulation verification and the layout implement of the devised construction designed is also available.
本文以锂离子电池保护集成电路为例,重点研究了内部抗射频干扰的设计。通过对芯片电磁兼容(EMC)三大要素的分析,给出了射频干扰对芯片影响的定性和准定量分析结果。采用简单的滤波电路和可隔离、吸收和消耗RFI能量的现有材料物理结构,有效地降低了保护电感的电磁磁化率。利用Winspice软件对所设计的结构进行了时域仿真,并利用IC_EMC工具实现了从时域到频域的转换,从而完成了频谱分析。该设计通过了仿真验证,并给出了所设计结构的布置图。
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引用次数: 1
C4NP for Pb-free solder wafer bumping and 3D fine-pitch applications C4NP用于无铅焊料晶圆碰撞和3D细间距应用
D. Shih, B. Dang, P. Gruber, M. Lu, S. Kang, S. Buchwalter, J. Knickerbocker, E. Perfecto, J. Garant, S. Knickerbocker, K. Semkow, B. Sundlof, J. Busby, R. Weisman, K. Ruhmer, E. Hughlett
Controlled collapse chip connection - new process (C4NP) technology is a novel solder bumping technology developed by IBM to address the limitations of existing bumping technologies. Through continuous improvements in processes, materials and defect control, C4NP technology has been successfully implemented at IBM in the manufacturing of all 300 mm Pb-free solder bumped wafers. Both 200 mum and 150 mum pitch products have been qualified and are currently ramping up volume production. Extendibility of C4NP to 50 mum ultra-fine pitch microbump application has been successfully demonstrated with the existing C4NP manufacturing tools. Targeted applications for microbumps are three-dimensional (3D) chip integration and the conversion of memory wafers from wirebonding (WB) to C4 bumping. The metrology data on solder volume, bump height, defect and yield have been characterized by RVSI inspection. This paper reviews the C4NP processes from mold manufacturing, solder fill and solder transfer onto 300 mm wafers, along with defect and yield analysis. Reliability challenges as well as solutions in the development and qualification of flip chip Pb-free solder joint are also reviewed. In addition to a suitable under bump metallurgy (UBM), a robust lead-free solder alloy with precisely controlled composition and special alloy doping is needed to enhance performance and reliability.
控制折叠芯片连接-新工艺(C4NP)技术是IBM为解决现有碰撞技术的局限性而开发的一种新型焊料碰撞技术。通过对工艺、材料和缺陷控制的不断改进,C4NP技术已成功地在IBM制造了所有300毫米无铅凸点晶圆。200米和150米的产品都已通过认证,目前正在批量生产。利用现有的C4NP制造工具成功地演示了C4NP到50微米超细间距微凸点应用的可扩展性。微凸点的目标应用是三维(3D)芯片集成和从线键合(WB)到C4凸点的存储晶圆转换。对焊料体积、凸点高度、缺陷和成品率等计量数据进行了RVSI检测表征。本文回顾了C4NP工艺从模具制造,焊料填充和焊料转移到300mm晶圆上,以及缺陷和良率分析。回顾了倒装无铅焊点在开发和鉴定过程中面临的可靠性挑战以及解决方案。为了提高焊料的性能和可靠性,除了需要一种适用于碰撞冶金(UBM)的焊料合金外,还需要一种具有精确控制成分和特殊合金掺杂的坚固无铅焊料合金。
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引用次数: 6
Design advisor for package-on-package (PoP) manufacturing 包对包(PoP)制造的设计顾问
B. Xie, P. Sun, D. Shi
The needs to integrate devices into portable products with smaller form factor and more functionality have fueled enormous growth of 3D packaging technology. The package-on-package (PoP) is one of the 3D packaging solutions, by which the packaging and assembly houses can achieve a lower cost, faster turn benefits and testing prior to assembly. PoP is a complicated system with multi-layered structure, which induces more manufacturability issues, such as stand-off height issue and top & bottom packages having different types of warpage. In order to reduce R&D cost, achieve fast time-to-market and address most of the manufacturability issues during the development of a new PoP, a design advisor for PoP manufacturing has been developed based on the design for manufacturability (DFM) methodology. The key components of this design advisor are the validated numerical models, comprehensive materials library, design guidelines of PoP packaging and novel finite element analysis (FEA) techniques. With the developed novel FEA techniques for curing process simulation and seamless packaging process simulation, complete numerical models for PoP manufacturing were developed and validated, which can simulate the whole PoP manufacturing processes. The design advisor is easy to use by selecting package geometries, material properties and process parameters. By running the envelope-based design advisor for normal package design or the FEA-based design advisor for special package design, the detailed analysis reports can be generated, including simulation results, design evaluations and recommendations to ensure the first-time success of package design. Therefore, the design advisor can help improve the yield of complex PoP manufacturing processes leading to higher quality and confidence of manufacturing processes, faster time-to-market and lower overall manufacturing cost.
将设备集成到具有更小尺寸和更多功能的便携式产品中的需求推动了3D封装技术的巨大增长。封装对封装(PoP)是一种3D封装解决方案,通过它,封装和装配厂可以实现更低的成本、更快的周转效益和组装前的测试。PoP是一个复杂的多层结构系统,它带来了更多的可制造性问题,如超限高度问题和上下封装存在不同类型翘曲的问题。为了降低研发成本,加快产品上市速度,解决新型PoP开发过程中的大多数可制造性问题,基于可制造性设计(DFM)方法开发了PoP制造设计顾问。该设计顾问的关键组成部分是经过验证的数值模型、综合材料库、PoP包装设计指南和新颖的有限元分析技术。利用新兴的固化过程模拟和无缝封装过程模拟有限元分析技术,建立并验证了完整的PoP制造数值模型,可以模拟PoP制造的整个过程。通过选择包装几何形状、材料特性和工艺参数,设计顾问易于使用。通过运行基于信封的普通包装设计顾问或基于有限元的特殊包装设计顾问,可以生成详细的分析报告,包括仿真结果、设计评估和建议,以确保包装设计的首次成功。因此,设计顾问可以帮助提高复杂PoP制造过程的产量,从而提高制造过程的质量和信心,加快上市时间并降低总体制造成本。
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引用次数: 9
Study on non-uniformity of Through-Mask electroplated Ni thin-film 透掩膜镀镍薄膜不均匀性的研究
Jun Tang, Hong Wang, Rui Liu, Shengping Mao, Xiaolin Zhao, G. Ding
Through-mask electroplating has been widely used in the fabrication of chips, BGA substrates and PCBs etc. The uniformity of plating thin-film is the major factor contributed to the reliability of the products. Currently, it is usually by setting optimum plating parameters and adopting electrochemical method to achieve the uniformity of plating. However, the problem of non-uniform distribution of electric field, which is the major cause of the non-uniformity of the plating thin-film, has not been solved. In this paper, finite element method (FEM) was developed to analyze the non-uniform distribution of electric field under different conditions in the process of electroplating. The results show that different thickness of photo-resist and size of electroplating cell are two major factors contribute to the uniformity of plating thin-film. The uniform of electroplating cell can be improved by adding in-chip auxiliary electrode. Also better uniformity of the plating film in radial direction can achieved by setting a shield in the proper position of the plating solution and annular out-chip auxiliary electrode (Cu) around the wafer. The simulation results were consistent with experimental results, which proved that finite element method is an effect way to simulate the electroplating process.
通过掩模电镀已广泛应用于芯片、BGA衬底和pcb等领域。镀层的均匀性是影响产品可靠性的主要因素。目前,通常是通过设定最佳电镀参数和采用电化学方法来达到镀层的均匀性。然而,电场分布不均匀的问题是导致镀层不均匀的主要原因,一直没有得到解决。本文采用有限元法对电镀过程中不同条件下电场的不均匀分布进行了分析。结果表明,光刻胶厚度和电镀槽尺寸的不同是影响镀层均匀性的两个主要因素。通过在片内添加辅助电极,可以改善电镀槽的均匀性。在镀液的适当位置设置屏蔽层,在晶圆周围设置环形片外辅助电极(Cu),可以使镀层径向均匀性更好。仿真结果与实验结果吻合较好,证明了有限元法是一种有效的模拟电镀过程的方法。
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引用次数: 3
Electrodeposition of palladium films on Ni-Co coatings Ni-Co镀层上钯膜的电沉积
Yanping He, D. Ding, Xiang Gao, Z. Chen, Ming Li, D. Mao
Co-Ni alloys have the properties of high hardness, good wear and corrosion resistance. A transition layer of Co-Ni coating will help enhance the hydrogen sensing stability of Pd films. In this work, Pd films were electrodeposited on Co-Ni coated copper substrate and silicon wafers. The influence of deposition parameters on the microstructure of Co-Ni coatings and Pd films were investigated. Experimental results indicated that scallop shell-like Co-Ni alloys could be fabricated on copper wafers. The tendency to form the shell-like deposits increased with increase of deposition time. While on silicon wafers, scallop shell-like Co-Ni alloys could not be fabricated. SEM and AFM analyses indicated that both composite films have a large surface area. Results showed that Pd films could be shaped by the prime films and thus maintain a large surface area.
钴镍合金具有硬度高、耐磨、耐腐蚀等特点。钴镍涂层的过渡层有助于提高钯膜的感氢稳定性。在这项工作中,Pd薄膜被电沉积在Co-Ni涂层的铜衬底和硅片上。研究了沉积参数对Co-Ni涂层和Pd膜微观结构的影响。实验结果表明,可以在铜晶片上制备扇贝状钴镍合金。随着沉积时间的增加,形成贝壳状沉积物的倾向增加。而在硅晶片上,不能制造扇贝状的钴镍合金。SEM和AFM分析表明,两种复合膜均具有较大的比表面积。结果表明,钯膜可以被初始膜塑造,从而保持较大的表面积。
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引用次数: 0
Mold array package for POP applications 用于POP应用的模具阵列包
A. Lee, Louie Huang, M. Hung
The package on package (POP) stacking is getting more and more popular for system in package (SIP) applications. But during the assembly process, the POP had encountered the challenge of packages stacking yield loss, especially when top package and bottom package stacking. The key factors are the mount height of top package, the mold cap of bottom package, and the metallized ball land on the top surface of bottom package. JEDEC JC-11 has defined the rules of two packages stacking. However, the fine pitch package stacking application will meet the process capability limitation, including thinner mold cap, wafer thinning and the lowest wire bond loop height challenges. The POP used the top gate mold chase for the bottom package to expose the metallized ball land on the top side of package which is a dedicated molding tooling. Also, some process are used for solving yield loss issues such as a POP with interposer between top package and bottom package, or a bottom package with pre-mounted the solder ball on chip side ready for top package to attach. Those are customized tooling and not a prevailing tooling that increases the developing cost and timing. To resolve the stacking process yield loss issue, a MAPPOP solution had been revealed for eliminating the limitation between the top and bottom package stacking. The assembly process of mold array package (MAP) for fine pitch BGA has been implemented for MAPPOP applications. In the paper, the package design rules, and assembly process of exposed metallized ball land on the top surface of bottom package had been discussed. Finally the warpage performance and the packaging level reliability had also been discussed and analyzed.
在系统中封装(SIP)的应用中,封装上封装(POP)堆叠越来越受欢迎。但在组装过程中,POP遇到了封装堆叠成品率损失的挑战,尤其是在顶部封装和底部封装堆叠时。关键因素是上封装的安装高度、下封装的模盖、金属化球落在下封装的上表面。JEDEC JC-11规定了两包堆叠的规则。然而,小间距封装堆叠应用将满足工艺能力的限制,包括更薄的模具帽,晶圆变薄和最低的线键环高度的挑战。POP采用底部封装的上浇口模槽,露出封装顶部的金属化球块,是专用的成型工具。此外,还有一些工艺用于解决良率损失问题,例如在顶部封装和底部封装之间使用中间插孔的POP,或者在底部封装的芯片一侧预先安装了焊接球,以便顶部封装连接。这些都是定制的工具,而不是增加开发成本和时间的主流工具。为了解决堆叠过程的良率损失问题,提出了一种MAPPOP解决方案,消除了顶部和底部封装堆叠之间的限制。针对MAPPOP应用,实现了小间距BGA的模阵封装(MAP)装配工艺。本文讨论了底部封装上表面外露金属化球块的封装设计原则和组装工艺。最后对其翘曲性能和封装级可靠性进行了讨论和分析。
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引用次数: 1
High-Q on-chip inductors embedded in wafer-level package for RFIC applications 用于RFIC应用的高q级片上电感器嵌入晶圆级封装
Tao Feng, Jian Cai, Hye-Kyong Kwon, Qian Wang, Xinyu Dou
Wafer level packaging (WLP) technology has been used to integrate high-Q inductor on Si substrate. These inductors consist of a thick Cu electroplated rerouting to reduce series resistance and a thick dielectric layer to separate the inductors from Si substrate. The measured results show that the peak O-factor is 30 at 4 GHz for a 0.77 nH inductor, which is good agreement with the simulated performance by HFSS. Therefore, this technology realizes embedded high-Q inductors in WLP and can improve the performance of RF system.
晶圆级封装(WLP)技术已被用于在硅衬底上集成高q电感器。这些电感包括一个厚的镀铜重布线,以减少串联电阻和一个厚的介电层,将电感器与硅衬底分开。测量结果表明,0.77 nH电感在4 GHz时的峰值o因子为30,与HFSS模拟性能吻合较好。因此,该技术在WLP中实现了嵌入式高q电感器,可以提高射频系统的性能。
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引用次数: 1
期刊
2008 International Conference on Electronic Packaging Technology & High Density Packaging
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