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2008 International Conference on Electronic Packaging Technology & High Density Packaging最新文献

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BGA assembly process development for 45nm ELK CUP devices 45纳米ELK CUP器件的BGA组装工艺开发
A. Tseng, B. Lin, L. Huang, M. Hung
The object of this study is to develop a set of optimized assembly process parameters for BGA package using 45 nm ELK (extreme Low-K) and CUP (circuit under pad) wafer which is driven by high speed and high I/O requested. Due to chip size shrinkage with electrical performance improvement, most of 0.13 mum and 90 nm wafer process technology are moving toward 65 nm and even 45 nm now. The ELK dielectric material for Inter-Level Dielectric (ILD) with the CUP has been designed to get more space for active circuit layout. But the poor mechanical properties of the low-k dielectric and the CUP structure circuit pad design make packaging assembly more challenges. The impacts of IC packaging assembly processes are including the wafer sawing, wire bonding, and molding process. For mass production purpose, the most effective parameters for 45 nm ELK CUP wafer have been studied such as sawing blade type, sawing speed and sawing feeding rate for different wafer thickness, the wire bond time, bond power and bond force. To solve bond wire sweep and mold void issues, the properties of different molding compounds have been studied and assembly process parameters have been optimized. In the end, a real functional die of 45 nm ELK with CUP design has been assembled into package level for reliability test using optimized process parameters.
本研究的目的是利用45 nm ELK(极低k)和CUP(片下电路)晶圆,在高速和高I/O需求的驱动下,开发一套优化的BGA封装组装工艺参数。随着电性能的提高,芯片尺寸不断缩小,目前大多数0.13 nm和90 nm晶圆制程技术正在向65 nm甚至45 nm方向发展。ELK介电材料用于带CUP的级间介电(ILD),为有源电路的布局提供了更大的空间。但是低k介电介质的力学性能差,以及CUP结构电路的设计给封装组装带来了更多的挑战。IC封装组装过程的影响包括晶圆锯切,线键合和成型过程。为了实现批量生产,研究了不同厚度的45 nm ELK CUP晶圆的锯片类型、锯切速度和锯切进料速度、焊线时间、焊线功率和焊线力等最有效的参数。为了解决焊丝扫焊和模具空洞问题,研究了不同成型化合物的性能,并优化了装配工艺参数。最后,利用优化后的工艺参数,完成了45 nm ELK CUP设计的实际功能芯片组装到封装级进行可靠性测试。
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引用次数: 3
Numerical simulation of solder spreading and solidification during solder jet bumping process 焊锡喷射碰撞过程中焊锡扩散与凝固的数值模拟
D. Tian, Chunqing Wang, Yanhong Tian
A VOF model is developed to simulate the solder spreading and solidification during solder jet bumping process. This model is based on fixed mesh method, and accounts for the surface tension, wetting effects, and heat transfer with solidification. The visualizations of the transient impact processes are employed in order to compare and validate the numerical model presented. Results show the spreading and recoiling process coupled with the solidification leads to a final cone-shaped solder bump. The variation of gravitational potential energy in the impingement is too small to be neglected. The simulated results are in excellent agreement with the photographic images.
建立了模拟焊锡喷射碰撞过程中焊锡扩散和凝固过程的VOF模型。该模型基于固定网格法,考虑了表面张力、润湿效应和凝固传热。为了比较和验证所提出的数值模型,采用了瞬态冲击过程的可视化方法。结果表明,扩散和后坐过程与凝固过程相结合,最终形成锥形凸点。碰撞过程中重力势能的变化很小,不容忽视。模拟结果与实测图像吻合良好。
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引用次数: 0
Development of moisture automation analysis system for microelectronic packaging structures 微电子封装结构水分自动化分析系统的研制
Yangjian Xia, Yuanxiang Zhang, L. Liang, Y. Liu, S. Irving, T. Luk
Moisture sensitivity of packages is an area of great concern for the electronics industry. The differential swelling of materials in a non-hermetic package during manufacture, handling, storage, assembly, and then also during its lifetime can cause stresses large enough to damage the package. A moisture automation analysis system is developed based on ANSYS Workbench and Excel platform in this paper. The goal of this paper is to develop an analysis system for moisture diffusion, hygro-mechanical stress and vapor pressure analysis automatically for different package family The application of moisture automation analysis system for moisture diffusion, vapor pressure diffusion, thermal-mechanical stress; hygro-mechanical stress; vapor equivalent thermal mismatch stress are performed. The comparisons of some results based on moisture automation analysis system with those from ANSYS are given. The results from this paper agree with those from pure ANSYS.
包装的水分敏感性是电子工业非常关注的一个领域。在非密封包装中,材料在制造、搬运、储存、组装以及在其使用寿命期间的差异膨胀会产生足够大的应力,从而损坏包装。本文基于ANSYS Workbench和Excel平台开发了一个水分自动化分析系统。本文的目标是开发一套针对不同包装系列的水分扩散、水分机械应力和蒸汽压自动分析系统。应用该系统进行水分扩散、蒸汽压扩散、热机械应力自动分析;hygro-mechanical压力;蒸汽等效热失配应力进行了计算。给出了基于水分自动化分析系统的一些结果与ANSYS的结果进行了比较。本文计算结果与纯ANSYS计算结果一致。
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引用次数: 6
Ultra-fine via pitch on flexible substrate for high density interconnect (HDI) 用于高密度互连(HDI)的柔性基板上的超细通孔间距
K. Pun, C. Q. Cui, T. Chung
In the trend of miniaturization, low cost, and the performance of electronics, high density interconnect has been required for interfacing with very fine pitch BGA, CSP and SIP. This raises a great challenge to the substrate technology and related interconnect technology in electronic packaging for high density, small feature size and high performance. Miniaturization in electronics means finer lines and smaller vias in substrate technology. Very fine lines on the substrate are difficult to produce by thicker copper layer in conventional CO2 laser blind via. In this paper, ultra-fine blind via with solid Cu filled at an entry diameter of 20 mum, over the current blind via size of 50-200 mum by CO2 laser drilling, is demonstrated on polyimide (PI) based flexible substrate. A via pitch at 30 mum for the blind via has been developed for next generation of stack die packaging accompanying with dimpless design, which ameliorates the void entrapment failure caused by soldering and direct flip-chip (FC) bonding, and strengthens interfacial bond strength. In the meantime, thinner Cu conductor at top and bottom side could be achieved for high circuit density. The reliability of the ultra-fine blind vias has been assessed in daisy chain modules at substrate level, subjected to JEDEC air-to-air thermal cycle and thermal shock, and low/high temperature storage tests. Applications in direct FC bonding and their virtues including high electrical and thermal performances, and feasible of various metals surface finishing, will be discussed. In the end, the ultra-fine Cu filled blind via technology has introduced to the production in Compass for SIP, stack die CSP, 2-metal layer chip-on-flex (COF) and multi-layer buildup flex, etc.
在电子器件小型化、低成本、高性能的趋势下,对极细间距BGA、CSP和SIP的接口提出了高密度互连的要求。这对电子封装中的衬底技术和相关互连技术提出了巨大的挑战,以实现高密度、小特征尺寸和高性能。电子学中的微型化意味着衬底技术中的细线和小过孔。在传统的CO2激光盲孔中,由于铜层较厚,很难在衬底上产生非常精细的线条。本文在基于聚酰亚胺(PI)的柔性基板上展示了一种入口直径为20微米、填充固体Cu的超细盲孔,超越了目前CO2激光钻孔的50-200微米盲孔尺寸。针对新一代叠层封装的盲孔设计,提出了一种30 μ m的盲孔设计,改善了由于焊接和直接倒装芯片(FC)键合引起的孔洞夹带失效,增强了界面结合强度。同时,在顶部和底部的铜导体更薄,可以实现更高的电路密度。在衬底级雏菊链模块中评估了超细盲孔的可靠性,并进行了JEDEC空对空热循环和热冲击以及低温/高温储存测试。讨论了其在直接FC键合中的应用,以及其高电学和热学性能和各种金属表面处理的可行性。最后介绍了超细补铜盲孔技术在Compass的SIP、叠层模CSP、2金属层片上挠性(COF)和多层堆积挠性等领域的生产。
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引用次数: 3
A lowpass filter with an embedded capacitor for wideband noise suppression in Multi-GHz PCBs 一种用于多ghz pcb中宽带噪声抑制的带有嵌入式电容的低通滤波器
Wei Gao, L. Wan, Jun Li
This paper presents a novel lowpass filter with an embedded capacitor which can substitute conventional filter network and suppress switching noise with a large bandwidth in Multi-GHz PCBs. A new design methodology of the low pass filter network is proposed. A new SPICE model of embedded capacitor based on transmission line theory is built and a comparison between H-spice and GTLE is used to illuminate its validity. With the model and finite elements method, the feature of the embedded capacitor, in which different frequency modes were excited by special exciting positions, was studied and the design procedure of an ECF was developed. As an application example, a typical power supply filter network and its replacement, an embedded capacitor with a 100 uF SMD capacitor, were studied.
本文提出了一种新型的嵌入式电容低通滤波器,可以替代传统的滤波网络,抑制多ghz pcb中大带宽的开关噪声。提出了一种新的低通滤波器网络设计方法。基于传输线理论,建立了一种新的嵌入式电容SPICE模型,并与GTLE模型进行了比较,说明了该模型的有效性。利用该模型和有限元方法,研究了嵌入式电容器在特定激励位置激励不同频率模式的特性,并制定了ECF的设计步骤。作为应用实例,研究了一种典型的电源滤波网络及其替代物——100uf贴片电容的嵌入式电容。
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引用次数: 3
Electromigration behavior of the Ni/SnZn/Cu solder interconnect Ni/SnZn/Cu焊料互连的电迁移行为
X.F. Zhang, J.D. Guo, J. Shang
Electromigration in the Ni/SnZn/Cu solder interconnect was studied with an average current density of 4.1times104A/cm2 for 168.5h at 150degC. When the electrons flowed from the Ni side to the Cu side, uniform layers of Ni5Zn21 and Cu5Zn8 were formed at the Ni/SnZn and Cu/SnZn interfaces. The results are similar to those without passage of an electric current. However, upon reversing the current direction where electron flow was from the Cu side to the Ni side, thicker Cu6Sn5 phase replaced Ni5Zn21 phase at the Ni/SnZn interface, whereas at the Cu/SnZn interface, thicker beta-CuZn phase replaced Cu5Zn8 phase. Meanwhile, Cu-Sn phases also appeared at the Cu/SnZn interface. A kinetic model, based on the Zn and Cu mass transport in the sample, was presented to explain the growth of the intermetallic compound at the anode and cathode.
研究了Ni/SnZn/Cu焊料互连中的电迁移,平均电流密度为4.1倍104a /cm2,在150℃下持续168.5h。当电子从Ni侧流向Cu侧时,在Ni/SnZn和Cu/SnZn界面处形成了均匀的Ni5Zn21和Cu5Zn8层。其结果与没有电流通过的结果相似。然而,当电子从Cu侧流向Ni侧时,在Ni/SnZn界面处,较厚的Cu6Sn5相取代了Ni5Zn21相,而在Cu/SnZn界面处,较厚的β - cuzn相取代了Cu5Zn8相。同时Cu/SnZn界面也出现Cu- sn相。提出了基于样品中Zn和Cu质量输运的动力学模型来解释金属间化合物在阳极和阴极的生长。
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引用次数: 0
Frequency dielectric constant and loss tangent extracting of organic material using multi-length microstrip 利用多长度微带提取有机材料的频率介电常数和损耗正切
S. Wu, Chi-Chang Lai, Hung-Hsiang Cheng, Yu-Che Tai, Chen-Chao Wang
Organic material using for packaging substrate is selected and multi-length microstrip lines in same trace width are designed and performed on it. Novel formulas deliver to extract dielectric constant and loss tangent varying with frequency for selected organic materials will be shown in this paper. Performances of microstrip lines are measured by Agilent vector network analyzer up to 20 GHz and SOLT calibration used to get two-port S-parameters. Then, novel formulas are used to extract material parameters in ADS software by measurement date.
选择有机材料作为封装基板,在其上设计并实现了相同走线宽度的多长度微带线。本文给出了对所选有机材料计算介电常数和损耗正切随频率变化的新公式。采用安捷伦20 GHz矢量网络分析仪测量微带线的性能,并采用SOLT校准获得双端口s参数。然后,利用新公式在ADS软件中根据测量数据提取材料参数。
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引用次数: 5
Capability study on the destructive pull test of 1 mil gold wire bond and its asymmetric distribution 金丝粘结破坏拉拔试验及其不对称分布的性能研究
Jin Peng
The statistical process control (SPC) of destructive pull test on 1 Au gold wire is studied on two high-rel devices, namely #1 and #2. It was found that the Cpk of both parts are around 1.2, which have not meet our goal of 1.33 and the ultimately six sigma (Cpk= 2). However, this study shows that the traditional method of calculating Cpk has underestimated the capability of process control if considering the tolerance as asymmetric, such as the case for 1 mil gold wire bond.
在1号和2号两台高精密设备上研究了1金丝破坏性拉拔试验的统计过程控制(SPC)。结果发现,两个零件的Cpk都在1.2左右,没有达到我们的目标1.33和最终的6西格玛(Cpk= 2)。然而,本研究表明,如果考虑到公差不对称,传统的计算Cpk的方法低估了过程控制的能力,例如1密金丝键合的情况。
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引用次数: 0
Research on the characteristics theory of reverse SoC TAM design based on dual-balanced strategy 基于双平衡策略的反向SoC TAM设计特性理论研究
Zhang Jinyi, Wang Jia, Lin Feng, Jia Yanhui, Zhou Kai
The paper presents a reverse SoC TAM design based dual-balanced strategy, which is on the basis of IEEE1500. Firstly test scheduling is executed according to the conceptual TAM architecture that is physically realizable, and then the real TAM architecture can be reversely established according to the test scheduling result. Since the test scheduling is not limited by TAM architecture, the test scheduling optimization can involve both top level and IP level and obtain the cross-level combined optimization between these two levels. The experimental results on the ITCpsila02 show the better availability and reliability and the performance improvement on test time of the proposed method, compared with several other representative approaches. Particularly, the method of this paper is based on the practical test cost, thus is of greatly practical value.
本文提出了一种基于IEEE1500双平衡策略的反向SoC TAM设计方法。首先根据物理上可实现的概念TAM体系结构执行测试调度,然后根据测试调度结果反向建立真实的TAM体系结构。由于测试调度不受TAM体系结构的限制,因此测试调度优化可以同时涉及顶层和IP层,并获得这两层之间的跨层组合优化。在ITCpsila02上的实验结果表明,与其他几种代表性方法相比,该方法具有更好的可用性和可靠性,并且在测试时间上性能有所提高。特别是本文的方法是基于实际的测试成本,因此具有很大的实用价值。
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引用次数: 0
A simplified thermal resistance network model for high power LED street lamp 大功率LED路灯热阻网络简化模型
Xiaobing Luo, Weizhi Xiong, Sheng Liu
Light emitting diode (LED) street lamp heavily relies on successful thermal management, which strongly affects the optical extraction and the reliability/durability of the LED lamp. In this study, a thermal resistance network model was presented to estimate the maximum heat sink temperature of the street lamp, which could be utilized to further evaluate the thermal performance of the street lamp. Two high power LED street lamps, an 114 watts and an 80 watts LED street lamp were used to evaluate the present model. Their heat sink temperatures were calculated by the model, the results showed that the maximum heat sink temperature was about 61degC at the environment temperature of 25degC for the 114 watts LED street lamp. For the 80 watts LED street lamp, the maximum heat sink temperature was about 42.5degC at the environment temperature of 11degC. To prove the model feasibility, experimental investigations on the 114 watts and 80 watts LED street lamp were conducted. The results demonstrated that the heat sink temperature of the 114 watts LED street lamp remained to be stable at about 60degC after several hourspsila lighting at the room temperature of 25degC. The heat sink temperature of the 80 watts LED street lamp remained to be stable at about 42degC at the room temperature of 11degC. Comparing the results achieved by the thermal resistance model with the experimental results, it was found that the proposed thermal resistance model could be used for temperature estimation and thermal evaluation for the high power street lamp.
发光二极管(LED)路灯在很大程度上依赖于成功的热管理,热管理强烈影响LED灯的光提取和可靠性/耐用性。本研究提出了一个热阻网络模型来估算路灯的最大散热温度,该模型可用于进一步评估路灯的热性能。两个大功率LED路灯,一个114瓦和一个80瓦的LED路灯被用来评估本模型。通过该模型对其散热器温度进行了计算,结果表明,114瓦LED路灯在环境温度为25℃时,其最大散热器温度约为61℃。对于80瓦LED路灯,在环境温度为11℃时,最大散热温度约为42.5℃。为了证明模型的可行性,对114瓦和80瓦LED路灯进行了实验研究。结果表明,114瓦LED路灯在室温25℃下连续照明数小时后,散热温度稳定在60℃左右。80瓦LED路灯的散热温度在室温11℃下保持稳定在42℃左右。将热阻模型的计算结果与实验结果进行比较,发现所提出的热阻模型可以用于大功率路灯的温度估算和热评价。
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引用次数: 23
期刊
2008 International Conference on Electronic Packaging Technology & High Density Packaging
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