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2008 International Conference on Electronic Packaging Technology & High Density Packaging最新文献

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Design advisor for package-on-package (PoP) manufacturing 包对包(PoP)制造的设计顾问
B. Xie, P. Sun, D. Shi
The needs to integrate devices into portable products with smaller form factor and more functionality have fueled enormous growth of 3D packaging technology. The package-on-package (PoP) is one of the 3D packaging solutions, by which the packaging and assembly houses can achieve a lower cost, faster turn benefits and testing prior to assembly. PoP is a complicated system with multi-layered structure, which induces more manufacturability issues, such as stand-off height issue and top & bottom packages having different types of warpage. In order to reduce R&D cost, achieve fast time-to-market and address most of the manufacturability issues during the development of a new PoP, a design advisor for PoP manufacturing has been developed based on the design for manufacturability (DFM) methodology. The key components of this design advisor are the validated numerical models, comprehensive materials library, design guidelines of PoP packaging and novel finite element analysis (FEA) techniques. With the developed novel FEA techniques for curing process simulation and seamless packaging process simulation, complete numerical models for PoP manufacturing were developed and validated, which can simulate the whole PoP manufacturing processes. The design advisor is easy to use by selecting package geometries, material properties and process parameters. By running the envelope-based design advisor for normal package design or the FEA-based design advisor for special package design, the detailed analysis reports can be generated, including simulation results, design evaluations and recommendations to ensure the first-time success of package design. Therefore, the design advisor can help improve the yield of complex PoP manufacturing processes leading to higher quality and confidence of manufacturing processes, faster time-to-market and lower overall manufacturing cost.
将设备集成到具有更小尺寸和更多功能的便携式产品中的需求推动了3D封装技术的巨大增长。封装对封装(PoP)是一种3D封装解决方案,通过它,封装和装配厂可以实现更低的成本、更快的周转效益和组装前的测试。PoP是一个复杂的多层结构系统,它带来了更多的可制造性问题,如超限高度问题和上下封装存在不同类型翘曲的问题。为了降低研发成本,加快产品上市速度,解决新型PoP开发过程中的大多数可制造性问题,基于可制造性设计(DFM)方法开发了PoP制造设计顾问。该设计顾问的关键组成部分是经过验证的数值模型、综合材料库、PoP包装设计指南和新颖的有限元分析技术。利用新兴的固化过程模拟和无缝封装过程模拟有限元分析技术,建立并验证了完整的PoP制造数值模型,可以模拟PoP制造的整个过程。通过选择包装几何形状、材料特性和工艺参数,设计顾问易于使用。通过运行基于信封的普通包装设计顾问或基于有限元的特殊包装设计顾问,可以生成详细的分析报告,包括仿真结果、设计评估和建议,以确保包装设计的首次成功。因此,设计顾问可以帮助提高复杂PoP制造过程的产量,从而提高制造过程的质量和信心,加快上市时间并降低总体制造成本。
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引用次数: 9
C4NP for Pb-free solder wafer bumping and 3D fine-pitch applications C4NP用于无铅焊料晶圆碰撞和3D细间距应用
D. Shih, B. Dang, P. Gruber, M. Lu, S. Kang, S. Buchwalter, J. Knickerbocker, E. Perfecto, J. Garant, S. Knickerbocker, K. Semkow, B. Sundlof, J. Busby, R. Weisman, K. Ruhmer, E. Hughlett
Controlled collapse chip connection - new process (C4NP) technology is a novel solder bumping technology developed by IBM to address the limitations of existing bumping technologies. Through continuous improvements in processes, materials and defect control, C4NP technology has been successfully implemented at IBM in the manufacturing of all 300 mm Pb-free solder bumped wafers. Both 200 mum and 150 mum pitch products have been qualified and are currently ramping up volume production. Extendibility of C4NP to 50 mum ultra-fine pitch microbump application has been successfully demonstrated with the existing C4NP manufacturing tools. Targeted applications for microbumps are three-dimensional (3D) chip integration and the conversion of memory wafers from wirebonding (WB) to C4 bumping. The metrology data on solder volume, bump height, defect and yield have been characterized by RVSI inspection. This paper reviews the C4NP processes from mold manufacturing, solder fill and solder transfer onto 300 mm wafers, along with defect and yield analysis. Reliability challenges as well as solutions in the development and qualification of flip chip Pb-free solder joint are also reviewed. In addition to a suitable under bump metallurgy (UBM), a robust lead-free solder alloy with precisely controlled composition and special alloy doping is needed to enhance performance and reliability.
控制折叠芯片连接-新工艺(C4NP)技术是IBM为解决现有碰撞技术的局限性而开发的一种新型焊料碰撞技术。通过对工艺、材料和缺陷控制的不断改进,C4NP技术已成功地在IBM制造了所有300毫米无铅凸点晶圆。200米和150米的产品都已通过认证,目前正在批量生产。利用现有的C4NP制造工具成功地演示了C4NP到50微米超细间距微凸点应用的可扩展性。微凸点的目标应用是三维(3D)芯片集成和从线键合(WB)到C4凸点的存储晶圆转换。对焊料体积、凸点高度、缺陷和成品率等计量数据进行了RVSI检测表征。本文回顾了C4NP工艺从模具制造,焊料填充和焊料转移到300mm晶圆上,以及缺陷和良率分析。回顾了倒装无铅焊点在开发和鉴定过程中面临的可靠性挑战以及解决方案。为了提高焊料的性能和可靠性,除了需要一种适用于碰撞冶金(UBM)的焊料合金外,还需要一种具有精确控制成分和特殊合金掺杂的坚固无铅焊料合金。
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引用次数: 6
Parametric study on board-level electronic test device subjected to JEDEC vibration loads JEDEC振动载荷下板级电子测试装置的参数化研究
Chang-Lin Yeh, Y. Lai, Ching-Chun Wang
We derive in this paper equations of motion of board-level IC packages subjected to swept sine vibration loads following the support excitation scheme. Harmonic analysis is performed based on the argument such that at each loading state over the swept sine process, hysteresis responses of solder joints following the isotropic hardening rule vanish fairly quickly so that plasticity is fully developed. Computed and measured acceleration response spectra of a board-level test vehicle are benchmarked. Stress-based failure indices as well as elastoplastic responses and strain rates of solder joints are examined for the test vehicle subjected to swept sine vibration tests of different acceleration levels with vibration frequencies up to 2 kHz.
本文推导了支撑激励方案下板级集成电路封装在扫频正弦振动载荷作用下的运动方程。谐波分析基于这样的论点:在扫频正弦过程的每个加载状态下,遵循各向同性硬化规则的焊点的滞后响应消失得相当快,从而使塑性得到充分发展。对一台板级试验车的计算和实测加速度响应谱进行了基准测试。在振动频率高达2khz的不同加速度水平下,对试验车辆的应力失效指标、焊点弹塑性响应和应变率进行了测试。
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引用次数: 3
Reliability study of flexible display module by experiments 柔性显示模块可靠性实验研究
Q. Chen, Leon Xu, A. Salo, Gustavo Neto, Germano Freitas
Flexible display module reliability were investigated herein with experiments, such as bending, twisting and ball drop. The pretests of all the three experiments were carried out firstly to primarily understand the flexibility and mechanical behavior of the display. Based on the pretest results, the corresponding fatigue test setup method and process were put forward. Then, the fatigue tests were executed. At last, through the failure analysis, the flexibility and reliability of the flexible display in different use cases were evaluated. Suggestions about how to use the display and improve the reliability through change the design were given also.
通过弯曲、扭曲、落球等实验,对柔性显示模块的可靠性进行了研究。首先进行了三个实验的预测试,初步了解了显示器的柔性和力学性能。根据预试结果,提出了相应的疲劳试验设置方法和流程。然后进行了疲劳试验。最后,通过故障分析,对柔性显示器在不同用例下的灵活性和可靠性进行了评估。并对如何使用显示器和通过改变设计来提高可靠性提出了建议。
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引用次数: 17
Mold array package for POP applications 用于POP应用的模具阵列包
A. Lee, Louie Huang, M. Hung
The package on package (POP) stacking is getting more and more popular for system in package (SIP) applications. But during the assembly process, the POP had encountered the challenge of packages stacking yield loss, especially when top package and bottom package stacking. The key factors are the mount height of top package, the mold cap of bottom package, and the metallized ball land on the top surface of bottom package. JEDEC JC-11 has defined the rules of two packages stacking. However, the fine pitch package stacking application will meet the process capability limitation, including thinner mold cap, wafer thinning and the lowest wire bond loop height challenges. The POP used the top gate mold chase for the bottom package to expose the metallized ball land on the top side of package which is a dedicated molding tooling. Also, some process are used for solving yield loss issues such as a POP with interposer between top package and bottom package, or a bottom package with pre-mounted the solder ball on chip side ready for top package to attach. Those are customized tooling and not a prevailing tooling that increases the developing cost and timing. To resolve the stacking process yield loss issue, a MAPPOP solution had been revealed for eliminating the limitation between the top and bottom package stacking. The assembly process of mold array package (MAP) for fine pitch BGA has been implemented for MAPPOP applications. In the paper, the package design rules, and assembly process of exposed metallized ball land on the top surface of bottom package had been discussed. Finally the warpage performance and the packaging level reliability had also been discussed and analyzed.
在系统中封装(SIP)的应用中,封装上封装(POP)堆叠越来越受欢迎。但在组装过程中,POP遇到了封装堆叠成品率损失的挑战,尤其是在顶部封装和底部封装堆叠时。关键因素是上封装的安装高度、下封装的模盖、金属化球落在下封装的上表面。JEDEC JC-11规定了两包堆叠的规则。然而,小间距封装堆叠应用将满足工艺能力的限制,包括更薄的模具帽,晶圆变薄和最低的线键环高度的挑战。POP采用底部封装的上浇口模槽,露出封装顶部的金属化球块,是专用的成型工具。此外,还有一些工艺用于解决良率损失问题,例如在顶部封装和底部封装之间使用中间插孔的POP,或者在底部封装的芯片一侧预先安装了焊接球,以便顶部封装连接。这些都是定制的工具,而不是增加开发成本和时间的主流工具。为了解决堆叠过程的良率损失问题,提出了一种MAPPOP解决方案,消除了顶部和底部封装堆叠之间的限制。针对MAPPOP应用,实现了小间距BGA的模阵封装(MAP)装配工艺。本文讨论了底部封装上表面外露金属化球块的封装设计原则和组装工艺。最后对其翘曲性能和封装级可靠性进行了讨论和分析。
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引用次数: 1
A design for increasing the immunity to RFI of protection IC of lithium-ion battery 一种提高锂离子电池保护IC抗射频干扰能力的设计
Dongfang Cheng, Jue Zhang, Xiaohui Li, Jiongming Wang
Illustrated by the case of a lithium-ion battery protection IC, the paper focuses on the design of internal immunity to RFI. With analysis of the chippsilas three major elements of electromagnetic compatibility (EMC), the qualitative and quasi-quantitative analysis results of RFI influence to the chip are given out. By using a simple filter circuit and available material physical construction which can isolate, absorb and consume the RFI energy, the protection ICpsilas electromagnetic susceptibility has been reduced effectively. The simulation of the devised structure in the time domain is gained by Winspice, and tool IC_EMC makes it possible of the conversion from time domain to frequency domain in which the spectrum analysis is completed. The design has passed the simulation verification and the layout implement of the devised construction designed is also available.
本文以锂离子电池保护集成电路为例,重点研究了内部抗射频干扰的设计。通过对芯片电磁兼容(EMC)三大要素的分析,给出了射频干扰对芯片影响的定性和准定量分析结果。采用简单的滤波电路和可隔离、吸收和消耗RFI能量的现有材料物理结构,有效地降低了保护电感的电磁磁化率。利用Winspice软件对所设计的结构进行了时域仿真,并利用IC_EMC工具实现了从时域到频域的转换,从而完成了频谱分析。该设计通过了仿真验证,并给出了所设计结构的布置图。
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引用次数: 1
Study of plasticity damage mechanics constitutive model for SnAgCu solder joint SnAgCu焊点塑性损伤力学本构模型研究
Xiaoyan Li, Yongchang Yan, Na Liu
A thermodynamics-based damage mechanics rate dependent constitutive model is used to simulate experiments conducted on thin layer eutectic SnAgCu(SAC) solder joints. The non-damage constitutive is measured by bulk tensile test. The relationship between true stress and strain is sigma=85.26epsiv0.3536. Damage evolution equation is proposed based Lemaitre ductile damage theory and the constant in the equation is measured by unloading elastic modulus method. The damage evolution equation is D=1.0689epsivP-0.0008. Simulation (using software Ansys 9.0) of shear test of solder joint between Cu sticks employing damage mechanics rate independent constitutive is uniform to practicable test.
采用基于热力学的损伤力学速率相关本构模型,对薄层共晶SnAgCu(SAC)焊点进行了实验模拟。非损伤本构通过体拉伸试验测量。真实应力与应变的关系为σ =85.26epsiv0.3536。基于Lemaitre延性损伤理论建立了损伤演化方程,并采用卸载弹性模量法测量了方程中的常数。损伤演化方程为D=1.0689epsivP-0.0008。采用损伤力学速率无关本构的铜棒间焊点剪切试验模拟(软件Ansys 9.0)与实际试验结果一致。
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引用次数: 2
A new process to fabricate cavities in Pyrex7740 glass for high density packaging of micro-system 提出了一种在Pyrex7740玻璃中制备微系统高密度封装空腔的新工艺
Junwen Liu, Qing‐An Huang, J. Shang, Jing Song, Jie-ying Tang
In the domain of manufacturing and packaging of micro-system, the Pyrex7740 glass is a widely-used material since its coefficient of thermal expansion is similar to that of silicon, and its good optical performance for biosensors and optical sensors. But the use of Pyrex7740 glass is limited for its isotropic etching characteristic of tradition micro-machining. In this paper, we present a new process to fabricate deep grooves in Pyrex7740 glass. The process is based on the anodic bonding, and it uses the Si substrate as the mold for forming the shape of the cavity. Finally the cavities were formed by the atmospheric pressure after the special heat treatment. The Pyrex7740 glass with cavities could be used for high density packaging of micro-system by anodic bonding or adhesive bonding. The approach of fabricating deep cavities in Pyrex7740 glass is a key technology, which has seldom studied before. We have experimentally verified the feasibility of this new process. First of all, we fabricated the array of desired shape of cavities on silicon substrate by wet etching or dry etching. It is much easier to get the precise shape on the silicon substrate by micro machining than in Pyrex7740 glass. In our experiment, we had chosen several different side length of the square as a pattern. Then we bonded the Pyrex7740 glass and the silicon substrate together under the vacuum environment by anodic bonding. After that twice heat treatments were taken to the bonding wafer. One was to form the Pyrex7740 glass into desired shape by the silicon mold with the temperature up to the softening point. Another was to release thermal stress of the anodic bonding and the first heat treatment. The placement of the wafer during the heat treatment must be taken attention to. Finally, the bonding wafer with cavities was finished for the high density packaging of micro-system.
在微系统制造和封装领域,Pyrex7740玻璃具有与硅相似的热膨胀系数,在生物传感器和光学传感器中具有良好的光学性能,是一种广泛使用的材料。但由于传统微加工的各向同性蚀刻特性,限制了Pyrex7740玻璃的使用。本文提出了一种在Pyrex7740玻璃上制造深沟槽的新工艺。该工艺以阳极键合为基础,使用Si衬底作为形成腔体形状的模具。最后经特殊热处理,在常压作用下形成空腔。带腔的Pyrex7740玻璃可用于微系统的高密度封装。在Pyrex7740玻璃中制造深空腔的方法是一项关键技术,以往研究很少。我们通过实验验证了这种新工艺的可行性。首先,我们采用湿法蚀刻或干法蚀刻在硅衬底上制备出所需形状的空腔阵列。与Pyrex7740玻璃相比,通过微加工在硅衬底上获得精确的形状要容易得多。在我们的实验中,我们选择了几个不同边长的正方形作为图案。然后在真空环境下通过阳极键合将Pyrex7740玻璃与硅衬底结合在一起。然后对键合晶片进行两次热处理。一种是利用硅模具将Pyrex7740玻璃在温度达到软化点的情况下形成所需的形状。另一种是释放热应力的阳极键合和第一次热处理。在热处理过程中必须注意晶圆片的放置。最后,完成了用于微系统高密度封装的空腔键合晶片。
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引用次数: 4
Vibration and buckling of a carbon nanotube inserted with a carbon chain 插入碳链的碳纳米管的振动和屈曲
Zhili Hu, X. Guo, J. Liu
An elastic string-elastic shell model is developed to study vibration behaviors of a carbon nanowire. The present model predicts that non-coaxial vibration between the C-chain and the innermost tube does not occur due to negligible bending rigidity of the C-chain. In addition, it is found that the C-chain has most significant effect on the lowest frequency associated with radial vibration mode for circumferential wave-number 2 (n=2). In particular, the effect of the C-chain on axisymmetric radial breathing frequencies (n=0) predicted by the present model is found to be in reasonable agreement with known experimental and modeling results available in the literature.
为了研究碳纳米线的振动特性,建立了弹性弦-弹性壳模型。该模型预测,由于c链的弯曲刚度可以忽略不计,因此c链与最内层管之间不会发生非同轴振动。此外,对于周向波数2 (n=2), c链对与径向振型相关的最低频率的影响最为显著。特别是,本模型预测的c链对轴对称径向呼吸频率(n=0)的影响与文献中已知的实验和建模结果基本一致。
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引用次数: 0
A new method for the investigation of strip warpage of MAP-QFN 一种研究MAP-QFN带材翘曲的新方法
Guohua Gao, Honghui Wang, Guoji Yang, Haiqing Zhu
Electronic package plays an important part in the development of IC industry. As we all known, strip warpage is a critical issue for the MAP-QFN manufacturing, results from the package structure, the thermal mismatch of materials and the manufacturing process. In this paper, a new finite element model was used to predict the warpage of one MAP-QFN block. And in this model, the temperature-dependent parameters of materials were characterized by DMA and DSC measurements, and the boundary condition was set up to be close to the real deforming situation. Furthermore, by the geometric triangle principle, the calculated warpage was also verified with the experiment measurement data. Finally we accomplished the optimization of related package parameters, and decreased the warpage of MAP-QFN by applying the dead weight on the strip block in the post mould curing process.
电子封装在集成电路产业的发展中起着重要的作用。众所周知,带材翘曲是MAP-QFN制造中的一个关键问题,它是由封装结构、材料热失配和制造工艺造成的。本文采用一种新的有限元模型来预测MAP-QFN块体的翘曲。在该模型中,通过DMA和DSC测量对材料的温度相关参数进行表征,并建立了接近实际变形情况的边界条件。利用几何三角形原理,将计算的翘曲量与实验测量数据进行了验证。最后完成了相关封装参数的优化,并在模后固化过程中对带块施加自重,减小了MAP-QFN的翘曲。
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引用次数: 4
期刊
2008 International Conference on Electronic Packaging Technology & High Density Packaging
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