Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334625
Rui-jin Wang, Jianzhong Lin
Movement of aggregated chains in magnetic fluid was caused by the rotation of external magnetic field to break the laminar flow for resulting in the chaotic flow and improving the mixing efficiency of the fluid. The experiments were performed with varying strength of magnetic field, rotation frequency and flow rate using micro particle image velocimetry (micro-PIV) technique. The results show that there is no obvious effect of the external magnetic field on the mixing efficiency when the magnetic field is strong enough to rotate the aggregated chains. However, the rotation frequency influences the mixing efficiency greatly. A critical value of the rotation frequency was found, below and above which the mixing efficiency increases and decreases with increasing the rotation frequency, respectively. It is helpful to design the magnetic micro-mixer
{"title":"Experimental Research on Mixing Efficiency of Magnetic Micromixer","authors":"Rui-jin Wang, Jianzhong Lin","doi":"10.1109/NEMS.2006.334625","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334625","url":null,"abstract":"Movement of aggregated chains in magnetic fluid was caused by the rotation of external magnetic field to break the laminar flow for resulting in the chaotic flow and improving the mixing efficiency of the fluid. The experiments were performed with varying strength of magnetic field, rotation frequency and flow rate using micro particle image velocimetry (micro-PIV) technique. The results show that there is no obvious effect of the external magnetic field on the mixing efficiency when the magnetic field is strong enough to rotate the aggregated chains. However, the rotation frequency influences the mixing efficiency greatly. A critical value of the rotation frequency was found, below and above which the mixing efficiency increases and decreases with increasing the rotation frequency, respectively. It is helpful to design the magnetic micro-mixer","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"17 1","pages":"74-77"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80768380","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334777
H. Chan, N. Xi, Jiangbo Zhang, Guangyong Li
Carbon nanotube (CNT) is found to be an amazing material for nanoelectronics due to its unique properties. It provides the possibility of miniaturizing the traditional electronic elements. Recently, people have been focusing on exploring its applications on optoelectronics because CNT is a direct bandgap material and its bandgap is inversely related to its diameter. Thus, it is ease for photon adsorption or generation with different wavelengths. In this paper, we presented the modification of the diameter of a single multi-walled carbon nanotube (s-MWNT) by electrical breakdown of nanotube walls. Thus, the conduction mechanism of the single carbon nanotube (s-CNT) can change from conducting to semi-conducting. Also, the barrier height of the s-CNT based diode which is fabricated by using atomic force microscopy based nanomanipulation system, can be indirectly modified, which has the same effect from CNT doping. The breakdown of a MWNT was investigated using atomic force microscopy (AFM) and the diameter, changed from 60 nm to ~10 nm, was measured at each step of breakdowns. Using this modification technique, the s-CNT based diode can potentially be used in optoelectronics
{"title":"Tuning Semiconducting Properties of Single Carbon Nanotube for Fabrication of Nano Devices","authors":"H. Chan, N. Xi, Jiangbo Zhang, Guangyong Li","doi":"10.1109/NEMS.2006.334777","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334777","url":null,"abstract":"Carbon nanotube (CNT) is found to be an amazing material for nanoelectronics due to its unique properties. It provides the possibility of miniaturizing the traditional electronic elements. Recently, people have been focusing on exploring its applications on optoelectronics because CNT is a direct bandgap material and its bandgap is inversely related to its diameter. Thus, it is ease for photon adsorption or generation with different wavelengths. In this paper, we presented the modification of the diameter of a single multi-walled carbon nanotube (s-MWNT) by electrical breakdown of nanotube walls. Thus, the conduction mechanism of the single carbon nanotube (s-CNT) can change from conducting to semi-conducting. Also, the barrier height of the s-CNT based diode which is fabricated by using atomic force microscopy based nanomanipulation system, can be indirectly modified, which has the same effect from CNT doping. The breakdown of a MWNT was investigated using atomic force microscopy (AFM) and the diameter, changed from 60 nm to ~10 nm, was measured at each step of breakdowns. Using this modification technique, the s-CNT based diode can potentially be used in optoelectronics","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"2012 1","pages":"1410-1413"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89807809","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334732
Weili Wang, Y. Fei, K. Fan
An improved XY positioning stage having a coplanar structure design, which makes the guide planes in X- and Y-directions are of the same height. As a result, the Abbe's error and the cumulative error can be reduced. Symmetric structure, linear slide ways and low thermal expansion material are all considered to achieve low structure distortion and thermal shift with impacted force and temperature change. Finite element analysis modeling techniques were used to optimize the configuration and parameters of the stage. Integrated with ultrasonic actuator and the linear diffraction grating interferometer, the straightness of the guide way and the measuring repeatability of the stage have been proved. Experimental results have shown that the stage has a higher straightness less than 5" and the repeatability less than 30 nm in fine motion
{"title":"Investigation of Nanometer XY Positioning Stage","authors":"Weili Wang, Y. Fei, K. Fan","doi":"10.1109/NEMS.2006.334732","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334732","url":null,"abstract":"An improved XY positioning stage having a coplanar structure design, which makes the guide planes in X- and Y-directions are of the same height. As a result, the Abbe's error and the cumulative error can be reduced. Symmetric structure, linear slide ways and low thermal expansion material are all considered to achieve low structure distortion and thermal shift with impacted force and temperature change. Finite element analysis modeling techniques were used to optimize the configuration and parameters of the stage. Integrated with ultrasonic actuator and the linear diffraction grating interferometer, the straightness of the guide way and the measuring repeatability of the stage have been proved. Experimental results have shown that the stage has a higher straightness less than 5\" and the repeatability less than 30 nm in fine motion","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"320-324"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89504578","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334666
Lei Jin, L. Qiang, Ying Xie, H. Fu
Lithium niobate (LiNbO3) is one of the most important ferroelectric and nonlinear optical crystals and has many technological applications. But few fundamental theoretical studies on it are reported. The band structure and optical properties of this crystal are calculated within the framework of density functional theory with generalized gradient approximation (DFT-GGA). The results show that the band gap at the G point of brillouin zone is 3.54 eV, which is more close to the experimental value than that from LDA calculations, and that the optical properties of LN crystal, such as the reflectivity and the imaginary part of the dielectric function, are anisotropic along different polarization directions. The relation between electronic structure and optical properties are also discussed
{"title":"First-principle Calculations of Optical Properties of LiNbO3","authors":"Lei Jin, L. Qiang, Ying Xie, H. Fu","doi":"10.1109/NEMS.2006.334666","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334666","url":null,"abstract":"Lithium niobate (LiNbO3) is one of the most important ferroelectric and nonlinear optical crystals and has many technological applications. But few fundamental theoretical studies on it are reported. The band structure and optical properties of this crystal are calculated within the framework of density functional theory with generalized gradient approximation (DFT-GGA). The results show that the band gap at the G point of brillouin zone is 3.54 eV, which is more close to the experimental value than that from LDA calculations, and that the optical properties of LN crystal, such as the reflectivity and the imaginary part of the dielectric function, are anisotropic along different polarization directions. The relation between electronic structure and optical properties are also discussed","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"56 1","pages":"1138-1141"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88004458","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334651
J.N. Ding, G. Xie, Z. Fan, P. Yang, Q. Wang
A comparative study of the micro-tribological properties of silicon-based component and octadecyltrichlorosilane (OTS) molecular lubricant film which was prepared on Si(100) substrate, and their adhesive and tribological properties were mainly investigated by AFM/LFM. Meanwhile, the effect of relative humidity and scanning velocity was taken into consideration. The results show that the adhesive force of OTS film is much smaller the one of Si (100) substrate which leads to a relatively low friction coefficient, thereby the OTS film presents better lubricant performance; Besides, the Si(100) substrate is much more affected by the variation of humidity than OTS film; The velocity effect on the frictional performance is more significant for Si(100) component due to the Si(OH)4 lubricant film caused by the tribo-chemical reaction. A thermally activated capillary condensation model while taking the surface roughness effect into consideration is also adopted to explain the humidity and velocity effects on the adhesive and tribological properties theoretically. In addition, the durability tests indicate that the OTS lubricant film exhibits not only better wearability but also stability comparatively
{"title":"Experimental Study of Tribological Properties of Silicon-Based MEMS/NEMS Surface with Atomic Force Microscope","authors":"J.N. Ding, G. Xie, Z. Fan, P. Yang, Q. Wang","doi":"10.1109/NEMS.2006.334651","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334651","url":null,"abstract":"A comparative study of the micro-tribological properties of silicon-based component and octadecyltrichlorosilane (OTS) molecular lubricant film which was prepared on Si(100) substrate, and their adhesive and tribological properties were mainly investigated by AFM/LFM. Meanwhile, the effect of relative humidity and scanning velocity was taken into consideration. The results show that the adhesive force of OTS film is much smaller the one of Si (100) substrate which leads to a relatively low friction coefficient, thereby the OTS film presents better lubricant performance; Besides, the Si(100) substrate is much more affected by the variation of humidity than OTS film; The velocity effect on the frictional performance is more significant for Si(100) component due to the Si(OH)4 lubricant film caused by the tribo-chemical reaction. A thermally activated capillary condensation model while taking the surface roughness effect into consideration is also adopted to explain the humidity and velocity effects on the adhesive and tribological properties theoretically. In addition, the durability tests indicate that the OTS lubricant film exhibits not only better wearability but also stability comparatively","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"47 1","pages":"116-120"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85803464","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334829
L. Li, R. Zhu, Zhaoying Zhou
The squeeze film damping effect generating from the sealed air gap between a vibrating circular thin plate and a fixed substrate is analyzed in this paper. Both the Bessel series technique and the Rayleigh-Ritz energy method are utilized to investigate the gas damping effect on the micro airflow in a sealed chamber. The air pressure distribution of the squeeze film air damping is determined by solving the nondimensionalized and linearized isothermal compressible Reynolds' equation and combined with the sealed pressure boundary condition. The coupled model of piezoelectric-Si film-micro airflow is derived according to the Rayleigh-Ritz energy method. The air damping factor is extracted. By adding and removing the air damping factor, there is no obvious variation of the resonance frequency of piezoelectric-Si film-airflow coupled vibration. The relation between the bending displacement and the cavity depth indicates that the effects of air damping become more intensive with the reducing of cavity depth
{"title":"Squeeze Film Damping Effect of the Micro Airflow in a Sealed Chamber","authors":"L. Li, R. Zhu, Zhaoying Zhou","doi":"10.1109/NEMS.2006.334829","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334829","url":null,"abstract":"The squeeze film damping effect generating from the sealed air gap between a vibrating circular thin plate and a fixed substrate is analyzed in this paper. Both the Bessel series technique and the Rayleigh-Ritz energy method are utilized to investigate the gas damping effect on the micro airflow in a sealed chamber. The air pressure distribution of the squeeze film air damping is determined by solving the nondimensionalized and linearized isothermal compressible Reynolds' equation and combined with the sealed pressure boundary condition. The coupled model of piezoelectric-Si film-micro airflow is derived according to the Rayleigh-Ritz energy method. The air damping factor is extracted. By adding and removing the air damping factor, there is no obvious variation of the resonance frequency of piezoelectric-Si film-airflow coupled vibration. The relation between the bending displacement and the cavity depth indicates that the effects of air damping become more intensive with the reducing of cavity depth","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"117 1","pages":"509-512"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86641856","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334802
Xianfang Zhu
The solid phase epitaxial regrowth of structurally modified amorphous silicon created by self-ion implantation into nanovoided crystalline silicon is investigated. It is demonstrated that although the modified amorphous silicon is fully reconstructed into single crystal during the epitaxial regrowth, both activation energy and atom attempt frequency for the regrowth are much higher than those of the typical amorphous Si induced by self-ion implantation into Si wafer without nanovoids. The novel regrowth kinetics indicates that the modified amorphous silicon would contain a very high concentration of dangling bonds, which are believed to result from dissociation of the nanovoids originally metastabilized in crystalline silicon. The unparalleled sensitivity of SPEG provides an effective and simple way to detect and characterize the subtle structural changes at nanometer scale in amorphous Si
{"title":"Kinetics of Solid Phase Epitaxy of Amorphous Si Induced by Self-ion Implantation into Si with Nanocavities","authors":"Xianfang Zhu","doi":"10.1109/NEMS.2006.334802","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334802","url":null,"abstract":"The solid phase epitaxial regrowth of structurally modified amorphous silicon created by self-ion implantation into nanovoided crystalline silicon is investigated. It is demonstrated that although the modified amorphous silicon is fully reconstructed into single crystal during the epitaxial regrowth, both activation energy and atom attempt frequency for the regrowth are much higher than those of the typical amorphous Si induced by self-ion implantation into Si wafer without nanovoids. The novel regrowth kinetics indicates that the modified amorphous silicon would contain a very high concentration of dangling bonds, which are believed to result from dissociation of the nanovoids originally metastabilized in crystalline silicon. The unparalleled sensitivity of SPEG provides an effective and simple way to detect and characterize the subtle structural changes at nanometer scale in amorphous Si","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"15 1","pages":"470-474"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78608336","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334701
Mingfei Xiao, Zhaoying Zhou, Xing Yang, Yingfei Wu, Shangfeng Liu
The physical quantity which is acquired from biological electrical impedance spectroscopy (EIS) can reflect the plentiful biological electrical characteristics. A microfabricated chip and related measurement system, which could be used for electrical impedance spectroscopy analysis, were introduced in this paper. A novel EIS measurement method is emerging. Based on the preliminary experimental results, the HeLa cell suspensions with different physiological status could be measured and distinguished. A 6-elements equivalent circuit model was used to simulate the experimental results. The micro chip has some advantages, such as high resolution and ease of operation. It shows application potentials in the fields of cellular electrophysiology, drug screening and bio-sensors, etc
{"title":"Simulation and Experiment Analysis for Electrical Property of Cell Suspension by Micro Chip","authors":"Mingfei Xiao, Zhaoying Zhou, Xing Yang, Yingfei Wu, Shangfeng Liu","doi":"10.1109/NEMS.2006.334701","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334701","url":null,"abstract":"The physical quantity which is acquired from biological electrical impedance spectroscopy (EIS) can reflect the plentiful biological electrical characteristics. A microfabricated chip and related measurement system, which could be used for electrical impedance spectroscopy analysis, were introduced in this paper. A novel EIS measurement method is emerging. Based on the preliminary experimental results, the HeLa cell suspensions with different physiological status could be measured and distinguished. A 6-elements equivalent circuit model was used to simulate the experimental results. The micro chip has some advantages, such as high resolution and ease of operation. It shows application potentials in the fields of cellular electrophysiology, drug screening and bio-sensors, etc","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"35 1","pages":"1216-1219"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80008532","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334596
Qinwen Huang, Kai Li, Binbin Jiao, Tianchun Ye, Dapeng Chen, Y. Ou, Chaobo Li, Qingchuan Zhang
Microfabricated cantilevers have recently become increasingly popular as transducers in chemical and biological sensors. Here, an evaluation of laboratory prototype that is microcantilever-based optical detection is demonstrated. Surface stress changes when molecules adsorb on cantilevers surface, which offers an attractive way to chemical and biological detection by measuring the bending of cantilevers. In this work, different figures of cantilevers were fabricated. Preliminary evaluation of these microfabricated cantilevers was performed by comparing the intensity of reflecting light on the end surfaces of different cantilever figures and the stability of different cantilever figures in liquid. The result demonstrated that triangle cantilever with paddle acting as a flat mirror has better performance of light reflecting and stability in liquid. Then, cantilevers-based sensors were used to detect the conformational changes in PNIPAM molecules with temperature changing
{"title":"Cantilever-based Transducer for Molecules Configuration Research","authors":"Qinwen Huang, Kai Li, Binbin Jiao, Tianchun Ye, Dapeng Chen, Y. Ou, Chaobo Li, Qingchuan Zhang","doi":"10.1109/NEMS.2006.334596","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334596","url":null,"abstract":"Microfabricated cantilevers have recently become increasingly popular as transducers in chemical and biological sensors. Here, an evaluation of laboratory prototype that is microcantilever-based optical detection is demonstrated. Surface stress changes when molecules adsorb on cantilevers surface, which offers an attractive way to chemical and biological detection by measuring the bending of cantilevers. In this work, different figures of cantilevers were fabricated. Preliminary evaluation of these microfabricated cantilevers was performed by comparing the intensity of reflecting light on the end surfaces of different cantilever figures and the stability of different cantilever figures in liquid. The result demonstrated that triangle cantilever with paddle acting as a flat mirror has better performance of light reflecting and stability in liquid. Then, cantilevers-based sensors were used to detect the conformational changes in PNIPAM molecules with temperature changing","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"12 1","pages":"989-993"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79571355","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334603
Zhiqiang Zhao, Xiaolin Zheng, Jun Yang, Xiaoying Wu, Xiaoguang Hei, Yong-yong Cao
Commonly, microelectrodes used in microfluidics are made from copper, Au or Pt. They are difficult to fabricate and the cost is relatively high. Thus, we designed and fabricated a novel microelectrode made from silicon for it is cheap and easy to fabricate. It has been proven that cells can be manipulated by dielectrophoresis force producing on interdigitated electrodes. In addition, the direction and velocity of cell motion could be controlled by altering the voltage and frequency. The interdigitated electrodes consist of linear and spiculate electrodes. After human hepatocarcinoma SMMC-7721 cells in PBS were dropped on microchip, they were attracted to electrodes with a velocity up to 45 mus, which is large enough to flow across the channel. This kind of electrodes can also be used for cell engineering, such as cell fusion and cell electroporation.
{"title":"Dielectrophoretic Manipulation of Cells by Using Interdigitated Microelectrodes","authors":"Zhiqiang Zhao, Xiaolin Zheng, Jun Yang, Xiaoying Wu, Xiaoguang Hei, Yong-yong Cao","doi":"10.1109/NEMS.2006.334603","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334603","url":null,"abstract":"Commonly, microelectrodes used in microfluidics are made from copper, Au or Pt. They are difficult to fabricate and the cost is relatively high. Thus, we designed and fabricated a novel microelectrode made from silicon for it is cheap and easy to fabricate. It has been proven that cells can be manipulated by dielectrophoresis force producing on interdigitated electrodes. In addition, the direction and velocity of cell motion could be controlled by altering the voltage and frequency. The interdigitated electrodes consist of linear and spiculate electrodes. After human hepatocarcinoma SMMC-7721 cells in PBS were dropped on microchip, they were attracted to electrodes with a velocity up to 45 mus, which is large enough to flow across the channel. This kind of electrodes can also be used for cell engineering, such as cell fusion and cell electroporation.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"179 1","pages":"1021-1024"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73287309","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}