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2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems最新文献

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Experimental Research on Mixing Efficiency of Magnetic Micromixer 磁性微混合器混合效率的实验研究
Rui-jin Wang, Jianzhong Lin
Movement of aggregated chains in magnetic fluid was caused by the rotation of external magnetic field to break the laminar flow for resulting in the chaotic flow and improving the mixing efficiency of the fluid. The experiments were performed with varying strength of magnetic field, rotation frequency and flow rate using micro particle image velocimetry (micro-PIV) technique. The results show that there is no obvious effect of the external magnetic field on the mixing efficiency when the magnetic field is strong enough to rotate the aggregated chains. However, the rotation frequency influences the mixing efficiency greatly. A critical value of the rotation frequency was found, below and above which the mixing efficiency increases and decreases with increasing the rotation frequency, respectively. It is helpful to design the magnetic micro-mixer
磁性流体中聚集链的运动是由于外加磁场的旋转打破层流,从而产生混沌流动,提高了流体的混合效率。采用微粒子图像测速技术(micro- piv)在不同的磁场强度、旋转频率和流量下进行实验。结果表明:当磁场强度足以使聚合链发生旋转时,外磁场对混合效率的影响不明显;而旋转频率对混合效率影响较大。找到了旋转频率的临界值,低于临界值时,混合效率随旋转频率的增加而增大,高于临界值时,混合效率随旋转频率的增加而减小。对磁性微混合器的设计有一定的指导意义
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引用次数: 1
Tuning Semiconducting Properties of Single Carbon Nanotube for Fabrication of Nano Devices 调谐单碳纳米管的半导体特性用于制造纳米器件
H. Chan, N. Xi, Jiangbo Zhang, Guangyong Li
Carbon nanotube (CNT) is found to be an amazing material for nanoelectronics due to its unique properties. It provides the possibility of miniaturizing the traditional electronic elements. Recently, people have been focusing on exploring its applications on optoelectronics because CNT is a direct bandgap material and its bandgap is inversely related to its diameter. Thus, it is ease for photon adsorption or generation with different wavelengths. In this paper, we presented the modification of the diameter of a single multi-walled carbon nanotube (s-MWNT) by electrical breakdown of nanotube walls. Thus, the conduction mechanism of the single carbon nanotube (s-CNT) can change from conducting to semi-conducting. Also, the barrier height of the s-CNT based diode which is fabricated by using atomic force microscopy based nanomanipulation system, can be indirectly modified, which has the same effect from CNT doping. The breakdown of a MWNT was investigated using atomic force microscopy (AFM) and the diameter, changed from 60 nm to ~10 nm, was measured at each step of breakdowns. Using this modification technique, the s-CNT based diode can potentially be used in optoelectronics
碳纳米管(CNT)以其独特的性能成为纳米电子学领域的一种重要材料。它提供了小型化传统电子元件的可能性。近年来,由于碳纳米管是一种直接带隙材料,其带隙与直径成反比,因此其在光电子领域的应用一直受到人们的关注。因此,它易于吸附或产生不同波长的光子。在本文中,我们提出了通过电击穿纳米管壁来改变单个多壁碳纳米管(s-MWNT)直径。因此,单碳纳米管(s-CNT)的导电机制可以从导电转变为半导体。此外,利用原子力显微镜纳米操作系统制备的s-CNT基二极管的势垒高度也可以间接改变,与掺杂碳纳米管具有相同的效果。利用原子力显微镜(AFM)研究了MWNT的击穿过程,并测量了每一步击穿时直径从60 nm到~10 nm的变化。利用这种修饰技术,基于s-碳纳米管的二极管可以潜在地用于光电子学
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引用次数: 2
Investigation of Nanometer XY Positioning Stage 纳米XY定位工作台的研究
Weili Wang, Y. Fei, K. Fan
An improved XY positioning stage having a coplanar structure design, which makes the guide planes in X- and Y-directions are of the same height. As a result, the Abbe's error and the cumulative error can be reduced. Symmetric structure, linear slide ways and low thermal expansion material are all considered to achieve low structure distortion and thermal shift with impacted force and temperature change. Finite element analysis modeling techniques were used to optimize the configuration and parameters of the stage. Integrated with ultrasonic actuator and the linear diffraction grating interferometer, the straightness of the guide way and the measuring repeatability of the stage have been proved. Experimental results have shown that the stage has a higher straightness less than 5" and the repeatability less than 30 nm in fine motion
一种改进型XY定位台,采用共面结构设计,使X方向和y方向的导轨平面高度相同。这样可以减小阿贝误差和累积误差。考虑了对称结构、线性滑动方式和低热膨胀材料,在冲击力和温度变化下实现低结构变形和热位移。采用有限元分析建模技术对平台的结构和参数进行了优化。结合超声作动器和直线衍射光栅干涉仪,验证了导轨的直线度和工作台的测量重复性。实验结果表明,该平台具有较高的直线度,在精细运动中直线度小于5”,重复性小于30 nm
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引用次数: 5
First-principle Calculations of Optical Properties of LiNbO3 LiNbO3光学性质的第一性原理计算
Lei Jin, L. Qiang, Ying Xie, H. Fu
Lithium niobate (LiNbO3) is one of the most important ferroelectric and nonlinear optical crystals and has many technological applications. But few fundamental theoretical studies on it are reported. The band structure and optical properties of this crystal are calculated within the framework of density functional theory with generalized gradient approximation (DFT-GGA). The results show that the band gap at the G point of brillouin zone is 3.54 eV, which is more close to the experimental value than that from LDA calculations, and that the optical properties of LN crystal, such as the reflectivity and the imaginary part of the dielectric function, are anisotropic along different polarization directions. The relation between electronic structure and optical properties are also discussed
铌酸锂(LiNbO3)是最重要的铁电和非线性光学晶体之一,具有许多技术应用。但是关于它的基础理论研究却很少。在密度泛函理论的框架下,用广义梯度近似(DFT-GGA)计算了该晶体的能带结构和光学性质。结果表明,在布里渊区G点处的带隙为3.54 eV,比LDA计算值更接近实验值,并且LN晶体的光学性质,如反射率和介电函数虚部沿不同偏振方向呈各向异性。讨论了电子结构与光学性质的关系
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引用次数: 1
Experimental Study of Tribological Properties of Silicon-Based MEMS/NEMS Surface with Atomic Force Microscope 硅基MEMS/NEMS表面摩擦学性能的原子力显微镜实验研究
J.N. Ding, G. Xie, Z. Fan, P. Yang, Q. Wang
A comparative study of the micro-tribological properties of silicon-based component and octadecyltrichlorosilane (OTS) molecular lubricant film which was prepared on Si(100) substrate, and their adhesive and tribological properties were mainly investigated by AFM/LFM. Meanwhile, the effect of relative humidity and scanning velocity was taken into consideration. The results show that the adhesive force of OTS film is much smaller the one of Si (100) substrate which leads to a relatively low friction coefficient, thereby the OTS film presents better lubricant performance; Besides, the Si(100) substrate is much more affected by the variation of humidity than OTS film; The velocity effect on the frictional performance is more significant for Si(100) component due to the Si(OH)4 lubricant film caused by the tribo-chemical reaction. A thermally activated capillary condensation model while taking the surface roughness effect into consideration is also adopted to explain the humidity and velocity effects on the adhesive and tribological properties theoretically. In addition, the durability tests indicate that the OTS lubricant film exhibits not only better wearability but also stability comparatively
对比研究了硅基组分和在Si(100)衬底上制备的十八烷基三氯硅烷(OTS)分子润滑膜的微摩擦学性能,并采用AFM/LFM对其粘接性能和摩擦学性能进行了研究。同时考虑了相对湿度和扫描速度的影响。结果表明:OTS薄膜的粘附力远小于Si(100)衬底,摩擦系数相对较低,具有较好的润滑性能;此外,相对于OTS薄膜,Si(100)衬底受湿度变化的影响更大;由于Si(OH)4润滑膜的摩擦化学反应,速度对Si(100)组分摩擦性能的影响更为显著。采用考虑表面粗糙度效应的热激活毛细凝结模型,从理论上解释了湿度和速度对粘接性能和摩擦学性能的影响。此外,耐久性试验表明,OTS润滑膜不仅具有较好的耐磨性,而且具有较好的稳定性
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引用次数: 1
Squeeze Film Damping Effect of the Micro Airflow in a Sealed Chamber 密封腔室中微气流的挤压膜阻尼效应
L. Li, R. Zhu, Zhaoying Zhou
The squeeze film damping effect generating from the sealed air gap between a vibrating circular thin plate and a fixed substrate is analyzed in this paper. Both the Bessel series technique and the Rayleigh-Ritz energy method are utilized to investigate the gas damping effect on the micro airflow in a sealed chamber. The air pressure distribution of the squeeze film air damping is determined by solving the nondimensionalized and linearized isothermal compressible Reynolds' equation and combined with the sealed pressure boundary condition. The coupled model of piezoelectric-Si film-micro airflow is derived according to the Rayleigh-Ritz energy method. The air damping factor is extracted. By adding and removing the air damping factor, there is no obvious variation of the resonance frequency of piezoelectric-Si film-airflow coupled vibration. The relation between the bending displacement and the cavity depth indicates that the effects of air damping become more intensive with the reducing of cavity depth
本文分析了振动圆形薄板与固定基板之间密封气隙产生的挤压膜阻尼效应。采用贝塞尔级数法和瑞利-里兹能量法研究了密闭腔室中气体阻尼对微气流的影响。通过求解无量纲化、线性化的等温可压缩雷诺方程,结合密封压力边界条件,确定了挤压膜空气阻尼的气压分布。根据瑞利-里兹能量法推导了压电-硅膜微气流耦合模型。提取了空气阻尼系数。通过添加和去除空气阻尼因子,压电-硅膜-气流耦合振动的共振频率没有明显变化。弯曲位移与空腔深度的关系表明,空气阻尼的影响随着空腔深度的减小而增强
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引用次数: 0
Kinetics of Solid Phase Epitaxy of Amorphous Si Induced by Self-ion Implantation into Si with Nanocavities 自离子注入纳米空腔诱导非晶硅固相外延动力学
Xianfang Zhu
The solid phase epitaxial regrowth of structurally modified amorphous silicon created by self-ion implantation into nanovoided crystalline silicon is investigated. It is demonstrated that although the modified amorphous silicon is fully reconstructed into single crystal during the epitaxial regrowth, both activation energy and atom attempt frequency for the regrowth are much higher than those of the typical amorphous Si induced by self-ion implantation into Si wafer without nanovoids. The novel regrowth kinetics indicates that the modified amorphous silicon would contain a very high concentration of dangling bonds, which are believed to result from dissociation of the nanovoids originally metastabilized in crystalline silicon. The unparalleled sensitivity of SPEG provides an effective and simple way to detect and characterize the subtle structural changes at nanometer scale in amorphous Si
研究了自离子注入纳米空化晶体硅制备的结构修饰非晶硅的固相外延再生。结果表明,虽然修饰后的非晶硅在外延再生过程中完全重构为单晶,但其再生的活化能和原子尝试频率都远高于在无纳米孔的硅片中自离子注入诱导的非晶硅。新的再生动力学表明,改性的非晶硅将含有非常高浓度的悬空键,这被认为是由于最初在晶体硅中亚稳态的纳米空隙解离的结果。SPEG无与伦比的灵敏度为检测和表征非晶硅纳米尺度的细微结构变化提供了一种有效而简单的方法
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引用次数: 0
Simulation and Experiment Analysis for Electrical Property of Cell Suspension by Micro Chip 微芯片对细胞悬浮液电性能的仿真与实验分析
Mingfei Xiao, Zhaoying Zhou, Xing Yang, Yingfei Wu, Shangfeng Liu
The physical quantity which is acquired from biological electrical impedance spectroscopy (EIS) can reflect the plentiful biological electrical characteristics. A microfabricated chip and related measurement system, which could be used for electrical impedance spectroscopy analysis, were introduced in this paper. A novel EIS measurement method is emerging. Based on the preliminary experimental results, the HeLa cell suspensions with different physiological status could be measured and distinguished. A 6-elements equivalent circuit model was used to simulate the experimental results. The micro chip has some advantages, such as high resolution and ease of operation. It shows application potentials in the fields of cellular electrophysiology, drug screening and bio-sensors, etc
生物电阻抗谱(EIS)所获得的物理量可以反映生物丰富的电特性。介绍了一种可用于电阻抗谱分析的微晶片及其测量系统。一种新的环境影响评估方法正在兴起。根据初步的实验结果,可以对不同生理状态的海拉细胞悬浮液进行测量和区分。采用6元等效电路模型对实验结果进行了模拟。该微芯片具有分辨率高、操作方便等优点。它在细胞电生理、药物筛选和生物传感器等领域具有广阔的应用前景
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引用次数: 1
Cantilever-based Transducer for Molecules Configuration Research 悬臂式分子构型传感器研究
Qinwen Huang, Kai Li, Binbin Jiao, Tianchun Ye, Dapeng Chen, Y. Ou, Chaobo Li, Qingchuan Zhang
Microfabricated cantilevers have recently become increasingly popular as transducers in chemical and biological sensors. Here, an evaluation of laboratory prototype that is microcantilever-based optical detection is demonstrated. Surface stress changes when molecules adsorb on cantilevers surface, which offers an attractive way to chemical and biological detection by measuring the bending of cantilevers. In this work, different figures of cantilevers were fabricated. Preliminary evaluation of these microfabricated cantilevers was performed by comparing the intensity of reflecting light on the end surfaces of different cantilever figures and the stability of different cantilever figures in liquid. The result demonstrated that triangle cantilever with paddle acting as a flat mirror has better performance of light reflecting and stability in liquid. Then, cantilevers-based sensors were used to detect the conformational changes in PNIPAM molecules with temperature changing
微加工悬臂梁作为传感器在化学和生物传感器中越来越受欢迎。在这里,实验室原型的评估是微悬臂为基础的光学检测演示。分子吸附在悬臂梁表面时,表面应力会发生变化,这为通过测量悬臂梁的弯曲度来进行化学和生物检测提供了一种有吸引力的方法。在这项工作中,制作了不同形状的悬臂梁。通过比较不同微悬臂形状端面的反射光强度和不同微悬臂形状在液体中的稳定性,对微悬臂结构进行了初步评价。结果表明,以叶片为平镜的三角形悬臂梁具有较好的反光性能和液体稳定性。然后,利用悬臂式传感器检测PNIPAM分子随温度变化的构象变化
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引用次数: 0
Dielectrophoretic Manipulation of Cells by Using Interdigitated Microelectrodes 交叉指状微电极的细胞介电泳操作
Zhiqiang Zhao, Xiaolin Zheng, Jun Yang, Xiaoying Wu, Xiaoguang Hei, Yong-yong Cao
Commonly, microelectrodes used in microfluidics are made from copper, Au or Pt. They are difficult to fabricate and the cost is relatively high. Thus, we designed and fabricated a novel microelectrode made from silicon for it is cheap and easy to fabricate. It has been proven that cells can be manipulated by dielectrophoresis force producing on interdigitated electrodes. In addition, the direction and velocity of cell motion could be controlled by altering the voltage and frequency. The interdigitated electrodes consist of linear and spiculate electrodes. After human hepatocarcinoma SMMC-7721 cells in PBS were dropped on microchip, they were attracted to electrodes with a velocity up to 45 mus, which is large enough to flow across the channel. This kind of electrodes can also be used for cell engineering, such as cell fusion and cell electroporation.
通常,微流体中使用的微电极是由铜、金或铂制成的,它们制造困难,成本相对较高。因此,我们设计并制造了一种新型的硅微电极,它便宜且易于制造。已经证明,细胞可以通过在交叉指状电极上产生的介电泳力来操纵。此外,可以通过改变电压和频率来控制细胞运动的方向和速度。交错电极包括线状电极和针状电极。将PBS中的人肝癌SMMC-7721细胞滴在微芯片上后,它们以高达45 mus的速度被电极吸引,这个速度足够大,可以通过通道流动。这种电极也可用于细胞工程,如细胞融合和细胞电穿孔。
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引用次数: 1
期刊
2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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