Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334880
A. Benahmed, Chih-Ming Ho
Surface plasmon waves (SP) are electromagnetic waves that propagate at the interface between a metal such as gold or silver and a dielectric. In a manner similar to the propagation of photons through a Fabry-Perot filter, the propagation of SP can be blocked by periodic nanostructures on the surface. This phenomenon can be described with a band gap in the SP dispersion relation. By taking advantage of this property, we developed a new chemical and biological sensor. Compared to traditional Surface Plasmon Resonance (SPR) sensing, our sensor does not require precise control or measurement of the transverse momentum of the excitation light. Therefore, for comparable sensitivity, the Surface Plasmon Band Gap sensor will be more easily implemented in a compact format. We present here the numerical simulations and the first optical measurements that demonstrate the validity of our approach.
{"title":"Using Surface Plasmon Propagation through Nanostructures for Chemical and Biological Sensing","authors":"A. Benahmed, Chih-Ming Ho","doi":"10.1109/NEMS.2006.334880","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334880","url":null,"abstract":"Surface plasmon waves (SP) are electromagnetic waves that propagate at the interface between a metal such as gold or silver and a dielectric. In a manner similar to the propagation of photons through a Fabry-Perot filter, the propagation of SP can be blocked by periodic nanostructures on the surface. This phenomenon can be described with a band gap in the SP dispersion relation. By taking advantage of this property, we developed a new chemical and biological sensor. Compared to traditional Surface Plasmon Resonance (SPR) sensing, our sensor does not require precise control or measurement of the transverse momentum of the excitation light. Therefore, for comparable sensitivity, the Surface Plasmon Band Gap sensor will be more easily implemented in a compact format. We present here the numerical simulations and the first optical measurements that demonstrate the validity of our approach.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"42 1","pages":"717-720"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78476667","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Topology optimization method is a novel design method for MEMS actuators. In this paper, a multi-objective design method is introduced into topology optimization for MEMS actuators. Some important factors for multi-objective design of MEMS actuators are deeply researched. A multi-objective topology optimization method based on minimal structural compliance and maximal structural output displacement of MEMS actuators is proposed and the corresponding governing equation for topology optimization is established. A sensitivity analysis of adjoint method is proposed to analyze topology optimization design of multi-objective MEMS actuators. Meanwhile, GCMMA (globally convergent version of the method of moving asymptotes) algorithm is used in optimization. Two numerical examples of MEMS actuators verified the effectiveness of above theory and algorithm
{"title":"Design MEMS Actuators with Topology Optimization Method","authors":"Kongtian Zuo, Yudong Zhao, Yong-gao Xie, Liping Chen","doi":"10.1109/NEMS.2006.334820","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334820","url":null,"abstract":"Topology optimization method is a novel design method for MEMS actuators. In this paper, a multi-objective design method is introduced into topology optimization for MEMS actuators. Some important factors for multi-objective design of MEMS actuators are deeply researched. A multi-objective topology optimization method based on minimal structural compliance and maximal structural output displacement of MEMS actuators is proposed and the corresponding governing equation for topology optimization is established. A sensitivity analysis of adjoint method is proposed to analyze topology optimization design of multi-objective MEMS actuators. Meanwhile, GCMMA (globally convergent version of the method of moving asymptotes) algorithm is used in optimization. Two numerical examples of MEMS actuators verified the effectiveness of above theory and algorithm","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"42 1","pages":"1517-1522"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77339324","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334618
W. Jin, Hongwei Duan, Yujun Zhang, Feng-fu Li
Electrospinning is a straightforward and effective technique to produce nanofiber nonwovens. In this paper, a comb ionomer of poly(ethylene covinyl alcohol) end-capped with sulfonic acid (EVOH-g-SO 3H) was synthesized by two-step synthesis process and electrospun into nonwoven membranes. The effect of processing parameters on the fibrous and beads morphology was investigated by scanning electron microscopy (SEM). The result indicated that the morphology of EVOH-g-SO3H membrane was heavily dependent on the electrospinning process as the electrospinning voltage (v), the concentration of polymer solution (c), the surface tension of polymer solution (sigma), the solution flow-rate (upsi), and the deposition distance between the syringe needle and the collecting drum (1). A 'beads-on-string' morphology could be seen from SEM image when the solution was electrospun in DMAc/water while decreasing the surface tension is a good way towards the formation of fibers without beads. When the solution concentration reaches 35wt%, a melded twist-ribbon structure could appear. There is an optimum range of solution concentration (5.0~20.0wt%) for a stable electrospinning and nonwoven formation. A higher applied voltage could result in a higher electric charge density on the surface of polymer solution jet during the electrospinning, they cause the higher splitting to the polymer jet and result in higher density and smaller diameter of round beads, as well as they also produce the thinner diameters fibers
{"title":"Nonafiber Membrane of EVOH-Based Ionomer by Electrospinning","authors":"W. Jin, Hongwei Duan, Yujun Zhang, Feng-fu Li","doi":"10.1109/NEMS.2006.334618","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334618","url":null,"abstract":"Electrospinning is a straightforward and effective technique to produce nanofiber nonwovens. In this paper, a comb ionomer of poly(ethylene covinyl alcohol) end-capped with sulfonic acid (EVOH-g-SO 3H) was synthesized by two-step synthesis process and electrospun into nonwoven membranes. The effect of processing parameters on the fibrous and beads morphology was investigated by scanning electron microscopy (SEM). The result indicated that the morphology of EVOH-g-SO3H membrane was heavily dependent on the electrospinning process as the electrospinning voltage (v), the concentration of polymer solution (c), the surface tension of polymer solution (sigma), the solution flow-rate (upsi), and the deposition distance between the syringe needle and the collecting drum (1). A 'beads-on-string' morphology could be seen from SEM image when the solution was electrospun in DMAc/water while decreasing the surface tension is a good way towards the formation of fibers without beads. When the solution concentration reaches 35wt%, a melded twist-ribbon structure could appear. There is an optimum range of solution concentration (5.0~20.0wt%) for a stable electrospinning and nonwoven formation. A higher applied voltage could result in a higher electric charge density on the surface of polymer solution jet during the electrospinning, they cause the higher splitting to the polymer jet and result in higher density and smaller diameter of round beads, as well as they also produce the thinner diameters fibers","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"130 1","pages":"42-46"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77611297","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334672
Huibin Zhao, Q. Ren, Yunsheng Lin, Yansheng Zuo, Li Han
A new type of bio-chemical sensor based on SPM was designed and fabricated in this paper. The bio-chemical sensor uses the SPM head as the probe part, which can convert the physical variation quantity on the micro-cantilever to electrical signals, and finally change it into image. In the experiment, the bio-chemical sensor based on SPM is used to detect two kinds of ssDNA molecules in PBS solution. By comparing the data in our experiment with that in other experiment, it can be seen that detecting unknown DNA molecules and other chemical or biological molecules in solution by this type of bio-chemical sensor is efficient and practical
{"title":"A New Type of Bio-Chemical Sensor Based on SPM","authors":"Huibin Zhao, Q. Ren, Yunsheng Lin, Yansheng Zuo, Li Han","doi":"10.1109/NEMS.2006.334672","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334672","url":null,"abstract":"A new type of bio-chemical sensor based on SPM was designed and fabricated in this paper. The bio-chemical sensor uses the SPM head as the probe part, which can convert the physical variation quantity on the micro-cantilever to electrical signals, and finally change it into image. In the experiment, the bio-chemical sensor based on SPM is used to detect two kinds of ssDNA molecules in PBS solution. By comparing the data in our experiment with that in other experiment, it can be seen that detecting unknown DNA molecules and other chemical or biological molecules in solution by this type of bio-chemical sensor is efficient and practical","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"117 1","pages":"1165-1168"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73379388","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334913
C. Qiu, Huijun Zhang, Wei Qu, Hongmei Liu, Dan Bu, M. Cao
A new microactuator design was fabricated to make a qualitative researcher on the PZT (Pb(Zr,Ti)O3) piezoelectric thin film. A novel V type valve geometry structure enables fluid pumping. The PZT thin films were used to fabricate multi-layer driving membrane for microactuator by its piezoelectric response. As the key technology of driving membrane, the Si /SiO2/Ti /Au /PZT/Cr/Au multi-layer film preparation on silicon substrate was developed. The microactuator consists of silicon-silicon stack and is fabricated with anisotropic etching process involving pump chamber and V type valve etching step. The SEM (scanning electron microscope) photographs of V type valve and XRD (X- ray diffraction) analysis for the multi-layer driving membrane were presented. The results show that the method of pump chamber fabricated is flat and uniform and the problem of PZT deposited on silicon substrate solved well. The single layer design of V type valve reduced the fabrication complexity and it satisfied the desires for materials retrenchment. Design and fabricated are described and discussed in this paper.
{"title":"A Novel Design and Fabrication of V Type Valve Microactuator with PZT Prepared by Sol-Gel","authors":"C. Qiu, Huijun Zhang, Wei Qu, Hongmei Liu, Dan Bu, M. Cao","doi":"10.1109/NEMS.2006.334913","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334913","url":null,"abstract":"A new microactuator design was fabricated to make a qualitative researcher on the PZT (Pb(Zr,Ti)O3) piezoelectric thin film. A novel V type valve geometry structure enables fluid pumping. The PZT thin films were used to fabricate multi-layer driving membrane for microactuator by its piezoelectric response. As the key technology of driving membrane, the Si /SiO2/Ti /Au /PZT/Cr/Au multi-layer film preparation on silicon substrate was developed. The microactuator consists of silicon-silicon stack and is fabricated with anisotropic etching process involving pump chamber and V type valve etching step. The SEM (scanning electron microscope) photographs of V type valve and XRD (X- ray diffraction) analysis for the multi-layer driving membrane were presented. The results show that the method of pump chamber fabricated is flat and uniform and the problem of PZT deposited on silicon substrate solved well. The single layer design of V type valve reduced the fabrication complexity and it satisfied the desires for materials retrenchment. Design and fabricated are described and discussed in this paper.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"186 1","pages":"864-867"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73942312","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334828
Xiaomei Yu, Haitao Zhang, Xiu-Han Li, Yaquan Tang, Ting Li
Gold-coated microcantilevers were used to develop sensitive micromechanical biosensor for detecting mismatch mutations in DNA hybrids. The selective 5'-end immobilization of 25-mer single-stranded (ss) DNA probes to a gold-coated cantilever surface and the specific hybridization of ssDNA targets to the immobilized probe were performed by the direct electric field control. The controlled electric fields were used to regulate the transport of charged oligo-nucleotides. More than 70% of the immobilization and hybridization can be carried out in 2-3 seconds, and the detection rates are at least 102 times faster than in the passive control reactions performed without electric field
{"title":"Electric-field Assisted Immobilization and Hybridization of DNA Oligomers on Microcantilever Sensors","authors":"Xiaomei Yu, Haitao Zhang, Xiu-Han Li, Yaquan Tang, Ting Li","doi":"10.1109/NEMS.2006.334828","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334828","url":null,"abstract":"Gold-coated microcantilevers were used to develop sensitive micromechanical biosensor for detecting mismatch mutations in DNA hybrids. The selective 5'-end immobilization of 25-mer single-stranded (ss) DNA probes to a gold-coated cantilever surface and the specific hybridization of ssDNA targets to the immobilized probe were performed by the direct electric field control. The controlled electric fields were used to regulate the transport of charged oligo-nucleotides. More than 70% of the immobilization and hybridization can be carried out in 2-3 seconds, and the detection rates are at least 102 times faster than in the passive control reactions performed without electric field","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"25 1","pages":"505-508"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74014225","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334900
Hui Guo, Y. Wang, Sheng-mei Chen, Guobing Zhang, Haixia Zhang, Zhihong Li
Silicon carbide (SiC) is a promising material for the device operating in hash environment, such as high temperature, high pressure or erodent environment, owning to its excellent electrical, mechanical, and chemical properties. The PECVD process allows deposition of SiC at low temperature (200degC-400degC), which makes SiC has better compatibility in Post-CMOS processes. In this paper, PECVD SiC has been investigated as a chemical resistant material in MEMS systematically. SiC was utilized as a coating layer to protect micromachined polysilicon devices from erosive environment and as a wet-etch mask to pattern silicon and glass. SiC was also used to construct microstructures taking the merit of SiC's chemical stability.
{"title":"PECVD SiC as a Chemical Resistant Material in MEMS","authors":"Hui Guo, Y. Wang, Sheng-mei Chen, Guobing Zhang, Haixia Zhang, Zhihong Li","doi":"10.1109/NEMS.2006.334900","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334900","url":null,"abstract":"Silicon carbide (SiC) is a promising material for the device operating in hash environment, such as high temperature, high pressure or erodent environment, owning to its excellent electrical, mechanical, and chemical properties. The PECVD process allows deposition of SiC at low temperature (200degC-400degC), which makes SiC has better compatibility in Post-CMOS processes. In this paper, PECVD SiC has been investigated as a chemical resistant material in MEMS systematically. SiC was utilized as a coating layer to protect micromachined polysilicon devices from erosive environment and as a wet-etch mask to pattern silicon and glass. SiC was also used to construct microstructures taking the merit of SiC's chemical stability.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"148 1","pages":"805-808"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75372855","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334693
S. Yung, C. Chung, J. Ding
(FePt)1-xCux alloy nanoparticles were prepared by chemical-reduction of platinum acetylacetonate, iron acetylacetonate and copper acetylacetonate with 1,2-hexadecanediol as the reducing regent. As prepared, the particles have a disordered fcc structure with an average diameter of ca. 3nm. The addition of 4 % copper promotes the effect that the disordered fcc structure transforms to ordered fct phase, thereby it reduces the ordering temperature from 500degC to 400degC compared with those without any additives. The lattice parameter change of the L10-ordered phase suggests that the Fe sites of FePt ordered alloy are replaced by Cu. After the (FePt)96Cu4 alloy nanoparticles being annealed at 450degC for 30 min, the coercivity of the film is more than 5000Oe, while the film containing FePt nanoparticles is about 2700Oe
{"title":"Reduction of the fcc to L10 Ordering Temperature for FePt Nanoparticles Containing Cu","authors":"S. Yung, C. Chung, J. Ding","doi":"10.1109/NEMS.2006.334693","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334693","url":null,"abstract":"(FePt)1-xCux alloy nanoparticles were prepared by chemical-reduction of platinum acetylacetonate, iron acetylacetonate and copper acetylacetonate with 1,2-hexadecanediol as the reducing regent. As prepared, the particles have a disordered fcc structure with an average diameter of ca. 3nm. The addition of 4 % copper promotes the effect that the disordered fcc structure transforms to ordered fct phase, thereby it reduces the ordering temperature from 500degC to 400degC compared with those without any additives. The lattice parameter change of the L10-ordered phase suggests that the Fe sites of FePt ordered alloy are replaced by Cu. After the (FePt)96Cu4 alloy nanoparticles being annealed at 450degC for 30 min, the coercivity of the film is more than 5000Oe, while the film containing FePt nanoparticles is about 2700Oe","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"24 1","pages":"231-235"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75567001","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334896
H. Zeng, Z. Zhao, Haifeng Dong, Z. Fang, Peng Guo
MEMS/NEMS based integrated sensors for humidity, temperature and pressure used in environment monitoring are usually combined by separate devices for complicated technology and material compatibility. In order to lower cost, polyimide (PI) was introduced in to fabricate integrated sensors realizing IC compatible process. Different humidity electrodes have been investigated and a humidity sensor with a sensitivity of 2.375pF/RH% during 20~90%RH is fabricated. Performance in high humidity is compensated by temperature elements, which shows excellent linearity from -20degC to 100degC. Polyimide and nitride diaphragm was used to measure external pressure, which achieves a sensitivity of 1.1 mV/degC and an accuracy of 0.06 kPa.
{"title":"Fabrication and Test of MEMS/NEMS based Polyimide Integrated Humidity, Temperature and Pressure Sensor","authors":"H. Zeng, Z. Zhao, Haifeng Dong, Z. Fang, Peng Guo","doi":"10.1109/NEMS.2006.334896","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334896","url":null,"abstract":"MEMS/NEMS based integrated sensors for humidity, temperature and pressure used in environment monitoring are usually combined by separate devices for complicated technology and material compatibility. In order to lower cost, polyimide (PI) was introduced in to fabricate integrated sensors realizing IC compatible process. Different humidity electrodes have been investigated and a humidity sensor with a sensitivity of 2.375pF/RH% during 20~90%RH is fabricated. Performance in high humidity is compensated by temperature elements, which shows excellent linearity from -20degC to 100degC. Polyimide and nitride diaphragm was used to measure external pressure, which achieves a sensitivity of 1.1 mV/degC and an accuracy of 0.06 kPa.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"29 2","pages":"788-791"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72574161","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334619
H.-H. Wang, P. Yang, W. Liao, L.-J. Yang
This paper proposes a novel wafer-level packaging (WLP) method at room temperature for piezoresistive pressure sensors. We use a polydimethylsiloxane (PDMS) sheet as a candidate for replacing a Pyrex glass wafer, to seal the backside V-grooved chambers of the pressure sensor chips. PDMS is a well-known material in MEMS technology recently. It is not only cheap but also has a merit of a simple process. We also fabricated piezoresistive pressure sensors, made by the same batch, with different packaging materials of Pyrex glass and PDMS sheet in the paper, respectively. The spin-coating approach is accessed to control the thickness of PDMS by applying the silicon and Teflon disks, as the supporting substrates during the formation of PDMS sheets. The sensors packaged by the PDMS room temperature bonding herein almost have the same performance as the ones packaged by the conventional anodic bonding through the real verification of pressure testing
{"title":"A New Packaging Method for Pressure Sensors by PDMS MEMS Technology","authors":"H.-H. Wang, P. Yang, W. Liao, L.-J. Yang","doi":"10.1109/NEMS.2006.334619","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334619","url":null,"abstract":"This paper proposes a novel wafer-level packaging (WLP) method at room temperature for piezoresistive pressure sensors. We use a polydimethylsiloxane (PDMS) sheet as a candidate for replacing a Pyrex glass wafer, to seal the backside V-grooved chambers of the pressure sensor chips. PDMS is a well-known material in MEMS technology recently. It is not only cheap but also has a merit of a simple process. We also fabricated piezoresistive pressure sensors, made by the same batch, with different packaging materials of Pyrex glass and PDMS sheet in the paper, respectively. The spin-coating approach is accessed to control the thickness of PDMS by applying the silicon and Teflon disks, as the supporting substrates during the formation of PDMS sheets. The sensors packaged by the PDMS room temperature bonding herein almost have the same performance as the ones packaged by the conventional anodic bonding through the real verification of pressure testing","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"15 1","pages":"47-51"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75122200","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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