Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334886
D. Rodger, Wen Li, H. Ameri, A. Ray, J. Weiland, M. Humayun, Y. Tai
We present the first single metal layer flexible microelectrode arrays designed for intraocular implantation that utilize parylene C as their primary structural and insulating material. These electrodes are fabricated as a key component of an intraocular retinal prosthesis comprising a radio-frequency coil for power and data transfer, a packaged high lead-count telemetry-recovery and driving application-specific integrated circuit (ASIC), and a high-density epiretinal stimulating microelectrode array for the treatment of retinal degenerative blindness in humans. Electrochemical tests have demonstrated that these thin-film platinum electrodes perform as necessary for neuronal stimulation. A novel bioconformal MEMS geometry for a complete intraocular system with capsular retaining-wings that enables all the components of the system to be implanted and retained within the lens capsule and vitreous cavity of the eye is also presented. The efficacy of this geometry when compared with a previous model without capsular retaining-wings has been verified by surgical implantation in animal models.
{"title":"Flexible Parylene-based Microelectrode Technology for Intraocular Retinal Prostheses","authors":"D. Rodger, Wen Li, H. Ameri, A. Ray, J. Weiland, M. Humayun, Y. Tai","doi":"10.1109/NEMS.2006.334886","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334886","url":null,"abstract":"We present the first single metal layer flexible microelectrode arrays designed for intraocular implantation that utilize parylene C as their primary structural and insulating material. These electrodes are fabricated as a key component of an intraocular retinal prosthesis comprising a radio-frequency coil for power and data transfer, a packaged high lead-count telemetry-recovery and driving application-specific integrated circuit (ASIC), and a high-density epiretinal stimulating microelectrode array for the treatment of retinal degenerative blindness in humans. Electrochemical tests have demonstrated that these thin-film platinum electrodes perform as necessary for neuronal stimulation. A novel bioconformal MEMS geometry for a complete intraocular system with capsular retaining-wings that enables all the components of the system to be implanted and retained within the lens capsule and vitreous cavity of the eye is also presented. The efficacy of this geometry when compared with a previous model without capsular retaining-wings has been verified by surgical implantation in animal models.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"155 1-4","pages":"743-746"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91487914","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334738
Z. Deng, Jing Liu
The latest generation of gigahertz-clock-rate CPUs is becoming more challenging to fit into designs. These chips are squeezing into tighter and tighter spaces with no enough places for heat to dissipate. Meanwhile, high-capacity cooling options remain limited for many small-scale applications such as microsystems, sensors and actuators, and micro/nano electronic components. This work presents a MEMS based micro cooling device, which is comprised of an active cooling substrate embedded with fluidic cooling functionality using liquid metal, to provide direct cooling to high heat flux electronics and MEMS devices. In order to better understand the cooling capability of this MEMS-based micro cooling device, the three-dimensional heat transfer process thus involved was numerically simulated. A series of calculations with different flow rates and thermal parameters were performed. Effect of different working fluids is also investigated. The results indicate that the MEMS-based cooling device has powerful cooling capability while using liquid metal as cooling fluid, and thus allow for lower operating temperatures for electronic devices and micro/nano systems
{"title":"Capacity Evaluation of a MEMS Based Micro Cooling Device Using Liquid Metal as Coolant","authors":"Z. Deng, Jing Liu","doi":"10.1109/NEMS.2006.334738","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334738","url":null,"abstract":"The latest generation of gigahertz-clock-rate CPUs is becoming more challenging to fit into designs. These chips are squeezing into tighter and tighter spaces with no enough places for heat to dissipate. Meanwhile, high-capacity cooling options remain limited for many small-scale applications such as microsystems, sensors and actuators, and micro/nano electronic components. This work presents a MEMS based micro cooling device, which is comprised of an active cooling substrate embedded with fluidic cooling functionality using liquid metal, to provide direct cooling to high heat flux electronics and MEMS devices. In order to better understand the cooling capability of this MEMS-based micro cooling device, the three-dimensional heat transfer process thus involved was numerically simulated. A series of calculations with different flow rates and thermal parameters were performed. Effect of different working fluids is also investigated. The results indicate that the MEMS-based cooling device has powerful cooling capability while using liquid metal as cooling fluid, and thus allow for lower operating temperatures for electronic devices and micro/nano systems","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"13 1","pages":"1311-1315"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88913783","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334695
Q. Shi, Shourong Wang, A. Qiu, Yishen Xu, Xunsheng Ji
Canceling and minimizing quadrature error is the key to improve the performance of MEMS gyroscopes. This paper addresses how to design suspension springs to decrease the quadrature error which induced with manufacture asymmetric. According to the stiffness matrix of suspension spring, the relationship among quadrature error, terms of stiffness matrix and width mismatch was put forward. The off-diagonal term which is coupled between driven and sensing directions has larger effect on the quadrature error than other off-diagonal terms of system stiffness matrix. The design principle of suspension springs of MEMS gyroscope was put forward, which is suggest that U-spring, serpentine spring and folded-flexure spring should be preferential adopted. At last, a z-axis MEMS gyroscope was improved based on the design principle, and the results of FEM simulation and experiment show the quadrature error is decreased largely
{"title":"Design Principle of Suspension of MEMS Gyroscope","authors":"Q. Shi, Shourong Wang, A. Qiu, Yishen Xu, Xunsheng Ji","doi":"10.1109/NEMS.2006.334695","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334695","url":null,"abstract":"Canceling and minimizing quadrature error is the key to improve the performance of MEMS gyroscopes. This paper addresses how to design suspension springs to decrease the quadrature error which induced with manufacture asymmetric. According to the stiffness matrix of suspension spring, the relationship among quadrature error, terms of stiffness matrix and width mismatch was put forward. The off-diagonal term which is coupled between driven and sensing directions has larger effect on the quadrature error than other off-diagonal terms of system stiffness matrix. The design principle of suspension springs of MEMS gyroscope was put forward, which is suggest that U-spring, serpentine spring and folded-flexure spring should be preferential adopted. At last, a z-axis MEMS gyroscope was improved based on the design principle, and the results of FEM simulation and experiment show the quadrature error is decreased largely","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"242-245"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83807004","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334794
Baojian Xu, Zhi Qiao, Qinghui Jin, Jianlong Zhao
The paper proposes a novel design concept and fabrication method of micro dispensing chip. The filling process is performed by capillary force without extra energy, greatly reducing the complexity of design and operation. The annular interspaces around the nozzles in the chip can help the droplet formation on the hydrophilic surfaces, and the step conjunction between the channel and the reservoir can reduce the fluid refluence to the inlet. The fabrication of the silicon chip with 25 reservoirs has been successfully completed by deep reactive ion etching (DRIE). Polydimethyl silocane (PDMS) membrane can tightly bond the silicon surface to form a sealed channel in the vacuum environment at 150degC in 3 hrs. By applying 10 kPa pressure with the duration of 1000 mus, the chip could simultaneously produce 5 times 5 array on the glass within the area of 3.4mm times 3.4mm. The coefficient of variation (CV) for intensities within 25 individual fluid spots can reach 4.1% and the CV for diameters is as low as 3.8%. The results from both computational fluid dynamics (CFD) simulations and dispensing experiments demonstrated that the fabricated silicon chip can produce uniform microarrays with high stability and good reproducibility in a short time
{"title":"A Novel Micro Dispensing Chip for Microarray Fabrication","authors":"Baojian Xu, Zhi Qiao, Qinghui Jin, Jianlong Zhao","doi":"10.1109/NEMS.2006.334794","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334794","url":null,"abstract":"The paper proposes a novel design concept and fabrication method of micro dispensing chip. The filling process is performed by capillary force without extra energy, greatly reducing the complexity of design and operation. The annular interspaces around the nozzles in the chip can help the droplet formation on the hydrophilic surfaces, and the step conjunction between the channel and the reservoir can reduce the fluid refluence to the inlet. The fabrication of the silicon chip with 25 reservoirs has been successfully completed by deep reactive ion etching (DRIE). Polydimethyl silocane (PDMS) membrane can tightly bond the silicon surface to form a sealed channel in the vacuum environment at 150degC in 3 hrs. By applying 10 kPa pressure with the duration of 1000 mus, the chip could simultaneously produce 5 times 5 array on the glass within the area of 3.4mm times 3.4mm. The coefficient of variation (CV) for intensities within 25 individual fluid spots can reach 4.1% and the CV for diameters is as low as 3.8%. The results from both computational fluid dynamics (CFD) simulations and dispensing experiments demonstrated that the fabricated silicon chip can produce uniform microarrays with high stability and good reproducibility in a short time","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"15 1","pages":"438-441"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83459519","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334604
Xue-jin Shen, Yongyu Zhang, Xiaoyang Chen
The nano manipulation needs miniaturized microtools for minute adjustment or in situ mechanical characterization. This paper demonstrates the feasibility of using bulk silicon electro-thermal expansion micro actuator to drive a lever nano motion platform. The feasibility study includes specimen preparation and dynamic and static characteristic testing. The specimen is made up of a micro electro-thermal actuator and two stage lever with 24.6 lever ratio for transforming the micro displacement of thermal expansion actuator into nano displacement of platform, and the dimension of whole specimen is 1150 mumx 850 mum. The other symmetry two stage lever is used to amplify the nano displacement of platform upon the micro displacement simultaneously for comparing with that one of thermal expansion actuator. The lever fulcrum is flexure hinge. In the testing, the apply voltage ranging from 0 to 5 V. The biggest static input displacement of thermal expansion actuator is more than 2 mum, and the output displacement is about half of the input ones. The non-synchronizing phenomenon has been found in the dynamic process, which is depending on the frequency of applied alternating voltage.
纳米操作需要小型化的微工具进行微小的调整或原位力学表征。本文论证了用体硅电热膨胀微驱动器驱动杠杆纳米运动平台的可行性。可行性研究包括试样制备和动静态特性测试。试件由一个微电热致动器和两级杠杆组成，杠杆比为24.6，用于将热膨胀致动器的微位移转化为平台的纳米位移，试件整体尺寸为1150 μ m × 850 μ m。另一个对称两级杠杆用于将平台的纳米位移同时放大到微位移上，并与热膨胀执行器的纳米位移进行比较。杠杆支点为柔性铰链。在测试中，施加的电压范围从0到5v。热膨胀执行器的最大静态输入位移大于2 μ m，输出位移约为输入位移的一半。在动态过程中发现了不同步现象，这取决于施加交流电压的频率。
{"title":"Feasibility Study of Micro Electro-thermal Actuator for Lever Nano Motion","authors":"Xue-jin Shen, Yongyu Zhang, Xiaoyang Chen","doi":"10.1109/NEMS.2006.334604","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334604","url":null,"abstract":"The nano manipulation needs miniaturized microtools for minute adjustment or in situ mechanical characterization. This paper demonstrates the feasibility of using bulk silicon electro-thermal expansion micro actuator to drive a lever nano motion platform. The feasibility study includes specimen preparation and dynamic and static characteristic testing. The specimen is made up of a micro electro-thermal actuator and two stage lever with 24.6 lever ratio for transforming the micro displacement of thermal expansion actuator into nano displacement of platform, and the dimension of whole specimen is 1150 mumx 850 mum. The other symmetry two stage lever is used to amplify the nano displacement of platform upon the micro displacement simultaneously for comparing with that one of thermal expansion actuator. The lever fulcrum is flexure hinge. In the testing, the apply voltage ranging from 0 to 5 V. The biggest static input displacement of thermal expansion actuator is more than 2 mum, and the output displacement is about half of the input ones. The non-synchronizing phenomenon has been found in the dynamic process, which is depending on the frequency of applied alternating voltage.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"46 1","pages":"1025-1028"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83553660","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334653
Yongqian Li, Liding Wang, Zheng Xu
The plug-like fluidic profile is one of most advantages of electroosmotic flow, which influences the reproducibility, sensitivity and separation efficiency of the microfluidic devices. Electroosmotic flow in microchannels with hydraulic diameters of less than 20 microns are investigated experimentally and qualitatively compared with prediction in electric double layer (EDL) theory. Fluidic profiles are obtained using caged-dye based technique with a high degree of resolution near the channel walls. The experimental results indicate the existence of transition zones, which is characterized by a drastic transition in velocity profile as a matching zone between the channel wall and the middle steady flow. The width scale of the transition layer was found to be the same magnitude of hydraulic diameter and much larger than the prediction in EDL theory, which is correlated with the zeta potential and length ratio of Debye length to channel's hydraulic diameter, while the middle profile is influenced by pressure force and the viscidity force. The experiments indicate that the deviations from plug-like velocity profile can be avoided by the reduction of pressure gradient and the channel's dimensional size
{"title":"Deviations of Electroosmotic Fluidic Profile from Electric Double Layer Theory","authors":"Yongqian Li, Liding Wang, Zheng Xu","doi":"10.1109/NEMS.2006.334653","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334653","url":null,"abstract":"The plug-like fluidic profile is one of most advantages of electroosmotic flow, which influences the reproducibility, sensitivity and separation efficiency of the microfluidic devices. Electroosmotic flow in microchannels with hydraulic diameters of less than 20 microns are investigated experimentally and qualitatively compared with prediction in electric double layer (EDL) theory. Fluidic profiles are obtained using caged-dye based technique with a high degree of resolution near the channel walls. The experimental results indicate the existence of transition zones, which is characterized by a drastic transition in velocity profile as a matching zone between the channel wall and the middle steady flow. The width scale of the transition layer was found to be the same magnitude of hydraulic diameter and much larger than the prediction in EDL theory, which is correlated with the zeta potential and length ratio of Debye length to channel's hydraulic diameter, while the middle profile is influenced by pressure force and the viscidity force. The experiments indicate that the deviations from plug-like velocity profile can be avoided by the reduction of pressure gradient and the channel's dimensional size","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"65 1","pages":"126-130"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88766345","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334823
H. S. Cheng, M. R. Shen, C. Mak, P. Lim
A novel room temperature synthesis of carbon nanotubes (CNTs) by liquid phase deposition of methanol is firstly reported. Nanotube samples were characterized with field emission scanning electron microscopy (FESEM), transmission electron microscopy (TEM) and Raman spectroscopy. FESEM micrographs revealed that nanotubes with diameter in the range of 20-200 nm were grown at room temperature. HR-TEM images and electron diffraction pattern demonstrated that the as-grown nanotubes were multi-wall carbon nanotubes (MWCNTs). Furthermore, Raman spectra of the nanotubes showed two strong characteristic vibrational modes at 1352 cm-1 and 1585 cm-1, Raman peaks commonly found for carbon nanotubes
{"title":"Liquid Phase Electrochemical Route to Carbon Nanotubes at Room Temperature","authors":"H. S. Cheng, M. R. Shen, C. Mak, P. Lim","doi":"10.1109/NEMS.2006.334823","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334823","url":null,"abstract":"A novel room temperature synthesis of carbon nanotubes (CNTs) by liquid phase deposition of methanol is firstly reported. Nanotube samples were characterized with field emission scanning electron microscopy (FESEM), transmission electron microscopy (TEM) and Raman spectroscopy. FESEM micrographs revealed that nanotubes with diameter in the range of 20-200 nm were grown at room temperature. HR-TEM images and electron diffraction pattern demonstrated that the as-grown nanotubes were multi-wall carbon nanotubes (MWCNTs). Furthermore, Raman spectra of the nanotubes showed two strong characteristic vibrational modes at 1352 cm-1 and 1585 cm-1, Raman peaks commonly found for carbon nanotubes","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"13 1","pages":"484-487"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87417800","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334598
Dan Wu, Changzhe Wu, J. Yue, Ming Wang, T. Song
ATP synthase is the minimal molecular motor and a highly efficient rotary machine. Giant magnetoresistance (GMR) effect is the change in electrical resistance that occurs when materials are exposed to a magnetic field. In this paper, a new dynamic biomolecule identification technique is proposed using GMR sensor combined with ATP molecular motors. Molecular motors, attached with magnetic nano-particles, can be rotated by special magnetic field. If there is specific target molecular in the sample combining with the probe molecular which is labeled on the molecular motor, the load of the molecular motor will be changed. So the movement of the molecular motor is changed, which can be detected by GMR sensor. Without the procedure of pre-treating, labeling the sample, and removing the redundant label, the biomolecule identification system could be manufactured in portable size and conveniently used in many fields. A physical model was established to simulate the identification system and a mathematic model was generated to analyze dynamics of molecular motor's rotating. The experiment results and the simulation results are consistent. It certificates the feasibility of this technique to identify biomolecule.
{"title":"Simulation and Analysis of Dynamic Biomolecule Identification Technique Based on Molecular Motors and GMR Effect","authors":"Dan Wu, Changzhe Wu, J. Yue, Ming Wang, T. Song","doi":"10.1109/NEMS.2006.334598","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334598","url":null,"abstract":"ATP synthase is the minimal molecular motor and a highly efficient rotary machine. Giant magnetoresistance (GMR) effect is the change in electrical resistance that occurs when materials are exposed to a magnetic field. In this paper, a new dynamic biomolecule identification technique is proposed using GMR sensor combined with ATP molecular motors. Molecular motors, attached with magnetic nano-particles, can be rotated by special magnetic field. If there is specific target molecular in the sample combining with the probe molecular which is labeled on the molecular motor, the load of the molecular motor will be changed. So the movement of the molecular motor is changed, which can be detected by GMR sensor. Without the procedure of pre-treating, labeling the sample, and removing the redundant label, the biomolecule identification system could be manufactured in portable size and conveniently used in many fields. A physical model was established to simulate the identification system and a mathematic model was generated to analyze dynamics of molecular motor's rotating. The experiment results and the simulation results are consistent. It certificates the feasibility of this technique to identify biomolecule.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"999-1003"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84790141","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334565
Dunzhu Xia, Bailing Zhou, Shourong Wang
The working principle of Micromechanical Resonator is introduced by using control theory. The Q of the MEMS resonator is very important under different vacuum condition. Theoretically, the sense mode motion is amplified by the mechanical quality factor of the sense mode when the two frequencies are closely matched. To achieve a high stability driving not only at the aspect of resonance frequency but also at its amplitude. An intelligent Double Matched Resonance system based on DSP chip and DDS combined techniques is presented and a design frame for a new type intelligent closed-loop drive generator is proposed. The interface method in digital circuitry part and the weak signal detection technique in analogy circuitry part are analyzed in detail. Combined with closed-loop experiment data and scanning curves, several frequency searching approaches in different vacuum circumstance are presented. After automatic sweeping to their resonance frequency, a number of MEMS z-axis rate gyroscope can work in excellent stability.
{"title":"Double Matched Microgyro Resonant System in Drive and Sense Modes","authors":"Dunzhu Xia, Bailing Zhou, Shourong Wang","doi":"10.1109/NEMS.2006.334565","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334565","url":null,"abstract":"The working principle of Micromechanical Resonator is introduced by using control theory. The Q of the MEMS resonator is very important under different vacuum condition. Theoretically, the sense mode motion is amplified by the mechanical quality factor of the sense mode when the two frequencies are closely matched. To achieve a high stability driving not only at the aspect of resonance frequency but also at its amplitude. An intelligent Double Matched Resonance system based on DSP chip and DDS combined techniques is presented and a design frame for a new type intelligent closed-loop drive generator is proposed. The interface method in digital circuitry part and the weak signal detection technique in analogy circuitry part are analyzed in detail. Combined with closed-loop experiment data and scanning curves, several frequency searching approaches in different vacuum circumstance are presented. After automatic sweeping to their resonance frequency, a number of MEMS z-axis rate gyroscope can work in excellent stability.","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"31 1","pages":"919-922"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80661694","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334656
Zhenlong Wang, B. Zhu
A fabrication technology of microelectrode with nano radius of its tip was presented in electrochemical micromachining (EMM). The mechanism of pulses EMM was expatriated firstly. The shaping principle of microelectrode and micro probe was analyzed. Based on the fundamental experimental behavior of EMM current, a control strategy of current density was proposed with the gap variance. Then an experimental setup was constructed with pulses power supply and a control computer, which could detect the machining process and control the current density. After the experiments of technology analyzed, some microelectrodes were fabricated successfully by tungsten filament. This could provide the simple microelectrode for further electro-machining or micro probe for scanning probe microscopy. Preliminary experimental results show the feasibility of EMM and its potential capability for better machining accuracy and smaller machining size
{"title":"Fabricating Microelectrode with Nano Radius Tip by Electrochemical Micromachining","authors":"Zhenlong Wang, B. Zhu","doi":"10.1109/NEMS.2006.334656","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334656","url":null,"abstract":"A fabrication technology of microelectrode with nano radius of its tip was presented in electrochemical micromachining (EMM). The mechanism of pulses EMM was expatriated firstly. The shaping principle of microelectrode and micro probe was analyzed. Based on the fundamental experimental behavior of EMM current, a control strategy of current density was proposed with the gap variance. Then an experimental setup was constructed with pulses power supply and a control computer, which could detect the machining process and control the current density. After the experiments of technology analyzed, some microelectrodes were fabricated successfully by tungsten filament. This could provide the simple microelectrode for further electro-machining or micro probe for scanning probe microscopy. Preliminary experimental results show the feasibility of EMM and its potential capability for better machining accuracy and smaller machining size","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"15 1","pages":"140-143"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84971390","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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