Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334871
Xiang Geng, Z. Jiao, Haobo Wang, Qun Fu, Haijian Zhong, Zhen Li
In this paper the Al2O3 nanowire is grown on silicon chips by electrochemical reaction under AFM probe. The obtained Al2O3 nanowire is regular arranged, the length and width of the nanowire can be controlled by adjusting applied voltage and scanning rate of AFM probe
{"title":"The Al2O3 nanowire grown on silicon chips by electrochemical reaction under AFM probe","authors":"Xiang Geng, Z. Jiao, Haobo Wang, Qun Fu, Haijian Zhong, Zhen Li","doi":"10.1109/NEMS.2006.334871","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334871","url":null,"abstract":"In this paper the Al<sub>2</sub>O<sub>3</sub> nanowire is grown on silicon chips by electrochemical reaction under AFM probe. The obtained Al<sub>2</sub>O<sub>3</sub> nanowire is regular arranged, the length and width of the nanowire can be controlled by adjusting applied voltage and scanning rate of AFM probe","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"20 1","pages":"679-681"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82269602","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334846
X. Jing, Di Chen, Baozeng Zhang, Jingquan Liu, Jun Zhu
A new method for realization of 3D multilayer micro structures is presented in this paper. It consists of two major processes: silicon etching process and UV-LIGA process. In this way, some shape limitations of single technology can be overcome for new functions. By combining these processes, multilayer structures and complex graphics can be fabricated. To make good combination, the adhesive characteristics between the SU-8 photoresist and the surface of etched silicon substrate was studied. Two steps that can thoroughly remove bubbles in the etched silicon groove are also employed. To demonstrate this combination of micro fabrication process, some SU-8 microstructures are successfully fabricated in the etched silicon grooves. This method has applications in multi-layer microstructure fabrication
{"title":"A New Fabrication Method for 3D Multilayer Microstructure","authors":"X. Jing, Di Chen, Baozeng Zhang, Jingquan Liu, Jun Zhu","doi":"10.1109/NEMS.2006.334846","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334846","url":null,"abstract":"A new method for realization of 3D multilayer micro structures is presented in this paper. It consists of two major processes: silicon etching process and UV-LIGA process. In this way, some shape limitations of single technology can be overcome for new functions. By combining these processes, multilayer structures and complex graphics can be fabricated. To make good combination, the adhesive characteristics between the SU-8 photoresist and the surface of etched silicon substrate was studied. Two steps that can thoroughly remove bubbles in the etched silicon groove are also employed. To demonstrate this combination of micro fabrication process, some SU-8 microstructures are successfully fabricated in the etched silicon grooves. This method has applications in multi-layer microstructure fabrication","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"366 1","pages":"567-570"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76420489","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334856
Z. Jian, Yu Yuanwei, Lu Le, Cheng Chen, Zhang Yong, Yang Naibin
A 3-port MEMS switch for MEMS phase shifter is present, with bias electrodes physically insulated from RF/microwave transmission line, which are designed for lower crosstalk between bias and microwave signal. The RF/microwave performances of these switches are optimized by 2.5 dimension electromagnetic (EM) field-solvers of ADS/Momentum. The mechanical structure of the switch is optimized by electromechanical coupling analysis of Intellisuitereg software. The insert loss of the switch is 0.66dB@10GHz and the isolation is 23.26dB@10GHz. The delay of on-state is about 50mus (90% bias) and that of off-state is about 15mus (10% bias). The whole chip size of the switch is 800mum*1000mum which made the MEMS phase shifter much more compact
{"title":"A 3-port MEMS switch for MEMS phase shifter application","authors":"Z. Jian, Yu Yuanwei, Lu Le, Cheng Chen, Zhang Yong, Yang Naibin","doi":"10.1109/NEMS.2006.334856","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334856","url":null,"abstract":"A 3-port MEMS switch for MEMS phase shifter is present, with bias electrodes physically insulated from RF/microwave transmission line, which are designed for lower crosstalk between bias and microwave signal. The RF/microwave performances of these switches are optimized by 2.5 dimension electromagnetic (EM) field-solvers of ADS/Momentum. The mechanical structure of the switch is optimized by electromechanical coupling analysis of Intellisuitereg software. The insert loss of the switch is 0.66dB@10GHz and the isolation is 23.26dB@10GHz. The delay of on-state is about 50mus (90% bias) and that of off-state is about 15mus (10% bias). The whole chip size of the switch is 800mum*1000mum which made the MEMS phase shifter much more compact","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"8 1","pages":"611-614"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76107885","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334724
Hong Wan, Chao Xu, Xuezhong Wu
Giant magnetoelectric coupling effect between Ni and PZT was discovered by investigating the Ni/PZT laminate composites experimentally and numerically. The experimental results, which were well coincident with the data calculated by the finite element software ANSYS, showed that the magnetoelectric voltage coefficient alphaE could reach to 4800 mV/A for Ni/PZT bilayer cantilever at its resonant frequency and the average alphaE of Ni/PZT/Ni three-ply was about 1050 mV/A at its nonresonant frequency. That giant magnetoelectric coupling effect of Ni/PZT laminate composites attributed to the high magnetostrictive sensitivity of Ni at a low applied magnetic field and the high piezoelectric properties of PZT. With low cost and easy fabrication, this kind of composite was potential candidates for magnetoelectric memory devices, electrically controlled magnetic devices, magnetically controlled piezoelectric devices, and smart sensors
{"title":"Magnetoelectric Effect in Ni/PZT Laminate Composites","authors":"Hong Wan, Chao Xu, Xuezhong Wu","doi":"10.1109/NEMS.2006.334724","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334724","url":null,"abstract":"Giant magnetoelectric coupling effect between Ni and PZT was discovered by investigating the Ni/PZT laminate composites experimentally and numerically. The experimental results, which were well coincident with the data calculated by the finite element software ANSYS, showed that the magnetoelectric voltage coefficient alphaE could reach to 4800 mV/A for Ni/PZT bilayer cantilever at its resonant frequency and the average alphaE of Ni/PZT/Ni three-ply was about 1050 mV/A at its nonresonant frequency. That giant magnetoelectric coupling effect of Ni/PZT laminate composites attributed to the high magnetostrictive sensitivity of Ni at a low applied magnetic field and the high piezoelectric properties of PZT. With low cost and easy fabrication, this kind of composite was potential candidates for magnetoelectric memory devices, electrically controlled magnetic devices, magnetically controlled piezoelectric devices, and smart sensors","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"67 1","pages":"287-290"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76227139","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334847
Tzung-Han Lin, W. Shih, Chuin-Shan Chen, Y. Chiu
In this paper, we present a three-dimensional dissipative particle dynamics simulation, which is independent of the initial conditions, for analyzing the wettability on liquid-solid interfaces. The model parameters are constructed based on simulation optimization. The contact angle of a droplet on the solid platforms which possess different surface energy is simulated. The normalized factors indicate the parameters of the surface energy. By tuning the attractive and repulsive effects between the platform and the droplet, the contact angles with wide range are found at steady states. In simulation result, the linear relation between contact angle and the normalized factor is obtained. The proper repulsive factor in the paper is recommended to be 15 or 20. The ranges of the contact angles are from about 65 to 155 degrees. Moreover, the local density and the equation of state are applied for determining the droplet's self energy and compressibility. The simulation results will help us to predict the profile and internal physical behavior of a micro-droplet
{"title":"Simulation and Analysis of Interfacial Wettability by Dissipative Particle Dynamics","authors":"Tzung-Han Lin, W. Shih, Chuin-Shan Chen, Y. Chiu","doi":"10.1109/NEMS.2006.334847","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334847","url":null,"abstract":"In this paper, we present a three-dimensional dissipative particle dynamics simulation, which is independent of the initial conditions, for analyzing the wettability on liquid-solid interfaces. The model parameters are constructed based on simulation optimization. The contact angle of a droplet on the solid platforms which possess different surface energy is simulated. The normalized factors indicate the parameters of the surface energy. By tuning the attractive and repulsive effects between the platform and the droplet, the contact angles with wide range are found at steady states. In simulation result, the linear relation between contact angle and the normalized factor is obtained. The proper repulsive factor in the paper is recommended to be 15 or 20. The ranges of the contact angles are from about 65 to 155 degrees. Moreover, the local density and the equation of state are applied for determining the droplet's self energy and compressibility. The simulation results will help us to predict the profile and internal physical behavior of a micro-droplet","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"7 1","pages":"571-574"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87693045","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334684
Yuehua Wu, Bin Zhou, Chao Xu, Xiang Xu, Jun Shen
In this paper, nano-porous silica aerogels were prepared via sol-gel process with acid/base two-step catalysis technique. Silica aerogel structure can be effectively controlled by changing experimental parameter. Ultralow density silica aerogel with density as low as 3.4 mg/cm3 has been successfully prepared. Transmission electron microscope (TEM), gas chromatography/mass spectrometry (GC/MS) and particle size analyzer were used to characterize the properties of the microstructure and particle distribution of the sol. Scanning electron microscope (SEM) was used to characterize the microstructure of the aerogels. Structure controlling by changing the catalysis condition during sol-gel process was researched, and stabilization of the sol during long-time reserving was researched too. The results showed that silica sol particle can be controlled from 4nm to 9nm continuously and the optimized refluxing time was about 24 hours
{"title":"Structural Analysis and Control of Ultralow Density Silica Aerogels Prepared by Sol-gel Process","authors":"Yuehua Wu, Bin Zhou, Chao Xu, Xiang Xu, Jun Shen","doi":"10.1109/NEMS.2006.334684","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334684","url":null,"abstract":"In this paper, nano-porous silica aerogels were prepared via sol-gel process with acid/base two-step catalysis technique. Silica aerogel structure can be effectively controlled by changing experimental parameter. Ultralow density silica aerogel with density as low as 3.4 mg/cm3 has been successfully prepared. Transmission electron microscope (TEM), gas chromatography/mass spectrometry (GC/MS) and particle size analyzer were used to characterize the properties of the microstructure and particle distribution of the sol. Scanning electron microscope (SEM) was used to characterize the microstructure of the aerogels. Structure controlling by changing the catalysis condition during sol-gel process was researched, and stabilization of the sol during long-time reserving was researched too. The results showed that silica sol particle can be controlled from 4nm to 9nm continuously and the optimized refluxing time was about 24 hours","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"36 1","pages":"192-195"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88389203","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The cryogenic dielectric and mechanical properties of nanowire-Al 2O3 filled PBT/GF (glass fiber) composites are investigated by combing macro-performances testing and microstructures analysis. Compared with PBT/GF composites, the PBT/GF/Al2O 3 ternary systems present improved tensile strength as well as impact strength. The fracture surface shows a typical toughened characteristic under SEM observation, which may be explained by the "crack bridging" toughening mechanism. At the same time, POM study indicates diminished spherulitic texture for the three phase composites, which is due to nucleating effect of the nanoparticles. DSC and WAXD analysis suggest that nanowire-Al2O3 can hinder the crystal growth and lower the degree of crystallinity. Cryogenic dielectric spectra of the composites showed a broad gamma loss process shifting to low temperature region with the increasing content of Al2O3, which suggested that the existence of the nanowire might facilitate the molecular motions of PBT matrix and improved the low temperature toughness. Suitable amount of Al2O3 can also be helpful to reduce the micro-defects, which may contribute to the higher electrical strength of the systems
{"title":"Cryogenic Dielectric and Mechanical Properties of Nanowire-A1203 Filled PBT/GF Composites","authors":"Demei Yu, Yunchuan Xie, W. Wan, Xiusheng Guo, Ying Xi, Zhantong Mao, Long‐Biao Huang","doi":"10.1109/NEMS.2006.334725","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334725","url":null,"abstract":"The cryogenic dielectric and mechanical properties of nanowire-Al 2O3 filled PBT/GF (glass fiber) composites are investigated by combing macro-performances testing and microstructures analysis. Compared with PBT/GF composites, the PBT/GF/Al2O 3 ternary systems present improved tensile strength as well as impact strength. The fracture surface shows a typical toughened characteristic under SEM observation, which may be explained by the \"crack bridging\" toughening mechanism. At the same time, POM study indicates diminished spherulitic texture for the three phase composites, which is due to nucleating effect of the nanoparticles. DSC and WAXD analysis suggest that nanowire-Al2O3 can hinder the crystal growth and lower the degree of crystallinity. Cryogenic dielectric spectra of the composites showed a broad gamma loss process shifting to low temperature region with the increasing content of Al2O3, which suggested that the existence of the nanowire might facilitate the molecular motions of PBT matrix and improved the low temperature toughness. Suitable amount of Al2O3 can also be helpful to reduce the micro-defects, which may contribute to the higher electrical strength of the systems","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"51 1","pages":"291-294"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86170363","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334575
Honghu Huang, Jia Zhou, Yipin Huang, M. Bao
In this study, basing on electrochemistry and MEMS technology we develop a novel biosensor with multi channels to detect three markers (hyaluronic acid (HA), Laminin (LN), type IV collagen (IV-C) ) so as to evaluate the liver disease. With MEMS technology, a chip including a CE, a RE and 6 gold electrodes is fabricated for detection of at most 6 markers simultaneously. Different antibodies of serum markers are embedded in poly(o-phenylenediamine) to form semi-insulated membranes on the gold electrodes, separately by electrochemical polymerization. It is grounded on a mechanism of detecting the variation of the peak current caused by the immunoreactions between the markers and their corresponding antibodies. Concentrations of HA, LN and IV-C in 140 samples are tested both by the sensor and RIA, namely, sensor group and RIA group. Compared the two groups of results, it is found that the two measures have similar sensitivities and consistency while the sensor has significantly reduced the response time as well as the cost. The coefficients of variation of the sensor are less than 20% for both inter and intra-assay with error less than 20%, while for RIA, coefficients of variation for intra-assay less than 10% and inter-assay less than 15% with error less than 20%
{"title":"Development of a multi-channel immunosensor for determnination of serum hepatic fibrosis markers","authors":"Honghu Huang, Jia Zhou, Yipin Huang, M. Bao","doi":"10.1109/NEMS.2006.334575","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334575","url":null,"abstract":"In this study, basing on electrochemistry and MEMS technology we develop a novel biosensor with multi channels to detect three markers (hyaluronic acid (HA), Laminin (LN), type IV collagen (IV-C) ) so as to evaluate the liver disease. With MEMS technology, a chip including a CE, a RE and 6 gold electrodes is fabricated for detection of at most 6 markers simultaneously. Different antibodies of serum markers are embedded in poly(o-phenylenediamine) to form semi-insulated membranes on the gold electrodes, separately by electrochemical polymerization. It is grounded on a mechanism of detecting the variation of the peak current caused by the immunoreactions between the markers and their corresponding antibodies. Concentrations of HA, LN and IV-C in 140 samples are tested both by the sensor and RIA, namely, sensor group and RIA group. Compared the two groups of results, it is found that the two measures have similar sensitivities and consistency while the sensor has significantly reduced the response time as well as the cost. The coefficients of variation of the sensor are less than 20% for both inter and intra-assay with error less than 20%, while for RIA, coefficients of variation for intra-assay less than 10% and inter-assay less than 15% with error less than 20%","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"12 1","pages":"964-969"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86114414","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334781
Wen He, Xiao-Yin Cheng, Runjie Shen
To relieve the residual stress in small assembly, a method called high-frequency vibratory stress relief was researched. Microscopic origin of residual stress was analyzed according to the theory of crystal dislocation, which shows that the appeared unstable dislocations and localized energy concentrating are the main reason to produce residual stress. And then the mechanism of high frequency vibratory stress relief was studied through the dynamic model of dislocations, which is that the microscopic grains on the dislocations will move severely and go back to their original positions when the workpiece is excited at the higher resonant frequency, and thus the number of dislocations will become less and less so that residual stress is relieved. An experiment was designed to relieve the residual stress on a small welding specimen. The results prove that the method of stress relief on small-assembly is effective. Finally, the metallographic analysis also proves the mechanism of the method. The method could play an important role in the stress relief for MEMS devices
{"title":"Research on High-Frequency Vibratory Stress Relief for Small Assembly","authors":"Wen He, Xiao-Yin Cheng, Runjie Shen","doi":"10.1109/NEMS.2006.334781","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334781","url":null,"abstract":"To relieve the residual stress in small assembly, a method called high-frequency vibratory stress relief was researched. Microscopic origin of residual stress was analyzed according to the theory of crystal dislocation, which shows that the appeared unstable dislocations and localized energy concentrating are the main reason to produce residual stress. And then the mechanism of high frequency vibratory stress relief was studied through the dynamic model of dislocations, which is that the microscopic grains on the dislocations will move severely and go back to their original positions when the workpiece is excited at the higher resonant frequency, and thus the number of dislocations will become less and less so that residual stress is relieved. An experiment was designed to relieve the residual stress on a small welding specimen. The results prove that the method of stress relief on small-assembly is effective. Finally, the metallographic analysis also proves the mechanism of the method. The method could play an important role in the stress relief for MEMS devices","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"112 1","pages":"1428-1431"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86216001","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2006-01-01DOI: 10.1109/NEMS.2006.334679
M. Sin, G. Chow, C. Fung, W.J. Li, P. Leong, K. Wong, T. Lee
We have demonstrated multi-walled carbon nanotube (MWCNTs) based sensors, which are capable of detecting alcohol vapor with ultra-low power. We fabricated the Si-substrate sensors using an AC electrophoretic technique so as to form bundled MWCNTs sensing elements between Au microelectrodes. The I-V measurement illustrates that we can activate the sensors at the Ohmic region of the sensors (at 10 muA), which is without any overheat effect. The sensors only need an ultra-low power (~1 muW) to detect the alcohol vapor. They exhibit fast, reversible and repeatable response. We have tested the response of the sensors with alcohol concentrations from 10 ppth to 400 ppth (ppth = parts per thousand). Our result shows that there is a linear relation between the resistance of the sensors and alcohol concentration. Also, we can easily reverse the sensor to the initial reference resistance by annealing them at 100-250 muA current within 6 minutes. Moreover, the sensors are selective with respect to flow from air, water vapor, and alcohol vapor. Finally, we have also studied how the temperature of the sensors affects their response towards alcohol vapor. The result shows that the performance of the sensors will deteriorate as the temperature of the sensors increase. Also, the cooling effect of the vapor is not a dominating factor in determining the response of the sensor. Based on our experiments, we prove the feasibility of turning the MWCNTs sensors into a commercialized alcohol sensor with ultra-low power requirements
{"title":"Ultra-Low-Power Alcohol Vapor Sensors Based on Multi-Walled Carbon Nanotube","authors":"M. Sin, G. Chow, C. Fung, W.J. Li, P. Leong, K. Wong, T. Lee","doi":"10.1109/NEMS.2006.334679","DOIUrl":"https://doi.org/10.1109/NEMS.2006.334679","url":null,"abstract":"We have demonstrated multi-walled carbon nanotube (MWCNTs) based sensors, which are capable of detecting alcohol vapor with ultra-low power. We fabricated the Si-substrate sensors using an AC electrophoretic technique so as to form bundled MWCNTs sensing elements between Au microelectrodes. The I-V measurement illustrates that we can activate the sensors at the Ohmic region of the sensors (at 10 muA), which is without any overheat effect. The sensors only need an ultra-low power (~1 muW) to detect the alcohol vapor. They exhibit fast, reversible and repeatable response. We have tested the response of the sensors with alcohol concentrations from 10 ppth to 400 ppth (ppth = parts per thousand). Our result shows that there is a linear relation between the resistance of the sensors and alcohol concentration. Also, we can easily reverse the sensor to the initial reference resistance by annealing them at 100-250 muA current within 6 minutes. Moreover, the sensors are selective with respect to flow from air, water vapor, and alcohol vapor. Finally, we have also studied how the temperature of the sensors affects their response towards alcohol vapor. The result shows that the performance of the sensors will deteriorate as the temperature of the sensors increase. Also, the cooling effect of the vapor is not a dominating factor in determining the response of the sensor. Based on our experiments, we prove the feasibility of turning the MWCNTs sensors into a commercialized alcohol sensor with ultra-low power requirements","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"206 1","pages":"1198-1202"},"PeriodicalIF":0.0,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89017261","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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