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2010 3rd International Nanoelectronics Conference (INEC)最新文献

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A quantum mechanical transport approach to analyze of DG Silicon nanowire transistor 用量子力学输运方法分析DG硅纳米线晶体管
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424755
F. Karimi, R. Hosseini
In this paper we have used quantum mechanical transport approach to analyze electrical characteristics of silicon nanowire transistor and have compared the results with those obtained using semi classical Boltzmann transport model. The analyses employs a three dimensional simulation of Silicon nanowire transistor based on self consistent solution of Poisson, Schrodinger equations. Quantum mechanical transport model uses the non equilibrium Green's function (NEGF) [1] while the semi classic model doesn't account for tunneling current. We investigate the effect of tunneling current on I-V characteristics of Nanowire transistor with the different channel length. We have used of NANO TCAD ViDES software to analyze a DG (double gate) silicon nano wire transistor. We get that when the channel length increases to20nm and upper, tunneling is significant only for inversion condition, while for low gate voltages the error between these two models is negligible.
本文采用量子力学输运方法分析了硅纳米线晶体管的电特性,并与半经典玻尔兹曼输运模型的结果进行了比较。分析采用基于泊松、薛定谔方程自洽解的硅纳米线晶体管三维模拟。量子力学输运模型使用非平衡格林函数(NEGF),而半经典模型不考虑隧道电流。研究了隧道电流对不同沟道长度纳米线晶体管I-V特性的影响。利用NANO TCAD ViDES软件对双栅硅纳米线晶体管进行了分析。当通道长度增加到20nm及以上时,隧道效应仅在反转条件下显著,而在低栅极电压下,两种模型之间的误差可以忽略不计。
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引用次数: 0
Microstructure and resistivity of machinable AlN/h-BN ceramic nanocomposites 可切削AlN/h-BN陶瓷纳米复合材料的微观结构和电阻率
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5425117
H. Jin, Bo He, N. Gao, Zongren Peng
The microstructure and resistivity of AlN/BN ceramic nano-composites and micro-composites were investigated. The results showed that because the nano-BN crystals were homogeneously dispersed around the AlN grains of the matrix, the conductive glass phase surround AlN grains were separated, and the it was difficult to form the electric conductible consecutive passageway (than micro composites), the leakage conductance of nano-composites was far lower than micro- composites.
研究了AlN/BN陶瓷纳米复合材料和微复合材料的微观结构和电阻率。结果表明:由于纳米bn晶体均匀分散在基体的AlN晶粒周围,AlN晶粒周围的导电玻璃相被分离,且难以形成导电连续通道(比微复合材料),因此纳米复合材料的漏电导远低于微复合材料。
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引用次数: 0
Macromodeling of realistic single electron transistors for large scale circuit simulation 面向大规模电路仿真的现实单电子晶体管宏观建模
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424624
Haiqin Zhong, Yaqing Chi, He Sun, Chao Zhang, Liang Fang
In this paper we develop the macromodeling of single electron transistor (SET) based on the actual experiment results and the proposed model. Single electron transistors are supposed to be among the top candidates for the kernel devices of logic circuits in the post-CMOS period of near future. To develop an efficient model can be very useful for the simulation of large scale SET circuit. This model which is less time-consuming and reproduce the actual experiment results reasonably is fit for the simulation of SET circuit.
本文在实际实验结果的基础上,建立了单电子晶体管(SET)的宏观模型。在不久的将来,单电子晶体管将成为后cmos时代逻辑电路核心器件的首选。建立一个有效的模型对于大规模SET电路的仿真是非常有用的。该模型耗时短,能较好地再现实际实验结果,适合于SET电路的仿真。
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引用次数: 5
Wavefront engineering of semiconductor lasers using plasmonics 等离子体半导体激光器的波前工程
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424528
N. Yu, R. Blanchard, Jonathan A. Fan, Qi Jie Wang, M. Kats, F. Capasso
Plasmonics involves manipulation of surface plasmons (SPs), which are collective oscillations of surface electrons in metal interacting with an electromagnetic field. Plasmonic structures provide compact and integrated optical processing, where planar metallic structures can be used to manipulate the amplitude and phase of SPs in two dimensions at the subwavelength level. By integrating plasmonic structures on active optical devices, one can engineer and fabricate devices with small footprints and special beam profiles in the near-field and/or in the far-field. This talk summarizes our recent work on building integrated plasmonic collimators, beam splitters, and polarizers for semiconductor lasers.
等离子体动力学涉及操纵表面等离子体(SPs),这是金属表面电子与电磁场相互作用的集体振荡。等离子体结构提供了紧凑和集成的光学处理,其中平面金属结构可以在亚波长水平上在二维上操纵SPs的振幅和相位。通过在有源光学器件上集成等离子体结构,人们可以设计和制造具有小尺寸和近场和/或远场特殊光束轮廓的器件。这次演讲总结了我们最近在半导体激光器的集成等离子体准直器、分束器和偏振器方面的工作。
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引用次数: 0
Field emission from GaN/AlN nano-films on Si substrate prepared by pulsed laser deposition 脉冲激光沉积制备氮化镓/氮化铝纳米薄膜的场发射特性
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424581
Wei Zhao, Ruzhi Wang, FengYing Wang, Siying Chen, Bo Wang, Hao Wang, Hui Yan
GaN/AlN two-layer films with different thickness are synthesized on Si substrates by pulsed laser deposition (PLD). GaN and AlN single-layer films are also synthesized for comparison. It is found that the turn-on field of the GaN/AlN two-layer films are considerably decreased 2 orders of magnitude than that of single-layer films. The improvement of FE characteristics an attributed to the quantum structure effects, which supplies a favorable location of electron emission and enhances tunneling ability. We show that by tuning the thickness of GaN/AlN, various FE characteristics can be obtained, which is induced by the modulation of quantum potential well/barrier structure. It indicates that an optimal thickness exists for GaN/AlN two-layer nano-films to give best field emission performance.
采用脉冲激光沉积(PLD)技术在Si衬底上合成了不同厚度的GaN/AlN两层薄膜。还合成了氮化镓和氮化铝单层膜进行比较。结果表明,GaN/AlN双层膜的导通场比单层膜的导通场减小了2个数量级。量子结构效应为电子发射提供了有利的位置,提高了隧穿能力。我们发现,通过调整GaN/AlN的厚度,可以获得由量子势阱/势垒结构调制引起的各种FE特性。结果表明,氮化镓/氮化铝两层纳米膜存在一个最佳厚度以获得最佳场发射性能。
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引用次数: 0
Synthesis and electrical properties of the metal-silicide nanostructures 金属硅化物纳米结构的合成及其电学性质
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5425047
P. Yeh, C. Tsai
Metal silicide nanostructures have been synthesized by spontaneous chemical vapor transport and reaction method. The temperature and the vapor flow rate were shown to critically influence the growth of nanostructures. Various phases and morphologies, such as single-stem nanowires, three-dimensional nanowires networks, and aloe-like nanowires have been synthesized. Very low turn-on field (1.42 V/µm) and good conductance in field-emission and electrical property measurements indicates that metal-silicide nanowires is potentially useful.
采用自发化学气相输运和反应法制备了金属硅化物纳米结构。温度和蒸汽流速对纳米结构的生长有重要影响。不同的相和形态,如单茎纳米线、三维纳米线网络和芦荟状纳米线已被合成。极低的导通场(1.42 V/µm)和良好的电导率在场发射和电性能测量中表明金属硅化物纳米线具有潜在的用途。
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引用次数: 0
Fabrication of Si nanowire arrays selectively formed on pre-patterned (001)Si substrates 在预图像化(001)硅衬底上选择性形成的硅纳米线阵列的制备
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424985
S. Cheng, C. Lo
We report here the successful fabrication of large-area size-and site-controlled periodic arrays of Si nanowires by employing the colloidal nanosphere lithography technique and Au-assisted selective chemical etching process. The vertically-aligned Si nanowires with diameters down to 190 nm and 90 nm were selectively formed at particular positions on the pre-patterned (001)Si substrates. All the Si nanowires produced were single crystalline in nature and their axial orientations were identified to be parallel to the [001] direction. The experimental results demonstrated that with suitable etching conditions, these synthesis schemes provide the capability to fabricate a variety of periodic arrays of Si-based nanodevices.
本文报道了采用胶体纳米球光刻技术和金辅助选择性化学蚀刻工艺成功制备了大面积尺寸和位置可控的硅纳米线周期阵列。在预图像化的(001)Si衬底上选择性地在特定位置形成直径低至190 nm和90 nm的垂直排列的Si纳米线。所制备的硅纳米线均为单晶性质,其轴向与[001]方向平行。实验结果表明,在合适的蚀刻条件下,这些合成方案提供了制造各种硅基纳米器件周期阵列的能力。
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引用次数: 0
Structural properties of ultra-thin Y2O3 gate dielectrics studied by X-Ray diffraction (XRD) and X-Ray photoelectron spectroscopy (XPS) 用x射线衍射(XRD)和x射线光电子能谱(XPS)研究超薄Y2O3栅极电介质的结构特性
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424914
Chuan-Hsi Liu, P. Juan, Chin-Pao Cheng, Guan-Ting Lai, Huan Lee, Yi-Kuan Chen, Yu-Wei Liu, Chih-Wei Hsu
Ultra-thin yttrium oxide (Y2O3) films (physical thickness of 7 nm) were deposited on p-Si substrates by RF sputtering for MOS applications. The structural properties of the Y2O3 gate dielectrics were studied after RTA from 650 to 850°C. The crystalline phase and chemical bonding state of the films were characterized by X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS), respectively. According to the XRD patterns, Y2O3 films remain amorphous after 850 °C annealing. Moreover, also confirmed by XPS results, the formation of yttrium silicates (YSiO) was observed after 650°C annealing, and the silicate thickness increases with the annealing temperature. It is suggested that the thickness of the silicate layer YSiO dominates the gate leakage current of the MOS capacitors.
采用射频溅射技术在p-Si衬底上制备了物理厚度为7 nm的超薄氧化钇(Y2O3)薄膜。在650 ~ 850℃的RTA温度下,研究了Y2O3栅极电介质的结构性能。采用x射线衍射仪(XRD)和x射线光电子能谱仪(XPS)对膜的晶相和化学键状态进行了表征。XRD分析表明,850℃退火后,Y2O3薄膜仍为非晶态。此外,XPS结果也证实,650℃退火后观察到硅酸钇(YSiO)的形成,并且随着退火温度的升高,硅酸钇的厚度增加。结果表明,硅层厚度YSiO决定了MOS电容器的栅漏电流。
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引用次数: 2
In-situ synchrotron X-ray diffraction measurement of epitaxial FeRh thin films 外延FeRh薄膜的原位同步加速器x射线衍射测量
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424542
Sung-Uk Jang, S. Hyun, Hwan-Soo Lee, Soon-Ju Kwon, Ji-Hong Kim, K. Park, Hak-Joo Lee
The magnetic properties and structure of FeRh thin film epitaxially grown onto MgO(001) substrate were studied by MPMS(Magnetic Properties Measure System) and in-situ temperature synchrotron XRD(X-ray Diffraction). The transition temperature of FeRh thin films was around 380K. Both M-T curve and d-spacing changes correspond to each other very closely. Abrupt changes in the lattice constants can be observed from the in-situ analysis. Also, there is the likelihood of existence of a new phase.
采用磁性能测量系统(MPMS)和x射线衍射仪(XRD)研究了在MgO(001)衬底上外延生长的FeRh薄膜的磁性能和结构。FeRh薄膜的转变温度在380K左右。M-T曲线和d-间距变化之间的对应关系非常密切。从原位分析中可以观察到晶格常数的突变。此外,有可能存在一个新阶段。
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引用次数: 0
One dimensional ZnO nanostrucures grown on ZnO/Si by hydrothermal process 水热法在ZnO/Si表面生长一维ZnO纳米结构
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5425107
Y. Tao, Yongsheng Wang, M. Fu, D. He
Nanostructured semiconducting metal oxides such as nanotube, nanowires, nanoribbons and nanofibers are of considerable interest for solar energy conversion, sensors and in various electronic applications. In this study, ZnO nanofibers with extremely high length/diameter ratio and well-aligned ZnO nanorod arrays were synthesized by hydrothermal method, respectively, on Si substrates. Si substrates were covered with predeposited ZnO films as seed layers, which were deposited by DC magnetron sputtering. A growth mechanism involving nanorods were built from tiny nanowires of smaller diameter fusing together was inferred from SEM study of ZnO nanorod arrays. Also, growth positions of ZnO nanorod arrays were easily controlled via coating the ZnO seed layer with patterned photoresist “mask” fabricated by conventional photolithography. ZnO nanostructures would not grow on the organic mask due to the lack of ZnO nucleation sites on the organic resist layer. The design and preparing process of these ZnO nanostructures are in principle substrate-independent and occurs on flat surfaces regardless of their crystallinity or surface chemistry.
纳米结构的半导体金属氧化物,如纳米管、纳米线、纳米带和纳米纤维,在太阳能转换、传感器和各种电子应用中有着相当大的兴趣。本研究采用水热法在Si衬底上分别合成了具有极高长径比的ZnO纳米纤维和排列良好的ZnO纳米棒阵列。采用直流磁控溅射技术,在Si衬底上覆盖预沉积ZnO薄膜作为种子层。通过对ZnO纳米棒阵列的扫描电镜研究,推测了一种由直径较小的纳米线融合在一起的纳米棒生长机制。此外,通过在ZnO种子层上涂上传统光刻工艺制作的光刻胶“掩膜”,可以很容易地控制ZnO纳米棒阵列的生长位置。由于有机抗蚀剂层上缺乏ZnO成核位点,使得ZnO纳米结构无法在有机掩膜上生长。原则上,这些ZnO纳米结构的设计和制备过程与衬底无关,并且无论其结晶度或表面化学性质如何,都发生在平面上。
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引用次数: 1
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2010 3rd International Nanoelectronics Conference (INEC)
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