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2010 3rd International Nanoelectronics Conference (INEC)最新文献

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Evaluating biocompatibility of semiconductive gallium nitride, flat and nano-structured silicon chips by cell viability, adhesion and growth 通过细胞活力、粘附和生长来评价半导体氮化镓、平面和纳米结构硅片的生物相容性
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5425190
Yu-Ting Kang, T. Yen
We show that two dominant semiconductors gallium nitride (GaN) and silicon nanorods (SiNR) exhibit excellent biocompatibility, the most important property in the research of bio-medical materials. The result of MTT assays indicates no cytotoxicity and the observation of cellular morphology further reveals outstanding adhesion and extension of L929 cells (mouse fibroblasts) in both the GaN and silicon substrates. Consequently, combining the advantages of semiconductors including controllable electric properties and mature fabrication with the demonstrated favorable biocompatibility, GaN and SiNR are promising materials for neuron bio-chips, medical devices and other bio-medical application.
我们发现两种主要的半导体氮化镓(GaN)和硅纳米棒(SiNR)具有优异的生物相容性,这是生物医学材料研究中最重要的特性。MTT实验结果显示无细胞毒性,细胞形态学观察进一步显示L929细胞(小鼠成纤维细胞)在氮化镓和硅基质中都具有出色的粘附和延伸能力。因此,结合半导体的优势,包括可控的电性能和成熟的制造工艺,以及良好的生物相容性,GaN和SiNR是神经元生物芯片、医疗设备和其他生物医学应用的有前途的材料。
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引用次数: 3
Direct growth of Nb2O5 nanobelts on Nb foil Nb2O5纳米带在铌箔上的直接生长
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5425019
B. Gao, K. Huo, Jijiang Fu, P. Chu
Self-organized Nb2O5 nanobelt scaffolds and quasi-aligned bamboo slip-like Nb2O5 nanobelt arrays have been directly fabricated on Nb foils by a hydrothermal reaction in an alkaline solution followed by protonation and annealing. The length and width of the nanobelts can be controlled by varying the fabrication parameters such as reaction temperature, alkaline concentration, and reaction time. The morphology, structure and composition of the nanobelts were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), and X-ray photoelectron spectrometry (XPS).
采用碱性水热反应,经质子化和退火处理,在铌箔上制备了自组织Nb2O5纳米带支架和准排列的竹片状Nb2O5纳米带阵列。纳米带的长度和宽度可以通过改变反应温度、碱浓度和反应时间等制备参数来控制。采用x射线衍射(XRD)、扫描电镜(SEM)、透射电镜(TEM)和x射线光电子能谱(XPS)表征了纳米带的形貌、结构和组成。
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引用次数: 0
Fabrication of Si/SiO2/Au nanoparticles/HfO2 MOS capacitor structure by spin coating method 自旋镀膜法制备Si/SiO2/Au纳米颗粒/HfO2 MOS电容器结构
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424590
Shih-Tang Chen, Hua-Chiang Chen, Kun-Cheng Huang, Fu-Ken Liu, C. Leu
In this work, a Metal-Oxide-Semiconductor (MOS) capacitor (Si/SiO2/Au nanoparticles/HfO2) has been fabricated. Gold (Au) nanoparticles with particle size of about 3.3nm were synthesized by chemical reduction method. Then the self-assembled gold nanoparticles were attached to 3-aminopropyltrimethoxysilane (APTMS) modified silicon oxide substrates by the spin coating method. With the spin coating method, the gold nanoparticles can be fabricated onto 5.0 nm thermally grown silicon oxide with highly packing density of 1×1012cm−2 in a short processing time. Finally, the sol-gel derived HfO2 layer was spin coated to construct a Si/SiO2/Au nanoparticles/HfO2 structure. The MOS structure embedded with Au nanoparticles showed well defined counterclockwise C-V hysteresis curves which indicating a good memory effect. The flat-band voltage shift was about 2.7 V at a swapping voltage between ±5V. Furthermore, the MOS structure embedded with Au nanoparticles behaved a desirable retention characteristic up to 104s. We have succeeded to fabricate the Metal-Oxide-Semiconductor capacitor structure (Si/SiO2/Au nanoparticles/HfO2) by a spin coating method. The spin coating method has many advantages like short fabrication time, high uniformity, and better reproducibility when compared with the traditional immersion method. Therefore, the spin coating method has the potential to be applied to nanofabrication processes in mass production.
本文制备了一种金属氧化物半导体(MOS)电容器(Si/SiO2/Au纳米颗粒/HfO2)。采用化学还原法制备了粒径约3.3nm的金(Au)纳米颗粒。然后用自旋涂覆法将自组装金纳米粒子附着在3-氨基丙基三甲氧基硅烷(APTMS)修饰的氧化硅衬底上。利用自旋包覆方法,可以在短时间内将金纳米颗粒制备在5.0 nm的热生长氧化硅上,其堆积密度为1×1012cm−2。最后,自旋涂覆溶胶-凝胶衍生的HfO2层,构建Si/SiO2/Au纳米颗粒/HfO2结构。嵌入金纳米粒子的MOS结构呈现出清晰的逆时针C-V迟滞曲线,表明其具有良好的记忆效应。在±5V切换电压时,平带电压位移约为2.7 V。此外,嵌入金纳米粒子的MOS结构具有良好的保留特性,保留率高达104s。我们成功地用自旋镀膜方法制备了金属氧化物半导体电容器结构(Si/SiO2/Au纳米颗粒/HfO2)。与传统浸渍法相比,该方法具有制备时间短、均匀性高、重现性好等优点。因此,自旋涂层方法具有应用于大规模生产的纳米加工工艺的潜力。
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引用次数: 0
Synthesis of Ni/TiO2 nanocomposite by loading TiO2 nanotubes with Ni nanoparticles Ni纳米颗粒负载TiO2纳米管合成Ni/TiO2纳米复合材料
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5425035
Yannan Yang, Yunhuai Zhang, P. Xiao, Xiaoning Zhang, Lu Lu, Lu Li
Synthesis of Ni nanoparticles on TiO2 nanotubes was carried out using a pulsed electrodeposition technique. TiO2 nanotubes were fabricated by anodization. The influence of the pulse electrodeposition conditions (current amplitudes, pulse time of negative current and substrate conductivity) was investigated on the surface morphology of Ni electrodeposited on TiO2 nanotube arrays. The particle size and surface morphology of Ni deposits were studied by field emission scanning electron microscopy (FESEM). The result indicated that the average size of Ni nanoparticles was varied from 20 to 43 nm. The phase structure of Ni/TiO2 materials was studied by X-ray diffraction (XRD). The experiment found that enhancing the conductivity of the TiO2 nanotubes was a key factor for the successful deposition of Ni nanoparticles.
采用脉冲电沉积技术在TiO2纳米管上合成了Ni纳米颗粒。采用阳极氧化法制备了TiO2纳米管。研究了脉冲电沉积条件(电流幅值、负电流脉冲时间和衬底电导率)对电沉积在TiO2纳米管阵列上的Ni表面形貌的影响。采用场发射扫描电镜(FESEM)研究了镍镀层的粒度和表面形貌。结果表明,Ni纳米颗粒的平均尺寸在20 ~ 43 nm之间。采用x射线衍射(XRD)研究了Ni/TiO2材料的相结构。实验发现,增强TiO2纳米管的导电性是成功沉积Ni纳米粒子的关键因素。
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引用次数: 0
Enhancement of ordering and perpendicular magnetic properties of CoPt films by adding Ag underlayer 添加银底层增强CoPt薄膜的有序磁性和垂直磁性
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424949
C. Shen, P. Kuo, Y. S. Li, G. Lin, K. Huang, S. C. Chen
CoPt/Ag films were prepared by magnetron sputtering on glass substrates and subsequent annealing. The dependence of ordering degree and magnetic properties on Ag film thickness and annealing conditions were investigated. It was found that the Ag underlayer played a dominant role in inducing the (001) texture of the CoPt film after annealing. CoPt films with a thickness about 20 nm and Ag underlayers with a thickness about 70 nm are easy to obtain a well ordering degree and a perpendicular magnetic anisotropy after annealing at 700 °C for 30 min. CoPt/Ag films with a large perpendicular coercivity in the range of 13.5–14.0 kOe and a perpendicular squareness of 0.97 were obtained after annealing at 700 °C for 30 min. Ag underlayer is beneficial to enhance the perpendicular coercivity (Hc⊥) and perpendicular squareness (S⊥) of CoPt film significantly. The ordering degree and perpendicular magnetic properties of the CoPt films which deposited on Ag underlayer are larger than those of the single layer CoPt films.
采用磁控溅射法制备了CoPt/Ag薄膜。研究了银膜厚度和退火条件对有序度和磁性能的影响。结果表明,Ag下层对CoPt薄膜退火后(001)织构的形成起主导作用。科普特人电影,厚度约20 nm和Ag)衬层厚度约70海里很容易获得一个订购学位和一个垂直磁各向异性在700°C退火后30分钟。科普特人/ Ag)电影,垂直的范围13.5 - -14.0 kOe矫顽力和垂直的垂直度0.97得到退火后30分钟。700°C Ag衬层有利于提高垂直矫顽力(Hc⊥)和垂直的垂直度(S⊥)科普特人电影明显。镀银下层的CoPt薄膜的有序度和垂直磁性能均大于单层CoPt薄膜。
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引用次数: 0
Identification of different concentrations of antibody by electrical property of DLC thin films 利用DLC薄膜的电学性质鉴定不同浓度的抗体
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424636
V. Amornkitbamrung, Kridsanapan Srimongkon, N. Faibut, Samarn Saekow
Hydrophobic properties, electrical properties, ratio of diamond and graphite contents and X-ray diffraction pattern are characterized of diamond-like-carbon thin films which are grown on silicon substrate by RF-CVD. Seeding techniques are varied in this experiment. Silicon substrate is cleaned with three different solvents by ultrasonic cleaner i.e. acetone, methanol, and de-ionized water about 5 minutes in each solvent. The size of 4–5 nanometers diamond powder suspension in methanol of 0.0010g/50ml is used for electro-deposition technique. Voltage between electrodes is 30 V and seeding times is 25 minutes. These are seeding conditions. Normal seeding, normal seeding then cleaning by ultrasonic cleaner in methanol, and seeding and cleaning at the same time are three different seeding techniques. DLC thin films are grown by RF-CVD at power of 100 W, pressure of 8.5 mbar, growth time of 30 minutes and H2 and CH4 flow rate of 6.50 and 1.50 sccm respectively. It is found that the results of the three techniques of seeding are nearby, for example, they have a hydrophobic property and their XRD patterns are quite similar. IV-characteristic is measured by Van der Pauw 4 point probe technique. When pure water, and several concentrations of antibody are dropped on the films, their IV-curves can be distinguished.
采用RF-CVD技术对在硅衬底上生长的类金刚石碳薄膜的疏水性能、电学性能、金刚石与石墨含量比和x射线衍射图进行了表征。在这个试验中播种技术是多种多样的。用超声波清洗机用丙酮、甲醇和去离子水三种不同的溶剂清洗硅衬底,每种溶剂清洗约5分钟。电沉积技术采用4-5纳米大小的金刚石粉悬浮在0.0010g/50ml的甲醇中。电极间电压30v,播种时间25min。这些是播种条件。正常播种,正常播种后用超声波清洗机在甲醇中清洗,同时播种和清洗是三种不同的播种技术。采用RF-CVD生长DLC薄膜,功率为100 W,压力为8.5 mbar,生长时间为30 min, H2和CH4的流速分别为6.50和1.50 sccm。结果表明,三种播种技术的结果比较接近,具有疏水性,XRD谱图比较接近。采用Van der paw 4点探针技术测量了iv特性。当在膜上滴入纯水和几种浓度的抗体时,可以区分它们的iv曲线。
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引用次数: 0
Crystallization and electrochemical corrosion behaviors of amorphous and nanocrystalline Fe-based alloys 非晶和纳米晶铁基合金的结晶和电化学腐蚀行为
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5425104
Xiang Li, Yuxin Wang, Chunfeng Du, Chenkui Li, B. Yan
Amorphous Fe73.5Si13.5B9Nb3Cu1 alloy was prepared by the chill block melt-spinning process and nanocrystalline alloy was obtained by annealing. The crystallization behavior was analysed by DSC, XRD and TEM. The electrochemical corrosion behaviors in different annealed states were performed by linear polarization method and electrochemical impedance spectroscopy in 1mol/L HCl solution. The results show that the crystallization of amorphous alloy occurs in the two steps. Some nanometer crystals appear when annealing in 550°C and 600°C, respectively with grain size 13nm and 15nm. The nanocrystalline alloy has higher corrosion potential and lower anodic current density than amorphous alloy. It indicates that nanocrystalline alloy has a higher corrosion resistance. Amorphous and nanocrystalline Fe73.5Si13.5B9Nb3Cu1 alloys both consisted of only single semi-circle. The charge transfer reaction resistances increases as annealing temperature rises.
采用冷块熔融纺丝法制备了Fe73.5Si13.5B9Nb3Cu1非晶态合金,退火后得到了纳米晶合金。采用DSC、XRD和TEM分析了结晶行为。在1mol/L HCl溶液中,采用线性极化法和电化学阻抗谱研究了不同退火状态下的电化学腐蚀行为。结果表明,非晶合金的结晶过程分为两个阶段。在550℃和600℃退火时,出现纳米级晶体,晶粒尺寸分别为13nm和15nm。纳米晶合金比非晶合金具有更高的腐蚀电位和更低的阳极电流密度。表明纳米晶合金具有较高的耐蚀性。非晶和纳米晶Fe73.5Si13.5B9Nb3Cu1合金均由单个半圆组成。电荷转移反应电阻随退火温度的升高而增大。
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引用次数: 2
Introducing time-dependant sources for solving time-domain Schrödinger equation using FDTD method 介绍用时域有限差分法求解时域Schrödinger方程的时变源
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424536
Xiao-Ying Wang, Wenting Guo, Chengzhi Li, Jin Lan, W. Sui
A numerical approach to introduce excitations in finite-difference time-domain (FDTD) method that solves time-domain Schrödinger equation is presented in this paper. The proposed approach which used to solve electromagnetic waves incidence has its novel application in this study. It can ensure incident electron wave propagate in a designated direction. The corresponding three-dimensional FDTD formulations and modified formulations at the incident boundary are both derived. To verify the proposed method, transmission coefficient of tunneling structures is calculated and the simulation results show high accuracy compared with the analytical solutions. Therefore this approach is proven versatile in solving the time-domain Schrödinger equation and it gives an effective method to analyze other more complicated structures and lays the foundation for future research work in related areas.
本文提出了求解时域Schrödinger方程的时域有限差分法(FDTD)中引入激励的数值方法。所提出的求解电磁波入射的方法在本研究中具有新的应用价值。它能保证入射电子波沿指定方向传播。导出了相应的三维时域有限差分公式和在入射边界处的修正公式。为了验证所提出的方法,对隧道结构的传递系数进行了计算,与解析解相比,仿真结果具有较高的精度。因此,该方法在求解时域Schrödinger方程方面具有通用性,并为分析其他更复杂的结构提供了有效的方法,为今后相关领域的研究工作奠定了基础。
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引用次数: 0
Dielectrophoretic addressable deposition of arc-SWCNTs for high-throughput screening FET arrays 用于高通量筛选FET阵列的电弧- swcnts介电泳可寻址沉积
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5424895
W. Guo, Zengpei Dou, Xiaoxue Tian, Hongfang Sun, Yanyi Huang, Dongsheng Xu, Yuanfang Liu
For fabrication of arc-discharged single walled carbon nanotubes (arc-SWCNTs) based FET array, controllable deposition of SWNTs is an important issue. In this study highly purified arc-SWCNTs are deposited on the high-throughput screening FET array via the addressable dielectrophoresis method. The electrodes array are designed with different electrode gaps, from 3 to 20 µm, every electrode has its own address. In order to limit the SWCNTs to be deposited within the electrodes area, we designed a deposition window on the silicon chip surface by the optical lithography. Then the diluted SWCNTs solution was dropped onto the limited window. By setting a voltage (10 V, 100 kHz) between a specific source electrode and the shared drain electrode, the SWCNTs can be aligned evenly within the pair of electrodes via the dielectrophoresis process. This method might facilitate the controllable fabrication of high throughput screening SWCNTs-FET arrays for biosensors.
对于基于电弧放电单壁碳纳米管(arc-SWCNTs)的场效应管阵列的制备,可控的单壁碳纳米管沉积是一个重要的问题。在本研究中,通过可寻址介电泳方法将高纯度的弧形swcnts沉积在高通量筛选FET阵列上。电极阵列设计有不同的电极间隙,从3到20µm,每个电极都有自己的地址。为了限制SWCNTs沉积在电极区域内,我们通过光学光刻技术在硅片表面设计了沉积窗口。然后将稀释后的SWCNTs溶液滴入限定窗口。通过在特定源电极和共用漏极之间设置电压(10 V, 100 kHz), SWCNTs可以通过介电泳过程在一对电极内均匀排列。该方法可用于生物传感器的高通量筛选SWCNTs-FET阵列的可控制造。
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引用次数: 0
Crystallization behavior of Ni-Nb-Sb system bulk metallic glass Ni-Nb-Sb系大块金属玻璃的结晶行为
Pub Date : 2010-03-04 DOI: 10.1109/INEC.2010.5425131
Junxia Lu, Jiliang Zhang, C. Shek
The crystallization of (Ni8Nb5)99.5Sb0.5 bulk metallic glass at the temperature of 700°C in the synthetic air was investigated. Crystallization occurred to form the columbite NiNb2O6 and oxides Nb2O5 and NiO. The surface presented the compact and continuous structure. The cross section shows that the oxide scale is about 40 µm depth. The upper scale forms the compact structure, however, loose one with the lamellar structure was observed with the depth. In the internal, a compact transition layer was also seen.
研究了(Ni8Nb5)99.5Sb0.5大块金属玻璃在合成空气中700℃的结晶过程。结晶形成柱状NiNb2O6和氧化物Nb2O5和NiO。表面呈现致密连续的结构。从横截面上可以看出,氧化垢深度约为40µm。上尺度为致密结构,而随深度的增加,呈松散的层状结构。内部可见致密的过渡层。
{"title":"Crystallization behavior of Ni-Nb-Sb system bulk metallic glass","authors":"Junxia Lu, Jiliang Zhang, C. Shek","doi":"10.1109/INEC.2010.5425131","DOIUrl":"https://doi.org/10.1109/INEC.2010.5425131","url":null,"abstract":"The crystallization of (Ni8Nb5)99.5Sb0.5 bulk metallic glass at the temperature of 700°C in the synthetic air was investigated. Crystallization occurred to form the columbite NiNb<inf>2</inf>O<inf>6</inf> and oxides Nb<inf>2</inf>O<inf>5</inf> and NiO. The surface presented the compact and continuous structure. The cross section shows that the oxide scale is about 40 µm depth. The upper scale forms the compact structure, however, loose one with the lamellar structure was observed with the depth. In the internal, a compact transition layer was also seen.","PeriodicalId":6390,"journal":{"name":"2010 3rd International Nanoelectronics Conference (INEC)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2010-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73461015","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2010 3rd International Nanoelectronics Conference (INEC)
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