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2007 7th IEEE Conference on Nanotechnology (IEEE NANO)最新文献

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Structural and optical properties of CuPc/ZnSe multilayer hybrid thin films prepared by electron beam evaporator 电子束蒸发器制备CuPc/ZnSe多层杂化薄膜的结构和光学性能
Pub Date : 2007-08-01 DOI: 10.1109/NANO.2007.4601140
T. Thiwawong, B. Tunhoo, J. Nukeaw
Multilayer hybrid thin films consisting of alternating layers of organic and inorganic materials were fabricated with powder of copper-phthalocyanine (CuPc) and zinc selenide (ZnSe) by electron beam evaporator. The structural and optical characterization of multilayer hybrid thin film were carried out by using X-ray diffraction (XRD), atomic force microscope (AFM) and UV-Vis absorption spectroscopy. XRD patterns show two peaks of the orientation of (200) plane monoclinic structure in CuPc material and (111) plane cubic structure in ZnSe material where pair numbers of multilayer hybrid thin film higher than two pairs. With the variation in the number of pairs of CuPc/ZnSe, AFM images present almost similar morphology but the optical absorption spectra are significantly changed. Such spectral changes can be interpreted by the effect of the aggregate size and the characteristic of the multilayer hybrid structure.
以酞菁铜(CuPc)和硒化锌(ZnSe)为原料,利用电子束蒸发器制备了有机无机材料交替多层杂化薄膜。利用x射线衍射(XRD)、原子力显微镜(AFM)和紫外-可见吸收光谱对多层杂化薄膜进行了结构和光学表征。XRD谱图显示CuPc材料的(200)平面单斜结构取向峰和ZnSe材料的(111)平面立方结构取向峰,其中多层杂化薄膜的对数大于2对。随着CuPc/ZnSe对数的变化,AFM图像形貌基本一致,但光学吸收光谱发生明显变化。这种光谱变化可以用骨料粒度的影响和多层杂化结构的特性来解释。
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引用次数: 0
Atomically precise silicon device fabrication 原子精密硅器件制造
Pub Date : 2007-08-01 DOI: 10.1109/NANO.2007.4601329
M. Simmons, F. Rueß, W. Pok, D. Thompson, M. Fuchsle, Giordano Scappucci, T. Reusch, K. Goh, S. R. Schofield, B. Weber, L. Oberbeck, A. Hamilton, F. Ratto
An important driving force behind the microelectronics industry is the ability to pack ever more features onto a silicon chip, by continually miniaturising the individual components. However, after 2015 there is no known technological route to reduce devices below 10 nm. We demonstrate a complete fabrication strategy towards atomic-scale device fabrication in silicon using phosphorus as a dopant in combination with scanning probe lithography and high purity, low temperature crystal growth. A major advantage of this strategy is the ability to investigate the role of dopant placement and atomically controlled growth on electronic device operation.
微电子工业背后的一个重要驱动力是,通过不断缩小单个组件,能够在硅芯片上封装更多的功能。然而,在2015年之后,没有已知的技术路线将器件缩小到10纳米以下。我们展示了一种完整的制造策略,用于在硅中使用磷作为掺杂剂,结合扫描探针光刻和高纯度,低温晶体生长。这种策略的一个主要优点是能够研究掺杂剂放置和原子控制生长对电子器件操作的作用。
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引用次数: 1
Extraordinary transmission through aluminum metal with superperiodic micro-cell arranged in a long-range periodic structure 超常传输通过铝金属与超周期微电池排列在长周期结构
Pub Date : 2007-08-01 DOI: 10.1109/NANO.2007.4601189
Yi-Tsung Chang, Y. Ye, Chia-Yi Chen, M. Tsai, Si‐Chen Lee
Enhanced optical transmission through an Al film with perforated short-range 3times3, 4times4 and 5times5 hole arrays arranged in a long-range periodic structure is investigated. This three finite squared holes array constitutes an individual micro-cell, respectively. The measured transmission peak wavelength reveals that the surface plasmons are Fabry-Perot type resonance to different integer order. The ratio of periodicity between the super-periodic structure p and the NtimesN micro-cell d determines the integer order (where N is number of isolated hole; N=3, 4 and 5). Namely, when p/d>4, the order 4 and 5 surface plasmon modes with average hole spacing p/4 and p/5 are observed in 4times4 micro-cell array, respectively. The transmission intensities of order 4 mode are the strongest, and those of order 5 modes are barely seen. But as p/d approaches 5, the order 4 mode gradually disappear with the emergence of order 5 mode. The 3times3 and 5times5 micro-cell array have the same result. These phenomena suggest that the surface plasmons are Fabry-Perot type resonance within a super unit cell. The dispersion relations of surface plasmons are also observed.
研究了以长程周期结构排列的3times3、4times4和5times5孔阵列穿孔铝膜的增强光传输。这三个有限的平方孔阵列分别构成一个单独的微电池。透射峰波长测量结果表明,表面等离子体为不同整数阶的法布里-珀罗型共振。超周期结构p与NtimesN微单元d之间的周期性之比决定了整数阶数(其中N为隔离孔数;N= 3,4和5),即当p/d>4时,在4times4微单元阵列中分别观测到平均空穴间距为p/4和p/5的4阶和5阶表面等离子体模。4阶模式的传输强度最强,而5阶模式的传输强度几乎看不到。但当p/d接近5时,4阶模态逐渐消失,出现5阶模态。3times3和5times5微单元阵列的结果相同。这些现象表明,表面等离激元是超单晶胞内的法布里-珀罗型共振。还观察了表面等离子体的色散关系。
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引用次数: 0
Controlling the orientation of carbon nanotubes in nano assembly 纳米组装中碳纳米管取向的控制
Pub Date : 2007-08-01 DOI: 10.1109/NANO.2007.4601214
U. Wejinya, N. Xi, Yantao Shen, K. Lai
In this paper, a new mathematical model describing precisely the rotation/orientation of carbon nanotubes in viscous medium (acetone) is presented. This new mathematical model correctly assumes that carbon nanotubes form a line shape after undergoing AC dielectrophoretic force (DEP) compare to existing model that assumes carbon nanotubes to be a spherical particle. The new mathematical model is based on a new developed model for applied torque due to dielectrophoresis. It is also a method for controlled assembly of the CNTs on microstructures that have the plausibility to be scaled to wafer-level manufacturing. Simulation results are presented for the developed models. The developed model can be used to detect the position of carbon nanotubes and further implemented in the separation of semiconducting and metallic band structure carbon nanotubes. Ultimately, the developed model will provide a critical and major step towards the use of carbon nanotubes in the manufacturing of electronics and sensors for potential use in electrical circuits, as fiber and film, computer circuits, light bulb filament, ultracapacitors, combat jackets, etc.
本文提出了一种新的精确描述碳纳米管在粘性介质(丙酮)中的旋转/取向的数学模型。与现有的假设碳纳米管是球形粒子的模型相比,这个新的数学模型正确地假设碳纳米管在经历交流介电泳力(DEP)后形成线形。新的数学模型是基于新建立的介电电泳施加扭矩模型。这也是一种控制碳纳米管在微结构上组装的方法,这种微结构有可能扩展到晶圆级制造。最后给出了所建立模型的仿真结果。该模型可用于碳纳米管的位置检测,并进一步应用于半导体和金属带结构碳纳米管的分离。最终,开发的模型将为碳纳米管在电子产品和传感器制造中的潜在应用提供关键和重要的一步,如光纤和薄膜、计算机电路、灯泡灯丝、超级电容器、战斗夹克等。
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引用次数: 1
Silicon-based 2D slab nano photonic crystal TM polarizer in telecommunication wavelength 通信波长硅基二维平板纳米光子晶体TM偏振器
Pub Date : 2007-08-01 DOI: 10.1109/NANO.2007.4601374
Yonghao Cui, Qi Wu, E. Schonbrun, M. Tinker, J. Lee, W. Park
We report an extremely compact (15.4 mum x 8 mum) silicon-based 2D slab nano photonic crystal transverse magnetic (TM) polarizer which blocks propagation of the transverse electric (TE) polarized light around telecommunication wavelength (1,550 nm). TM polarization occurs in a length of mere 4.9 mum and it has a great potential to be integrated in a complex photonic integrated circuits. To our knowledge, this is the first ever demonstration of silicon-based TM polarizer in telecommunication wavelength. 2D and 3D finite difference time domain (FDTD) simulation was utilized to design a triangular array of air holes in silicon. Such photonic crystal TM polarizer was fabricated in silicon-on-insulator wafer using focused ion beam and reactive ion etch with air hole diameter of 170 nm and pitch distance of 347 nm for the TM polarizer and 371 nm for the input and output waveguide. The device was fully characterized using tunable lasers in the wavelength range of 1,528 nm ~ 1,604 nm. Transmitted light intensities of the TE and TM polarized lights were measured which clearly showed the TE polarized light is filtered out around 1.55 mum wavelength.
我们报道了一种非常紧凑的(15.4 μ m x 8 μ m)硅基二维平板纳米光子晶体横向磁(TM)偏振器,它可以阻止横向电(TE)偏振光在电信波长(1,550 nm)周围的传播。TM极化的长度仅为4.9 μ m,在复杂的光子集成电路中具有很大的集成潜力。据我们所知,这是有史以来第一次在电信波长上展示硅基TM偏振器。利用二维和三维时域有限差分(FDTD)仿真方法设计了硅材料上的三角形气孔阵列。采用聚焦离子束和反应离子蚀刻技术,在绝缘体硅片上制备了这种光子晶体TM偏振片,TM偏振片的气孔直径为170 nm,间距为347 nm,输入输出波导的间距为371 nm。利用波长范围为1528 nm ~ 1604 nm的可调谐激光器对器件进行了全面表征。测量了TE和TM偏振光的透射光强,清楚地表明TE偏振光在1.55 μ m波长附近被滤除。
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引用次数: 3
Micromanipulation based on AFM: Probe tip selection 基于AFM的显微操作:探针尖端选择
Pub Date : 2007-08-01 DOI: 10.1109/NANO.2007.4601242
Shaorong Du, Yangmin Li
Micromanipulation based on AFM (atomic force microscope) has become popular in recent years. Since the AFM probe tip can have several shapes, how to select tip shape is discussed for micromanipulation in this paper. Based on the Hamaker hypotheses and the Lennard-Jones potential, interactions between probe and substrate surface are analyzed for three typical shape probe tips, namely, quadrilateral pyramid, cone, and paraboloid. Simulations are presented, and conclusion is obtained: a quadrilateral pyramid probe tip with small inclination between edge and axis is the best choice for micromanipulation based on AFM.
基于原子力显微镜(AFM)的显微操作近年来得到了广泛的应用。由于AFM探针的尖端可以有多种形状,本文讨论了如何选择尖端形状进行显微操作。基于Hamaker假设和Lennard-Jones势,分析了四棱锥型、锥型和抛物面型三种典型形状探针尖端与基底表面的相互作用。仿真结果表明:边轴倾角小的四边形金字塔探针尖是AFM显微操作的最佳选择。
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引用次数: 6
Field emission from the composite structure of silicon tips and vertical carbon nanotubes 硅尖与垂直碳纳米管复合结构的场发射
Pub Date : 2007-08-01 DOI: 10.1109/NANO.2007.4601210
S.X. Chen, J.J. Li, C. Gu
The composite structure of silicon tips and vertical aligned carbon nanotubes (CNTs) was prepared using plasma enhanced hot filament chemical vapor deposition (PE-HFCVD) method on the silicon wafer, and Au/Ni film coated on the substrate was considered as a catalyst. High proportion hydrogen of 96% volume percentage and high total pressure are used during preparing process, and the pure CNTs, pure silicon tips, and the admixture of silicon tips and CNTs can be prepared by varying the total pressures, respectively. Scanning electron microscopy measurement shows that Si tips are formed in the vertical aligned CNTs, and the related formation mechanism of this admixture was discussed. The results of field emission measurement show that this composite structure has very excellent electron field emission properties - low threshold field, high emission current density and stable emission current, which are attributed to the increased field enhancement factor and reducing field shield effect for this composite structure.
采用等离子体增强热丝化学气相沉积(PE-HFCVD)方法在硅片上制备了硅尖与垂直排列碳纳米管(CNTs)的复合结构,并将镀在衬底上的Au/Ni薄膜作为催化剂。制备过程中使用96%体积百分比的高比例氢气和高总压,通过改变总压可以分别制备出纯碳纳米管、纯硅尖端和硅尖端与碳纳米管的混合物。扫描电镜测量结果表明,垂直排列的CNTs中有Si尖端形成,并对其形成机理进行了讨论。场发射测量结果表明,该复合结构具有极好的场发射性能——低阈值场、高发射电流密度和稳定的发射电流,这是由于该复合结构提高了场增强因子和减小了场屏蔽效应。
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引用次数: 2
Two-dimensional electron gas (2DEG) IDT SAW devices on AlGaN/GaN heterostructure AlGaN/GaN异质结构的二维电子气体(2DEG) IDT SAW器件
Pub Date : 2007-08-01 DOI: 10.1109/NANO.2007.4601361
King-yuen Wong, W. Tang, K. Lau, K.J. Chen
Surface acoustic wave (SAW) devices using two-dimensional electron gas (2DEG) as interdigital transducers (IDTs) on AlGaN/GaN heterostructure has been demonstrated using a planar isolation technique based on the fluoride-based (CF4) plasma treatment technique. The RF characteristics of the SAW filters with planar 2DEG IDTs are compared with SAW devices that are made of metal IDTs or hybrid metal/2DEG IDTs.
利用基于氟基(CF4)等离子体处理技术的平面隔离技术,在AlGaN/GaN异质结构上展示了使用二维电子气(2DEG)作为数字间换能器(IDTs)的表面声波(SAW)器件。比较了采用平面2DEG idt的SAW滤波器与采用金属idt或混合金属/2DEG idt的SAW器件的射频特性。
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引用次数: 0
Packaging carbon nanotube based infrared detector 基于碳纳米管封装的红外探测器
Pub Date : 2007-08-01 DOI: 10.1109/NANO.2007.4601301
K. Lai, N. Xi, Jiangbo Zhang, Guangyong Li, Hongzhi Chen
We present a fabrication and packaging method of carbon nanotube (CNT) based infrared (IR) sensor chip using parylene C layer. CNT was found to be sensitive under near IR radiation and it could be used as IR sensing element. Parylene C thin film was used as a conformal pin hole free insulating layer and oxygen barrier for protecting CNTs during the detection. The IR transmission properties of parylene C layer and the influence on the response of the CNT sensor were studied. Our experimental results showed that the CNT sensor without parylene C protection exhibited current change when it was exposed to the IR laser. The sensing current percentage changes decreased when the parylene C thin film substrate was placed between the CNT sensor and IR laser source. It implied the IR absorption behavior of parylene C thin film. We also found that the IR absorption level is proportional to the thickness of the parylene C layer. The parylene C packaged CNT sensor was fabricated and tested under near IR radiation. Preliminary results indicated that the CNT IR detector coated with parylene C was capable of sensing IR radiation and exhibited repeatable response. Moreover, the IV characteristic of the sensor chip was measured when it was surrounded by dry ice for long time to investigate its long term stability under moisture environment. Therefore, the packaging process can become possible to fabricate a CNT based IR sensor array which possesses more stable and reliable performance.
提出了一种基于聚对二甲苯C层的碳纳米管红外传感器芯片的制备和封装方法。碳纳米管对近红外辐射敏感,可作为红外传感元件。采用聚对二甲苯薄膜作为保形无针孔绝缘层和氧屏障,在检测过程中保护碳纳米管。研究了聚对二甲苯C层的红外透射特性及其对碳纳米管传感器响应的影响。实验结果表明,未加对二甲苯保护的碳纳米管传感器在红外激光照射下发生电流变化。当在碳纳米管传感器和红外激光源之间放置对二甲苯C薄膜衬底时,传感电流百分比变化减小。揭示了聚对二甲苯C薄膜的红外吸收行为。我们还发现,红外吸收水平与聚二甲苯层的厚度成正比。制备了聚对二甲苯封装的碳纳米管传感器,并对其进行了近红外辐射测试。初步结果表明,聚对二甲苯涂层的碳纳米管红外探测器能够感知红外辐射,并具有可重复的响应。此外,通过测量传感器芯片长时间被干冰包围时的IV特性,考察其在水分环境下的长期稳定性。因此,封装工艺可以制造出性能更稳定可靠的基于碳纳米管的红外传感器阵列。
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引用次数: 15
Cu2O nanorods with large surface area for photodegradation of organic pollutant under visible light 具有大表面积的Cu2O纳米棒在可见光下光降解有机污染物
Pub Date : 2007-08-01 DOI: 10.1109/NANO.2007.4601346
Lili Ma, Meng Peng, Jialin Li, Ying Yu, Zhenghua Chen
Cu2O nanorods with extraordinary large surface area are synthesized by polyol method successfully. Their photocatalytic property is evaluated by the photodegradation of brilliant red dye under visible light irradiation. For comparison, Cu2O nanocubes are synthesized and evaluated with photocatalytic property as well. The results show that the photocatalytic activity of the Cu2O nanorods is more than one time higher than that for Cu2O nanocubes under visible light. Additionally, the structure of the Cu2O nanorods is very stable and they can not be oxidized to CuO even during the photocatalytic reaction process. It is noticeable that this kind of Cu2O nanorods has remarkable large surface areas 47.6 m2/g, which is about forty times as large as that for as-prepared Cu2O nanocubes and it is also three times larger than that for the reported porous Cu2O nanoparticles. The large surface area of Cu2O nanorods leads to its higher adsorption ability to the brilliant red dye and excellent high photocatalytic activity under visible light. Since Cu2O nanorods are very stable and have high photocatalytic activity under visible light, they are expected to be used in photocatalytic oxidation technology practically in the future.
采用多元醇法制备了具有超大表面积的Cu2O纳米棒。通过在可见光照射下对大红染料的光降解,评价了它们的光催化性能。为了比较,合成了Cu2O纳米立方体,并对其光催化性能进行了评价。结果表明,在可见光下,纳米棒的光催化活性比纳米立方的光催化活性高1倍以上。此外,Cu2O纳米棒的结构非常稳定,即使在光催化反应过程中也不会被氧化成CuO。值得注意的是,这种Cu2O纳米棒具有显著的大表面积47.6 m2/g,是制备的Cu2O纳米立方体的40倍左右,是报道的多孔Cu2O纳米颗粒的3倍。Cu2O纳米棒的表面积大,对艳红染料具有较高的吸附能力,在可见光下具有优异的光催化活性。由于Cu2O纳米棒在可见光下非常稳定且具有较高的光催化活性,因此有望在未来的光催化氧化技术中得到实际应用。
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引用次数: 1
期刊
2007 7th IEEE Conference on Nanotechnology (IEEE NANO)
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