Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260957
M. Sundaramurthy
IEEE Xplore Document Suppressed.
IEEE explore文档抑制。
{"title":"Linearizing the protein-carbon nanotube/graphene amperometric sensors using negative feedback","authors":"M. Sundaramurthy","doi":"10.1109/ISPTS.2012.6260957","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260957","url":null,"abstract":"IEEE Xplore Document Suppressed.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86043550","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260920
E. Prabhu, C. Mariappan, G. Hareesh, K. I. Gnanasekar, V. Jayaraman, T. Gnanasekaran
An ammonia sensor based on Ag6Mo10O33 thick film was fabricated and tested. The morphology of the film was characterized by SEM. The electrical capacitance and impedance of the compound were investigated by exposing the film in air, air containing 500 vppm of H2, petroleum gas (PG) and NH3 independently at 350°C using AC impedance spectroscopy. When the film was exposed to air containing ammonia significant increase in capacitance was observed at lower frequencies. The mechanism for the changes in capacitance and impedance as a function of frequency is presented.
{"title":"Selective detection of NH3 by Ag6Mo10O33 thick film by AC impedance spectroscopy","authors":"E. Prabhu, C. Mariappan, G. Hareesh, K. I. Gnanasekar, V. Jayaraman, T. Gnanasekaran","doi":"10.1109/ISPTS.2012.6260920","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260920","url":null,"abstract":"An ammonia sensor based on Ag6Mo10O33 thick film was fabricated and tested. The morphology of the film was characterized by SEM. The electrical capacitance and impedance of the compound were investigated by exposing the film in air, air containing 500 vppm of H2, petroleum gas (PG) and NH3 independently at 350°C using AC impedance spectroscopy. When the film was exposed to air containing ammonia significant increase in capacitance was observed at lower frequencies. The mechanism for the changes in capacitance and impedance as a function of frequency is presented.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91273246","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260969
Madhushree Bute, A. Sheikh, V. Mathe, D. Bodas, R. N. Karekar, S. Gosavi
The paper describes design and fabrication of simple, magnetically actuated flexible polymer valve for flow manipulation in the microfluidic network. The valve is made up of a polymer composite. The CoFe2O4 was embedded in PDMS (Polydimethylsiloxane) for making this polymer composite. The composites of different volume percentage loading of CoFe2O4 were used and for each concentration valves of different thicknesses were fabricated, as thin rectangular membranes. This membrane was magnetized in the thickness direction and showed typical permanent magnet behaviour. For actuation of the valve the membrane was deflected by externally applied magnetic force which can close either of the channels. The flow manipulation and proper operation of the valve depends on thickness and percentage loading of magnetic material in membrane as well as dimensions of channel, chamber and membrane with respect to the location of outlet channels. The microfluidic channel was completely close for any fluid flow rate.
{"title":"Magnetically controlled flexible valve for flow manipulation in polymer microfluidic devices","authors":"Madhushree Bute, A. Sheikh, V. Mathe, D. Bodas, R. N. Karekar, S. Gosavi","doi":"10.1109/ISPTS.2012.6260969","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260969","url":null,"abstract":"The paper describes design and fabrication of simple, magnetically actuated flexible polymer valve for flow manipulation in the microfluidic network. The valve is made up of a polymer composite. The CoFe2O4 was embedded in PDMS (Polydimethylsiloxane) for making this polymer composite. The composites of different volume percentage loading of CoFe2O4 were used and for each concentration valves of different thicknesses were fabricated, as thin rectangular membranes. This membrane was magnetized in the thickness direction and showed typical permanent magnet behaviour. For actuation of the valve the membrane was deflected by externally applied magnetic force which can close either of the channels. The flow manipulation and proper operation of the valve depends on thickness and percentage loading of magnetic material in membrane as well as dimensions of channel, chamber and membrane with respect to the location of outlet channels. The microfluidic channel was completely close for any fluid flow rate.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74579579","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260898
Girish M. Gouda, C. L. Nagendra
Manganese vanadium oxide thermistor materials both in bulk and thin film form have been prepared and characterized. The bulk materials synthesized by ceramic tape casting and solid state sintering are crystalline in nature while thin films are amorphous even after post deposition annealing at high temperature. The electrical properties' study clearly shows that these materials follow a typical characteristic of negative temperature coefficient (NTC) of resistivity which is attributed to small polaron hopping. The thin film samples have direct optical band gap and shows increased absorption in the infrared region.
{"title":"A new transition metal oxide sensor material for thermistor applications: Manganese-vanadium-oxide","authors":"Girish M. Gouda, C. L. Nagendra","doi":"10.1109/ISPTS.2012.6260898","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260898","url":null,"abstract":"Manganese vanadium oxide thermistor materials both in bulk and thin film form have been prepared and characterized. The bulk materials synthesized by ceramic tape casting and solid state sintering are crystalline in nature while thin films are amorphous even after post deposition annealing at high temperature. The electrical properties' study clearly shows that these materials follow a typical characteristic of negative temperature coefficient (NTC) of resistivity which is attributed to small polaron hopping. The thin film samples have direct optical band gap and shows increased absorption in the infrared region.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74626739","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260877
P.S Soumya, K. Surabhi, V. Krishnappa, G. Miranda, N. D. Dushyantha
This paper is an attempt to establish a procedure for 2D quantization of a flaw. In this study, Tin (Sn) a regularly occurring flaw in structural Steel is considered. Using COMSOL 4.2, a 2D transient pressure acoustic model is created, which consists of a 70mm×70mm structural Steel plate with four acoustic transceivers 90 degree apart (each providing 5cycles of 1Mhz sequential sinusoidal excitation) placed along its perfectly reflecting boundary. The signals obtained from the transceivers are post processed using FFT techniques and are further processed for image reconstruction. From the statistical analysis the position of the flaw is determined. The mean deviation from the actual central location of the flaw to the predicted location is (1.136mm, 0.979mm).
{"title":"Investigation of acoustic structure interaction for flawed structure","authors":"P.S Soumya, K. Surabhi, V. Krishnappa, G. Miranda, N. D. Dushyantha","doi":"10.1109/ISPTS.2012.6260877","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260877","url":null,"abstract":"This paper is an attempt to establish a procedure for 2D quantization of a flaw. In this study, Tin (Sn) a regularly occurring flaw in structural Steel is considered. Using COMSOL 4.2, a 2D transient pressure acoustic model is created, which consists of a 70mm×70mm structural Steel plate with four acoustic transceivers 90 degree apart (each providing 5cycles of 1Mhz sequential sinusoidal excitation) placed along its perfectly reflecting boundary. The signals obtained from the transceivers are post processed using FFT techniques and are further processed for image reconstruction. From the statistical analysis the position of the flaw is determined. The mean deviation from the actual central location of the flaw to the predicted location is (1.136mm, 0.979mm).","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89159180","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260919
C. Prakash
Electroceramics is a class of very important and versatile ceramic materials whose electrical properties are exploited to make devices for a number of advanced applications for civil and military use. These materials include: ferrites, ferroelectrics, piezoelectrics, pyroelectrics, microwave dielectrics etc. Their physical and chemical properties are sensitive to a change in the environment such as temperature, pressure, electric field, magnetic field etc. They form essential component of any smart system. Most of the practical applications are based on bulk ceramics. A material can be tailored by suitable substitutions to get desired characteristics to meet specific requirements. Though the material properties are predominantly governed by composition, processing methodology plays an important role to control material performance and thus optimization of processing parameters become very crucial. Here development of microwave ferrites and dielectrics for phase shifters, prizoelectrics for actuator applications and pyroelectrics for IR detectors are described. Some of the novel material processing techniques shall also be presented.
{"title":"Electroceramics for sensors and actuators","authors":"C. Prakash","doi":"10.1109/ISPTS.2012.6260919","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260919","url":null,"abstract":"Electroceramics is a class of very important and versatile ceramic materials whose electrical properties are exploited to make devices for a number of advanced applications for civil and military use. These materials include: ferrites, ferroelectrics, piezoelectrics, pyroelectrics, microwave dielectrics etc. Their physical and chemical properties are sensitive to a change in the environment such as temperature, pressure, electric field, magnetic field etc. They form essential component of any smart system. Most of the practical applications are based on bulk ceramics. A material can be tailored by suitable substitutions to get desired characteristics to meet specific requirements. Though the material properties are predominantly governed by composition, processing methodology plays an important role to control material performance and thus optimization of processing parameters become very crucial. Here development of microwave ferrites and dielectrics for phase shifters, prizoelectrics for actuator applications and pyroelectrics for IR detectors are described. Some of the novel material processing techniques shall also be presented.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83487277","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260951
Shweta Kirkire, Ashok Kumar, M. Karimi, Amarnath, Hanuman Prasad, Ashish Srivastava, Sanjeev Mehta, Sandip Paul, R. Parmar, D. Samudraiah
Future Remote Sensing Satellites with high resolution electro-optical payloads require multiple detectors to meet mission goals of multiple spectral bands and large swath. High speed detectors are available with limited pixels array length with multiple video ports. Large number of detectors at the focal plane calls for miniaturized camera electronics. Miniaturization requires usage of low power, low weight components and adaption of new packaging techniques like Multi chip module, System-in Package, Systems-on-chip and wafer level packaging etc. These technologies require multiple dice which are not readily available in required high quality levels. Hence, new packaging approach named as vertically stacked packaging (VSP) is developed in-house and demonstrated. This incorporates vertical stacking of PCBs, inter-board interfaces using copper leads, usage of flexi-rigid boards, single external interface connector and vertical passive component mounting. Here, using VSP technology, reduction is achieved in size by about 91% and weight by about 85% as compared to traditional packaging approaches. This paper mainly discusses the VSP development, optimization and integrated test results with 4K TDI detector.
{"title":"Development of vertically stacked packaging based miniaturized camera electronics for high resolution imaging payloads","authors":"Shweta Kirkire, Ashok Kumar, M. Karimi, Amarnath, Hanuman Prasad, Ashish Srivastava, Sanjeev Mehta, Sandip Paul, R. Parmar, D. Samudraiah","doi":"10.1109/ISPTS.2012.6260951","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260951","url":null,"abstract":"Future Remote Sensing Satellites with high resolution electro-optical payloads require multiple detectors to meet mission goals of multiple spectral bands and large swath. High speed detectors are available with limited pixels array length with multiple video ports. Large number of detectors at the focal plane calls for miniaturized camera electronics. Miniaturization requires usage of low power, low weight components and adaption of new packaging techniques like Multi chip module, System-in Package, Systems-on-chip and wafer level packaging etc. These technologies require multiple dice which are not readily available in required high quality levels. Hence, new packaging approach named as vertically stacked packaging (VSP) is developed in-house and demonstrated. This incorporates vertical stacking of PCBs, inter-board interfaces using copper leads, usage of flexi-rigid boards, single external interface connector and vertical passive component mounting. Here, using VSP technology, reduction is achieved in size by about 91% and weight by about 85% as compared to traditional packaging approaches. This paper mainly discusses the VSP development, optimization and integrated test results with 4K TDI detector.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85708434","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260866
P. Shelke, Y. Khollam, M. Chaskar, K. Mohite
Presently, our environment is polluted by number of gases exhausted from auto and chemical industry. The detection of harmful gases is becoming a need of society. Sensors play an important role in the areas of emissions control, environmental protection, public safety and human health. Over the past decades, several kinds of gas sensors have been developed. Co3O4 is an important p-type semiconductor with a normal spinel structure and it has many commercial or potential applications. However, literature research revealed that thin film gas sensors based on Co3O4 are not reported up to now. In view of this, the LPG and NH3 sensing characteristics of 1-D interlinked nanowired Co3O4 films deposited by using pulsed D.C. electrochemical deposition method are presented in this paper. The (CH3COO)2Co.4H2O (0.5 M) and H3BO3 (0.15 M) were dissolved one by one in 250 ml of double distilled water and then filtered using Whatman 41 filter paper. The cobalt based thin films were deposited on thoroughly cleaned stainless steel (SS) and copper (CU) substrates (each of size: 2 cm × 2 cm & thickness = 0.5 mm) using pulsed DC electrochemical deposition method. The films were deposited by using following parameters: (1) pH of solution ∼ 4.5 (by adding NaOH / HCl in solution), (2) cathode-anode distance ∼ 2.5 cm, (3) pulsed deposition on time = 1.5 minute, (4) pulsed off time = 20 sec, (5) total deposition time = 11 minute and (6) current density ∼ 8 mA/cm2. All as-deposited films were heated at 350 °C for 2 hr. The films prepared on SS and CU substrates were identified as PESA and PEUA respectively. The resultant films were characterized by using X-ray diffraction (XRD), Raman spectroscopy and scanning electron microscopy (SEM). The LPG and NH3 gas sensing properties: sensitivity factor (S.F.), response time, recovery time and repeatability of these films were measured at room temperature (RT) by using home-built static gas sensing system at different concentrations ranging from ∼ 25 to 350 ppm of a given test gas.The XRD and Raman spectroscopy studies clearly indicated the formation of pure Co3O4 phase in these films. The values of lattice parameter (ao) calculated for PESA and PEUA films are found to be 8.063 Å and 8.062 Å respectively, which are found to be matching with reported value = 8.084 Å for cubic spinel Co3O4. The morphological studies of films by SEM showed some interesting observations. The surface of each film is found to be covered with the mesh of interlinked wires with more or less flat base. The interlinked wired mesh is noted to be attached firmly to base at different points with the insertion of ends of wires into the surface at those points. The diameters and lengths of 1-D interlinked wires are found to be between 250 – 350 nm and 2 – 10 µm respectively. The densification at the surface of each film is seen to be moderate, however, qualitatively the densification below the interlinked wired mesh structure is found to be good. The LPG and NH3 g
{"title":"LPG and NH3 sensing characteristics of 1-D interlinked nanowired Co3O4 films deposited by using pulsed D.C. electrochemical deposition method","authors":"P. Shelke, Y. Khollam, M. Chaskar, K. Mohite","doi":"10.1109/ISPTS.2012.6260866","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260866","url":null,"abstract":"Presently, our environment is polluted by number of gases exhausted from auto and chemical industry. The detection of harmful gases is becoming a need of society. Sensors play an important role in the areas of emissions control, environmental protection, public safety and human health. Over the past decades, several kinds of gas sensors have been developed. Co3O4 is an important p-type semiconductor with a normal spinel structure and it has many commercial or potential applications. However, literature research revealed that thin film gas sensors based on Co3O4 are not reported up to now. In view of this, the LPG and NH3 sensing characteristics of 1-D interlinked nanowired Co3O4 films deposited by using pulsed D.C. electrochemical deposition method are presented in this paper. The (CH3COO)2Co.4H2O (0.5 M) and H3BO3 (0.15 M) were dissolved one by one in 250 ml of double distilled water and then filtered using Whatman 41 filter paper. The cobalt based thin films were deposited on thoroughly cleaned stainless steel (SS) and copper (CU) substrates (each of size: 2 cm × 2 cm & thickness = 0.5 mm) using pulsed DC electrochemical deposition method. The films were deposited by using following parameters: (1) pH of solution ∼ 4.5 (by adding NaOH / HCl in solution), (2) cathode-anode distance ∼ 2.5 cm, (3) pulsed deposition on time = 1.5 minute, (4) pulsed off time = 20 sec, (5) total deposition time = 11 minute and (6) current density ∼ 8 mA/cm2. All as-deposited films were heated at 350 °C for 2 hr. The films prepared on SS and CU substrates were identified as PESA and PEUA respectively. The resultant films were characterized by using X-ray diffraction (XRD), Raman spectroscopy and scanning electron microscopy (SEM). The LPG and NH3 gas sensing properties: sensitivity factor (S.F.), response time, recovery time and repeatability of these films were measured at room temperature (RT) by using home-built static gas sensing system at different concentrations ranging from ∼ 25 to 350 ppm of a given test gas.The XRD and Raman spectroscopy studies clearly indicated the formation of pure Co3O4 phase in these films. The values of lattice parameter (ao) calculated for PESA and PEUA films are found to be 8.063 Å and 8.062 Å respectively, which are found to be matching with reported value = 8.084 Å for cubic spinel Co3O4. The morphological studies of films by SEM showed some interesting observations. The surface of each film is found to be covered with the mesh of interlinked wires with more or less flat base. The interlinked wired mesh is noted to be attached firmly to base at different points with the insertion of ends of wires into the surface at those points. The diameters and lengths of 1-D interlinked wires are found to be between 250 – 350 nm and 2 – 10 µm respectively. The densification at the surface of each film is seen to be moderate, however, qualitatively the densification below the interlinked wired mesh structure is found to be good. The LPG and NH3 g","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86709363","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260926
S. Tatkare, S. Rane, S. Gosavi
This paper reports the synthesis of nano crystalline nickel ferrite (NiFe2O4) by solvothermal technique using simple microwave oven. This ferrite nano powder was used as a functional material in the thick film sensors. Thick film sensors were fabricated using screen printing technique. The structural, microstructural, thermal analysis of powder and the film were characterized by XRD, SEM and TG analysis. The hydrogen sensing properties of the sensor was detected by measuring the change in resistance under the exposure of gas. The results show that nickel ferrite provides good sensitivity nd response to H2 gas at an operating temperature of 175°C.
{"title":"Thick film hydrogen sensor based on nanocrystalline nickel ferrite prepared using simple microwave oven","authors":"S. Tatkare, S. Rane, S. Gosavi","doi":"10.1109/ISPTS.2012.6260926","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260926","url":null,"abstract":"This paper reports the synthesis of nano crystalline nickel ferrite (NiFe2O4) by solvothermal technique using simple microwave oven. This ferrite nano powder was used as a functional material in the thick film sensors. Thick film sensors were fabricated using screen printing technique. The structural, microstructural, thermal analysis of powder and the film were characterized by XRD, SEM and TG analysis. The hydrogen sensing properties of the sensor was detected by measuring the change in resistance under the exposure of gas. The results show that nickel ferrite provides good sensitivity nd response to H2 gas at an operating temperature of 175°C.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82865153","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260949
Sugato Ghosh, S. Chatterjee, A. Kundu, S. Maity, H. Saha
A cantilever type microheater array consisting of four individual isolated microheaters on single die has been designed here for MEMS based gas sensor platform using metal oxide semiconductor for different gas detection through a single sensor die for explosive and toxic gas analysis in the underground manhole. A thin SiO2/Si3N4 cantilever of 250µn X 100µn has been designed here for low power consumption and uniform temperature distribution throughout the entire active area. As the microheaters are isolated from each other, different temperatures may be achieved by applying different voltages in different heaters.
针对基于金属氧化物半导体的MEMS气体传感器平台，设计了一种由4个独立微加热器组成的悬臂式微加热器阵列，通过单个传感器模块对井下爆炸和有毒气体进行检测。在这里设计了250µn X 100µn的薄SiO2/Si3N4悬臂梁，在整个活动区域内具有低功耗和均匀的温度分布。由于微加热器彼此隔离，在不同的加热器上施加不同的电压可以达到不同的温度。
{"title":"Thermal analysis of cantilever MEMS based Low power microheater array for the selective detection of explosive and toxic gases","authors":"Sugato Ghosh, S. Chatterjee, A. Kundu, S. Maity, H. Saha","doi":"10.1109/ISPTS.2012.6260949","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260949","url":null,"abstract":"A cantilever type microheater array consisting of four individual isolated microheaters on single die has been designed here for MEMS based gas sensor platform using metal oxide semiconductor for different gas detection through a single sensor die for explosive and toxic gas analysis in the underground manhole. A thin SiO2/Si3N4 cantilever of 250µn X 100µn has been designed here for low power consumption and uniform temperature distribution throughout the entire active area. As the microheaters are isolated from each other, different temperatures may be achieved by applying different voltages in different heaters.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87822575","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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