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2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)最新文献

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Selective assembly of DNA nanostructure bridging onto a trenched silicon substrate DNA纳米结构桥接在沟槽硅衬底上的选择性组装
Y. Mori, Z. Ma, S. Park, Y. Hirai, T. Tsuchiya, O. Tabata
We demonstrated for the first time the versatility of the previously proposed concept of DNA nanostructure integration on MEMS [1] by selectively assembling DNA nanostructures to form a bridge over a trenched silicon. A DNA origami (30 × 150 nm) was fixed to bridge a trenches (100 nm width, 200 nm depth) utilizing the hybridization between ssDNA on the DNA origami and selectively immobilized complementary ssDNA-pattern at the edges of the etched trench. An octadecylsilane self-assembled monolayer (ODS SAM) was utilized as a masking layer for a scanning probe lithography (SPL) with better process stability than a trimethylsilyl (TMS) SAM. This result opens a way to integrate the nanomaterial components on a structured device such as MEMS by using DNA origami.
我们通过选择性地组装DNA纳米结构在沟槽硅上形成桥,首次证明了先前提出的DNA纳米结构集成在MEMS[1]上的多功能性。利用DNA折纸上的ssDNA与蚀刻沟槽边缘选择性固定互补的ssDNA模式之间的杂交,将30 × 150 nm的DNA折纸固定在沟槽(100 nm宽,200 nm深)上。利用十八烷基硅烷自组装单层膜(ODS SAM)作为扫描探针光刻(SPL)的掩蔽层,其工艺稳定性优于三甲基硅基(TMS)自组装单层膜。这一结果为利用DNA折纸技术将纳米材料组件集成到MEMS等结构器件上开辟了一条道路。
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引用次数: 1
Ring-shape SMA micro actuator with parylene retention spring for low power consumption, large displacement linear actuation 环形SMA微动器,采用聚对二甲苯保持弹簧,低功耗,大位移线性驱动
T. D. O. Moura, T. Tsukamoto, D. W. de Lima Monteiro, S. Tanaka
This paper reports a novel ring-shape micro actuator for a latching mechanism used in a low power consumption and large displacement micro linear actuation. The proposed actuator consists of a shape memory alloy (SMA) ring, parylene spring and shoes. The parylene spring was carefully designed for independent control of radial and axial stiffness, which can be realized by a high aspect ratio cross section and a meander structure. The maximum force generated by the parylene spring was about 40 mN. Two types of SMA actuator was examined for the actuation: simple wire and micro spring types. The maximum displacement as high as 300 μm was obtained by using the SMA micro spring.
本文报道了一种用于低功耗大位移闭锁机构的新型环形微作动器。所提出的驱动器由形状记忆合金(SMA)环、聚对二甲苯弹簧和鞋组成。对聚对二甲苯弹簧进行了精心设计,实现了轴向刚度和径向刚度的独立控制,并采用了高纵横比截面和弯曲结构。聚对二甲苯弹簧产生的最大作用力约为40 mN。测试了两种类型的SMA致动器:简单的导线型和微弹簧型。SMA微弹簧的最大位移可达300 μm。
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引用次数: 2
A new three axis low power MEMS gyroscope for consumer and industrial applications 用于消费和工业应用的新型三轴低功耗MEMS陀螺仪
A. Oliver, Y. L. Teo, A. Geisberger, R. Steimle, T. Cassagnes, K. Adhikari, D. Sadler, A. McNeil
The manuscript reports a new commercially available three axis gyroscope, the Freescale® FXAS21002C. The 6.8 mW power consumption is 20% less than the nearest competitor's three axis device while meeting standard consumer device parameters. The three axis gyroscope has two proof masses and an open loop control scheme. The open loop architecture and the discontinuous control scheme contribute to this differentiated power consumption.
该手稿报告了一种新的市售三轴陀螺仪,Freescale®FXAS21002C。6.8 mW的功耗比最接近的竞争对手的三轴设备低20%,同时满足标准的消费设备参数。三轴陀螺仪具有两个验证质量和开环控制方案。开环结构和不连续控制方案有助于这种差异化的功耗。
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引用次数: 6
Highly reconfigurable Aluminum Nitride MEMS resonator using 12 monolithically integrated phase change material switches 采用12个单片集成相变材料开关的高度可重构的氮化铝MEMS谐振器
G. Hummel, Y. Hui, M. Rinaldi
This paper presents the first demonstration of a frequency reconfigurable and programmable Aluminum Nitride (AlN) piezoelectric MEMS resonator using phase change material (PCM) based switchable electrodes. For the first time, 12 miniaturized (2 μm×2 μm) PCM switches are monolithically integrated with an AlN MEMS resonator and used to reconfigure the terminal connections of the individual metal fingers composing the device interdigital transducer (IDT). This innovative design solution provides high ON/OFF ratio switching of the acoustic resonance (~28X impedance variation at resonance), and reconfiguration of the device electromechanical coupling (kt2: 0-1.32%), capacitance (C: 125-1,134 fF), and operating frequency (f1~181.3 MHz, f2~385.4 MHz).
本文首次展示了一种频率可重构和可编程的氮化铝(AlN)压电MEMS谐振器,该谐振器采用基于相变材料(PCM)的可切换电极。首次将12个小型化(2 μm×2 μm) PCM开关与AlN MEMS谐振器单片集成,并用于重新配置组成器件间数字转换器(IDT)的单个金属手指的终端连接。这种创新的设计方案提供了声学共振的高开/关比切换(共振时阻抗变化~28X),以及器件机电耦合(kt2: 0-1.32%),电容(C: 125-1,134 fF)和工作频率(f1~181.3 MHz, f2~385.4 MHz)的重新配置。
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引用次数: 4
A stainless-steel-based capacitive pressure sensor chip and its microwelding integration 一种不锈钢电容式压力传感器芯片及其微焊接集成技术
Xing Chen, Daniel S. Brox, B. Assadsangabi, M. S. Mohamed Ali, K. Takahata
A stainless-steel (SS) chip of capacitive pressure sensor and its new integration method are developed. The sensors are microfabricated through thermal bonding of the chip dies made of medical-grade SS to the Au-polyimide diaphragm film. The capacitive cavity design with dead-end holes is verified to increase the pressure sensitivity. Laser microwelding is applied to permanently bond the sensor chips onto SS substrates. The microwelding is revealed to provide twice the mechanical strength and ~6× electrical conductance in its bond compared with a conductive epoxy case. The microwelded sensor exhibits an average sensitivity of 120 ppm/mmHg close to its pre-welding level. The welding integration with a SS antenna stent is demonstrated. The results suggest that laser microwelding is a promising packaging technique for SS-based biomedical and implant microdevices that require long-term bond reliability.
研制了一种电容式压力传感器的不锈钢芯片及其集成方法。传感器是通过将医用级SS制成的芯片模具与金聚酰亚胺膜片热粘合而制成的。验证了带端面孔的电容腔设计可以提高压力灵敏度。采用激光微焊接技术将传感器芯片永久粘接在SS基板上。与导电环氧树脂外壳相比,微焊接的机械强度提高了两倍,电导率提高了6倍。微焊接传感器的平均灵敏度为120 ppm/mmHg,接近其焊前水平。演示了与SS天线支架的焊接集成。结果表明,激光微焊接是一种很有前途的封装技术,用于基于ss的生物医学和植入微设备,需要长期的键合可靠性。
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引用次数: 2
Non-enzymatic specific detection of carbamate pesticides based on monodisperse gold-rhodium alloy nanocrystals 基于单分散金铑合金纳米晶的氨基甲酸酯类农药非酶特异性检测
Z. Chen, Y. Zhang, J. Q. Xu, P. Xu, X. Li
For the first time, monodisperse AuRh bimetallic nanocrystals are employed for the non-enzymatic specific detection of carbamate pesticides. Compared with other Au based bimetallic nanocrystals and monometallic analogues, AuRh nanocrystals show their advances in specific electrocatalytic reaction toward carbamate pesticides at nano-molar (nM) level without the assistance of acetylcholinesterase (AchE) or other biochemical recognition elements. According to the electrochemical assessments, we discover that AuRh nanocrystals have considerable response toward 1 nM carbaryl, while there is no response to organophosphorus pesticides over AuRh nanocrystals. The ultra-sensitive and highly selective detection of carbamate pesticides could be attributed to the great catalytic activity of AuRh nanocrystals toward -NH2 group in carbamate pesticides.
首次将单分散的AuRh双金属纳米晶用于氨基甲酸酯类农药的非酶特异性检测。与其他Au基双金属纳米晶体和单金属类似物相比,AuRh纳米晶体在纳米摩尔(nM)水平上对氨基甲酸酯类农药的特异电催化反应方面表现出了新的进展,无需乙酰胆碱酯酶(AchE)或其他生化识别元件的辅助。通过电化学评价,我们发现AuRh纳米晶体对1 nM的西威灵有相当大的响应,而对有机磷农药没有响应。AuRh纳米晶对氨基甲酸酯类农药中的-NH2基团具有很强的催化活性,因此对氨基甲酸酯类农药具有超灵敏和高选择性的检测效果。
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引用次数: 2
Characterization of electrothermal actuation with nanometer and microradian precision 纳米和微弧度精度电热致动的表征
Craig R. Copeland, C. McGray, J. Geist, V. Aksyuk, S. M. Stavis
The single motion cycles of an electrothermal actuator were measured with nanometer and microradian precision, using a recently introduced particle tracking method. The actuator linked two rigid bodies that translated and rotated. Stochastic input noise decoupled and coupled the two bodies within the play of the linkage, resulting in a nondeterministic output. The linkage was characterized using a simple model of the actuation mechanism, establishing a new approach to characterizing microelectromechanical systems (MEMS).
采用一种新引入的粒子跟踪方法,对电热致动器的单次运动周期进行了纳米级和微度精度的测量。驱动器连接两个平移和旋转的刚体。随机输入噪声对连杆内的两个机构进行解耦和耦合,导致不确定性输出。利用驱动机构的简单模型对连杆进行表征,为微机电系统(MEMS)的表征提供了一种新的方法。
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引用次数: 8
Artificial compound eye inspired by imaging principle of Xenos peckii 受大腹蛇成像原理启发的人工复眼
D. Keum, D. S. Jeon, M. H. Kim, K. Jeong
This work reports an artificial compound eye inspired by the imaging principle of Xenos peckii, which is an endoparasite of paper wasps. The unique eye design exhibits higher spatial resolution and better sensitivity than conventional compound eyes. The biomimetic compound eye comprises three layers, a microprism arrays, a microlens arrays and an aperture arrays. All of the layers were formed on a planar substrate, the device can be directly integrated with a commercial image sensor. Each channel detects a different part of the whole scene, and the partial images are stitched in the following image processing step. The proposed artificial compound eye can create great opportunities for applications in medical, industrial and military fields.
本文报道了一种人造复眼,其灵感来自于纸黄蜂的内寄生物Xenos peckii的成像原理。独特的眼睛设计,比传统复眼具有更高的空间分辨率和更好的灵敏度。所述仿生复眼包括三层,微棱镜阵列、微透镜阵列和孔径阵列。所有的层都是在平面衬底上形成的,该器件可以直接与商用图像传感器集成。每个通道检测整个场景的不同部分,在接下来的图像处理步骤中缝合部分图像。所提出的人工复眼在医疗、工业和军事等领域具有广阔的应用前景。
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引用次数: 5
Large-amplitude resonant varifocal mirror with an acoustic cavity 带声腔的大振幅共振变焦镜
T. Sasaki, L. Rayas, K. Nakazawa, K. Hane
We report a large-amplitude resonant varifocal mirror with an acoustic cavity under atmospheric pressure. The amplitude of resonant varifocal mirror with acoustic cavity was measured by changing the cavity length. The amplitude of varifocal mirror was changed periodically depending on the cavity length. The period is in excellent agreement with the half of calculated wavelength of the acoustic wave. The maximum amplitude was about 4 times larger than the minimum amplitude. For designing of the acoustic cavity length, a theoretical approach on the basis of interaction between mechanical vibration and acoustic wave in the cavity is also described and compared to experimental results.
我们报道了一种在大气压下具有声腔的大振幅共振变焦镜。通过改变腔长来测量带声腔的谐振变焦镜的振幅。变焦镜的振幅随腔长周期性变化。周期与计算的声波波长的一半非常吻合。最大振幅约为最小振幅的4倍。对于声腔长度的设计,提出了一种基于腔内机械振动与声波相互作用的理论方法,并与实验结果进行了比较。
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引用次数: 1
High sensitive detections of Norovirus DNA and IgG by using multi-SiNW-FET biosensors 多sinw - fet生物传感器对诺如病毒DNA和IgG的高灵敏度检测
X. Gong, R. Zhao, Xiaomei Yu
This paper reports ultrasensitive detections of DNA and protein by multi-silicon-nanowire field-effect-transistor (SiNW-FET) biosensors. Single-SiNW-FET, double-SiNW-FET and quad-SiNW-FET have been designed on a single chip and fabricated by a simple top-down fabrication process. Compared with single-SiNW-FET, the multi-SiNW-FET biosensor shows a higher ability of decreasing the noise by averaging the source-drain currents. Both Norovirus DNA and IgG have been detected with the sensors at concentrations as low as 1 fM and 10 fM respectively. The sensor also shown high specificity in 1bp mismatch DNA disturbance.
本文报道了多硅纳米线场效应晶体管(SiNW-FET)生物传感器对DNA和蛋白质的超灵敏检测。单sinw - fet,双sinw - fet和四sinw - fet已经在单芯片上设计并通过简单的自上而下的制造工艺制造。与单sinw - fet相比,多sinw - fet生物传感器通过平均源漏电流来降低噪声的能力更高。诺如病毒DNA和IgG的检测浓度分别低至1fm和10fm。该传感器对1bp错配DNA干扰也有较高的特异性。
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引用次数: 8
期刊
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
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