Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7180851
A. Norouzpour-Shirazi, D. Serrano, M. Zaman, G. Casinovi, F. Ayazi
This paper introduces a novel dual-mode actuation and sensing scheme for readout and calibration of axisymmetric Coriolis resonant gyroscopes. The proposed scheme actuates both gyroscope modes simultaneously with the same in-phase excitation, senses both modes concurrently, and utilizes the sum and difference of the sense signals to demonstrate complete cancellation of the gyroscope bias terms, and provide automatic in-run mode-matching capability. Moreover, the architecture provides twofold enhancement of angular rate sensitivity and signal-to-noise performance, as compared to conventional single-mode excitation of the same gyroscope. We demonstrate, for the first time 45× reduction in temperature drift of bias of a 2.6 MHz 650 μm diameter substrate-decoupled BAW gyroscope and a bias stability of 5.4 °/hr, paving the way towards near-zero-drift gyroscopes.
{"title":"A dual-mode gyroscope architecture with in-run mode-matching capability and inherent bias cancellation","authors":"A. Norouzpour-Shirazi, D. Serrano, M. Zaman, G. Casinovi, F. Ayazi","doi":"10.1109/TRANSDUCERS.2015.7180851","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180851","url":null,"abstract":"This paper introduces a novel dual-mode actuation and sensing scheme for readout and calibration of axisymmetric Coriolis resonant gyroscopes. The proposed scheme actuates both gyroscope modes simultaneously with the same in-phase excitation, senses both modes concurrently, and utilizes the sum and difference of the sense signals to demonstrate complete cancellation of the gyroscope bias terms, and provide automatic in-run mode-matching capability. Moreover, the architecture provides twofold enhancement of angular rate sensitivity and signal-to-noise performance, as compared to conventional single-mode excitation of the same gyroscope. We demonstrate, for the first time 45× reduction in temperature drift of bias of a 2.6 MHz 650 μm diameter substrate-decoupled BAW gyroscope and a bias stability of 5.4 °/hr, paving the way towards near-zero-drift gyroscopes.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79677271","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181155
T. Akashi, H. Funabashi, Y. Omura, M. Fujiyoshi, Y. Hata, Y. Nonomura
We report a detuned 2-axis yaw-and-roll gyroscope with a single sensor element. We designed and fabricated a novel structure composed of a synchronously driven dual mass and three types of supporting beams to limit the movable direction of each mass. The designed resonant frequencies agreed well with the measured values, which resulted in 2-axis detuning ratios of -0.7 and -2.2%. The fabricated gyroscope showed a cross-axis sensitivity of +/-2.7%. The test results demonstrated that the gyroscope simultaneously detects yaw and roll rates with low cross-axis sensitivity.
{"title":"A 2-axis gyroscope with a synchronously-driven dual mass","authors":"T. Akashi, H. Funabashi, Y. Omura, M. Fujiyoshi, Y. Hata, Y. Nonomura","doi":"10.1109/TRANSDUCERS.2015.7181155","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181155","url":null,"abstract":"We report a detuned 2-axis yaw-and-roll gyroscope with a single sensor element. We designed and fabricated a novel structure composed of a synchronously driven dual mass and three types of supporting beams to limit the movable direction of each mass. The designed resonant frequencies agreed well with the measured values, which resulted in 2-axis detuning ratios of -0.7 and -2.2%. The fabricated gyroscope showed a cross-axis sensitivity of +/-2.7%. The test results demonstrated that the gyroscope simultaneously detects yaw and roll rates with low cross-axis sensitivity.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85269383","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181074
Y. Wen, W. Ma, X. Yu, Y. Zhao, M. Liu, L. Dong
This paper reports a novel spatial light modulator (SLM) with 256×256 pixels addressed by terahertz (THz) radiation. The SLM was realized by integrating metamaterial absorbers (MAs) into bi-material cantilever pixels and fabricated by a polyimide (PI) sacrificial layer process on a glass substrate. The device works passively in an optical reflection mode with no-electronic components and can easily achieve high resolution. The coaxial visible light was spatially modulated to a Gaussian spot and cross shape with the measured modulation sensitivity of 0.18 deg/μW and the theoretical time constant of 7.8ms.
{"title":"Terahertz addressed spatial light modulator based on bi-material cantilevers array","authors":"Y. Wen, W. Ma, X. Yu, Y. Zhao, M. Liu, L. Dong","doi":"10.1109/TRANSDUCERS.2015.7181074","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181074","url":null,"abstract":"This paper reports a novel spatial light modulator (SLM) with 256×256 pixels addressed by terahertz (THz) radiation. The SLM was realized by integrating metamaterial absorbers (MAs) into bi-material cantilever pixels and fabricated by a polyimide (PI) sacrificial layer process on a glass substrate. The device works passively in an optical reflection mode with no-electronic components and can easily achieve high resolution. The coaxial visible light was spatially modulated to a Gaussian spot and cross shape with the measured modulation sensitivity of 0.18 deg/μW and the theoretical time constant of 7.8ms.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81839164","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181209
Chun-Yen Kuo, P.-S Chen, K. Chiu, C.-J. Lu, W. Tian
This article presents a novel electroless gold plating method to fabricate a thin film heater for a new micro preconcentrator (μPCT) utilized in a micro gas chromatograph (μGC). The gold thin film utilized for heating with a high porosity is fabricated within the surface of the μPCT channel. The μPCT can be heated to >300°C repeatedly by applying a constant electrical power. A commercial Tenax TA was used as an adsorbent. Four volatile organic compounds (VOCs), acetone, benzene, toluene and m-xylene, are successfully collected and concentrated with the narrow peak width at half height (PWHH) (1.92 to 3.88 s). Compared to our previous results, this study presents up to approximately 49% narrower PWHH and approximately six times faster heating.
{"title":"Development of new micro gas preconcentrator using novel electroless gold plating process","authors":"Chun-Yen Kuo, P.-S Chen, K. Chiu, C.-J. Lu, W. Tian","doi":"10.1109/TRANSDUCERS.2015.7181209","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181209","url":null,"abstract":"This article presents a novel electroless gold plating method to fabricate a thin film heater for a new micro preconcentrator (μPCT) utilized in a micro gas chromatograph (μGC). The gold thin film utilized for heating with a high porosity is fabricated within the surface of the μPCT channel. The μPCT can be heated to >300°C repeatedly by applying a constant electrical power. A commercial Tenax TA was used as an adsorbent. Four volatile organic compounds (VOCs), acetone, benzene, toluene and m-xylene, are successfully collected and concentrated with the narrow peak width at half height (PWHH) (1.92 to 3.88 s). Compared to our previous results, this study presents up to approximately 49% narrower PWHH and approximately six times faster heating.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81861741","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7180858
K. Tao, S. Lye, N. Wang, X. Hu, J. Miao
This paper presents the design, modeling and characterization of a compact MEMS electret power generator for multi-directional vibration energy harvesting. The device is built on a symmetrical square-shape resonator that could harvest kinetic energy from multiple directions by using two orthogonal vibration degrees of freedom. Sandwich structure is adopted not only to enhance the output performance, but also to reduce both vertical pull-in and horizontal electrostatic damping force with two separate 180° out-of-phase capacitive circuit. The generator can be a potential candidate towards a practical multi-directional energy harvesting device for low-level ambient vibrational energy harvesting.
{"title":"A sandwich-structured MEMS electret power generator for multi-directional vibration energy harvesting","authors":"K. Tao, S. Lye, N. Wang, X. Hu, J. Miao","doi":"10.1109/TRANSDUCERS.2015.7180858","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180858","url":null,"abstract":"This paper presents the design, modeling and characterization of a compact MEMS electret power generator for multi-directional vibration energy harvesting. The device is built on a symmetrical square-shape resonator that could harvest kinetic energy from multiple directions by using two orthogonal vibration degrees of freedom. Sandwich structure is adopted not only to enhance the output performance, but also to reduce both vertical pull-in and horizontal electrostatic damping force with two separate 180° out-of-phase capacitive circuit. The generator can be a potential candidate towards a practical multi-directional energy harvesting device for low-level ambient vibrational energy harvesting.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82275085","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
An affinity based method of glucose measurement using a fiber optic surface plasmon resonance (FO-SPR) sensor with surface modification by a borate polymer was proposed. The proposed sensor is able to obtain the glucose concentration by detecting the surface refractive index of the sensor, which could avoid the impact of bioelectricity from viable tissues when applied for implantable measurement. A biocompatible borate polymer, PAA-ran-PAAPBA, is used to modify the FO-SPR sensor and the corresponding sensor realized non-consumption measurement of glucose due to the dynamic association and dissociation between the polymer and the glucose molecules, thereby enabling the possibility of glucose detection in hypoglycemia.
{"title":"Glucose measurement using surface plasmon resonance sensor with affinity based surface modification by borate polymer","authors":"Dachao Li, Jianwei Wu, P. Wu, Yuan Lin, Yingjuan Sun, Rui Zhu, Jia Yang, Kexin Xu","doi":"10.1109/TRANSDUCERS.2015.7181238","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181238","url":null,"abstract":"An affinity based method of glucose measurement using a fiber optic surface plasmon resonance (FO-SPR) sensor with surface modification by a borate polymer was proposed. The proposed sensor is able to obtain the glucose concentration by detecting the surface refractive index of the sensor, which could avoid the impact of bioelectricity from viable tissues when applied for implantable measurement. A biocompatible borate polymer, PAA-ran-PAAPBA, is used to modify the FO-SPR sensor and the corresponding sensor realized non-consumption measurement of glucose due to the dynamic association and dissociation between the polymer and the glucose molecules, thereby enabling the possibility of glucose detection in hypoglycemia.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82292401","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7180889
J. C. Wang, Xinxin Li
This paper reports, for the first time, a single-wafer micromachined P-in-G composite-sensor for automobile tire-pressure monitoring system (TPMS) application. Located inside the proof-mass of the accelerometer, the pressure sensor is freely suspended from the stress-free proof-mass-end, thereby eliminating the influence of acceleration to the pressure sensor. The designed P-in-G composite-sensor tested result is 36-fold better than that of the recently published work. Besides the compact P-in-G architecture, the 1.25mm×1.25mm×0.45mm tiny-sized composite-sensor benefits from the single-wafer front-side fabrication technique. With neither double-side alignment/exposure nor wafer-bonding, the IC-foundry compatible high-yield process has created a 6-level 3D micro-structure for the sensor. The sensors have been tested with satisfactory performance for TPMS application.
{"title":"A high-performance P-in-G sensor with multiple-level 3D micro-structure fabricated from one side of single wafer","authors":"J. C. Wang, Xinxin Li","doi":"10.1109/TRANSDUCERS.2015.7180889","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180889","url":null,"abstract":"This paper reports, for the first time, a single-wafer micromachined P-in-G composite-sensor for automobile tire-pressure monitoring system (TPMS) application. Located inside the proof-mass of the accelerometer, the pressure sensor is freely suspended from the stress-free proof-mass-end, thereby eliminating the influence of acceleration to the pressure sensor. The designed P-in-G composite-sensor tested result is 36-fold better than that of the recently published work. Besides the compact P-in-G architecture, the 1.25mm×1.25mm×0.45mm tiny-sized composite-sensor benefits from the single-wafer front-side fabrication technique. With neither double-side alignment/exposure nor wafer-bonding, the IC-foundry compatible high-yield process has created a 6-level 3D micro-structure for the sensor. The sensors have been tested with satisfactory performance for TPMS application.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82513832","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181095
M. Storey, A. Bhat, S. Bhave
This paper demonstrates differential optomechanical transduction which selectively drives and senses the wine-glass vibration mode of a silicon resonator. Two waveguide arms are used for optomechanical sensing at the anti-nodes of the 22 MHz wine-glass mode and utilize a differential photo detector (PD) to measure the vibration. The differential sense scheme enhances the wine-glass signal by 5.4 dB while significantly attenuating the radial “common-mode” vibration at 96.2 MHz by 11 dB.
{"title":"Selective transduction of wine-glass vibration mode using differential optomechanics","authors":"M. Storey, A. Bhat, S. Bhave","doi":"10.1109/TRANSDUCERS.2015.7181095","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181095","url":null,"abstract":"This paper demonstrates differential optomechanical transduction which selectively drives and senses the wine-glass vibration mode of a silicon resonator. Two waveguide arms are used for optomechanical sensing at the anti-nodes of the 22 MHz wine-glass mode and utilize a differential photo detector (PD) to measure the vibration. The differential sense scheme enhances the wine-glass signal by 5.4 dB while significantly attenuating the radial “common-mode” vibration at 96.2 MHz by 11 dB.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83037766","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7180940
Min Sung, Kumjae Shin, W. Moon
This paper presents the design and fabrication of a miniaturized hydrophone made by applying the electric field of a micro-sized piezoelectric body directly on the gate of a field-effect transistor (FET). Changes in the bound surface charge density of the piezoelectric body and the corresponding changes in the electric field in response to the applied pressure affect the channel current of a FET regardless of its size. The proposed transduction overcomes the sensitivity limitations of a micro-sized piezoelectric body for various underwater applications, especially at low frequencies. A complementary metal oxide semiconductor (CMOS)-integrated underwater sensor system can also be realized by using the proposed CMOS-compatible fabrication.
{"title":"A micro-machined hydrophone using piezoelectricity on gate of a field-effect transistor","authors":"Min Sung, Kumjae Shin, W. Moon","doi":"10.1109/TRANSDUCERS.2015.7180940","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180940","url":null,"abstract":"This paper presents the design and fabrication of a miniaturized hydrophone made by applying the electric field of a micro-sized piezoelectric body directly on the gate of a field-effect transistor (FET). Changes in the bound surface charge density of the piezoelectric body and the corresponding changes in the electric field in response to the applied pressure affect the channel current of a FET regardless of its size. The proposed transduction overcomes the sensitivity limitations of a micro-sized piezoelectric body for various underwater applications, especially at low frequencies. A complementary metal oxide semiconductor (CMOS)-integrated underwater sensor system can also be realized by using the proposed CMOS-compatible fabrication.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83124190","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7180883
M. S. Hajhashemi, A. Rasouli, B. Bahreyni
We are reporting on the first use of strongly coupled resonator arrays to improve the sensitivity of sensor systems to single or multiple inputs. A novel physics-based model is developed to investigate the effect of perturbations on the eigenvalues of resonator arrays, which demonstrates the improvements in sensitivity as the coupling strength between the resonators is increased. The developed theory is employed to design strongly-coupled resonant sensor systems. Sample devices were fabricated in a custom fabrication process. Experimental results were used to validate the theoretical model, demonstrating a seven fold improvement in the sensitivity of the fabricated devices.
{"title":"Fabrication of resonant sensors with significantly improved sensitivity through strong mechanical coupling","authors":"M. S. Hajhashemi, A. Rasouli, B. Bahreyni","doi":"10.1109/TRANSDUCERS.2015.7180883","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180883","url":null,"abstract":"We are reporting on the first use of strongly coupled resonator arrays to improve the sensitivity of sensor systems to single or multiple inputs. A novel physics-based model is developed to investigate the effect of perturbations on the eigenvalues of resonator arrays, which demonstrates the improvements in sensitivity as the coupling strength between the resonators is increased. The developed theory is employed to design strongly-coupled resonant sensor systems. Sample devices were fabricated in a custom fabrication process. Experimental results were used to validate the theoretical model, demonstrating a seven fold improvement in the sensitivity of the fabricated devices.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77721824","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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