Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181368
X. Zhao, J. Zhang, K. Fan, H. Seren, R. Averitt, Xin Zhang
This paper reports the electric field induced electron emission across the capacitive gap in a metamaterial structure under intense terahertz (THz) pulses. The gold metamaterial fabricated on a silicon nitride thin film can enhance the electric field greatly around the resonance frequency, resulting in THz field induced electron emission across the capacitive gap in the metamaterial structure when the incident electric field is > 60kV/cm. The emission current is measured experimentally and shows dependency on the strength of the incident field strength, which can be used as a THz detector.
{"title":"Terahertz field detector based on electron emission","authors":"X. Zhao, J. Zhang, K. Fan, H. Seren, R. Averitt, Xin Zhang","doi":"10.1109/TRANSDUCERS.2015.7181368","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181368","url":null,"abstract":"This paper reports the electric field induced electron emission across the capacitive gap in a metamaterial structure under intense terahertz (THz) pulses. The gold metamaterial fabricated on a silicon nitride thin film can enhance the electric field greatly around the resonance frequency, resulting in THz field induced electron emission across the capacitive gap in the metamaterial structure when the incident electric field is > 60kV/cm. The emission current is measured experimentally and shows dependency on the strength of the incident field strength, which can be used as a THz detector.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":"26 1","pages":"2085-2088"},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80093797","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181295
P. P. D. Leon, Hill Frances, E. Heubel, L. Velásquez-García
We report the design, fabrication, and characterization of novel microfabricated, multiplexed sources for highthroughput production of polymer nanofibers. The devices are planar arrays of high-aspect-ratio silicon emitters with surfaces covered by an array of micropillars that enable surface tension-driven feed of liquid to the emitter tips. The sources are assembled from monolithic linear arrays of emitters etched out of a silicon wafer using deep reactiveion etching. Experimental data show high array utilization and uniform generation of nanofibers with average diameter equal to ~250 nm. Increase of the operational bias voltage results in increasing the emission current and nanofiber flux.
{"title":"High-throughput manufacturing of polymer nanofibers via electrohydrodynamic jetting from planar arrays of microfabricated externally-fed emitters","authors":"P. P. D. Leon, Hill Frances, E. Heubel, L. Velásquez-García","doi":"10.1109/TRANSDUCERS.2015.7181295","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181295","url":null,"abstract":"We report the design, fabrication, and characterization of novel microfabricated, multiplexed sources for highthroughput production of polymer nanofibers. The devices are planar arrays of high-aspect-ratio silicon emitters with surfaces covered by an array of micropillars that enable surface tension-driven feed of liquid to the emitter tips. The sources are assembled from monolithic linear arrays of emitters etched out of a silicon wafer using deep reactiveion etching. Experimental data show high array utilization and uniform generation of nanofibers with average diameter equal to ~250 nm. Increase of the operational bias voltage results in increasing the emission current and nanofiber flux.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":"63 1","pages":"1794-1797"},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80319924","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181185
Bum-Ryul Maeng, Seung-Ki Lee, S. Bai, Jaehyoung Park
This paper presents a novel microtip-based electrode array with the reference electrode around tips. A microelectromechanical systems process for a microtip electrode array has been developed using DRIE and RIE combination process. The conductive microtip with high aspect ratio, small apex radius and the height of tens of micron scale is insulated except the tip ends. The tips are closely surrounded by the self-aligned reference electrode. The whole process was completed with a single photography mask. The fabricated microtip-based electrode array was successfully verified with the cyclic voltammetry measurements and characterized with the measurement of photosynthetic reaction of chlorella cell using microtip electrode array.
{"title":"Fabrication of microtip electrode array integrated with self-aligned reference electrode","authors":"Bum-Ryul Maeng, Seung-Ki Lee, S. Bai, Jaehyoung Park","doi":"10.1109/TRANSDUCERS.2015.7181185","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181185","url":null,"abstract":"This paper presents a novel microtip-based electrode array with the reference electrode around tips. A microelectromechanical systems process for a microtip electrode array has been developed using DRIE and RIE combination process. The conductive microtip with high aspect ratio, small apex radius and the height of tens of micron scale is insulated except the tip ends. The tips are closely surrounded by the self-aligned reference electrode. The whole process was completed with a single photography mask. The fabricated microtip-based electrode array was successfully verified with the cyclic voltammetry measurements and characterized with the measurement of photosynthetic reaction of chlorella cell using microtip electrode array.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":"78 1","pages":"1362-1365"},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81871987","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181409
J. M. Tsai, M. Daneman, B. Boser, D. Horsley, M. Rais-Zadeh, H. Tang, Yipeng Lu, O. Rozen, F. Liu, M. Lim, F. Assaderaghi
We present the extension of the InvenSense fabrication platform to piezoelectric transduction. The newly proposed CMOS-MEMS Integrated Piezoelectric Platform inherits the wafer bonding advantages of its predecessor, leverages existing semiconductor infrastructure, and is applicable to a wide range of applications.
{"title":"Versatile CMOS-MEMS integrated piezoelectric platform","authors":"J. M. Tsai, M. Daneman, B. Boser, D. Horsley, M. Rais-Zadeh, H. Tang, Yipeng Lu, O. Rozen, F. Liu, M. Lim, F. Assaderaghi","doi":"10.1109/TRANSDUCERS.2015.7181409","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181409","url":null,"abstract":"We present the extension of the InvenSense fabrication platform to piezoelectric transduction. The newly proposed CMOS-MEMS Integrated Piezoelectric Platform inherits the wafer bonding advantages of its predecessor, leverages existing semiconductor infrastructure, and is applicable to a wide range of applications.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":"39 1","pages":"2248-2251"},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82304337","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181404
Ferdinandus, S. Arai, S. Ishiwata, Madoka Suzuki, Hirotaka Sato
We have developed a fluorescent nanoparticle thermometer capable of mapping out the temperature distributions in small animals with higher spatial resolution than conventional infrared thermography. To acquire the fluorescence intensity change solely owing to the temperature shift, we encapsulated both the thermo-sensitive dye and the thermo-insensitive (reference) dye into the nanoparticles. The nanoparticle thermometer exhibited a significantly high thermo-sensitivity of 3.6 %/°C, and could be orally dosed into fruit fly larvae so as to stably measure the temperature distributions in the animals. This thermal-microscopy system could provide a powerful experimental paradigm to illuminate physiological functions and activities in small living organisms.
{"title":"Self-calibrated fluorescent thermometer nanoparticles enable in vivo micro thermography in milimeter scale living animals","authors":"Ferdinandus, S. Arai, S. Ishiwata, Madoka Suzuki, Hirotaka Sato","doi":"10.1109/TRANSDUCERS.2015.7181404","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181404","url":null,"abstract":"We have developed a fluorescent nanoparticle thermometer capable of mapping out the temperature distributions in small animals with higher spatial resolution than conventional infrared thermography. To acquire the fluorescence intensity change solely owing to the temperature shift, we encapsulated both the thermo-sensitive dye and the thermo-insensitive (reference) dye into the nanoparticles. The nanoparticle thermometer exhibited a significantly high thermo-sensitivity of 3.6 %/°C, and could be orally dosed into fruit fly larvae so as to stably measure the temperature distributions in the animals. This thermal-microscopy system could provide a powerful experimental paradigm to illuminate physiological functions and activities in small living organisms.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":"72 1","pages":"2228-2231"},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82395059","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181045
G. Laghi, A. Longoni, P. Minotti, A. Tocchio, G. Langfelder
The work presents a module for earth magnetic field measurements based on four microelectromechanical devices: one out-of-plane and two in-plane differential Lorentz-force magnetometers, and a Tang resonator. The latter is used to provide the reference frequency in off-resonance operation, a way that enables the magnetometers to share the same Lorentz current, giving an intrinsic 3-fold consumption decrease. At the same time, using multiple-loop design, a 5-fold larger sensitivity and a 4-fold better resolution are obtained with respect to previous implementations that used the same process. The system operating bandwidth is electronically selectable up to 50 Hz.
{"title":"100 µA, 320 nT/vHz, 3-AXIS Lorentz force MEMS magnetometer","authors":"G. Laghi, A. Longoni, P. Minotti, A. Tocchio, G. Langfelder","doi":"10.1109/TRANSDUCERS.2015.7181045","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181045","url":null,"abstract":"The work presents a module for earth magnetic field measurements based on four microelectromechanical devices: one out-of-plane and two in-plane differential Lorentz-force magnetometers, and a Tang resonator. The latter is used to provide the reference frequency in off-resonance operation, a way that enables the magnetometers to share the same Lorentz current, giving an intrinsic 3-fold consumption decrease. At the same time, using multiple-loop design, a 5-fold larger sensitivity and a 4-fold better resolution are obtained with respect to previous implementations that used the same process. The system operating bandwidth is electronically selectable up to 50 Hz.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":"100 1","pages":"803-806"},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76083988","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181024
M. Gueltig, M. Ohtsuka, H. Miki, T. Takagi, M. Kohl
A novel energy harvesting device using magnetic shape memory alloy (MSMA) film actuation is presented showing a power density of up to 3 mW/cm3 at a temperature change of the material of about 2 K. This exceeds the power output of previous MSMA harvesting devices by at least three orders of magnitude and challenges state-of-the-art thermoelectrics. The results are accomplished by using a tailored Ni-Co-Mn-Ga film with large temperature-dependent change of magnetization at the Curie temperature TC and a new cantilever design, with low thermal mass for rapid heat transfer in the order of 10 ms, matching the time constant of eigenoscillation.
{"title":"Thermal energy harvesting by high frequency actuation of magnetic shape memory alloy films","authors":"M. Gueltig, M. Ohtsuka, H. Miki, T. Takagi, M. Kohl","doi":"10.1109/TRANSDUCERS.2015.7181024","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181024","url":null,"abstract":"A novel energy harvesting device using magnetic shape memory alloy (MSMA) film actuation is presented showing a power density of up to 3 mW/cm3 at a temperature change of the material of about 2 K. This exceeds the power output of previous MSMA harvesting devices by at least three orders of magnitude and challenges state-of-the-art thermoelectrics. The results are accomplished by using a tailored Ni-Co-Mn-Ga film with large temperature-dependent change of magnetization at the Curie temperature TC and a new cantilever design, with low thermal mass for rapid heat transfer in the order of 10 ms, matching the time constant of eigenoscillation.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":"54 1","pages":"718-721"},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76209107","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181360
H. Honma, K. Takahashi, M. Ishida, K. Sawada
This paper presents a surface-plasmons-based tunable color filter using aluminum (Al) subwavelength grating operated by an electrostatic comb-drive actuator. We also fabricate the actuator integrated with an Al hinge and a stretchable parylene-C hinge that are used to constantly change the period of the Al subwavelength grating. Freestanding Al subwavelength grating with 450 nm pitch performed extraordinary optical transmission at 450 nm wavelength by TM-polarized light. We obtained a 225 nm displacement of the actuator having the stretchable hinges by applied voltage of 45 V, and a 750 nm displacement of the actuator having the Al hinges by applied voltage of 12 V.
{"title":"Fabrication of tunable plasmonic color filter using al subwavelength grating integrated with electrostatic comb-drive actuator","authors":"H. Honma, K. Takahashi, M. Ishida, K. Sawada","doi":"10.1109/TRANSDUCERS.2015.7181360","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181360","url":null,"abstract":"This paper presents a surface-plasmons-based tunable color filter using aluminum (Al) subwavelength grating operated by an electrostatic comb-drive actuator. We also fabricate the actuator integrated with an Al hinge and a stretchable parylene-C hinge that are used to constantly change the period of the Al subwavelength grating. Freestanding Al subwavelength grating with 450 nm pitch performed extraordinary optical transmission at 450 nm wavelength by TM-polarized light. We obtained a 225 nm displacement of the actuator having the stretchable hinges by applied voltage of 45 V, and a 750 nm displacement of the actuator having the Al hinges by applied voltage of 12 V.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":"20 1","pages":"2053-2056"},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88025861","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181012
O. Rozen, S. T. Block, Stefon E. Shelton, D. Horsley
In a conventional piezoelectric micromachined ultrasonic transducer (PMUT), only half the acoustic output is used, because pressure emerging from the back of the PMUT is wasted. Here, we demonstrate a novel method to recycle the back-side acoustic pressure by redirecting it to the front-side through concentric venting rings. The ring diameter determines the phase-shift between the sound emerging from the front-side port and the ring, and can be adjusted to either amplify the far-field sound pressure level (SPL) or change the directivity of the output beam. Devices were fabricated in an industrial foundry process using wafer-level bonding of a MEMS PMUT wafer to a CMOS wafer using a conductive metal eutectic bond. We have designed, fabricated, and characterized nine new venting designs, and we achieved a 4.5 dB increase in SPL for a design with a 400 μm radius venting ring.
{"title":"Piezoelectric micromachined ultrasonic transducer with increased output pressure via concentric venting rings","authors":"O. Rozen, S. T. Block, Stefon E. Shelton, D. Horsley","doi":"10.1109/TRANSDUCERS.2015.7181012","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181012","url":null,"abstract":"In a conventional piezoelectric micromachined ultrasonic transducer (PMUT), only half the acoustic output is used, because pressure emerging from the back of the PMUT is wasted. Here, we demonstrate a novel method to recycle the back-side acoustic pressure by redirecting it to the front-side through concentric venting rings. The ring diameter determines the phase-shift between the sound emerging from the front-side port and the ring, and can be adjusted to either amplify the far-field sound pressure level (SPL) or change the directivity of the output beam. Devices were fabricated in an industrial foundry process using wafer-level bonding of a MEMS PMUT wafer to a CMOS wafer using a conductive metal eutectic bond. We have designed, fabricated, and characterized nine new venting designs, and we achieved a 4.5 dB increase in SPL for a design with a 400 μm radius venting ring.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":"33 1","pages":"670-673"},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87024015","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7180917
J. Lee, D. Kwon, J. Kim
We demonstrate a novel shock protector based on confined self-adjusting carbon nanotube (CNT) arrays. The CNTs with self-adjusted length are selectively synthesized on fully fabricated single crystal silicon microstructures to generate coulomb damping. The frictional contact between CNT arrays dissipates energy during impact and thus reduces the impact force applied on microstructures. The outstanding mechanical flexibility and resilience of CNTs make them suitable as a contact material that effectively absorbs energy through frictional contact preventing mechanical failure of microstructures. Experimental shock tests verify that CNT-based shock protector provides substantial survival rate of movable proof-mass compared with hard stop or compliant spring stop.
{"title":"Shock protection based on confined self-adjusting carbon nanotube arrays","authors":"J. Lee, D. Kwon, J. Kim","doi":"10.1109/TRANSDUCERS.2015.7180917","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180917","url":null,"abstract":"We demonstrate a novel shock protector based on confined self-adjusting carbon nanotube (CNT) arrays. The CNTs with self-adjusted length are selectively synthesized on fully fabricated single crystal silicon microstructures to generate coulomb damping. The frictional contact between CNT arrays dissipates energy during impact and thus reduces the impact force applied on microstructures. The outstanding mechanical flexibility and resilience of CNTs make them suitable as a contact material that effectively absorbs energy through frictional contact preventing mechanical failure of microstructures. Experimental shock tests verify that CNT-based shock protector provides substantial survival rate of movable proof-mass compared with hard stop or compliant spring stop.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":"36 1","pages":"287-290"},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87130000","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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