Pub Date : 2015-08-05DOI: 10.1109/TRANSDUCERS.2015.7180975
Y. Arakawa, M. Ohmura, D. Tsujimoto, Y. Yamanishi
We have successfully developed novel processing equipment based on the combined of cavitation and plasma irradiation. This technique uses the strong points of the powerful ablation of cavitation as well as plasma irradiation. The novelty of the technique enable to process not only conductive material but also non-conductive material such as polymer, CFRP (carbon fiber reinforced plastic) and silicon, which is unlike conventional wire electric discharge machine. Also, the directional transportation of bubbles provides positioning accuracy of micro-processing. The structure of the plasma-cavitation pencil cutter is low cost and very simple structure. This technology contributes to effective processing of wide range of materials such as metal plate, polymer, carbon-fiber and biomaterials.
{"title":"Plasma-cavitation pencil cutter for powerful micro-processing","authors":"Y. Arakawa, M. Ohmura, D. Tsujimoto, Y. Yamanishi","doi":"10.1109/TRANSDUCERS.2015.7180975","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180975","url":null,"abstract":"We have successfully developed novel processing equipment based on the combined of cavitation and plasma irradiation. This technique uses the strong points of the powerful ablation of cavitation as well as plasma irradiation. The novelty of the technique enable to process not only conductive material but also non-conductive material such as polymer, CFRP (carbon fiber reinforced plastic) and silicon, which is unlike conventional wire electric discharge machine. Also, the directional transportation of bubbles provides positioning accuracy of micro-processing. The structure of the plasma-cavitation pencil cutter is low cost and very simple structure. This technology contributes to effective processing of wide range of materials such as metal plate, polymer, carbon-fiber and biomaterials.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-08-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87546090","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181372
A. Michael, S. Chen, C. Kwok
This paper reports the design, fabrication and characterization of an inter-digitated piezoelectric actuation mechanism for micro-lens movement. A theoretical model has been developed and substantiated by ANSYS simulation. Results show good agreement with both simulation and modeling. The out-of-plane deflection is 24μm at 6V/μm electric field with a maximum Deflection Sensitivity to Voltage (DSV) of 0.5μm/V. The unloaded resonance frequency is 2420Hz. With a 600μm diameter ball lens weighing 320μg mounted to the actuation structure, the resonance frequency is reduced to 752Hz without significantly impacting the static out-of-plane deflection behavior. In comparison to other micro-lens actuator, this structure demonstrates large deflection response and a relatively large resonance frequency.
{"title":"Design, fabrication and testing of piezo-electric driving mechanism for micro-optics","authors":"A. Michael, S. Chen, C. Kwok","doi":"10.1109/TRANSDUCERS.2015.7181372","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181372","url":null,"abstract":"This paper reports the design, fabrication and characterization of an inter-digitated piezoelectric actuation mechanism for micro-lens movement. A theoretical model has been developed and substantiated by ANSYS simulation. Results show good agreement with both simulation and modeling. The out-of-plane deflection is 24μm at 6V/μm electric field with a maximum Deflection Sensitivity to Voltage (DSV) of 0.5μm/V. The unloaded resonance frequency is 2420Hz. With a 600μm diameter ball lens weighing 320μg mounted to the actuation structure, the resonance frequency is reduced to 752Hz without significantly impacting the static out-of-plane deflection behavior. In comparison to other micro-lens actuator, this structure demonstrates large deflection response and a relatively large resonance frequency.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73700689","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7180860
D. Kim, S. Yu, B.-G Kang, K. Yun
We propose a liquid-based electrostatic energy harvester that uses ferrofluid droplets. The proposed device consists of top and bottom plates with conducting electrodes coated with a solid dielectric layer, a conducting liquid, and oil-based ferrofluid droplets. Using an external magnetic field, we experimentally verified the surfaces on which the ferrofluid actuates well. In addition, we investigated the rotational motion of ferrofluid droplets on Parylene C surface by adding surfactant of conducting liquid.
{"title":"Liquid-based electrostatic energy harvester using rotational motion of ferrofluid droplets","authors":"D. Kim, S. Yu, B.-G Kang, K. Yun","doi":"10.1109/TRANSDUCERS.2015.7180860","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180860","url":null,"abstract":"We propose a liquid-based electrostatic energy harvester that uses ferrofluid droplets. The proposed device consists of top and bottom plates with conducting electrodes coated with a solid dielectric layer, a conducting liquid, and oil-based ferrofluid droplets. Using an external magnetic field, we experimentally verified the surfaces on which the ferrofluid actuates well. In addition, we investigated the rotational motion of ferrofluid droplets on Parylene C surface by adding surfactant of conducting liquid.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73772909","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7180923
W. Vitale, M. Fernandez-Bolaños, C. Moldovan, A. Paone, A. Schuler, A. Ionescu
We report the fabrication, modeling and characterization of novel microwave tunable capacitors based on the metal-insulator transition (MIT) of Vanadium Dioxide (VO2). We present the advantages of VO2-based capacitors over alternative technologies for microwave reconfigurable electronics in terms of ease of integration, design and performance at high frequency. We show the potential of the proposed devices for RF reconfigurable electronics by fabricating a tunable bandstop filter (22.5-19.8 GHz) with insertion loss <; 2 dB up to 40 GHz.
{"title":"Tunable capacitors and microwave filters based on vanadium dioxide metal-insulator transition","authors":"W. Vitale, M. Fernandez-Bolaños, C. Moldovan, A. Paone, A. Schuler, A. Ionescu","doi":"10.1109/TRANSDUCERS.2015.7180923","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180923","url":null,"abstract":"We report the fabrication, modeling and characterization of novel microwave tunable capacitors based on the metal-insulator transition (MIT) of Vanadium Dioxide (VO2). We present the advantages of VO2-based capacitors over alternative technologies for microwave reconfigurable electronics in terms of ease of integration, design and performance at high frequency. We show the potential of the proposed devices for RF reconfigurable electronics by fabricating a tunable bandstop filter (22.5-19.8 GHz) with insertion loss <; 2 dB up to 40 GHz.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74152984","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181345
Ruochen Lu, S. Gong
This paper reports an iteration-driven method to numerically study the thermal nonlinearity in lithium niobate (LN) based MEMS resonators. In comparison to the state of the art, this technique adopts an approximation-free algorithm and thus more accurately captures the complex nonlinear dynamics that often evades the description by Duffing equation. For the first time, the nonlinearity of LN-based laterally vibrating resonators is theoretically investigated and experimentally validated. The admittance response of both S0 and SH0 mode devices was simulated and measured in this work by forward and backward sweeping the excitation frequency at different power levels. Excellent agreement between simulations and measurements has been achieved.
{"title":"Study of thermal nonlinearity in lithium niobate-based MEMS resonators","authors":"Ruochen Lu, S. Gong","doi":"10.1109/TRANSDUCERS.2015.7181345","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181345","url":null,"abstract":"This paper reports an iteration-driven method to numerically study the thermal nonlinearity in lithium niobate (LN) based MEMS resonators. In comparison to the state of the art, this technique adopts an approximation-free algorithm and thus more accurately captures the complex nonlinear dynamics that often evades the description by Duffing equation. For the first time, the nonlinearity of LN-based laterally vibrating resonators is theoretically investigated and experimentally validated. The admittance response of both S0 and SH0 mode devices was simulated and measured in this work by forward and backward sweeping the excitation frequency at different power levels. Excellent agreement between simulations and measurements has been achieved.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75655784","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181127
E. Tatar, T. Mukherjee, G. Fedder
A three-fold symmetric SOI-MEMS gyroscope having parasitic softening nonlinearity from the drive comb and frequency tune fingers is successfully linearized through the use of shaped comb fingers that introduce a tuned cubic hardening compensation. The nonlinearity compensated gyroscope achieves high drive displacement (>10μm) while maintaining linear magnitude and phase frequency responses. The proposed tuning method also minimizes the amplitude-frequency (A-f) effects on the drive mode. Cancelling the drive nonlinearities leads to a better bias instability compared to the high displacement with nonlinear characteristics.
{"title":"Nonlinearity tuning and its effects on the performance of a MEMS gyroscope","authors":"E. Tatar, T. Mukherjee, G. Fedder","doi":"10.1109/TRANSDUCERS.2015.7181127","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181127","url":null,"abstract":"A three-fold symmetric SOI-MEMS gyroscope having parasitic softening nonlinearity from the drive comb and frequency tune fingers is successfully linearized through the use of shaped comb fingers that introduce a tuned cubic hardening compensation. The nonlinearity compensated gyroscope achieves high drive displacement (>10μm) while maintaining linear magnitude and phase frequency responses. The proposed tuning method also minimizes the amplitude-frequency (A-f) effects on the drive mode. Cancelling the drive nonlinearities leads to a better bias instability compared to the high displacement with nonlinear characteristics.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73199274","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181319
H. Jiang, M. Ochoa, J. H. Park, A. Otte, R. Pinal, B. Ziaie
We have developed a wireless sensing scheme for rapid screening of gelatin film physical degradation. The technique presents a new method for delineating the initial swelling (capacitive change) and subsequent dissolution (inductive change) phases. This is accomplished by incorporating super-paramagnetic nanoparticles into a gelatin film that is immobilized on top of a planar inductor. The degradation kinetics are measured wirelessly to identify the swelling and dissolution phases with sensitivities of 2313.4 kHz per absorbance unit during the first 60 minutes and 2214.2 kHz per absorbance unit from 60 minutes to 540 minutes.
{"title":"Wireless screenning of degradation kinetics in pharmaceutical gelatin films","authors":"H. Jiang, M. Ochoa, J. H. Park, A. Otte, R. Pinal, B. Ziaie","doi":"10.1109/TRANSDUCERS.2015.7181319","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181319","url":null,"abstract":"We have developed a wireless sensing scheme for rapid screening of gelatin film physical degradation. The technique presents a new method for delineating the initial swelling (capacitive change) and subsequent dissolution (inductive change) phases. This is accomplished by incorporating super-paramagnetic nanoparticles into a gelatin film that is immobilized on top of a planar inductor. The degradation kinetics are measured wirelessly to identify the swelling and dissolution phases with sensitivities of 2313.4 kHz per absorbance unit during the first 60 minutes and 2214.2 kHz per absorbance unit from 60 minutes to 540 minutes.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75535002","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181134
F. Lee, K.-C Liang, E. Cheng, W. Fang
This study demonstrates the structural design and implementation of a single-axis MEMS vibratory rate gyroscope for the robustness improvement. As in Fig.1, features of this study are: (1) the employment of the fully-decoupled mechanism minimizes the mechanical cross-coupling between the drive-mode and the sense-mode; (2) the tuning fork structure combined with differential sensing architecture increases the resistance against external vibrations; (3) a compact structural design consists of the structurally forced (by rigid lever mechanism) anti-phase sense-mode and the linear-coupled anti-phase drive-mode. Preliminary results show a reduced coupling signal of near 500°/s, and the vibration resistances along different directions are also investigated. Moreover, the angular rate sensitivity is 17.7μV/°/s, which can be further improved using a mode-matched operation.
{"title":"Design and implementation of a fully-decoupled tuning fork (FDTF) MEMS vibratory gyroscope for robustness improvement","authors":"F. Lee, K.-C Liang, E. Cheng, W. Fang","doi":"10.1109/TRANSDUCERS.2015.7181134","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181134","url":null,"abstract":"This study demonstrates the structural design and implementation of a single-axis MEMS vibratory rate gyroscope for the robustness improvement. As in Fig.1, features of this study are: (1) the employment of the fully-decoupled mechanism minimizes the mechanical cross-coupling between the drive-mode and the sense-mode; (2) the tuning fork structure combined with differential sensing architecture increases the resistance against external vibrations; (3) a compact structural design consists of the structurally forced (by rigid lever mechanism) anti-phase sense-mode and the linear-coupled anti-phase drive-mode. Preliminary results show a reduced coupling signal of near 500°/s, and the vibration resistances along different directions are also investigated. Moreover, the angular rate sensitivity is 17.7μV/°/s, which can be further improved using a mode-matched operation.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75559722","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181212
F. Wang, J. Tong, C. Bian, Y. Li, J. Sun, S. Xia
In this work, a fully integrated on-chip electrochemical microreactor fabricated by MEMS technique is reported for the detection of total phosphorus (TP) in freshwater. Both a ultra-violet (UV) photocatalytic digestion unit and an electrochemical three-electrode unit are integrated on a chip to realize the microreactor. Without additional oxidizing reagent, a fully compatible electrochemical detection of TP can be achieved. The digestion rate is enhanced by thermally assisted UV photocatalysis, and the sensitivity of the electrochemical unit is increased by using interdigitated ultra-microelectrode array. The experimental results show that this integrated chip can perform a fully functional determination of total phosphorus.
{"title":"A fully integrated on-chip electrochemical microreactor for the detection of total phosphorus in freshwater","authors":"F. Wang, J. Tong, C. Bian, Y. Li, J. Sun, S. Xia","doi":"10.1109/TRANSDUCERS.2015.7181212","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181212","url":null,"abstract":"In this work, a fully integrated on-chip electrochemical microreactor fabricated by MEMS technique is reported for the detection of total phosphorus (TP) in freshwater. Both a ultra-violet (UV) photocatalytic digestion unit and an electrochemical three-electrode unit are integrated on a chip to realize the microreactor. Without additional oxidizing reagent, a fully compatible electrochemical detection of TP can be achieved. The digestion rate is enhanced by thermally assisted UV photocatalysis, and the sensitivity of the electrochemical unit is increased by using interdigitated ultra-microelectrode array. The experimental results show that this integrated chip can perform a fully functional determination of total phosphorus.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74587337","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7180899
W. Wang, J. Chen, A. Zivkovic, C. Duan, Huikai Xie
This paper reports a compact Fourier transform spectrometer system with a large-stroke electrothermal MEMS mirror and other optical components all integrated on a micro-machined silicon base with the dimension of 2cm×2cm. The overall size of the system is reduced dramatically from the prior work [1]. The linear optical path difference (OPD) scan range is increased to 440μm and the mirror plate tilting is compensated down to ±0.002° during the full OPD scan using a new open-loop control method. A spectral resolution of 1.1nm at 532nm is achieved.
{"title":"A silicon based Fourier transform spectrometer base on an open-loop controlled electrothermal MEMS mirror","authors":"W. Wang, J. Chen, A. Zivkovic, C. Duan, Huikai Xie","doi":"10.1109/TRANSDUCERS.2015.7180899","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180899","url":null,"abstract":"This paper reports a compact Fourier transform spectrometer system with a large-stroke electrothermal MEMS mirror and other optical components all integrated on a micro-machined silicon base with the dimension of 2cm×2cm. The overall size of the system is reduced dramatically from the prior work [1]. The linear optical path difference (OPD) scan range is increased to 440μm and the mirror plate tilting is compensated down to ±0.002° during the full OPD scan using a new open-loop control method. A spectral resolution of 1.1nm at 532nm is achieved.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74763312","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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