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2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)最新文献

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50O-terminated ALN MEMS filters based on lamb wave resonators 基于lamb波谐振器的50端端ALN MEMS滤波器
J. Liang, H. Zhang, D. Zhang, H. Zhang, W. Pang
This paper reports on an implementation of an ultra-miniature 140 MHz narrowband filter based on aluminum nitride (AlN) Lamb wave resonators (LWRs). First, a design principle for ladder type LWR filters is presented. The fabricated device, cascaded with an inductor-capacitor network, is well matched to 50 ohm and shows a remarkably high performance. Further, the filter is monolithically integrated with a pair of on-chip capacitors and only the inductors are needed, thus involving much simpler circuits and size savings. The final filter shows a low pass-band insertion loss (IL) of 2.78 dB and steep filter skirts and occupies much smaller areas than its surface acoustic wave counterpart in the intermediate frequency band.
本文报道了一种基于氮化铝(AlN)兰姆波谐振器(lws)的超小型140 MHz窄带滤波器的实现。首先,提出了梯形低水波滤波器的设计原则。该器件与电感-电容网络级联,在50欧姆电压下匹配良好,并显示出非常高的性能。此外,该滤波器与一对片上电容单片集成,只需要电感,因此涉及更简单的电路和尺寸节省。最终滤波器显示出2.78 dB的低通带插入损耗(IL)和陡峭的滤波器裙边,并且在中频带占用的面积比表面声波滤波器小得多。
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引用次数: 3
A highly stretchable pH sensor array using elastomer-embedded laser carbonized patterns 使用弹性体嵌入激光碳化图案的高度可拉伸pH传感器阵列
R. Rahimi, M. Ochoa, W. Yu, B. Ziaie
This paper reports on a facile and low cost method to fabricate highly stretchable potentiometric pH sensor arrays for biomedical and wearable applications. The technique uses laser carbonization of a thermoset polymer followed by transfer and embedment of carbonized nanomaterial onto an elastomeric matrix. The process combines selective laser pyrolization/carbonization with meander interconnect methodology to fabricate stretchable conductive composites with which pH sensors can be realized. The stretchable pH sensors display a sensitivity of -51 mV/pH over the clinically-relevant range of pH 4-10. The sensors remain stable for strains of up to 50 %.
本文报道了一种简单和低成本的方法来制造高度可拉伸的电位pH传感器阵列,用于生物医学和可穿戴应用。该技术使用热固性聚合物的激光碳化,然后将碳化的纳米材料转移和嵌入到弹性基体上。该工艺结合了选择性激光热解/碳化和弯曲互连方法来制造可拉伸的导电复合材料,该复合材料可以实现pH传感器。可拉伸pH传感器在pH 4-10的临床相关范围内显示灵敏度为-51 mV/pH。传感器在高达50%的应变下保持稳定。
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引用次数: 5
A MEMS tunable photonic ring resonator with small footprint and large free spectral range 一种占地面积小、自由光谱范围大的MEMS可调谐光子环谐振器
Carlos Errando-Herranz, F. Niklaus, G. Stemme, K. Gylfason
We demonstrate a MEMS tunable silicon photonic ring resonator with a 20 μm radius and a 5 nm free spectral range (FSR) for wavelength selection in reconfigurable optical networks. The device shows a loaded Q of 12000, and 300 pm tuning range at a wavelength of 1544 nm.
我们展示了一个半径为20 μm,自由光谱范围为5 nm的MEMS可调谐硅光子环谐振器,用于可重构光网络中的波长选择。该器件显示负载Q为12000,在1544 nm波长下的调谐范围为300 pm。
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引用次数: 10
Micromanipulation tool replaceable soft actuator with gripping force enhancing and output motion converting mechanisms 带有夹持力增强和输出运动转换机构的微操作工具可更换软执行器
G. Feng, S. Yen
This paper presents an innovative arched ionic polymer metal composite (IPMC) actuator for micromanipulating soft matters (e.g. cells). With a pair of through-hole structures at two front ends of the actuator, versatile designed micro-tools can be individually installed onto and replaced from the actuator. Two micro-tools of scissor-type gripper and elastic pin structure are developed to strengthen the clamping force of the gripper and convert a squeeze/pull motion to forward/backward motion, respectively. Through the location design of a hinge joint on the scissor-type gripping tool, the gripper tip can produce several times larger force on than at the end of the assembled actuator. A microneedle can be mounted onto the pin of arc-shaped PDMS tool to manipulate a single cell in a linear motion through electrically controlling IPMC actuation.
本文提出了一种新型的拱形离子聚合物金属复合材料(IPMC)致动器,用于微操纵软物质(如细胞)。在执行器的两个前端有一对通孔结构,多功能设计的微型工具可以单独安装到执行器上或从执行器上更换。开发了剪刀式夹持器和弹性销结构两种微型工具,分别加强夹持器的夹紧力,将夹持器的挤/拉运动转化为向前/向后运动。通过对剪刀式夹持工具上铰链接头的位置设计,使夹持器尖端产生的作用力比装配的执行器末端大几倍。微针可以安装在弧形PDMS工具的销上,通过电控IPMC驱动,以线性运动的方式操纵单个细胞。
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引用次数: 11
Investigation of a broadband micromachined thermoelectric microwave power sensor with a cantilever beam 悬臂梁式宽带微机械热电微波功率传感器的研究
D. B. Wang, Y. M. Fang
This paper reports a novel thermoelectric microwave power sensor with a MEMS cantilever beam in order to improve the measurement dynamic range and the band width. The measured results show that the MEMS cantilever beam can improve the dynamic range by increasing the top end of the range into no less than 200mW, and enhance the band width by increasing the top end of the range into no less than 36GHz.
为了提高测量动态范围和带宽,本文报道了一种新型的MEMS悬臂梁热电微波功率传感器。测量结果表明,MEMS悬臂梁可以通过将动态范围的上限增加到不小于200mW来提高动态范围,并通过将范围的上限增加到不小于36GHz来提高带宽。
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引用次数: 1
Particle separation under the co-action of Brownian motion and optical force in near-field speckle patterns 近场散斑图中布朗运动和光力共同作用下的粒子分离
H. T. Zhao, G. Zhang, L. K. Chin, H. Cai, J. F. Song, Z. Yang, E. Yap, W. Ser, D. Kwong, A. Liu
Continuous separation of nano-sized molecules has great importance in biomedical applications. This paper represents a near-field optical approach to separate nanoparticles using speckle patterns. Near-field random light patterns (speckle pattern) are generated by the repeated coupling and interference of light in nano-waveguide arrays. The movements of 2-μm and 0.5-μm particles are studied under the co-action of Brownian motion and the exerted optical force. The experimental results show that the 2-μm particle has an average lateral displacement of 10 μm, which is considerably larger than that of the 0.5-μm particle. This method avoids the stringent optical systems and broadens the perspectives of optical manipulation in real-life applications.
纳米分子的连续分离在生物医学领域具有重要的应用价值。本文提出了一种利用散斑图分离纳米粒子的近场光学方法。在纳米波导阵列中,光的反复耦合和干涉产生了近场随机光图(散斑图)。研究了2-μm和0.5-μm粒子在布朗运动和光力作用下的运动。实验结果表明,2 μm颗粒的平均横向位移为10 μm,比0.5 μm颗粒的横向位移大得多。该方法避免了严格的光学系统,拓宽了光学操作在实际应用中的前景。
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引用次数: 1
A portable, paper-based multiplexing immunosensor for detection of HIV and HCV markers in serum 一种用于检测血清中HIV和HCV标记物的便携式、纸质多路免疫传感器
Chen Zhao, Xinyu Liu
This paper reports an integrated diagnostic platform, including a paper-based electrochemical immunosensor array and a customized handheld potentiostat, for detecting protein markers of human immunodeficiency virus (HIV) and hepatitis C virus (HCV) in serum. To our best knowledge, this is the first paper-based electrochemical immunosensing platform, with multiplexing and telemedicine capabilities, for diagnosing HIV/HCV co-infection. The platform can perform simultaneous enzyme-linked immunesorbent assays (ELISAs) on 8 serum samples, produce multiple measurement data for HIV and HCV markers from a single run, and transmit the results to remote sites for telemedicine. The unique integration of paper-based microfluidics and mobile instrumentation renders our tests portable, low-cost, user-friendly, and high-throughput.
本文报道了一种检测血清中人类免疫缺陷病毒(HIV)和丙型肝炎病毒(HCV)蛋白标志物的集成诊断平台,该平台包括基于纸张的电化学免疫传感器阵列和定制的手持式恒电位器。据我们所知,这是第一个基于纸张的电化学免疫传感平台,具有多路复用和远程医疗功能,用于诊断HIV/HCV合并感染。该平台可同时对8份血清样本进行酶联免疫吸附测定(elisa),单次运行可产生HIV和HCV标记物的多个测量数据,并将结果传输到远程站点,用于远程医疗。基于纸张的微流体和移动仪器的独特集成使我们的测试便携,低成本,用户友好和高通量。
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引用次数: 1
NEMS spectrometer-on-a-chip NEMS spectrometer-on-a-chip
B. Dong, H. Cai, M. Tang, Y. D. Gu, Z. Yang, Y. Jin, Y. Hao, D. Kwong, A. Liu
This paper reports a NEMS spectrometer-on-a-chip, which integrates fiber-waveguide coupler and photo detector on a single silicon chip. Spectrometer based on Fourier transform, for the first time, has been miniaturized into a waveguide based silicon photonic chip. The on-chip spectrometer is fabricated by nano-silicon-photonic fabrication processes. It also eliminates moving parts and confine light in nano-waveguides, which can effectively reduce the spectrometer chip size (1 cm × 1 cm) and lower the power consumption (<; 10 mW), while maintaining high resolution (<; 40 cm-1). It has high potential applications in biomedical and physical spectroscopy field.
本文报道了一种将光纤波导耦合器和光电探测器集成在一块硅片上的NEMS片上光谱仪。基于傅里叶变换的光谱仪,首次被小型化成基于波导的硅光子芯片。片上光谱仪采用纳米硅-光子加工工艺制备。它还消除了运动部件,并将光限制在纳米波导中,可以有效地减小光谱仪芯片尺寸(1cm × 1cm),降低功耗(<;,同时保持高分辨率(<;40 cm - 1)。它在生物医学和物理光谱学领域具有很大的应用潜力。
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引用次数: 0
Employing piezojunction effect for ultra-low power resonant microdevice applications 利用压电结效应在超低功率谐振微器件中的应用
A. Rasouli, M. Syrzycki, B. Bahreyni
We are reporting on application of the piezojunction effect as a viable mechanism for detection of resonance frequency in silicon microdevices. In this technique, the sensing pn-junction is reverse-biased, therefore, due to low sensing current, the required power for detection of resonance is rather small. A bulk extensional resonator with an embedded pn-junction has been designed, fabricated, and characterized to serve as a proof-of-concept structure. The experiments have shown that a power consumption as low as 37nW was needed for detection of extensional-mode of the resonator at a resonant frequency of 9MHz.
我们报告了压电结效应的应用,作为一种可行的机制,以检测谐振频率在硅微器件。在这种技术中,传感pn结是反向偏置的,因此,由于低传感电流,谐振检测所需的功率相当小。设计、制造和表征了具有嵌入式pn结的大块拉伸谐振器,以作为概念验证结构。实验表明,在9MHz谐振频率下,检测谐振器的扩展模式所需的功耗低至37nW。
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引用次数: 4
Detachable ultrasonic enabled inserter for neural probe insertion using biodissolvable Polyethylene Glycol 可拆卸的超声波插入器,用于神经探针插入,使用生物可溶解的聚乙二醇
Po-Cheng Chen, A. Lal
We report on a method to reversibly bond and debond silicon neural probes to a silicon ultrasonic horn to enable ultrasonic actuation during neural probe insertion. Neural probes can be attached using Poly-Ethylene Glycol (PEG), a bio-dissolvable polymer, and consequently debonded from the ultrasonic driver by aqueous dissolution. We demonstrate reduced force during probe insertion corresponding to ultrasonically micro-cutting of tissue. Reduced insertion forces can lead to less damage and reduced immune response for longer life neural interfaces. Three different configurations of neural probes were tested demonstrating insertion force reduction significantly by a factor of 4.3. The probes were driven by 30 Vpp at 101.7 kHz. Our approach can potentially help inserting neural probes made in any new technology ultrasonically and increase the lifetime of neural probe recording sites.
我们报告了一种方法,可逆键和脱键硅神经探针到硅超声喇叭,使超声驱动在神经探针插入。神经探针可以使用聚乙二醇(PEG)(一种生物可溶聚合物)连接,然后通过水溶解与超声波驱动器分离。我们证明了在超声显微切割组织时探头插入时减少的力。减少插入力可以减少损伤,减少免疫反应,延长神经接口的寿命。对三种不同配置的神经探针进行了测试,结果显示插入力显著降低了4.3倍。探针被30vpp驱动,频率为101.7 kHz。我们的方法可以潜在地帮助插入任何新技术的超声神经探针,并增加神经探针记录部位的寿命。
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引用次数: 11
期刊
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
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