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2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)最新文献

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Immobilized electrolyte biodegradable batteries for implantable MEMS 可植入MEMS的固定化电解质可生物降解电池
D. She, M. Tsang, J. K. Kim, M. Allen
Liquid electrolyte volume is a key driver in the lifetime and overall size of microfabricated biodegradable batteries. Harnessing liquid from the body to serve as the battery electrolyte may, therefore, be desirable; however, for stable operation, maintaining a constant environment inside the electrochemical cell is required even in the presence of changing body conditions. We report a biodegradable battery featuring a solid electrolyte of sodium chloride (NaCl) and polycaprolactone (PCL). This approach harnesses the body fluid that diffuses into the cell as an element of the electrolyte; however, the large excess of ionic material suspended in the PCL holds intracellular conditions constant. A constant discharge profile can then be achieved even in the presence of varying external aqueous conditions, enabling compact, stably-performing cells.
液体电解质体积是微加工生物可降解电池寿命和整体尺寸的关键驱动因素。因此,利用人体的液体作为电池电解质可能是可取的;然而,为了稳定运行,即使在身体条件变化的情况下,电化学电池内部也需要保持恒定的环境。我们报道了一种以氯化钠(NaCl)和聚己内酯(PCL)为固体电解质的可生物降解电池。这种方法利用扩散到细胞中的体液作为电解质的一种元素;然而,悬浮在PCL中的大量过量离子物质保持细胞内条件不变。即使在变化的外部水条件下,也可以实现恒定的放电曲线,从而实现紧凑,性能稳定的电池。
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引用次数: 8
Low velocity digital air flow sensor from 3D printed PEDOT:PSS micro-hair structures 低速数字气流传感器从3D打印PEDOT:PSS微头发结构
H. Devaraj, K. Aw, J. Travas-sejdic, R. N. Sharma
This paper reports a novel method for digital sensing of low-velocity air flow using high aspect-ratio 3D printed conducting polymer (PEDOT:PSS) micro-hair structures (1000 μm long, 5.5±0.5 μm diameter). By implementing multiple micro-hair structures as micro-switches that respond to air flows of particular velocities, a low-velocity digital flow sensor capable of detecting air flow in the range of 61 mm/s to 99 mm/s is demonstrated.
本文报道了一种利用高纵横比3D打印导电聚合物(PEDOT:PSS)微毛结构(长1000 μm,直径5.5±0.5 μm)实现低速气流数字传感的新方法。通过实现多个微毛结构作为响应特定速度气流的微开关,演示了一种能够检测61毫米/秒至99毫米/秒范围内气流的低速数字流量传感器。
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引用次数: 9
Low stress flip-chip package for pressure sensors operating at 500 °C 低应力倒装芯片封装的压力传感器工作在500°C
R. Zeiser, S. Ayub, P. Wagner, J. Muller, S. Henneck, J. Wilde
This work presents a method for a reliable assembly and interconnection of MEMS for very high temperatures. A flip-chip concept for resistive micromechanical pressure sensors with a platinum thin film was developed and sensor-assemblies were fabricated. The investigated metallized ceramic substrates were AlN, Si3N4, a Low-Temperature-Cofired-Ceramic (LTCC) and a zirconia-silicate (ZrSiO4). A borosilicate glass-solder was the die-attachment material and gold stud-bumps were the interconnection. The thermal-mechanical stresses in the sensors, induced by the packaging process due to material-dependent mismatches were analyzed with FEM and optical deformation measurements from 20 to 500 °C. The comparison of the obtained experimental and FE-results revealed a strong influence of the applied substrate on the thermal-mechanical stresses in the chip-membrane which is affecting the output-signal and reliability. Both methods were in good accordance. The two specific silicon-matched ceramic substrates LTCC and ZrSiO4 reduced the stresses in the sensor-element significantly. Furthermore, the electrical characterization of assembled test-sensors revealed a correlation between the package-induced stresses in the chip-membrane and the shift of the sensor-signal after the assembly-process.
这项工作提出了一种在高温下可靠组装和互连MEMS的方法。提出了一种基于铂薄膜的电阻式微机械压力传感器的倒装芯片概念,并制作了传感器组件。所研究的金属化陶瓷衬底为AlN、Si3N4、低温共烧陶瓷(LTCC)和硅酸锆(ZrSiO4)。一种硼硅玻璃焊料是模具连接材料,金钉凸点是互连材料。在20 ~ 500°C范围内,利用有限元法和光学变形测量分析了封装过程中由于材料不匹配引起的传感器热机械应力。实验结果与有限元结果的比较表明,衬底对芯片膜的热机械应力有很大的影响,影响了输出信号和可靠性。两种方法都很一致。两种特定的硅匹配陶瓷衬底LTCC和ZrSiO4显著降低了传感器元件中的应力。此外,组装测试传感器的电学特性揭示了封装引起的芯片膜应力与组装过程后传感器信号位移之间的相关性。
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引用次数: 1
Shape Anisotropic Magnetic Particles for high throughput and high efficiecy intracelluar delivery of functional macromolecules 形状各向异性磁性颗粒,用于高通量和高效率的功能大分子细胞内递送
M. Lin, Y. C. Wu, J. Lee, J. Zhou, M. Teitell, P. Chiou
We report a novel intracellular delivery system based on aligning Shape-Anisotropic Magnetic Particles (SAMP) to deliver functional molecules into mammalian cells with high efficiency and high viability. A broad range of molecules (calcein, dextran 3K, dextran 40K, GFP plasmid, SiRNA, and β-lactamase) have been successfully delivered into primary cells with preserved functions. We have achieved high efficiency delivery of enzyme into primary human dermal fibroblast (NHDF), and other large macromolecules (dextran 40K) into mouse cortical neurons.
我们报道了一种新的基于形状各向异性磁颗粒(SAMP)对齐的细胞内递送系统,以高效率和高活力将功能分子递送到哺乳动物细胞中。广泛的分子(钙黄蛋白、葡聚糖3K、葡聚糖40K、GFP质粒、SiRNA和β-内酰胺酶)已成功递送到原代细胞中,并保留了功能。我们已经实现了将酶高效递送至原代人真皮成纤维细胞(NHDF),将其他大分子(葡聚糖40K)高效递送至小鼠皮质神经元。
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引用次数: 0
Optically-induced cell fusion on microfluidic chip utilizing locally enhanced electric field 利用局部增强电场的微流控芯片光诱导细胞融合
P. Yang, C. Wang, G. Lee
This work reports a new approach called optically-induced cell fusion (OICF) which integrates cell-pairing microstructures and an optically-induced system to achieve cell fusion with high yields and efficiency. It is the first time in literature that cell-pairing SU8 microstructures were combined with optically-induced “virtual” electrodes to form the OICF system such that precise cell-pairing and high-yield cell fusion could be achieved. Experimental results showed that HeLa cells and MCF-7 cells could be successfully fused using this new approach. Furthermore, the new method allows one to selectively fuse cells by using addressable light patterns. It is therefore promising for further biomedical applications.
这项工作报告了一种称为光诱导细胞融合(OICF)的新方法,该方法将细胞配对微结构和光诱导系统结合在一起,以高产量和高效率实现细胞融合。这是文献中首次将细胞配对SU8微结构与光诱导的“虚拟”电极结合形成OICF系统,从而实现精确的细胞配对和高产量的细胞融合。实验结果表明,该方法可成功融合HeLa细胞和MCF-7细胞。此外,新方法允许人们通过使用可寻址的光模式来选择性地融合细胞。因此,它具有进一步的生物医学应用前景。
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引用次数: 0
III–V nitride microcantilever as a displacement sensor III-V型氮化物微悬臂位移传感器
A. Talukdar, G. Koley
The application of gated piezoresitor (or `piezotransistor') embedded GaN microcantilever utilizing unique properties of AlGaN/GaN Heterojunction Field Effect Transistor (HFET) to very significantly enhance the device performance in order to transduce femtoscale displacement have been demonstrated. This novel technology offers several orders higher sensitivity than state-of-the-art and enabled detection of minute explosive in open ambient by photoacoustic spectroscopy.
门控压电电阻(或“压电晶体管”)嵌入GaN微悬臂的应用,利用AlGaN/GaN异质结场效应晶体管(HFET)的独特特性,非常显著地提高了器件性能,以实现飞尺度位移。这种新技术的灵敏度比目前最先进的技术高几个数量级,并且可以通过光声光谱检测开放环境中的微小爆炸物。
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引用次数: 0
High-resolution neural depth probe with integrated 460 NM light emitting diode for optogenetic applications 集成460纳米发光二极管的高分辨率神经深度探针,用于光遗传学应用
M. Schwaerzle, F. Pothof, Oliver Paul, P. Ruther
We report on the design, assembly, and optical as well as thermal characterization of a polymer-based optrode with an integrated light source for applications in optogenetics. The novel probe allows to optically stimulate neural brain tissue in deeper brain regions and to simultaneously record brain activity using integrated macroelectrodes and microelectrodes. The optrode is based on a cylindrical polyimide (PI) probe carrying the electrodes and their respective wiring. A bare light emitting diode (LED) chip is integrated within this cylinder and electrically interconnected through a separate PI-based ribbon cable.
我们报道了一种集成光源的聚合物基光极的设计、组装、光学和热特性,用于光遗传学。这种新型探针可以光学刺激大脑深层区域的神经脑组织,并同时使用集成的大电极和微电极记录大脑活动。光极是基于一个圆柱形的聚酰亚胺(PI)探针,它携带电极和它们各自的线路。一个裸露的发光二极管(LED)芯片集成在这个圆柱体内,并通过一个单独的基于pi的带状电缆进行电气连接。
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引用次数: 16
Ultra-thin, evaporation-resistent PDMS devices for absolute quantification of DNA using digital PCR 超薄,抗蒸发PDMS设备的绝对定量DNA使用数字PCR
H. Zec, C. O’Keefe, Polly C. Ma, Tza-Huei Wang
We present an array-based nanoliter digital PCR (dPCR) platform. The ultra-thin microfluidic device can accommodate high temperatures for extended periods, while minimizing evaporation. The device utilizes a very simple fabrication scheme, and can achieve a limit of detection of 100 attomolar of synthetic target. dPCR presents a feasible way to quantify rare targets, especially in high background. We demonstrate proof-of-concept use of this device to identify methylation of synthetic DNA in high background, a potential biomarker for many diseases. We believe that this simple and cost-effective device will encourage wider adoption of dPCR.
我们提出了一个基于阵列的纳升数字PCR (dPCR)平台。超薄微流控装置可以适应长时间的高温,同时最大限度地减少蒸发。该装置采用了一种非常简单的制造方案,可实现对100原子摩尔合成目标的检测极限。dPCR是一种量化稀有靶标的可行方法,特别是在高背景下。我们演示了该设备的概念验证,用于鉴定高背景合成DNA的甲基化,这是许多疾病的潜在生物标志物。我们相信这种简单和经济的设备将鼓励更广泛地采用dPCR。
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引用次数: 8
Characteristic parameter estimation for single-particle based on dielectrophoretic and hydrodynamic effects 基于介电泳和流体动力学效应的单粒子特征参数估计
J. Xu, R. Zhu, X. Guo
Dielectrophoresis (DEP) as a well-known approach to manipulate particles can be utilized in combination with fluidics to implement a measurement on characteristic parameters of particles. Numerical simulation of DEP factors was executed together with simulation of electric field distribution by means of Comsol Multiphysics. The simulation results facilitate the establishment of dynamic equilibrium model between a DEP force and a fluid drag force. According to critical release flow-rate and signal frequency of DEP, those parameters of a particle, such as permittivity, conductivity and radius, were estimated via Levenberg Maquardt iteration algorithm. The experiments validated the method and demonstrated a sensitive and consistent measure for single-particle assay.
介质电泳(DEP)是一种众所周知的颗粒控制方法,可以与流体学相结合来实现颗粒特征参数的测量。利用Comsol Multiphysics软件对电场分布进行了模拟,并对各因素进行了数值模拟。仿真结果有助于建立DEP力与流体阻力之间的动态平衡模型。根据DEP的临界释放流量和信号频率,通过Levenberg Maquardt迭代算法估计粒子的介电常数、电导率和半径等参数。实验验证了该方法的灵敏度和一致性。
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引用次数: 0
Fiber-Optic Localized Surface Plasmon Resonance sensor combined with micro fluidic channel 结合微流体通道的光纤局部表面等离子体共振传感器
Joong-Hyun Kim, Sung-Taeg Kang, Seung-Gon Lee, Hakmin Lee, D. Jeong, Jaehyoung Park, Seung-Ki Lee
This paper proposes Fiber-Optic Localized Surface Plasmon Resonance (FO LSPR) sensor combined with micro fluidic channel, which enables the continuous supply of fluid for bio-reaction. The proposed method can prevent the degradation of the sensing characteristics due to the change of measurement condition. The feasibility of the FO LSPR sensor with micro fluidic channel is proved by Computational Fluid Dynamics simulation (CFD). Also, the proposed method has been evidenced by measuring the output intensity of the FO LSPR sensor at various refractive index solutions. Finally, Prostate Specific Antigen (PSA) immunoassay was measured to verify the possibility of the fabricated sensor system as a biosensor.
本文提出了一种结合微流体通道的光纤局部表面等离子体共振(folspr)传感器,可以为生物反应提供连续的流体供应。该方法可以防止由于测量条件的变化而引起的传感特性的退化。计算流体动力学仿真(CFD)验证了微通道FO LSPR传感器的可行性。此外,通过测量不同折射率溶液下FO LSPR传感器的输出强度,验证了该方法的有效性。最后,进行前列腺特异抗原(PSA)免疫测定,验证该传感器系统作为生物传感器的可能性。
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引用次数: 49
期刊
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
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