Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7180998
Yufeng Wang, Qian Zhang, Lurui Zhao, E. S. Kim
This paper reports a non-resonant, broad-band electromagnetic vibration-energy harvester based on self-assembled liquid bearing made of ferrofluid. The liquid bearing suspends magnet array over a microfabricated multi-layer coil plate such that the energy harvester does not rely on any mechanical resonance, and can harvest vibration energy over a broad frequency range. The non-resonant energy harvester (20.7 × 12 × 4.5 mm3) produces μW level of power from 1 g acceleration even at 2 - 4 Hz, a frequency range that would be too low for a resonant energy harvester.
{"title":"Non-resonant, broad-band vibration-energy harvester based on self-assembled liquid bearing","authors":"Yufeng Wang, Qian Zhang, Lurui Zhao, E. S. Kim","doi":"10.1109/TRANSDUCERS.2015.7180998","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180998","url":null,"abstract":"This paper reports a non-resonant, broad-band electromagnetic vibration-energy harvester based on self-assembled liquid bearing made of ferrofluid. The liquid bearing suspends magnet array over a microfabricated multi-layer coil plate such that the energy harvester does not rely on any mechanical resonance, and can harvest vibration energy over a broad frequency range. The non-resonant energy harvester (20.7 × 12 × 4.5 mm3) produces μW level of power from 1 g acceleration even at 2 - 4 Hz, a frequency range that would be too low for a resonant energy harvester.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85973500","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7180937
K. Riaz, C. Zhao, T. S. Lau, S. Leung, Z. Fan, Y. K. Lee
We report a low-cost Nano-spike Bio-Impedance Sensor (nBIS) for detection and phenotyping of cancer/non-cancer cells (HeLa, MCF7 and HEK293). 3D self-aligned nano-spikes, fabricated on a thin aluminum substrate by nanoimprint and electrochemical anodization, were used to measure electrical impedance of cancer cells without surface functionalization. The impedance spectra of cancer and non-cancer cells show significant differences. From the modified Randle's model, nano-spike electrodes can significantly reduce electrochemical and polarization problems at the electrode and liquid interface. The limit of detection (LOD) of nBIS was 10 cells/mL. The normalized charge transfer resistance (20-30% difference among different cells) Rct was shown to be a promising electric biomarker for cancer cell detection and phenotyping.
{"title":"Low-cost Nano-spike Bio-Impedance Sensor (NBIS) without surface functionalization for detection and phenotyping of cancer cells","authors":"K. Riaz, C. Zhao, T. S. Lau, S. Leung, Z. Fan, Y. K. Lee","doi":"10.1109/TRANSDUCERS.2015.7180937","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180937","url":null,"abstract":"We report a low-cost Nano-spike Bio-Impedance Sensor (nBIS) for detection and phenotyping of cancer/non-cancer cells (HeLa, MCF7 and HEK293). 3D self-aligned nano-spikes, fabricated on a thin aluminum substrate by nanoimprint and electrochemical anodization, were used to measure electrical impedance of cancer cells without surface functionalization. The impedance spectra of cancer and non-cancer cells show significant differences. From the modified Randle's model, nano-spike electrodes can significantly reduce electrochemical and polarization problems at the electrode and liquid interface. The limit of detection (LOD) of nBIS was 10 cells/mL. The normalized charge transfer resistance (20-30% difference among different cells) Rct was shown to be a promising electric biomarker for cancer cell detection and phenotyping.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76923726","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7180967
X. Wang, Siwei Li
Micro energy storage devices have drawn increasing attention due to the importance of power supply in miniaturized multi-functional systems. This paper reviews the recent progress in micro energy storage devices, particularly the micro supercapacitors, including the design issues of device architectures, electrode materials, and fabrication technologies. The work developed in our laboratory is then demonstrated, mainly a method of direct prototyping of nanoporous carbon for batch-fabricated micro energy storage devices, like three-dimensional micro supercapacitors and silicon-based anode for Li-ion batteries.
{"title":"Micro supercapacitors for energy storage, on-chip devices based on prototyping of patterned nanoporous carbon","authors":"X. Wang, Siwei Li","doi":"10.1109/TRANSDUCERS.2015.7180967","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180967","url":null,"abstract":"Micro energy storage devices have drawn increasing attention due to the importance of power supply in miniaturized multi-functional systems. This paper reviews the recent progress in micro energy storage devices, particularly the micro supercapacitors, including the design issues of device architectures, electrode materials, and fabrication technologies. The work developed in our laboratory is then demonstrated, mainly a method of direct prototyping of nanoporous carbon for batch-fabricated micro energy storage devices, like three-dimensional micro supercapacitors and silicon-based anode for Li-ion batteries.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77079548","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181250
A. Schor, C. Buie
This paper describes a dielectrophoretic cell sorter containing arrays of conducting microposts. This sorter will be used to identify high-lipid-content organisms, which have commercial value for oil production and other applications. Cell sorting based on dielectrophoresis (DEP) typically utilizes planar electrodes, limiting throughput. Here, we present a rapid electroplating method that can produce an array of 15 μm tall posts in roughly ten minutes. Using this device, we were able to distinguish between two phenotypes of Yarrowia lipolytica, a lipid-containing yeast. In future work, we will use flow cytometry to confirm the lipid content of the sorted cell populations.
{"title":"Dielectrophoretic sorting of lipid-containing microorganisms using high frequency electric fields produced by conducting post arrays","authors":"A. Schor, C. Buie","doi":"10.1109/TRANSDUCERS.2015.7181250","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181250","url":null,"abstract":"This paper describes a dielectrophoretic cell sorter containing arrays of conducting microposts. This sorter will be used to identify high-lipid-content organisms, which have commercial value for oil production and other applications. Cell sorting based on dielectrophoresis (DEP) typically utilizes planar electrodes, limiting throughput. Here, we present a rapid electroplating method that can produce an array of 15 μm tall posts in roughly ten minutes. Using this device, we were able to distinguish between two phenotypes of Yarrowia lipolytica, a lipid-containing yeast. In future work, we will use flow cytometry to confirm the lipid content of the sorted cell populations.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85400358","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181160
Y. G. Jiang, X. Sun, D. Y. Zhang
This manuscript describes an electrospinning method for fabrication of highly aligned poly(vinylidene fluoride-trifluoroethylene) copolymer (P(VDF-TrFE)) nanofibers. In our experiments, micro-patterned parallel electrodes are used to modify the electric field nearby the collector, and electrospun nanofibers achieve good alignment when the gap distance of the parallel electrodes is larger than 200 μm with a nozzle-collector distance of 70 mm. The aligned nanofibers show excellent piezoelectricity after annealing at 120□ at 120 for 2 hours. It is found that the output of highly aligned P(VDF-TrFE) fibers is greatly improved, compared to that of randomly oriented fibers. The P(VDF-TrFE) fibers demonstrate anisotropic piezoelectricity, which means higher charge output with a strain in the axial direction of the nanofibers than that under a strain in other directions. In addition, the alignment of the P(VDF-TrFE) nanofibers leads to the anisotropic hydrophobicity.
{"title":"Highly aligned P(VDF-TrFE) nanofibers with anisotropic piezoelectricity fabricated by electrospinning for physical sensing devices","authors":"Y. G. Jiang, X. Sun, D. Y. Zhang","doi":"10.1109/TRANSDUCERS.2015.7181160","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181160","url":null,"abstract":"This manuscript describes an electrospinning method for fabrication of highly aligned poly(vinylidene fluoride-trifluoroethylene) copolymer (P(VDF-TrFE)) nanofibers. In our experiments, micro-patterned parallel electrodes are used to modify the electric field nearby the collector, and electrospun nanofibers achieve good alignment when the gap distance of the parallel electrodes is larger than 200 μm with a nozzle-collector distance of 70 mm. The aligned nanofibers show excellent piezoelectricity after annealing at 120□ at 120 for 2 hours. It is found that the output of highly aligned P(VDF-TrFE) fibers is greatly improved, compared to that of randomly oriented fibers. The P(VDF-TrFE) fibers demonstrate anisotropic piezoelectricity, which means higher charge output with a strain in the axial direction of the nanofibers than that under a strain in other directions. In addition, the alignment of the P(VDF-TrFE) nanofibers leads to the anisotropic hydrophobicity.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85893186","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181363
J. G. Huang, B. Dong, M. Tang, Y. D. Gu, J. H. Wu, T. N. Chen, Z. Yang, Y. Jin, Y. Hao, D. Kwong, A. Liu
This paper reports a novel all-optical light tracker by taking advantage of the optomechanical modulation. The optical force generated by a light can be used to control another light without relying on the traditional nonlinear material. Particularly, the all-optical modulation can transfer the information in a signal light into another tracking light without resorting to electro-optical converting. The novel all-optical modulation will have great potential use in on-chip signal processing.
{"title":"All optomechanical signal modulation in photonic circuits","authors":"J. G. Huang, B. Dong, M. Tang, Y. D. Gu, J. H. Wu, T. N. Chen, Z. Yang, Y. Jin, Y. Hao, D. Kwong, A. Liu","doi":"10.1109/TRANSDUCERS.2015.7181363","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181363","url":null,"abstract":"This paper reports a novel all-optical light tracker by taking advantage of the optomechanical modulation. The optical force generated by a light can be used to control another light without relying on the traditional nonlinear material. Particularly, the all-optical modulation can transfer the information in a signal light into another tracking light without resorting to electro-optical converting. The novel all-optical modulation will have great potential use in on-chip signal processing.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77940317","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181380
J. Saez, M. Antoñana, J. Etxebarria, F. Benito‐Lopez
This abstract describes for the first time the use of alginate hydrogels as miniaturised valves in microfluidic devices. These biocompatible and biodegradable microvalves are in-situ generated, on demand, allowing for microfluidic flow control. The microfluidic devices were fabricated using the origami technique with seven layers of cyclic olefin copolymer (COP) and thermocompression bonding. They can be thermally actuated (ON/OFF) at mild temperatures, 37 °C, and chemically erased from the main channel using an ethylenediaminetetraacetic acid disodium salt dehydrated (EDTA) solution, ensuring the reusability of the whole device.
{"title":"In-situ generated biocompatible alginate actuators for flow control in microfluidics","authors":"J. Saez, M. Antoñana, J. Etxebarria, F. Benito‐Lopez","doi":"10.1109/TRANSDUCERS.2015.7181380","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181380","url":null,"abstract":"This abstract describes for the first time the use of alginate hydrogels as miniaturised valves in microfluidic devices. These biocompatible and biodegradable microvalves are in-situ generated, on demand, allowing for microfluidic flow control. The microfluidic devices were fabricated using the origami technique with seven layers of cyclic olefin copolymer (COP) and thermocompression bonding. They can be thermally actuated (ON/OFF) at mild temperatures, 37 °C, and chemically erased from the main channel using an ethylenediaminetetraacetic acid disodium salt dehydrated (EDTA) solution, ensuring the reusability of the whole device.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72830167","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181320
F. Hsu, Chi-En Lu, W. Fang
This study is an extension of MR fluid (MR fluid: liquid glycerol polymer with magnetic-particles) applications on MEMS devices [1-2], presenting a novel moving technology for MR fluid using the rotation of chainlike magnetic particles (Fig.1). When driven by in-plane dynamic magnetic field, the chainlike magnetic particles inside MR fluid are rotated out-of-plane and further encourage the motion of MR fluid (Fig.1b). MR fluid movement speed and direction can be modulated by (1) weight fraction and chain length of magnetic powder; (2) strength and angular speed of applied magnetic field (Fig.1b); (3) pattern of spiral channel (Fig.1c-d). MR fluid movements are demonstrated on three PDMS dome shaped substrates [3] with no channel, clockwise spiral and counterclockwise spiral channels (Fig.1b-d). Measurement results are summarized in Table 1. Detail investigations are still required to quantitatively predict and precisely control the movement of the MR fluid.
{"title":"Movement of magnetorheological fluid using the rotation of chainlike magnetic-particles driven by rotation magnetic field","authors":"F. Hsu, Chi-En Lu, W. Fang","doi":"10.1109/TRANSDUCERS.2015.7181320","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181320","url":null,"abstract":"This study is an extension of MR fluid (MR fluid: liquid glycerol polymer with magnetic-particles) applications on MEMS devices [1-2], presenting a novel moving technology for MR fluid using the rotation of chainlike magnetic particles (Fig.1). When driven by in-plane dynamic magnetic field, the chainlike magnetic particles inside MR fluid are rotated out-of-plane and further encourage the motion of MR fluid (Fig.1b). MR fluid movement speed and direction can be modulated by (1) weight fraction and chain length of magnetic powder; (2) strength and angular speed of applied magnetic field (Fig.1b); (3) pattern of spiral channel (Fig.1c-d). MR fluid movements are demonstrated on three PDMS dome shaped substrates [3] with no channel, clockwise spiral and counterclockwise spiral channels (Fig.1b-d). Measurement results are summarized in Table 1. Detail investigations are still required to quantitatively predict and precisely control the movement of the MR fluid.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72877710","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7181201
N. I. Mou, M. Tabib-Azar
Surface adhesion forces in few layers of layered transition metal dichalcogenides (ReS2, NbS2, n-type WSe2, MoS2, p-type MoSe2, TaS2) hexagonal BN (hBN) and graphene were determined using atomic force microscope with conducting silicon tip in dark and under illumination to identify material for integrated optical sensor in NEMS/MEMS switches. In all cases the surface adhesion forces increased under illumination. WSe2, an indirect band gap with 1.66 eV energy, showed the largest change of ~165% in its adhesion force. Hexagonal BN, a wide band gap energy material of 5.5 eV, showed the smallest change of 7.2% comparable to changes in our control samples of 90 nm SiO2 on Si and 100 nm Au on SiO2/Si. NbS2 and graphene, samples with the smallest energy band gaps, respectively showed 54.8% and 8.4% increase in surface adhesion forces under illumination.
{"title":"Modification of adhesion forces in multiple layers of transition metal dichalcogenides using illumination for micro-actuators","authors":"N. I. Mou, M. Tabib-Azar","doi":"10.1109/TRANSDUCERS.2015.7181201","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7181201","url":null,"abstract":"Surface adhesion forces in few layers of layered transition metal dichalcogenides (ReS<sub>2</sub>, NbS<sub>2</sub>, n-type WSe<sub>2</sub>, MoS<sub>2</sub>, p-type MoSe<sub>2</sub>, TaS<sub>2</sub>) hexagonal BN (hBN) and graphene were determined using atomic force microscope with conducting silicon tip in dark and under illumination to identify material for integrated optical sensor in NEMS/MEMS switches. In all cases the surface adhesion forces increased under illumination. WSe<sub>2</sub>, an indirect band gap with 1.66 eV energy, showed the largest change of ~165% in its adhesion force. Hexagonal BN, a wide band gap energy material of 5.5 eV, showed the smallest change of 7.2% comparable to changes in our control samples of 90 nm SiO<sub>2</sub> on Si and 100 nm Au on SiO<sub>2</sub>/Si. NbS<sub>2</sub> and graphene, samples with the smallest energy band gaps, respectively showed 54.8% and 8.4% increase in surface adhesion forces under illumination.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72908626","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-06-21DOI: 10.1109/TRANSDUCERS.2015.7180882
Chao-Yu Chen, Ming-Huang Li, Ching-Hung Wang, Sheng-Shian Li
In this paper, we report the comparison of different transduction mechanisms, including (i) purely capacitive drive/sense, (ii) capacitive drive/piezoresistive sense, and (iii) thermal drive/piezoresisitve sense, through a simple resonant transducer achieved in a commercially available platform (CMOS 0.18μm technology). To perform a fair comparison, capacitive combs and poly resistors are adopted to provide various combinations of the drive and sense configurations. The experimental results show performance of the thermal drive/piezoresistive sense is superior to that of other transductions under a typical circuit biasing (1.8V). By characterizing randomly picked 8 samples, the 1-σ frequency variation is lower than 4,800 ppm with total drive/sense power consumption below 0.67 mW through the (iii) scheme. Moreover, a high Q-factor of 200 is also measured in air (under 760 Torr), which successfully demonstrates its great potential for future portable sensor nodes application.
{"title":"Transduction comparison of a resonant transducer realized in a commercially available CMOS-MEMS platform","authors":"Chao-Yu Chen, Ming-Huang Li, Ching-Hung Wang, Sheng-Shian Li","doi":"10.1109/TRANSDUCERS.2015.7180882","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2015.7180882","url":null,"abstract":"In this paper, we report the comparison of different transduction mechanisms, including (i) purely capacitive drive/sense, (ii) capacitive drive/piezoresistive sense, and (iii) thermal drive/piezoresisitve sense, through a simple resonant transducer achieved in a commercially available platform (CMOS 0.18μm technology). To perform a fair comparison, capacitive combs and poly resistors are adopted to provide various combinations of the drive and sense configurations. The experimental results show performance of the thermal drive/piezoresistive sense is superior to that of other transductions under a typical circuit biasing (1.8V). By characterizing randomly picked 8 samples, the 1-σ frequency variation is lower than 4,800 ppm with total drive/sense power consumption below 0.67 mW through the (iii) scheme. Moreover, a high Q-factor of 200 is also measured in air (under 760 Torr), which successfully demonstrates its great potential for future portable sensor nodes application.","PeriodicalId":6465,"journal":{"name":"2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2015-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73326527","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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