Cutting tools with surface micro-textures can effectively improve the wear resistance of the tool and improve cutting conditions. The effects of average output power on the morphology and quality of the micro-textures were analyzed by laser processing technology. The micro-pit diameter was 35μm, 30μm, 25μm, 20μm and non-woven tool on the wear resistance of tool was evaluated. The micro-texture performance was evaluated from tool wear length, width and machined surface roughness. The results show that micro-pore diameter and pit depth increase with increase of laser power. The diameter of the micro-pit has a certain influence on the wear resistance of tool. With decrease of the diameter, the surface roughness of Ti6Al4V alloy is decreasing. When the diameter is less than 25μm, the wear resistance of the tool is weakened and the surface roughness of Ti6Al4V alloy is increasing. Micro-pit texture plays an active role in the friction contact state between blade and chip, adhesion resistance, wear resistance, resistance reduction, storage chip and so on.
{"title":"Study on wear resistance of micro-pits texture on turning surface","authors":"Qianqian Cai, Yiquan Li, Umair Ayub, Zhanjiang Yu, Jinkai Xu, Huadong Yu","doi":"10.1109/3M-NANO.2017.8286311","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286311","url":null,"abstract":"Cutting tools with surface micro-textures can effectively improve the wear resistance of the tool and improve cutting conditions. The effects of average output power on the morphology and quality of the micro-textures were analyzed by laser processing technology. The micro-pit diameter was 35μm, 30μm, 25μm, 20μm and non-woven tool on the wear resistance of tool was evaluated. The micro-texture performance was evaluated from tool wear length, width and machined surface roughness. The results show that micro-pore diameter and pit depth increase with increase of laser power. The diameter of the micro-pit has a certain influence on the wear resistance of tool. With decrease of the diameter, the surface roughness of Ti6Al4V alloy is decreasing. When the diameter is less than 25μm, the wear resistance of the tool is weakened and the surface roughness of Ti6Al4V alloy is increasing. Micro-pit texture plays an active role in the friction contact state between blade and chip, adhesion resistance, wear resistance, resistance reduction, storage chip and so on.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"64 1","pages":"210-214"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86464493","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286281
S. El-Sheikh, A. Shawky, Sabrin M. Abdo, Thanaa I. El-Dosoqy, Mohamed Nageeb Rashad
Nanokaolinite photocatalyst was successfully prepared from bulk kaolinite by using simple intercalation-delamination method. The obtained nanokaolinite photocatalysts have been characterized by X-ray diffraction (XRD), FTIR analysis, transmission electron microscope (TEM), and UV-VIS diffuse reflectance spectroscopy (DRS). The XRD revealed that the layers of bulk kaolinite were exfoliated to form nanokaolinite with crystallite size ∼26–32 nm. FTIR spectra showed the presence of nitrogen species between nanokaolinite layers, which lead to decrease of band gap of as-prepared samples as estimated from DRS. The photocatalytic degradation of P-Nitrophenol (PNP) was investigated using the as-prepared nanokaolinite photocatalysts under UV irradiation. The optimum nanokaolinite sample using urea as intercalating agent shows a complete photodegradation of PNP within 30 minutes. This novel nanokaolinite photocatalyst represents an extraordinary alternate for oxide-based photocatalysts.
{"title":"A novel nanokaolinite photocatalyst for degradation of P-nitrophenol","authors":"S. El-Sheikh, A. Shawky, Sabrin M. Abdo, Thanaa I. El-Dosoqy, Mohamed Nageeb Rashad","doi":"10.1109/3M-NANO.2017.8286281","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286281","url":null,"abstract":"Nanokaolinite photocatalyst was successfully prepared from bulk kaolinite by using simple intercalation-delamination method. The obtained nanokaolinite photocatalysts have been characterized by X-ray diffraction (XRD), FTIR analysis, transmission electron microscope (TEM), and UV-VIS diffuse reflectance spectroscopy (DRS). The XRD revealed that the layers of bulk kaolinite were exfoliated to form nanokaolinite with crystallite size ∼26–32 nm. FTIR spectra showed the presence of nitrogen species between nanokaolinite layers, which lead to decrease of band gap of as-prepared samples as estimated from DRS. The photocatalytic degradation of P-Nitrophenol (PNP) was investigated using the as-prepared nanokaolinite photocatalysts under UV irradiation. The optimum nanokaolinite sample using urea as intercalating agent shows a complete photodegradation of PNP within 30 minutes. This novel nanokaolinite photocatalyst represents an extraordinary alternate for oxide-based photocatalysts.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"36 1","pages":"367-370"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81449168","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Surfaces in water would bear hydration repulsion or hydrophobic attraction when separation is small. However, the interaction mechanism of hydrophobic surfaces is still unclear though they are very important when the surfaces are in nanometer separation. With molecular dynamics simulations, the solvation force of water molecules between graphene surfaces of different hydrophobicity is analyzed. Important features of the step-like solvation force oscillatory behavior during the compression within a distance of ∼ 1.5 nm indicate that water is squeezed out layer-by-layer. The hydrophobicity of the graphene surfaces is shown to be an important parameter that influences the solvation force of water molecules. We find that the solvation force decreases when the hydrophobicity of the graphene surfaces increases. Detailed analysis of the water density distributions and the water molecule orientation between graphene surfaces show that changing hydrophobicity would influence the water structure. As the graphene surface becomes more hydrophobic, the water molecules become less ordered and the concentration will also decrease to some extent, which can account for the attenuation of the solvation force.
{"title":"Computational simulations of solvation force of water under different hydrophobic interactions","authors":"Zhongwu Li, Kun Li, Pinyao He, Kabin Lin, Jingjie Sha, Yunfei Chen","doi":"10.1109/3M-NANO.2017.8286263","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286263","url":null,"abstract":"Surfaces in water would bear hydration repulsion or hydrophobic attraction when separation is small. However, the interaction mechanism of hydrophobic surfaces is still unclear though they are very important when the surfaces are in nanometer separation. With molecular dynamics simulations, the solvation force of water molecules between graphene surfaces of different hydrophobicity is analyzed. Important features of the step-like solvation force oscillatory behavior during the compression within a distance of ∼ 1.5 nm indicate that water is squeezed out layer-by-layer. The hydrophobicity of the graphene surfaces is shown to be an important parameter that influences the solvation force of water molecules. We find that the solvation force decreases when the hydrophobicity of the graphene surfaces increases. Detailed analysis of the water density distributions and the water molecule orientation between graphene surfaces show that changing hydrophobicity would influence the water structure. As the graphene surface becomes more hydrophobic, the water molecules become less ordered and the concentration will also decrease to some extent, which can account for the attenuation of the solvation force.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"81 1","pages":"146-150"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79362259","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286297
J. Rakebrandt, Y. Zheng, H. Seifert, P. Smyrek, Wilhelm Pfleging
Lithium-ion batteries (LIB) using lithium nickel manganese cobalt oxide (Li(Nu/3Mn1/3Co1/3)O2, NMC-111) as cathode material have already become one of the most important types of mobile power sources due to their high gravimetric and volumetric capacity. Nevertheless, the automotive industry needs batteries with a further improved energy density to develop electric vehicles (EV) with comparable or even higher range than automobiles with ICE (Internal combustion engine). One approach to enhance the energy density is to increase the nickel content of the NMC cathode material. Therefore, NMC-622 cathodes were produced via tape casting containing 80 wt% of active material with a film thickness of 54 μm. The specific capacities were measured using galvanostatic measurements at different charging/discharging currents for cells with structured and unstructured electrodes. An improved lithium-ion diffusion kinetic due to an increased active surface area could be achieved by laser-assisted generation of three-dimensional architectures. Ultrafast laser ablation was used in order to avoid a thermal-induced damage of the active material. It could be shown that laser structuring of electrode material leads to a significant improvement of the electrochemical performance, especially at high charging and discharging currents.
{"title":"Laser micro structuring of composite Li(Ni0.6Mn0.2Co0.2)O2 cathode layersfor lithium-ion batteries","authors":"J. Rakebrandt, Y. Zheng, H. Seifert, P. Smyrek, Wilhelm Pfleging","doi":"10.1109/3M-NANO.2017.8286297","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286297","url":null,"abstract":"Lithium-ion batteries (LIB) using lithium nickel manganese cobalt oxide (Li(Nu/3Mn1/3Co1/3)O2, NMC-111) as cathode material have already become one of the most important types of mobile power sources due to their high gravimetric and volumetric capacity. Nevertheless, the automotive industry needs batteries with a further improved energy density to develop electric vehicles (EV) with comparable or even higher range than automobiles with ICE (Internal combustion engine). One approach to enhance the energy density is to increase the nickel content of the NMC cathode material. Therefore, NMC-622 cathodes were produced via tape casting containing 80 wt% of active material with a film thickness of 54 μm. The specific capacities were measured using galvanostatic measurements at different charging/discharging currents for cells with structured and unstructured electrodes. An improved lithium-ion diffusion kinetic due to an increased active surface area could be achieved by laser-assisted generation of three-dimensional architectures. Ultrafast laser ablation was used in order to avoid a thermal-induced damage of the active material. It could be shown that laser structuring of electrode material leads to a significant improvement of the electrochemical performance, especially at high charging and discharging currents.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"39 1","pages":"57-60"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88201313","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286322
Yongqiang Deng, Erwei Shang, Yu Liu, Weilian Gao, Yanqiu Chen, C. Bao, Peng Yan, Jin Jiang
A high-precision micro contact transfer printing machine, utilizing cantilever based force feedback control, is homebuilt for a general function in this work. It owns an agile access to control the contact force between the substrate and the printing stamp. The force is on-line processed by a micro controller unit carrying a P (proportional) — controller. The sample stage is installed on the horizontal axis so that the stamp could move from the ink position to the sample position. A real-time image of the press-down progress is shown on the operation interface, running on a personal computer. The printer could be implemented in printing electronics. With the resolution of 0.01N, the force between the stamp and the sample could be loaded precisely and the whole transfer printing process is visible thus it provides a way to take the force under consideration while investigating the mechanism of the transfer printer. Final demonstration on printing of a metallic array with resolution down to 1 micron has been in success.
{"title":"An overview on design of homebuilt micro-contact transfer printing machine with easy access to one micron patterning resolution","authors":"Yongqiang Deng, Erwei Shang, Yu Liu, Weilian Gao, Yanqiu Chen, C. Bao, Peng Yan, Jin Jiang","doi":"10.1109/3M-NANO.2017.8286322","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286322","url":null,"abstract":"A high-precision micro contact transfer printing machine, utilizing cantilever based force feedback control, is homebuilt for a general function in this work. It owns an agile access to control the contact force between the substrate and the printing stamp. The force is on-line processed by a micro controller unit carrying a P (proportional) — controller. The sample stage is installed on the horizontal axis so that the stamp could move from the ink position to the sample position. A real-time image of the press-down progress is shown on the operation interface, running on a personal computer. The printer could be implemented in printing electronics. With the resolution of 0.01N, the force between the stamp and the sample could be loaded precisely and the whole transfer printing process is visible thus it provides a way to take the force under consideration while investigating the mechanism of the transfer printer. Final demonstration on printing of a metallic array with resolution down to 1 micron has been in success.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"28 4 1","pages":"242-245"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91281842","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper presents the design and measurement of electrostatic energy harvesting. A spray coated electret based electrostatic energy harvester with out-of-plane gap closing scheme is fabricated using advanced MEMS technology. The size of this device is 13×18 mm2. With the matched resistance of 21 MΩ, an output power of 12 μW is harvested when the resonant frequency is 154 Hz under the acceleration of 28.5 m/s2. The thermal stability of this device is tested on 100 °C, decent power can be output after 34 hours.
{"title":"MEMS electrostatic energy harvesting device with spray coated electret","authors":"Anxin Luo, Yixin Xu, Siyan Chen, Hanning Dong, Yulong Zhang, Fei Wang","doi":"10.1109/3M-NANO.2017.8286330","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286330","url":null,"abstract":"This paper presents the design and measurement of electrostatic energy harvesting. A spray coated electret based electrostatic energy harvester with out-of-plane gap closing scheme is fabricated using advanced MEMS technology. The size of this device is 13×18 mm2. With the matched resistance of 21 MΩ, an output power of 12 μW is harvested when the resonant frequency is 154 Hz under the acceleration of 28.5 m/s2. The thermal stability of this device is tested on 100 °C, decent power can be output after 34 hours.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"2018 1","pages":"134-137"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83485745","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286274
Hairong Wang, M. Wang, Xiaowei Chen, B. Han
An integrated micro H2 sensor chip with low power consumption is presented. A pair of interdigitated sensing electrodes, sensing layer and heating electrodes surrounding them were designed on the same layer. To realize low power consumption, the silicon substrate with high thermal conduction was released by wet etching and the 1.3#x03BC;m thick membrane with excellent thermal insulation which consists of Si3N4/SiO2/Si3N4/SiO2 four films, was reserved to support the above structure. Annealing was carried out to reduce the stresses of the films. The stacked TiO2/SnO2 composite materials were used to detect H2 and they had six layers consisting of deposited SnO2 and TiO2 through RF magnetron sputtering in turn. The preparation process of the composite materials was combined with the conventional MEMS process to realize mass production of the wafer-level sensor chips with good consistency. The H2 sensor can work steadily for H2 detection (100–900ppm) at 244 °C with low power consumption as 36mW.
{"title":"The micro hydrogen sensor chip with low power consumption","authors":"Hairong Wang, M. Wang, Xiaowei Chen, B. Han","doi":"10.1109/3M-NANO.2017.8286274","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286274","url":null,"abstract":"An integrated micro H2 sensor chip with low power consumption is presented. A pair of interdigitated sensing electrodes, sensing layer and heating electrodes surrounding them were designed on the same layer. To realize low power consumption, the silicon substrate with high thermal conduction was released by wet etching and the 1.3#x03BC;m thick membrane with excellent thermal insulation which consists of Si3N4/SiO2/Si3N4/SiO2 four films, was reserved to support the above structure. Annealing was carried out to reduce the stresses of the films. The stacked TiO2/SnO2 composite materials were used to detect H2 and they had six layers consisting of deposited SnO2 and TiO2 through RF magnetron sputtering in turn. The preparation process of the composite materials was combined with the conventional MEMS process to realize mass production of the wafer-level sensor chips with good consistency. The H2 sensor can work steadily for H2 detection (100–900ppm) at 244 °C with low power consumption as 36mW.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"92 1","pages":"264-268"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75271513","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286267
Shuai Guo, Xudong Zheng, Yiyu Lin, Wei Ma, Zhong-he Jin
In order to improve the performance of MEMS gyroscopes, the least mean square demodulation (LMSD) algorithm is utilized in MEMS gyroscope control system. By using Matlab tool, the simulation result shows that the LMSD algorithm has better noise suppression performance than multiplicative demodulation (MD). LMSD algorithm is carried out in field-programmed-gate-array (FPGA) and experimental results are in good agreement with the simulation. Combining with automatic gain control (AGC) and phase-locked loop (PLL) technology, the amplitude variance and phase variance of drive mode are respectively 62ppm and 0.001°. The nonlinearity of scale factor based on LMSD algorithm is 0.068%. Moreover, the gyroscope using LMSD exhibits a bias stability (BS) of 1.8°/h and an angle random walk (ARW) of 0.031°/Vh, better than the BS 6.7°/h and ARW 0.114°/Vh using MD. The experiment proves the feasibility and effectiveness of LMSD algorithm in the digital control system of MEMS gyroscope.
{"title":"Design and test of MEMS gyroscope control system based on LMSD","authors":"Shuai Guo, Xudong Zheng, Yiyu Lin, Wei Ma, Zhong-he Jin","doi":"10.1109/3M-NANO.2017.8286267","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286267","url":null,"abstract":"In order to improve the performance of MEMS gyroscopes, the least mean square demodulation (LMSD) algorithm is utilized in MEMS gyroscope control system. By using Matlab tool, the simulation result shows that the LMSD algorithm has better noise suppression performance than multiplicative demodulation (MD). LMSD algorithm is carried out in field-programmed-gate-array (FPGA) and experimental results are in good agreement with the simulation. Combining with automatic gain control (AGC) and phase-locked loop (PLL) technology, the amplitude variance and phase variance of drive mode are respectively 62ppm and 0.001°. The nonlinearity of scale factor based on LMSD algorithm is 0.068%. Moreover, the gyroscope using LMSD exhibits a bias stability (BS) of 1.8°/h and an angle random walk (ARW) of 0.031°/Vh, better than the BS 6.7°/h and ARW 0.114°/Vh using MD. The experiment proves the feasibility and effectiveness of LMSD algorithm in the digital control system of MEMS gyroscope.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"301 1","pages":"260-263"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79728167","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Based on the electromagnetic actuator, a novel mechanical system is developed for the measurement of micro/nano newton force, as well as the deformation of the suspension mechanism. The system mainly includes the electromagnetic actuator, flexible suspension mechanism and displacement sensor. A null position measurement method for the suspension mechanism is introduced. The electromagnetic force is theoretically modeled and simulated in ANSYS Maxwell software to optimize the position of the magnet. And then, the suspension mechanism is simulated by Finite Element Analysis (FEA). According to the experimental results, the developed system has a current resolution 1mA, electromagnetic force conversion rate 400μN/mA, the stiffness 27.5N/m.
{"title":"A novel electromagnetic force method for micro/nano newton force measurement","authors":"Chongkai Zhou, Yanling Tian, Fujun Wang, Zhiyong Guo, Dawei Zhang","doi":"10.1109/3M-NANO.2017.8286287","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286287","url":null,"abstract":"Based on the electromagnetic actuator, a novel mechanical system is developed for the measurement of micro/nano newton force, as well as the deformation of the suspension mechanism. The system mainly includes the electromagnetic actuator, flexible suspension mechanism and displacement sensor. A null position measurement method for the suspension mechanism is introduced. The electromagnetic force is theoretically modeled and simulated in ANSYS Maxwell software to optimize the position of the magnet. And then, the suspension mechanism is simulated by Finite Element Analysis (FEA). According to the experimental results, the developed system has a current resolution 1mA, electromagnetic force conversion rate 400μN/mA, the stiffness 27.5N/m.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"24 1","pages":"40-45"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88969709","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286279
Biao Zhou, Chen-Yi Su, Biao Shi, Yunjiao Wang, Leyong Yu, Shuanglong Feng, Deqiang Wang
Single crystal WS2 film has been paid much more attentions due to its special optical-electrical performance and potential application in the field of biosensor and photodetector in recent years. In this work, we focused on the growth of single crystal WS2 and explored the effect of the position of sulfur and carrier gas flow rate on the nucleation density systematically. The results indicated that the nucleation density of WS2 varies obviously correspond to sulfur position and gas flow, the reasons of the variety on the nucleation density was investigated. Meanwhile, granular and massive WS2 was characterized by an optical microscope, atomic force microscope and Raman spectra.
{"title":"Growth of single crystal WS2 thin films via atmospheric pressure CVD","authors":"Biao Zhou, Chen-Yi Su, Biao Shi, Yunjiao Wang, Leyong Yu, Shuanglong Feng, Deqiang Wang","doi":"10.1109/3M-NANO.2017.8286279","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286279","url":null,"abstract":"Single crystal WS2 film has been paid much more attentions due to its special optical-electrical performance and potential application in the field of biosensor and photodetector in recent years. In this work, we focused on the growth of single crystal WS2 and explored the effect of the position of sulfur and carrier gas flow rate on the nucleation density systematically. The results indicated that the nucleation density of WS2 varies obviously correspond to sulfur position and gas flow, the reasons of the variety on the nucleation density was investigated. Meanwhile, granular and massive WS2 was characterized by an optical microscope, atomic force microscope and Raman spectra.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"108 1","pages":"379-383"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88133548","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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