首页 > 最新文献

2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)最新文献

英文 中文
A parallel kinematic scanner designed for high-speed atomic force microscopy 一种为高速原子力显微镜设计的平行运动扫描仪
Xianbin He, Liangyu Cui, K. Cai, Yanling Tian, Xianping Liu
Atomic force microscopy (AFM) is a useful tool in nanoscale measurement. However, conventional AFM suffers from slow scan speed, limiting the use for biological detection or nanofabrication, due to the limited bandwidth of AFM components. In which the resonant frequency of the AFM scanner is usually too low to achieve high-speed scanning. In this paper, a parallel kinematic piezoelectric actuator (PZT) AFM scanner is designed to achieve high-speed atomic force microscopy (HS-AFM) scanning. After that, finite element analysis (FEA) is adopted to characterize the scanner. Finally, images of standard gratings obtained at 25 Hz with our home-made AFM system is presented after calibration and motion coupling compensation.
原子力显微镜(AFM)是纳米尺度测量的一种有用工具。然而,由于AFM组件的带宽有限,传统AFM的扫描速度较慢,限制了其在生物检测或纳米制造中的应用。其中原子力显微镜扫描仪的谐振频率通常太低,无法实现高速扫描。为了实现原子力显微镜(HS-AFM)的高速扫描,设计了一种并联运动压电致动器(PZT) AFM扫描仪。然后,采用有限元分析(FEA)对扫描仪进行表征。最后给出了国产AFM系统经标定和运动耦合补偿后在25 Hz下得到的标准光栅图像。
{"title":"A parallel kinematic scanner designed for high-speed atomic force microscopy","authors":"Xianbin He, Liangyu Cui, K. Cai, Yanling Tian, Xianping Liu","doi":"10.1109/3M-NANO.2017.8286288","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286288","url":null,"abstract":"Atomic force microscopy (AFM) is a useful tool in nanoscale measurement. However, conventional AFM suffers from slow scan speed, limiting the use for biological detection or nanofabrication, due to the limited bandwidth of AFM components. In which the resonant frequency of the AFM scanner is usually too low to achieve high-speed scanning. In this paper, a parallel kinematic piezoelectric actuator (PZT) AFM scanner is designed to achieve high-speed atomic force microscopy (HS-AFM) scanning. After that, finite element analysis (FEA) is adopted to characterize the scanner. Finally, images of standard gratings obtained at 25 Hz with our home-made AFM system is presented after calibration and motion coupling compensation.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"282 1","pages":"46-49"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86739949","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Manipulation of magnetic nanoparticles by optically induced dielectrophoresis 光诱导介质电泳对磁性纳米颗粒的操纵
Ying Wang, Feifei Wang, Tingting Huang, Fenfen Guo, Ying Xie, Zhengxun Song, Jinyun Liu, Zuobin Wang, Yihui Wang
This paper presents a method for the manipulation of magnetic nanoparticles by optically induced dielectrophoresis (ODEP) device that can realize the transportation and convergence of nanoparticles. ODEP can be realized with a sandwich structure of three layers including the photoconductive layer, the liquid layer with the sample and the indium tin oxide electrode (ITO) layer. In this work, magnetic nanoparticles with the diameter of 10–100nm were successfully manipulated by positive dielectrophoresis force. The solution with magnetic nanoparticles on a mica substrate placed in the sandwich structure was dried in the air and imaged by atomic force microscope (AFM). The AFM images showed that the magnetic nanoparticles were converged in the illumination area. This method can be used to manipulate magnetic nanoparticles.
本文提出了一种利用光诱导介电泳(ODEP)装置对磁性纳米粒子进行操纵的方法,实现了纳米粒子的输运和会聚。ODEP可以通过三层夹层结构实现,包括光导层、样品液体层和氧化铟锡电极(ITO)层。在本研究中,我们成功地利用正电介质力对直径为10-100nm的磁性纳米颗粒进行了制备。将磁性纳米颗粒溶液置于夹层结构的云母衬底上,在空气中干燥,并通过原子力显微镜(AFM)成像。原子力显微镜(AFM)图像显示,磁性纳米颗粒在光照区聚集。该方法可用于操纵磁性纳米颗粒。
{"title":"Manipulation of magnetic nanoparticles by optically induced dielectrophoresis","authors":"Ying Wang, Feifei Wang, Tingting Huang, Fenfen Guo, Ying Xie, Zhengxun Song, Jinyun Liu, Zuobin Wang, Yihui Wang","doi":"10.1109/3M-NANO.2017.8286334","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286334","url":null,"abstract":"This paper presents a method for the manipulation of magnetic nanoparticles by optically induced dielectrophoresis (ODEP) device that can realize the transportation and convergence of nanoparticles. ODEP can be realized with a sandwich structure of three layers including the photoconductive layer, the liquid layer with the sample and the indium tin oxide electrode (ITO) layer. In this work, magnetic nanoparticles with the diameter of 10–100nm were successfully manipulated by positive dielectrophoresis force. The solution with magnetic nanoparticles on a mica substrate placed in the sandwich structure was dried in the air and imaged by atomic force microscope (AFM). The AFM images showed that the magnetic nanoparticles were converged in the illumination area. This method can be used to manipulate magnetic nanoparticles.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"55 1","pages":"325-328"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83016477","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Lithography-induced wettability changes of silicon 光刻诱导硅的润湿性变化
Jiajing Zhu, Chengjuan Yang, Fujun Wang, Yanling Tian, Xianping Liu
In recent years, the fabrication of hydrophobic surface has become a research hotspot. In this paper, three different patterns were fabricated successfully on the silicon wafers by lithography technology and the effects of dimension and interval parameters on surface wettability were the highlights in this study. Due to the different structural features, the overall average of linear pattern's contact angles were less than the overall average of grid pattern's contact angles and dot pattern's contact angles. What's more, the dimension parameters played a more important role than the interval parameters on the surface wettability. The smaller dimension of microstructure obviously preferred to have higher contact angle with better surface hydrophobic performance, especially when the size is less than 100μm. When the dimension of microstructure was 60μm, the contact angle were all larger than 90°, and some of them even reached the super-hydrophobic surface (larger than 150°).
近年来,疏水表面的制备已成为研究热点。本文采用光刻技术在硅片上成功制备了三种不同的图案,其中尺寸和间隔参数对表面润湿性的影响是本研究的重点。由于结构特征不同,线形图案接触角的总体平均值小于网格图案和点形图案接触角的总体平均值。尺寸参数比间距参数对表面润湿性的影响更大。微观结构尺寸越小,接触角越大,表面疏水性能越好,特别是当微观结构尺寸小于100μm时。当微观结构尺寸为60μm时,接触角均大于90°,有的甚至达到超疏水表面(大于150°)。
{"title":"Lithography-induced wettability changes of silicon","authors":"Jiajing Zhu, Chengjuan Yang, Fujun Wang, Yanling Tian, Xianping Liu","doi":"10.1109/3M-NANO.2017.8286259","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286259","url":null,"abstract":"In recent years, the fabrication of hydrophobic surface has become a research hotspot. In this paper, three different patterns were fabricated successfully on the silicon wafers by lithography technology and the effects of dimension and interval parameters on surface wettability were the highlights in this study. Due to the different structural features, the overall average of linear pattern's contact angles were less than the overall average of grid pattern's contact angles and dot pattern's contact angles. What's more, the dimension parameters played a more important role than the interval parameters on the surface wettability. The smaller dimension of microstructure obviously preferred to have higher contact angle with better surface hydrophobic performance, especially when the size is less than 100μm. When the dimension of microstructure was 60μm, the contact angle were all larger than 90°, and some of them even reached the super-hydrophobic surface (larger than 150°).","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"139 1","pages":"69-73"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87544717","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Design and driving of a 3-DOF electromagnetic direct-drive nanopositioning stage with long stroke 三自由度长行程电磁直驱纳米定位台的设计与驱动
Xixian Mo, Bo Zhang
In this paper, we present a novel electromagnetic driving scheme for nano-scale positioning stage with three-degree-of-freedom. Three air bearings are used to provide the suspension force for the stage against gravity. The stage has a +-50nm position resolution over a travel range of 50 × 50 mm in the xy plane. We explain the actuating scheme, the design of mechanical system in detail. The hardware-in-loop simulation scheme is adopted to build the control system of the stage. We describe the dynamic model of the stage and design its controller. We provide the test results to demonstrate the precision positioning capabilities of the proposed stage.
本文提出了一种新型的三自由度纳米级定位平台电磁驱动方案。三个空气轴承用于为舞台提供抗重力的悬浮力。该平台在xy平面50 × 50 mm的行程范围内具有+-50nm的位置分辨率。详细说明了驱动方案、机械系统的设计。采用硬件在环仿真方案构建了该舞台的控制系统。描述了舞台的动态模型,设计了舞台控制器。我们提供了测试结果来证明所提出的阶段的精确定位能力。
{"title":"Design and driving of a 3-DOF electromagnetic direct-drive nanopositioning stage with long stroke","authors":"Xixian Mo, Bo Zhang","doi":"10.1109/3M-NANO.2017.8286316","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286316","url":null,"abstract":"In this paper, we present a novel electromagnetic driving scheme for nano-scale positioning stage with three-degree-of-freedom. Three air bearings are used to provide the suspension force for the stage against gravity. The stage has a +-50nm position resolution over a travel range of 50 × 50 mm in the xy plane. We explain the actuating scheme, the design of mechanical system in detail. The hardware-in-loop simulation scheme is adopted to build the control system of the stage. We describe the dynamic model of the stage and design its controller. We provide the test results to demonstrate the precision positioning capabilities of the proposed stage.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"7 1","pages":"236-241"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83330206","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A roller support stage with remote center of motion for roll-to-roll printed electronics 用于卷对卷印刷电子产品的具有远程运动中心的辊子支撑台
Shasha Chen, Weihai Chen, Jingmeng Liu, Wenjie Chen
High uniformity of the web tension is of key importance in roll-to-roll printed electronics (R2RPE). A roller support stage with remote center of motion (RCM) is proposed to eliminate the uneven tension which can be transformed into an equivalent force and two equivalent moments. The equivalent force is supported by the rigid structure, then the equivalent moments can be eliminated by adjusting the roller angle, thus the uniformity of the tension can be guaranteed. The stage mainly consists of a high-stiffness spherical air bearing (SAB) and a multi-degree-of-freedom (multi-DOF) compliant mechanism. The roller center and the rotation center of the SAB locate at the same point. Therefore the roller will not produce lateral parasitic movement when the roller angle is changed. Based on the classical beam theory and the pseudo-rigid-body-model (PRBM), the analytical model of the compliant mechanism have been established. Finite element analysis (FEA) is conducted to verify the established model. Both the analytical model and FEA results demonstrate the superior property of the design, which indicates that the proposed mechanism can meet the requirements for the angle adjustment capacity of the roller support stage.
在卷对卷印刷电子(R2RPE)中,高度均匀的卷筒纸张力是至关重要的。为了消除不均匀张力,提出了一种具有远程运动中心的滚子支撑台,将不均匀张力转化为一个等效力和两个等效力矩。等效力由刚性结构支撑,通过调整滚轮角度消除等效力矩,从而保证张力的均匀性。该平台主要由高刚度球面空气轴承(SAB)和多自由度柔性机构组成。辊子中心与SAB的旋转中心位于同一点。因此,改变托辊角度时,托辊不会产生横向寄生运动。基于经典梁理论和拟刚体模型,建立了柔性机构的解析模型。通过有限元分析对所建立的模型进行了验证。分析模型和有限元分析结果均表明了该机构设计的优越性,表明该机构能够满足滚子支撑台角度调节能力的要求。
{"title":"A roller support stage with remote center of motion for roll-to-roll printed electronics","authors":"Shasha Chen, Weihai Chen, Jingmeng Liu, Wenjie Chen","doi":"10.1109/3M-NANO.2017.8286260","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286260","url":null,"abstract":"High uniformity of the web tension is of key importance in roll-to-roll printed electronics (R2RPE). A roller support stage with remote center of motion (RCM) is proposed to eliminate the uneven tension which can be transformed into an equivalent force and two equivalent moments. The equivalent force is supported by the rigid structure, then the equivalent moments can be eliminated by adjusting the roller angle, thus the uniformity of the tension can be guaranteed. The stage mainly consists of a high-stiffness spherical air bearing (SAB) and a multi-degree-of-freedom (multi-DOF) compliant mechanism. The roller center and the rotation center of the SAB locate at the same point. Therefore the roller will not produce lateral parasitic movement when the roller angle is changed. Based on the classical beam theory and the pseudo-rigid-body-model (PRBM), the analytical model of the compliant mechanism have been established. Finite element analysis (FEA) is conducted to verify the established model. Both the analytical model and FEA results demonstrate the superior property of the design, which indicates that the proposed mechanism can meet the requirements for the angle adjustment capacity of the roller support stage.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"23 1","pages":"319-324"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84390453","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and modeling of a 2-DOF decoupled rotation platform for micro-manipulation 面向微操作的二自由度解耦旋转平台设计与建模
C. Liang, Fujun Wang, Yanling Tian, Dawei Zhang
In high precision micro-manipulation task, precision angle adjustment is very important, which directly affects the quality of micro-manipulation. In this paper a novel 2-DOF (degree of freedom) rotation platform driven by two piezoelectric (PZT) actuators is designed to realize precision angle adjustment. The rotation platform has compact flexure-based mechanical structure and light weight. The rotation decoupling in X-and Y-axes are realized through the Hook joint. In order to obtain large range rotational angle, bridge-type mechanism is utilized in the 2-DOF rotation platform. An analytical model for rotational angle and input stiffness calculation is established. The influences of key parameters on the rotational angle as well as input stiffness of the rotation platform are analyzed. Finite element analysis (FEA) is conducted to evaluate the analytical model. The results of FEA fit the analytical model well and show the rotation platform exhibits good performance.
在高精度的微操作任务中,角的精确调节是非常重要的,它直接影响微操作的质量。本文设计了一种由两个压电驱动器驱动的2自由度旋转平台,实现了高精度角度调节。旋转平台具有紧凑的挠性机械结构,重量轻。通过Hook关节实现x轴和y轴的旋转解耦。为了获得大范围的旋转角度,在二自由度旋转平台中采用了桥式机构。建立了转角和输入刚度计算的解析模型。分析了关键参数对旋转平台转角和输入刚度的影响。对分析模型进行了有限元分析(FEA)。有限元分析结果与解析模型吻合较好,表明旋转平台具有良好的性能。
{"title":"Design and modeling of a 2-DOF decoupled rotation platform for micro-manipulation","authors":"C. Liang, Fujun Wang, Yanling Tian, Dawei Zhang","doi":"10.1109/3M-NANO.2017.8286283","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286283","url":null,"abstract":"In high precision micro-manipulation task, precision angle adjustment is very important, which directly affects the quality of micro-manipulation. In this paper a novel 2-DOF (degree of freedom) rotation platform driven by two piezoelectric (PZT) actuators is designed to realize precision angle adjustment. The rotation platform has compact flexure-based mechanical structure and light weight. The rotation decoupling in X-and Y-axes are realized through the Hook joint. In order to obtain large range rotational angle, bridge-type mechanism is utilized in the 2-DOF rotation platform. An analytical model for rotational angle and input stiffness calculation is established. The influences of key parameters on the rotational angle as well as input stiffness of the rotation platform are analyzed. Finite element analysis (FEA) is conducted to evaluate the analytical model. The results of FEA fit the analytical model well and show the rotation platform exhibits good performance.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"1 1","pages":"7-12"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87762715","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
H∞ control for piezo-actuated nanopositioning stages with time delays 具有时滞的压电驱动纳米定位平台的H∞控制
Zhiming Zhang, P. Yan
Many piezo-driven nanopositioning systems employ ultra high resolution capacitive sensors for displacement feedback, which results in significant time delays induced by AD conversion. The infinite dimensionality of such systems poses new challenges for nanopositioning control, where traditional control methods can not be applied directly. In this paper, a model with time delay on a nanopositioning stage is discussed, and a parameter identification method is further deployed using experiments to determine the time delay and other model parameters. A robust H∞ control design approach is also developed by using Pade expansion to approximate the time delay block. Real time experiments with the proposed control design are conducted on a piezo-actuated nanopositioning stage, where high precision motions, robustness against model uncertainties, as well as hysteresis compensation capability, are demonstrated, which significantly outperforms traditional PI control approach.
许多压电驱动的纳米定位系统采用超高分辨率电容式传感器进行位移反馈,这导致了AD转换引起的明显的时间延迟。这类系统的无限维性给传统控制方法无法直接应用的纳米定位控制提出了新的挑战。本文讨论了纳米定位阶段的时滞模型,并通过实验进一步部署了一种参数识别方法来确定模型的时滞和其他参数。利用Pade展开逼近时滞块,提出了一种鲁棒的H∞控制设计方法。在一个压电驱动的纳米定位平台上进行了实时实验,实验结果表明,该控制设计具有高精度运动、对模型不确定性的鲁棒性以及滞回补偿能力,显著优于传统的PI控制方法。
{"title":"H∞ control for piezo-actuated nanopositioning stages with time delays","authors":"Zhiming Zhang, P. Yan","doi":"10.1109/3M-NANO.2017.8286292","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286292","url":null,"abstract":"Many piezo-driven nanopositioning systems employ ultra high resolution capacitive sensors for displacement feedback, which results in significant time delays induced by AD conversion. The infinite dimensionality of such systems poses new challenges for nanopositioning control, where traditional control methods can not be applied directly. In this paper, a model with time delay on a nanopositioning stage is discussed, and a parameter identification method is further deployed using experiments to determine the time delay and other model parameters. A robust H∞ control design approach is also developed by using Pade expansion to approximate the time delay block. Real time experiments with the proposed control design are conducted on a piezo-actuated nanopositioning stage, where high precision motions, robustness against model uncertainties, as well as hysteresis compensation capability, are demonstrated, which significantly outperforms traditional PI control approach.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"84 1","pages":"224-228"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82065489","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
An overview on design of homebuilt micro-contact transfer printing machine with easy access to one micron patterning resolution 易于获得1微米图案分辨率的自制微接触转移印花机的设计概述
Yongqiang Deng, Erwei Shang, Yu Liu, Weilian Gao, Yanqiu Chen, C. Bao, Peng Yan, Jin Jiang
A high-precision micro contact transfer printing machine, utilizing cantilever based force feedback control, is homebuilt for a general function in this work. It owns an agile access to control the contact force between the substrate and the printing stamp. The force is on-line processed by a micro controller unit carrying a P (proportional) — controller. The sample stage is installed on the horizontal axis so that the stamp could move from the ink position to the sample position. A real-time image of the press-down progress is shown on the operation interface, running on a personal computer. The printer could be implemented in printing electronics. With the resolution of 0.01N, the force between the stamp and the sample could be loaded precisely and the whole transfer printing process is visible thus it provides a way to take the force under consideration while investigating the mechanism of the transfer printer. Final demonstration on printing of a metallic array with resolution down to 1 micron has been in success.
利用悬臂式力反馈控制的高精度微接触转移印花机是为这项工作的一般功能而自制的。它有一个灵活的通道来控制承印物和印件之间的接触力。该力由带有P(比例)控制器的微控制器在线处理。样品台安装在水平轴上,使印章可以从墨水位置移动到样品位置。在个人电脑上运行的操作界面上显示了按下过程的实时图像。该打印机可应用于印刷电子领域。在0.01N的分辨率下,可以精确地加载邮票与样品之间的力,并且可以看到整个转移打印过程,从而为研究转移打印机的机理提供了一种考虑力的方法。打印分辨率低至1微米的金属阵列的最终演示已经成功。
{"title":"An overview on design of homebuilt micro-contact transfer printing machine with easy access to one micron patterning resolution","authors":"Yongqiang Deng, Erwei Shang, Yu Liu, Weilian Gao, Yanqiu Chen, C. Bao, Peng Yan, Jin Jiang","doi":"10.1109/3M-NANO.2017.8286322","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286322","url":null,"abstract":"A high-precision micro contact transfer printing machine, utilizing cantilever based force feedback control, is homebuilt for a general function in this work. It owns an agile access to control the contact force between the substrate and the printing stamp. The force is on-line processed by a micro controller unit carrying a P (proportional) — controller. The sample stage is installed on the horizontal axis so that the stamp could move from the ink position to the sample position. A real-time image of the press-down progress is shown on the operation interface, running on a personal computer. The printer could be implemented in printing electronics. With the resolution of 0.01N, the force between the stamp and the sample could be loaded precisely and the whole transfer printing process is visible thus it provides a way to take the force under consideration while investigating the mechanism of the transfer printer. Final demonstration on printing of a metallic array with resolution down to 1 micron has been in success.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"28 4 1","pages":"242-245"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91281842","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
MEMS electrostatic energy harvesting device with spray coated electret 带有喷涂驻极体的MEMS静电能量收集装置
Anxin Luo, Yixin Xu, Siyan Chen, Hanning Dong, Yulong Zhang, Fei Wang
This paper presents the design and measurement of electrostatic energy harvesting. A spray coated electret based electrostatic energy harvester with out-of-plane gap closing scheme is fabricated using advanced MEMS technology. The size of this device is 13×18 mm2. With the matched resistance of 21 MΩ, an output power of 12 μW is harvested when the resonant frequency is 154 Hz under the acceleration of 28.5 m/s2. The thermal stability of this device is tested on 100 °C, decent power can be output after 34 hours.
本文介绍了静电能量收集的设计与测量。采用先进的微机电系统(MEMS)技术,研制了一种具有面外闭合方案的喷涂驻极体静电能量采集器。该设备的尺寸为13×18 mm2。匹配电阻为21 MΩ时,在28.5 m/s2加速度下,谐振频率为154 Hz,输出功率为12 μW。本装置在100℃的温度下进行热稳定性测试,34小时后可输出良好的功率。
{"title":"MEMS electrostatic energy harvesting device with spray coated electret","authors":"Anxin Luo, Yixin Xu, Siyan Chen, Hanning Dong, Yulong Zhang, Fei Wang","doi":"10.1109/3M-NANO.2017.8286330","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286330","url":null,"abstract":"This paper presents the design and measurement of electrostatic energy harvesting. A spray coated electret based electrostatic energy harvester with out-of-plane gap closing scheme is fabricated using advanced MEMS technology. The size of this device is 13×18 mm2. With the matched resistance of 21 MΩ, an output power of 12 μW is harvested when the resonant frequency is 154 Hz under the acceleration of 28.5 m/s2. The thermal stability of this device is tested on 100 °C, decent power can be output after 34 hours.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"2018 1","pages":"134-137"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83485745","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Construction of superhydrophobic surfaces by sol-gel techniques 溶胶-凝胶技术构建超疏水表面
Liang Gu, Yanyan Wang, Chengyun Xu, Feng Zhang, Zhuhui Wu, Xiaoxing Zhang, Zhenwu Shi, C. Peng
In this work, SÌO2 sol and 1H, 1H, 2H, 2H-perfluorodecylsilane are mixed in a certain proportion by ultrasonic to obtain modified SiO2 sol and gel. A superhydrophobic coating with a contact angle of 160° and a slide angle of less than 5° was constructed by spin coating on a glass substrate. The sol-gel techniques we used is simple and inexpensive, and the as-constructed superhydrophobic coatings are relatively uniform. In addition, by controlling the number of spin coating, the durability of the coating can be effectively enhanced. It is believed that this technique can hold a great potential in superhydrophobic surface fabrication.
本工作将SÌO2溶胶与1H、1H、2H、2H-全氟十二烷基硅烷按一定比例超声混合,得到改性SiO2溶胶和凝胶。在玻璃基板上采用自旋镀膜的方法制备了接触角为160°、滑动角小于5°的超疏水涂层。采用溶胶-凝胶技术制备的超疏水涂层结构简单,成本低廉,且制备的超疏水涂层相对均匀。另外,通过控制旋涂次数,可以有效地提高涂层的耐久性。认为该技术在超疏水表面制造中具有很大的潜力。
{"title":"Construction of superhydrophobic surfaces by sol-gel techniques","authors":"Liang Gu, Yanyan Wang, Chengyun Xu, Feng Zhang, Zhuhui Wu, Xiaoxing Zhang, Zhenwu Shi, C. Peng","doi":"10.1109/3M-NANO.2017.8286295","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286295","url":null,"abstract":"In this work, SÌO2 sol and 1H, 1H, 2H, 2H-perfluorodecylsilane are mixed in a certain proportion by ultrasonic to obtain modified SiO2 sol and gel. A superhydrophobic coating with a contact angle of 160° and a slide angle of less than 5° was constructed by spin coating on a glass substrate. The sol-gel techniques we used is simple and inexpensive, and the as-constructed superhydrophobic coatings are relatively uniform. In addition, by controlling the number of spin coating, the durability of the coating can be effectively enhanced. It is believed that this technique can hold a great potential in superhydrophobic surface fabrication.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"18 1","pages":"156-160"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85645309","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
期刊
2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1