In order to support the third generation DNA sequencing technique, a double layers nanopore consisting of silicon nitride (Si3N4) and graphene is fabricated in this paper. Firstly, high yield Si3N4 nanofilm chips were manufactured successfully after SißNt deposition, etching and release process. Then, focused ion beam (FIB) was used to manufacture SißNi nanopore on Si3N4 nanofilm chips with optimized process. The graphene sheet was synthesized with chemical vapor deposition (CVD) method and transferred onto the Si3N4 membrane milling area. We use transmission electron microscope (TEM) to fabricate the nanopore in the graphene membrane above the center of the Si3N4 nanopore. The diameter of SißNt layer was characterized to be 28 nm and the diameter of graphene nanopore was 4 nm which is fabricated by FIB and electron beam respectively. This method provides a useful tool to nanopore-based DNA sequence.
{"title":"Double layer nanopore fabricated by FIB and TEM","authors":"Haojie Yang, Wei Si, Jingjie Sha, Yunfei Chen, Xiao Xie, Anping Ji","doi":"10.1109/3M-NANO.2017.8286300","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286300","url":null,"abstract":"In order to support the third generation DNA sequencing technique, a double layers nanopore consisting of silicon nitride (Si<inf>3</inf>N<inf>4</inf>) and graphene is fabricated in this paper. Firstly, high yield Si<inf>3</inf>N<inf>4</inf> nanofilm chips were manufactured successfully after SißNt deposition, etching and release process. Then, focused ion beam (FIB) was used to manufacture SißNi nanopore on Si<inf>3</inf>N<inf>4</inf> nanofilm chips with optimized process. The graphene sheet was synthesized with chemical vapor deposition (CVD) method and transferred onto the Si<inf>3</inf>N<inf>4</inf> membrane milling area. We use transmission electron microscope (TEM) to fabricate the nanopore in the graphene membrane above the center of the Si<inf>3</inf>N<inf>4</inf> nanopore. The diameter of SißNt layer was characterized to be 28 nm and the diameter of graphene nanopore was 4 nm which is fabricated by FIB and electron beam respectively. This method provides a useful tool to nanopore-based DNA sequence.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"116 1","pages":"274-277"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80863533","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper presents a method for the manipulation of magnetic nanoparticles by optically induced dielectrophoresis (ODEP) device that can realize the transportation and convergence of nanoparticles. ODEP can be realized with a sandwich structure of three layers including the photoconductive layer, the liquid layer with the sample and the indium tin oxide electrode (ITO) layer. In this work, magnetic nanoparticles with the diameter of 10–100nm were successfully manipulated by positive dielectrophoresis force. The solution with magnetic nanoparticles on a mica substrate placed in the sandwich structure was dried in the air and imaged by atomic force microscope (AFM). The AFM images showed that the magnetic nanoparticles were converged in the illumination area. This method can be used to manipulate magnetic nanoparticles.
{"title":"Manipulation of magnetic nanoparticles by optically induced dielectrophoresis","authors":"Ying Wang, Feifei Wang, Tingting Huang, Fenfen Guo, Ying Xie, Zhengxun Song, Jinyun Liu, Zuobin Wang, Yihui Wang","doi":"10.1109/3M-NANO.2017.8286334","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286334","url":null,"abstract":"This paper presents a method for the manipulation of magnetic nanoparticles by optically induced dielectrophoresis (ODEP) device that can realize the transportation and convergence of nanoparticles. ODEP can be realized with a sandwich structure of three layers including the photoconductive layer, the liquid layer with the sample and the indium tin oxide electrode (ITO) layer. In this work, magnetic nanoparticles with the diameter of 10–100nm were successfully manipulated by positive dielectrophoresis force. The solution with magnetic nanoparticles on a mica substrate placed in the sandwich structure was dried in the air and imaged by atomic force microscope (AFM). The AFM images showed that the magnetic nanoparticles were converged in the illumination area. This method can be used to manipulate magnetic nanoparticles.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"55 1","pages":"325-328"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83016477","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286259
Jiajing Zhu, Chengjuan Yang, Fujun Wang, Yanling Tian, Xianping Liu
In recent years, the fabrication of hydrophobic surface has become a research hotspot. In this paper, three different patterns were fabricated successfully on the silicon wafers by lithography technology and the effects of dimension and interval parameters on surface wettability were the highlights in this study. Due to the different structural features, the overall average of linear pattern's contact angles were less than the overall average of grid pattern's contact angles and dot pattern's contact angles. What's more, the dimension parameters played a more important role than the interval parameters on the surface wettability. The smaller dimension of microstructure obviously preferred to have higher contact angle with better surface hydrophobic performance, especially when the size is less than 100μm. When the dimension of microstructure was 60μm, the contact angle were all larger than 90°, and some of them even reached the super-hydrophobic surface (larger than 150°).
{"title":"Lithography-induced wettability changes of silicon","authors":"Jiajing Zhu, Chengjuan Yang, Fujun Wang, Yanling Tian, Xianping Liu","doi":"10.1109/3M-NANO.2017.8286259","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286259","url":null,"abstract":"In recent years, the fabrication of hydrophobic surface has become a research hotspot. In this paper, three different patterns were fabricated successfully on the silicon wafers by lithography technology and the effects of dimension and interval parameters on surface wettability were the highlights in this study. Due to the different structural features, the overall average of linear pattern's contact angles were less than the overall average of grid pattern's contact angles and dot pattern's contact angles. What's more, the dimension parameters played a more important role than the interval parameters on the surface wettability. The smaller dimension of microstructure obviously preferred to have higher contact angle with better surface hydrophobic performance, especially when the size is less than 100μm. When the dimension of microstructure was 60μm, the contact angle were all larger than 90°, and some of them even reached the super-hydrophobic surface (larger than 150°).","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"139 1","pages":"69-73"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87544717","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286288
Xianbin He, Liangyu Cui, K. Cai, Yanling Tian, Xianping Liu
Atomic force microscopy (AFM) is a useful tool in nanoscale measurement. However, conventional AFM suffers from slow scan speed, limiting the use for biological detection or nanofabrication, due to the limited bandwidth of AFM components. In which the resonant frequency of the AFM scanner is usually too low to achieve high-speed scanning. In this paper, a parallel kinematic piezoelectric actuator (PZT) AFM scanner is designed to achieve high-speed atomic force microscopy (HS-AFM) scanning. After that, finite element analysis (FEA) is adopted to characterize the scanner. Finally, images of standard gratings obtained at 25 Hz with our home-made AFM system is presented after calibration and motion coupling compensation.
{"title":"A parallel kinematic scanner designed for high-speed atomic force microscopy","authors":"Xianbin He, Liangyu Cui, K. Cai, Yanling Tian, Xianping Liu","doi":"10.1109/3M-NANO.2017.8286288","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286288","url":null,"abstract":"Atomic force microscopy (AFM) is a useful tool in nanoscale measurement. However, conventional AFM suffers from slow scan speed, limiting the use for biological detection or nanofabrication, due to the limited bandwidth of AFM components. In which the resonant frequency of the AFM scanner is usually too low to achieve high-speed scanning. In this paper, a parallel kinematic piezoelectric actuator (PZT) AFM scanner is designed to achieve high-speed atomic force microscopy (HS-AFM) scanning. After that, finite element analysis (FEA) is adopted to characterize the scanner. Finally, images of standard gratings obtained at 25 Hz with our home-made AFM system is presented after calibration and motion coupling compensation.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"282 1","pages":"46-49"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86739949","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286283
C. Liang, Fujun Wang, Yanling Tian, Dawei Zhang
In high precision micro-manipulation task, precision angle adjustment is very important, which directly affects the quality of micro-manipulation. In this paper a novel 2-DOF (degree of freedom) rotation platform driven by two piezoelectric (PZT) actuators is designed to realize precision angle adjustment. The rotation platform has compact flexure-based mechanical structure and light weight. The rotation decoupling in X-and Y-axes are realized through the Hook joint. In order to obtain large range rotational angle, bridge-type mechanism is utilized in the 2-DOF rotation platform. An analytical model for rotational angle and input stiffness calculation is established. The influences of key parameters on the rotational angle as well as input stiffness of the rotation platform are analyzed. Finite element analysis (FEA) is conducted to evaluate the analytical model. The results of FEA fit the analytical model well and show the rotation platform exhibits good performance.
{"title":"Design and modeling of a 2-DOF decoupled rotation platform for micro-manipulation","authors":"C. Liang, Fujun Wang, Yanling Tian, Dawei Zhang","doi":"10.1109/3M-NANO.2017.8286283","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286283","url":null,"abstract":"In high precision micro-manipulation task, precision angle adjustment is very important, which directly affects the quality of micro-manipulation. In this paper a novel 2-DOF (degree of freedom) rotation platform driven by two piezoelectric (PZT) actuators is designed to realize precision angle adjustment. The rotation platform has compact flexure-based mechanical structure and light weight. The rotation decoupling in X-and Y-axes are realized through the Hook joint. In order to obtain large range rotational angle, bridge-type mechanism is utilized in the 2-DOF rotation platform. An analytical model for rotational angle and input stiffness calculation is established. The influences of key parameters on the rotational angle as well as input stiffness of the rotation platform are analyzed. Finite element analysis (FEA) is conducted to evaluate the analytical model. The results of FEA fit the analytical model well and show the rotation platform exhibits good performance.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"1 1","pages":"7-12"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87762715","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286277
M. Afzal, S. Tayyaba, Fazal-e-Aleem, M. Ashraf, M. Khalid Hossain, N. Afzulpurkar
This research work presents the simulation and analysis of blood flow in tortuous veins. Three different sized nano channels like spiral, u-shape and curvilinear have been simulated using ANSYS FLUENT. The radius of 200 nm has been considered for all channels during simulation. Flow rate and velocity of these channels have been determined. For spiral, U-shape and curvilinear channels, the flow rate and velocity of 236 pL/s and 18.73 cm/s, 245 pL/s and 19.45 cm/s and 248.8 pL/s and 19.75 cm/s have been observed respectively.
{"title":"Fluidic simulation and analysis of spiral, U-shape and curvilinear nano channels for biomedical application","authors":"M. Afzal, S. Tayyaba, Fazal-e-Aleem, M. Ashraf, M. Khalid Hossain, N. Afzulpurkar","doi":"10.1109/3M-NANO.2017.8286277","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286277","url":null,"abstract":"This research work presents the simulation and analysis of blood flow in tortuous veins. Three different sized nano channels like spiral, u-shape and curvilinear have been simulated using ANSYS FLUENT. The radius of 200 nm has been considered for all channels during simulation. Flow rate and velocity of these channels have been determined. For spiral, U-shape and curvilinear channels, the flow rate and velocity of 236 pL/s and 18.73 cm/s, 245 pL/s and 19.45 cm/s and 248.8 pL/s and 19.75 cm/s have been observed respectively.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"1 1","pages":"190-194"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90976489","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286313
Jinkai Xu, Xuefeng Li, Jingjing Liu, Huadong Yu
The surface roughness of the hydrophobic titanium alloy was obtained by using the electric spark wire cutting (Ti6Al4V) technology. The surface of the titanium alloy was measured and characterized by means of ultra depth of field microscopy, scanning electron microscopy and contact angle measurement. The pulse width, the number of power transistors (peak current) and feed speed parameters were optimized by orthogonal experiment, and the influence of these parameters on the wettability of Ti6Al4V surface was discussed. The results show that when the pulse width is 32μs, the number of the power tube is 4, the feed rate is 50 μm/s, the contact angle of Ti6Al4V is preferably 142 degrees.
{"title":"Orthogonal experiment on the preparation of hydrophobic Ti6Al4V surface by WEDM","authors":"Jinkai Xu, Xuefeng Li, Jingjing Liu, Huadong Yu","doi":"10.1109/3M-NANO.2017.8286313","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286313","url":null,"abstract":"The surface roughness of the hydrophobic titanium alloy was obtained by using the electric spark wire cutting (Ti6Al4V) technology. The surface of the titanium alloy was measured and characterized by means of ultra depth of field microscopy, scanning electron microscopy and contact angle measurement. The pulse width, the number of power transistors (peak current) and feed speed parameters were optimized by orthogonal experiment, and the influence of these parameters on the wettability of Ti6Al4V surface was discussed. The results show that when the pulse width is 32μs, the number of the power tube is 4, the feed rate is 50 μm/s, the contact angle of Ti6Al4V is preferably 142 degrees.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"70 1","pages":"165-169"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79175160","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286292
Zhiming Zhang, P. Yan
Many piezo-driven nanopositioning systems employ ultra high resolution capacitive sensors for displacement feedback, which results in significant time delays induced by AD conversion. The infinite dimensionality of such systems poses new challenges for nanopositioning control, where traditional control methods can not be applied directly. In this paper, a model with time delay on a nanopositioning stage is discussed, and a parameter identification method is further deployed using experiments to determine the time delay and other model parameters. A robust H∞ control design approach is also developed by using Pade expansion to approximate the time delay block. Real time experiments with the proposed control design are conducted on a piezo-actuated nanopositioning stage, where high precision motions, robustness against model uncertainties, as well as hysteresis compensation capability, are demonstrated, which significantly outperforms traditional PI control approach.
{"title":"H∞ control for piezo-actuated nanopositioning stages with time delays","authors":"Zhiming Zhang, P. Yan","doi":"10.1109/3M-NANO.2017.8286292","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286292","url":null,"abstract":"Many piezo-driven nanopositioning systems employ ultra high resolution capacitive sensors for displacement feedback, which results in significant time delays induced by AD conversion. The infinite dimensionality of such systems poses new challenges for nanopositioning control, where traditional control methods can not be applied directly. In this paper, a model with time delay on a nanopositioning stage is discussed, and a parameter identification method is further deployed using experiments to determine the time delay and other model parameters. A robust H∞ control design approach is also developed by using Pade expansion to approximate the time delay block. Real time experiments with the proposed control design are conducted on a piezo-actuated nanopositioning stage, where high precision motions, robustness against model uncertainties, as well as hysteresis compensation capability, are demonstrated, which significantly outperforms traditional PI control approach.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"84 1","pages":"224-228"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82065489","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286333
Yingmin Qu, Jinyun Liu, Guoliang Wang, Zhengxun Song, Zuobin Wang
In this study, an AFM tip was used to penetrate the human colon cancer cells (SW480) in the culture medium containing pEGFP-N1-TRAIL plasmids. The trail plasmids encoded with the enhanced green fluorescent protein (EGFP) were moved into the SW480 cells through membrane holes created by the AFM probe. Following the penetration, the culture medium was changed into the RPMI1640 medium supplemented with 10% of fetal bovine serum and incubated for 24h. The expression of PEGFP-N1-TRAIL in SW480 cells was then observed by inverted fluorescence microscope. The experiment results indicate that the AFM tip can be used to penetrate the membranes of targeted cells individually.
{"title":"Controlled manipulation of TRAIL into single human colon cancer cells using atomic force microscope","authors":"Yingmin Qu, Jinyun Liu, Guoliang Wang, Zhengxun Song, Zuobin Wang","doi":"10.1109/3M-NANO.2017.8286333","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286333","url":null,"abstract":"In this study, an AFM tip was used to penetrate the human colon cancer cells (SW480) in the culture medium containing pEGFP-N1-TRAIL plasmids. The trail plasmids encoded with the enhanced green fluorescent protein (EGFP) were moved into the SW480 cells through membrane holes created by the AFM probe. Following the penetration, the culture medium was changed into the RPMI1640 medium supplemented with 10% of fetal bovine serum and incubated for 24h. The expression of PEGFP-N1-TRAIL in SW480 cells was then observed by inverted fluorescence microscope. The experiment results indicate that the AFM tip can be used to penetrate the membranes of targeted cells individually.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"24 1","pages":"345-348"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85672869","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In this work, SÌO2 sol and 1H, 1H, 2H, 2H-perfluorodecylsilane are mixed in a certain proportion by ultrasonic to obtain modified SiO2 sol and gel. A superhydrophobic coating with a contact angle of 160° and a slide angle of less than 5° was constructed by spin coating on a glass substrate. The sol-gel techniques we used is simple and inexpensive, and the as-constructed superhydrophobic coatings are relatively uniform. In addition, by controlling the number of spin coating, the durability of the coating can be effectively enhanced. It is believed that this technique can hold a great potential in superhydrophobic surface fabrication.
{"title":"Construction of superhydrophobic surfaces by sol-gel techniques","authors":"Liang Gu, Yanyan Wang, Chengyun Xu, Feng Zhang, Zhuhui Wu, Xiaoxing Zhang, Zhenwu Shi, C. Peng","doi":"10.1109/3M-NANO.2017.8286295","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286295","url":null,"abstract":"In this work, SÌO2 sol and 1H, 1H, 2H, 2H-perfluorodecylsilane are mixed in a certain proportion by ultrasonic to obtain modified SiO2 sol and gel. A superhydrophobic coating with a contact angle of 160° and a slide angle of less than 5° was constructed by spin coating on a glass substrate. The sol-gel techniques we used is simple and inexpensive, and the as-constructed superhydrophobic coatings are relatively uniform. In addition, by controlling the number of spin coating, the durability of the coating can be effectively enhanced. It is believed that this technique can hold a great potential in superhydrophobic surface fabrication.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"18 1","pages":"156-160"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85645309","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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