Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286266
Tianyao Shen, B. Shirinzadeh, Y. Zhong, Julian Smith
Single cell microinjection is widely used in biological sciences, especially in genetic engineering and cytopathology. To investigate mechanical responses of the adherent cell in microinjection, a general geometrical description of adherent cells in microinjection is proposed. Based on finite strain theory in isotropic hyperelasticity and minimal potential energy principle, a hyperelastic model of the adherent cell is developed. Factors affecting the interaction force and the stress distribution in the adherent cell penetration are revealed and analyzed. The force-deformation relationship obtained in the proposed model shows high similarity with classical Hertz model, while more detailed mechanical behaviours of the adherent cell in microinjection can be discovered from the proposed model.
{"title":"A hyperelastic model for mechanical responses of adherent cells in microinjection","authors":"Tianyao Shen, B. Shirinzadeh, Y. Zhong, Julian Smith","doi":"10.1109/3M-NANO.2017.8286266","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286266","url":null,"abstract":"Single cell microinjection is widely used in biological sciences, especially in genetic engineering and cytopathology. To investigate mechanical responses of the adherent cell in microinjection, a general geometrical description of adherent cells in microinjection is proposed. Based on finite strain theory in isotropic hyperelasticity and minimal potential energy principle, a hyperelastic model of the adherent cell is developed. Factors affecting the interaction force and the stress distribution in the adherent cell penetration are revealed and analyzed. The force-deformation relationship obtained in the proposed model shows high similarity with classical Hertz model, while more detailed mechanical behaviours of the adherent cell in microinjection can be discovered from the proposed model.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"69 1","pages":"289-294"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84929903","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286279
Biao Zhou, Chen-Yi Su, Biao Shi, Yunjiao Wang, Leyong Yu, Shuanglong Feng, Deqiang Wang
Single crystal WS2 film has been paid much more attentions due to its special optical-electrical performance and potential application in the field of biosensor and photodetector in recent years. In this work, we focused on the growth of single crystal WS2 and explored the effect of the position of sulfur and carrier gas flow rate on the nucleation density systematically. The results indicated that the nucleation density of WS2 varies obviously correspond to sulfur position and gas flow, the reasons of the variety on the nucleation density was investigated. Meanwhile, granular and massive WS2 was characterized by an optical microscope, atomic force microscope and Raman spectra.
{"title":"Growth of single crystal WS2 thin films via atmospheric pressure CVD","authors":"Biao Zhou, Chen-Yi Su, Biao Shi, Yunjiao Wang, Leyong Yu, Shuanglong Feng, Deqiang Wang","doi":"10.1109/3M-NANO.2017.8286279","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286279","url":null,"abstract":"Single crystal WS2 film has been paid much more attentions due to its special optical-electrical performance and potential application in the field of biosensor and photodetector in recent years. In this work, we focused on the growth of single crystal WS2 and explored the effect of the position of sulfur and carrier gas flow rate on the nucleation density systematically. The results indicated that the nucleation density of WS2 varies obviously correspond to sulfur position and gas flow, the reasons of the variety on the nucleation density was investigated. Meanwhile, granular and massive WS2 was characterized by an optical microscope, atomic force microscope and Raman spectra.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"108 1","pages":"379-383"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88133548","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Based on the electromagnetic actuator, a novel mechanical system is developed for the measurement of micro/nano newton force, as well as the deformation of the suspension mechanism. The system mainly includes the electromagnetic actuator, flexible suspension mechanism and displacement sensor. A null position measurement method for the suspension mechanism is introduced. The electromagnetic force is theoretically modeled and simulated in ANSYS Maxwell software to optimize the position of the magnet. And then, the suspension mechanism is simulated by Finite Element Analysis (FEA). According to the experimental results, the developed system has a current resolution 1mA, electromagnetic force conversion rate 400μN/mA, the stiffness 27.5N/m.
{"title":"A novel electromagnetic force method for micro/nano newton force measurement","authors":"Chongkai Zhou, Yanling Tian, Fujun Wang, Zhiyong Guo, Dawei Zhang","doi":"10.1109/3M-NANO.2017.8286287","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286287","url":null,"abstract":"Based on the electromagnetic actuator, a novel mechanical system is developed for the measurement of micro/nano newton force, as well as the deformation of the suspension mechanism. The system mainly includes the electromagnetic actuator, flexible suspension mechanism and displacement sensor. A null position measurement method for the suspension mechanism is introduced. The electromagnetic force is theoretically modeled and simulated in ANSYS Maxwell software to optimize the position of the magnet. And then, the suspension mechanism is simulated by Finite Element Analysis (FEA). According to the experimental results, the developed system has a current resolution 1mA, electromagnetic force conversion rate 400μN/mA, the stiffness 27.5N/m.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"24 1","pages":"40-45"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88969709","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286274
Hairong Wang, M. Wang, Xiaowei Chen, B. Han
An integrated micro H2 sensor chip with low power consumption is presented. A pair of interdigitated sensing electrodes, sensing layer and heating electrodes surrounding them were designed on the same layer. To realize low power consumption, the silicon substrate with high thermal conduction was released by wet etching and the 1.3#x03BC;m thick membrane with excellent thermal insulation which consists of Si3N4/SiO2/Si3N4/SiO2 four films, was reserved to support the above structure. Annealing was carried out to reduce the stresses of the films. The stacked TiO2/SnO2 composite materials were used to detect H2 and they had six layers consisting of deposited SnO2 and TiO2 through RF magnetron sputtering in turn. The preparation process of the composite materials was combined with the conventional MEMS process to realize mass production of the wafer-level sensor chips with good consistency. The H2 sensor can work steadily for H2 detection (100–900ppm) at 244 °C with low power consumption as 36mW.
{"title":"The micro hydrogen sensor chip with low power consumption","authors":"Hairong Wang, M. Wang, Xiaowei Chen, B. Han","doi":"10.1109/3M-NANO.2017.8286274","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286274","url":null,"abstract":"An integrated micro H2 sensor chip with low power consumption is presented. A pair of interdigitated sensing electrodes, sensing layer and heating electrodes surrounding them were designed on the same layer. To realize low power consumption, the silicon substrate with high thermal conduction was released by wet etching and the 1.3#x03BC;m thick membrane with excellent thermal insulation which consists of Si3N4/SiO2/Si3N4/SiO2 four films, was reserved to support the above structure. Annealing was carried out to reduce the stresses of the films. The stacked TiO2/SnO2 composite materials were used to detect H2 and they had six layers consisting of deposited SnO2 and TiO2 through RF magnetron sputtering in turn. The preparation process of the composite materials was combined with the conventional MEMS process to realize mass production of the wafer-level sensor chips with good consistency. The H2 sensor can work steadily for H2 detection (100–900ppm) at 244 °C with low power consumption as 36mW.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"92 1","pages":"264-268"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75271513","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286294
Qifan Zhu, Zhiying Liu, Yuegang Fu, Chun-Jie Hao
Based on assumption of the visual system characteristics of the unidirectional microvilli array, this paper simulated the bionic model. The unidirectional microvilli array is simulated and it is simplified as cylinders, which is composed of material with index of refraction of n2 periodically arranged and is surrounded by medium with index of refraction of n1. Then, the bionic structure is equivalent to numbers of binary grating layers with different periods and thicknesses. Based on the effective medium theory (EMT) and transfer matrix method, this paper analyzed the relation between the transmittance of s-and p-modes and wavelengths in visible spectrum (400nm-700nm) for this bionic model. The result shows that the bionic model can work as a polarizer in two different narrow spectral ranges, and in two orthogonal polarization direction and can achieve the function of narrow-band and polarization cut-off filtering. Changing the thicknesses of the binary grating layers, the spectrum band of two spectral ranges would be different.
{"title":"Narrow-band and polarization cut-offfiltering based on the bionic structure of unidirectional microvilli array","authors":"Qifan Zhu, Zhiying Liu, Yuegang Fu, Chun-Jie Hao","doi":"10.1109/3M-NANO.2017.8286294","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286294","url":null,"abstract":"Based on assumption of the visual system characteristics of the unidirectional microvilli array, this paper simulated the bionic model. The unidirectional microvilli array is simulated and it is simplified as cylinders, which is composed of material with index of refraction of n2 periodically arranged and is surrounded by medium with index of refraction of n1. Then, the bionic structure is equivalent to numbers of binary grating layers with different periods and thicknesses. Based on the effective medium theory (EMT) and transfer matrix method, this paper analyzed the relation between the transmittance of s-and p-modes and wavelengths in visible spectrum (400nm-700nm) for this bionic model. The result shows that the bionic model can work as a polarizer in two different narrow spectral ranges, and in two orthogonal polarization direction and can achieve the function of narrow-band and polarization cut-off filtering. Changing the thicknesses of the binary grating layers, the spectrum band of two spectral ranges would be different.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"99 1","pages":"199-205"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80671446","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286309
Yanling Wan, Lining Xu, Jinkai Xu, Jing Li, Yonghua Wang
Aluminum alloy surface was machined by nanosecond laser equipment, and the effect of different processing parameters on the microstructure of aluminum alloy surface was studied. The surface microstructure was observed by scanning electron microscopy and confocal microscopy. Surface hydrophobicity was evaluated with deionized water. The experiment results show that, by controlling the machining parameters, the surface microstructure morphology can be designed and controlled, at the same time, the influence of processing parameters on microstructure depth and width are also determined.
{"title":"Fabrication of size-controlled microstructures of Al alloy surface based on nanosecond laser","authors":"Yanling Wan, Lining Xu, Jinkai Xu, Jing Li, Yonghua Wang","doi":"10.1109/3M-NANO.2017.8286309","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286309","url":null,"abstract":"Aluminum alloy surface was machined by nanosecond laser equipment, and the effect of different processing parameters on the microstructure of aluminum alloy surface was studied. The surface microstructure was observed by scanning electron microscopy and confocal microscopy. Surface hydrophobicity was evaluated with deionized water. The experiment results show that, by controlling the machining parameters, the surface microstructure morphology can be designed and controlled, at the same time, the influence of processing parameters on microstructure depth and width are also determined.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"29 1","pages":"161-164"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75772936","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Nanopores promise wide applications in biosensing, ion-sieve and supercapacitors, ect. However, when the pore diameter approaches nanoscale, ion dynamic properties would deviate from the continuum analysis. In this paper, we reported that ion mobility in a nanopore depended on the surface hydrophobicity of the nanopore material through molecular dynamics (MD) simulation methods. The surface hydrophobicity was regulated by changing the polarity of the Si-N bond and the Van der Waals coefficient. For the nonpolar bond case, the solid-liquid hydrophobic force left an area as expressway for ion and water transport. The ion velocity within 3 Â of the surface was even faster than that in the central diffusion layer. In contrast, for the polar bond case, the strong interaction between the surface charges and the counter ions resulted in the formation of the Stern layer where the velocity of ions as well as water molecules sharply deviated from pore center value. Consequently, the average Na+ velocity in the polar bond nanopore was at least 5 times slower than that in non-polar bond nanopore.
{"title":"Anomalous ion transport through hydrophilic and hydrophobic nanopores","authors":"Kun Li, Zhongwu Li, Kabin Lin, Chen Chen, Pinyao He, Jingjie Sha, Yunfei Chen","doi":"10.1109/3M-NANO.2017.8286269","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286269","url":null,"abstract":"Nanopores promise wide applications in biosensing, ion-sieve and supercapacitors, ect. However, when the pore diameter approaches nanoscale, ion dynamic properties would deviate from the continuum analysis. In this paper, we reported that ion mobility in a nanopore depended on the surface hydrophobicity of the nanopore material through molecular dynamics (MD) simulation methods. The surface hydrophobicity was regulated by changing the polarity of the Si-N bond and the Van der Waals coefficient. For the nonpolar bond case, the solid-liquid hydrophobic force left an area as expressway for ion and water transport. The ion velocity within 3 Â of the surface was even faster than that in the central diffusion layer. In contrast, for the polar bond case, the strong interaction between the surface charges and the counter ions resulted in the formation of the Stern layer where the velocity of ions as well as water molecules sharply deviated from pore center value. Consequently, the average Na+ velocity in the polar bond nanopore was at least 5 times slower than that in non-polar bond nanopore.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"63 1","pages":"151-155"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90252722","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In this paper, the milling experiments of the 7075 Aluminum alloy thin wall specimens are carried out. In the dry cutting under the experimental conditions, the hard alloy cutter the use of the 7075 Aluminum alloy milling can get better quality of the thin-walled specimens, machining, cutting and cutting edge burr and the source, the chip adhesion phenomenon, in the selection of cutting speed for variable conditions, with the increase of cutting speed, milling of thin-walled specimen deformation gradually becomes smaller the thin, the specimen surface residual stress gradually increase, in the selection of feed speed conditions within the range of variables, with the increase of feed speed, the 7075 Aluminum alloy milling of thin-walled specimens. The deformation degree increased, thin specimen surface residual stress decreases gradually, in the selection of cutting depth conditions the range of variables, with the increase of cutting depth, the 7075 Aluminum alloy test milling of thin-walled parts is the greater the degree of deformation, thin-walled specimen surface residual stress was gradually decreased, residual stress the hour gradually thin plate specimens deformation amount is small, the milling of thin-walled specimens after deformation is inevitable.
{"title":"Experimental study on cutting characteristics of thin walled structures with weak rigidity","authors":"Qimeng Liu, Jinkai Xu, Huadong Yu, Zhanjiang Yu, Yiquan Li, Yanling Wan, Xianghui Zhang, Zhongxu Lian","doi":"10.1109/3M-NANO.2017.8286327","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286327","url":null,"abstract":"In this paper, the milling experiments of the 7075 Aluminum alloy thin wall specimens are carried out. In the dry cutting under the experimental conditions, the hard alloy cutter the use of the 7075 Aluminum alloy milling can get better quality of the thin-walled specimens, machining, cutting and cutting edge burr and the source, the chip adhesion phenomenon, in the selection of cutting speed for variable conditions, with the increase of cutting speed, milling of thin-walled specimen deformation gradually becomes smaller the thin, the specimen surface residual stress gradually increase, in the selection of feed speed conditions within the range of variables, with the increase of feed speed, the 7075 Aluminum alloy milling of thin-walled specimens. The deformation degree increased, thin specimen surface residual stress decreases gradually, in the selection of cutting depth conditions the range of variables, with the increase of cutting depth, the 7075 Aluminum alloy test milling of thin-walled parts is the greater the degree of deformation, thin-walled specimen surface residual stress was gradually decreased, residual stress the hour gradually thin plate specimens deformation amount is small, the milling of thin-walled specimens after deformation is inevitable.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"38 1","pages":"95-99"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91546456","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286318
Wenxue Wang, Yuechao Wang, B. Liu, Lianqing Liu, Bo Wang
Organisms are composed by cells, and the cells can also reflect the physiology of creatures. The composition of a single cell and its cytoskeletal structure can be reflected by the mechanical properties of the cell. The cellular mechanical properties are correlated to the biological functions of the cell and its physiological activities. Therefore, establishing the mathematical model for the mechanical properties of single cells could provide the foundation for analyzing and regulating the physiological state of cells. In our previous work, we established a dynamical mathematical model with the viscose and elastic properties of single cells as the system parameters of the cellular system. The mathematical model can characterize the stressrelaxation phenomenon of a single cell, which is caused by an atomic force microscope (AFM). However, in this model, the effect of the loading rate of the AFM cantilever was neglected and all the stress-relaxation curves needed to be measured at a constant loading rate, in case that different loading rates would cause errors in the stress-relaxation curves. In this study, we discussed the effect of the loading rate on the measurement of cellular viscoelasticity properties with AFM. We clearly illustrated that the cellular stress-relaxation curves won't be effected by the loading rate of AFM when the loading rate is higher than a threshold. The stress-relaxation curves with the loading rate which is higher than the threshold can be used to extract viscoelasticity parameters more accurately.
{"title":"The effect of loading rate on the measurement of cellular viscoelasticity properties with atomic force microscopy","authors":"Wenxue Wang, Yuechao Wang, B. Liu, Lianqing Liu, Bo Wang","doi":"10.1109/3M-NANO.2017.8286318","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286318","url":null,"abstract":"Organisms are composed by cells, and the cells can also reflect the physiology of creatures. The composition of a single cell and its cytoskeletal structure can be reflected by the mechanical properties of the cell. The cellular mechanical properties are correlated to the biological functions of the cell and its physiological activities. Therefore, establishing the mathematical model for the mechanical properties of single cells could provide the foundation for analyzing and regulating the physiological state of cells. In our previous work, we established a dynamical mathematical model with the viscose and elastic properties of single cells as the system parameters of the cellular system. The mathematical model can characterize the stressrelaxation phenomenon of a single cell, which is caused by an atomic force microscope (AFM). However, in this model, the effect of the loading rate of the AFM cantilever was neglected and all the stress-relaxation curves needed to be measured at a constant loading rate, in case that different loading rates would cause errors in the stress-relaxation curves. In this study, we discussed the effect of the loading rate on the measurement of cellular viscoelasticity properties with AFM. We clearly illustrated that the cellular stress-relaxation curves won't be effected by the loading rate of AFM when the loading rate is higher than a threshold. The stress-relaxation curves with the loading rate which is higher than the threshold can be used to extract viscoelasticity parameters more accurately.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"13 1","pages":"246-249"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87683618","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286296
Xiaozhe Yuan, Yongchun Fang
Atomic force microscopy (AFM) is a powerful tool for measuring the topography and mechanical properties in nano-scale. The topography of the sample can be achieved by contact mode scanning, while the mechanical properties can be investigated with the help of force curve. However the force curve characterizes the mechanical properties of the sample at a certain point. In many cases, it is important to get the elasticity distribution of the entire surface, which means a huge amount of points need to be selected for measuring force curves. It is obvious that this operation is very time-consuming. As generally known, AFM force curve represents the relationship between the piezo scanner displacement in z-axis and the deflection of the cantilever. Thus the topography images consisted of the vertical displacements of the scanner and the deflection images can be combined to investigate some features of the force curve. The deflection set-point is set to be a time-varying value for increasing the range of scanning data. It is assumed that the elasticity is continuous in a small neighborhood of a scanning point, then a Kalman filter is utilized for conducting data fusion in the neighborhood and estimating the elasticity of the sample.
{"title":"A varying set-point AFM scanning method for simultaneous measurement of sample topography and elasticity","authors":"Xiaozhe Yuan, Yongchun Fang","doi":"10.1109/3M-NANO.2017.8286296","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286296","url":null,"abstract":"Atomic force microscopy (AFM) is a powerful tool for measuring the topography and mechanical properties in nano-scale. The topography of the sample can be achieved by contact mode scanning, while the mechanical properties can be investigated with the help of force curve. However the force curve characterizes the mechanical properties of the sample at a certain point. In many cases, it is important to get the elasticity distribution of the entire surface, which means a huge amount of points need to be selected for measuring force curves. It is obvious that this operation is very time-consuming. As generally known, AFM force curve represents the relationship between the piezo scanner displacement in z-axis and the deflection of the cantilever. Thus the topography images consisted of the vertical displacements of the scanner and the deflection images can be combined to investigate some features of the force curve. The deflection set-point is set to be a time-varying value for increasing the range of scanning data. It is assumed that the elasticity is continuous in a small neighborhood of a scanning point, then a Kalman filter is utilized for conducting data fusion in the neighborhood and estimating the elasticity of the sample.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"9 1","pages":"305-310"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86744470","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
扫码关注我们
求助内容：
应助结果提醒方式：