Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286293
Chao Wang, Yongchun Fang
Atomic force microscopy (AFM) has been widely used in various fields due to its excellent performance. Unfortunately the imaging principle of an AFM determines that tip convolution occurs in the scanning process, resulting in image distortion. A model is established to reveal the relationship between the lateral force and the topography of sample surface, and the variation of the lateral force in the tip convolution process is analyzed. On this basis, a method for detecting tip convolution effects based on lateral force analysis is presented. The method uses a specific image to visually represent the distortion areas in the topography image of the sample surface. Experiments show that this method can effectively detect the distortion areas caused by the tip convolution effects in the image.
{"title":"Detection of tip convolution effects based on lateral force analysis","authors":"Chao Wang, Yongchun Fang","doi":"10.1109/3M-NANO.2017.8286293","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286293","url":null,"abstract":"Atomic force microscopy (AFM) has been widely used in various fields due to its excellent performance. Unfortunately the imaging principle of an AFM determines that tip convolution occurs in the scanning process, resulting in image distortion. A model is established to reveal the relationship between the lateral force and the topography of sample surface, and the variation of the lateral force in the tip convolution process is analyzed. On this basis, a method for detecting tip convolution effects based on lateral force analysis is presented. The method uses a specific image to visually represent the distortion areas in the topography image of the sample surface. Experiments show that this method can effectively detect the distortion areas caused by the tip convolution effects in the image.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"18 1","pages":"13-18"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79304083","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286319
Mengjia Cui, Zhen Zhang
This paper proposes a multi-layer compliant XY nanomanipulator. Aiming at achieving a large stroke and compact desktop-size, a spatial redundant constraint module in two layers is proposed to restrict parasitic rotations. In addition, a combined Z-shaped beam and multi-beam flexure module is proposed to realize load bearing, and a double parallelogram beam flexure module is utilized to achieve kinematic decoupling. Within the designed stroke, the stiffness of the manipulator behaves linearly. Numerous FEA simulations are conducted to show that the proposed manipulator is able to achieve ±2 × 2 mm2 operation range, and a good agreement between the theoretical analysis and numerical results.
{"title":"Design and analysis of a large-stroke multi-layer XY compliant nanomanipulator of linear stiffness","authors":"Mengjia Cui, Zhen Zhang","doi":"10.1109/3M-NANO.2017.8286319","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286319","url":null,"abstract":"This paper proposes a multi-layer compliant XY nanomanipulator. Aiming at achieving a large stroke and compact desktop-size, a spatial redundant constraint module in two layers is proposed to restrict parasitic rotations. In addition, a combined Z-shaped beam and multi-beam flexure module is proposed to realize load bearing, and a double parallelogram beam flexure module is utilized to achieve kinematic decoupling. Within the designed stroke, the stiffness of the manipulator behaves linearly. Numerous FEA simulations are conducted to show that the proposed manipulator is able to achieve ±2 × 2 mm2 operation range, and a good agreement between the theoretical analysis and numerical results.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"7 1","pages":"113-118"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81024615","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286321
B. Han, Xiaohui Ning, Q. Meng, Jin Yan, Chenchen Xie, R. Ding, Zuobin Wang
The FAPbBrc perovskite nanoparticles are applied to mix in PVDF polymer for piezoelectric composite nanogenerators. The FAPbBn-PVDF based piezoelectric nanogenerators exhibit maximum piezoelectric outputs reaching over 29.5 V and 6.15 μA/cm2. The improved performance is attributed to the usage of PVDF polymer which working as the major matrix resulting in enhanced stress on the homogeneously distributed piezoelectric FAPbBn nanoparticles. Then the output piezoelectric signals were utilized to charge capacitances which can lighten purchased LEDs. The work demonstrates an effective approach to develop high-performance energy harvesters based on organometal trihalide perovskite materials.
{"title":"High output piezoelectric composite nanogenerators composed of FAPbBr3-PVDF","authors":"B. Han, Xiaohui Ning, Q. Meng, Jin Yan, Chenchen Xie, R. Ding, Zuobin Wang","doi":"10.1109/3M-NANO.2017.8286321","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286321","url":null,"abstract":"The FAPbBrc perovskite nanoparticles are applied to mix in PVDF polymer for piezoelectric composite nanogenerators. The FAPbBn-PVDF based piezoelectric nanogenerators exhibit maximum piezoelectric outputs reaching over 29.5 V and 6.15 μA/cm2. The improved performance is attributed to the usage of PVDF polymer which working as the major matrix resulting in enhanced stress on the homogeneously distributed piezoelectric FAPbBn nanoparticles. Then the output piezoelectric signals were utilized to charge capacitances which can lighten purchased LEDs. The work demonstrates an effective approach to develop high-performance energy harvesters based on organometal trihalide perovskite materials.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"14 1","pages":"371-374"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83291441","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286290
B. Liu, Mi Li, Bo Wang, Lianqing Liu, Fanan Wei
Non-Hodgkin's lymphoma (NHL) is the most common adult hematological cancer. With the advent of combination therapy of chemotherapy and the monoclonal anti-CD20 antibody Rituximab, the substantial advancement in the treatment of B-cell malignancies has been achieved. In the clinical treatment of NHL, however, there are still many patients who are not sensitive to the therapy of rituximab. Hence investigating the interactions between rituximab and lymphoma cells is crucial for us to understand the actions of rituximab and design drugs with better efficacies. Traditional biochemical methods for cell detection require the various pretreatments of the cell, destroying the structures of cells. This paper uses atomic force microscopy (AFM) to label-free characterize the micro/nano physical properties of single lymphoma cells, including cell morphology, cell elasticity, and molecular interactions on the cell surface. The study improved our understanding of the rituximab actions.
{"title":"Detecting the micro/nano physical properties of single lymphoma cells with atomic force microscopy","authors":"B. Liu, Mi Li, Bo Wang, Lianqing Liu, Fanan Wei","doi":"10.1109/3M-NANO.2017.8286290","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286290","url":null,"abstract":"Non-Hodgkin's lymphoma (NHL) is the most common adult hematological cancer. With the advent of combination therapy of chemotherapy and the monoclonal anti-CD20 antibody Rituximab, the substantial advancement in the treatment of B-cell malignancies has been achieved. In the clinical treatment of NHL, however, there are still many patients who are not sensitive to the therapy of rituximab. Hence investigating the interactions between rituximab and lymphoma cells is crucial for us to understand the actions of rituximab and design drugs with better efficacies. Traditional biochemical methods for cell detection require the various pretreatments of the cell, destroying the structures of cells. This paper uses atomic force microscopy (AFM) to label-free characterize the micro/nano physical properties of single lymphoma cells, including cell morphology, cell elasticity, and molecular interactions on the cell surface. The study improved our understanding of the rituximab actions.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"38 1","pages":"250-253"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83371299","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286278
B. Han, Guishan Wu, Hairong Wang, Jiuhong Wang
Gas preconcentrator is critical for many microanalyzer and allows the monitoring of ultra-low concentrations of VOC gas in the sub-ppm level. Especially, it can be used in field test to analyze the low-concentration exhaled VOC gases by improving the gas detection limit for the purpose of noninvasive medical diagnoses. In this paper, a micro metal gas preconcentrator (MGP) was fabricated by using laser etching technology (LET), which is a very powerful means to process more sophisticated and high-quality trenches compared with traditional machining. The preconcentrator chip consists of an array of microchannels that are filled with activeated-car-bon-based sorbent (Carboxen-1000) as the extraction medium. The main structure of chip is made of copper (C11000) because of its good thermal conductivity and small specific heat capacity. Compared with Si substrate, C11000 has better thermal properties, which is advantageous for achieving high concentration factor at relative low power. The copper channel layer is covered with the upper plate of the same material using of vacuum diffusion welding (VDW). At the bottom of the chip the platinum heater is deposited to quickly elevate temperature during its activation and desorption processes. The MGP has flat dimensions of 16 mm × 12.6 mm and a total inner volume about 14.4 μL with no filling the adsorbent granules. The MGP can be connected with GC (Gas chromatography) column and photo ionization detector (PID) to realize ultra-low concentration gas detection.
气体预浓缩器是许多微量分析仪的关键，允许监测超低浓度的挥发性有机化合物气体在ppm以下的水平。特别是可用于现场检测，通过提高气体检测限，对低浓度VOC气体进行分析，达到无创医疗诊断的目的。本文采用激光刻蚀技术(LET)制备了一种微型金属气体预浓缩器(MGP)，与传统的加工工艺相比，它是加工更精细、高质量沟槽的有力手段。预富集芯片由微通道阵列组成，微通道中填充了活化碳基吸附剂(Carboxen-1000)作为萃取介质。芯片的主要结构是铜(C11000)，因为它的导热性好，比热容小。与Si衬底相比，C11000具有更好的热性能，有利于在相对较低的功率下实现较高的集中系数。采用真空扩散焊(VDW)将铜通道层覆盖在相同材料的上板上。在芯片的底部沉积了铂加热器，以便在其激活和解吸过程中快速提高温度。在不填充吸附剂颗粒的情况下，MGP的平面尺寸为16 mm × 12.6 mm，总内积约为14.4 μL。MGP可与GC(气相色谱)柱和光电离检测器(PID)连接，实现超低浓度气体检测。
{"title":"Micro-fabricated packed metal gas preconcentrator for low detection limit exhaled VOC gas measurements","authors":"B. Han, Guishan Wu, Hairong Wang, Jiuhong Wang","doi":"10.1109/3M-NANO.2017.8286278","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286278","url":null,"abstract":"Gas preconcentrator is critical for many microanalyzer and allows the monitoring of ultra-low concentrations of VOC gas in the sub-ppm level. Especially, it can be used in field test to analyze the low-concentration exhaled VOC gases by improving the gas detection limit for the purpose of noninvasive medical diagnoses. In this paper, a micro metal gas preconcentrator (MGP) was fabricated by using laser etching technology (LET), which is a very powerful means to process more sophisticated and high-quality trenches compared with traditional machining. The preconcentrator chip consists of an array of microchannels that are filled with activeated-car-bon-based sorbent (Carboxen-1000) as the extraction medium. The main structure of chip is made of copper (C11000) because of its good thermal conductivity and small specific heat capacity. Compared with Si substrate, C11000 has better thermal properties, which is advantageous for achieving high concentration factor at relative low power. The copper channel layer is covered with the upper plate of the same material using of vacuum diffusion welding (VDW). At the bottom of the chip the platinum heater is deposited to quickly elevate temperature during its activation and desorption processes. The MGP has flat dimensions of 16 mm × 12.6 mm and a total inner volume about 14.4 μL with no filling the adsorbent granules. The MGP can be connected with GC (Gas chromatography) column and photo ionization detector (PID) to realize ultra-low concentration gas detection.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"18 1","pages":"269-273"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89300981","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286325
H. Zou, Wenming Zhang, Wen-Bo Li, G. Meng, Xinsheng Wei, Sen Wang
Impulsive energy is widespread in civil and industrial environment. Energy harvesting from ambient environment is considered as a promising way to replace the conventional batteries for powering wireless autonomous electronic devices. The combination of nonlinear bistable and flextensional mechanisms for impulsive energy harvesting has the advantages of high equivalent piezoelectric constant, high reliability and high sensitivity. The design consists of a cantilever beam with tip magnet and two magnetically coupled flextensional transducers (MCFTs). The coupled dynamical model is provided to describe the electromechanical transition. Experiments and simulations are carried out to evaluate the performances of the harvesters under different impulsive inputs by fingertip. Results verify that the coupled dynamical model can be used to characterize the harvester under impulsive excitation. The magnetically coupled flextensional impulsive energy harvester can work effectively under weak inputs and is reliable and durable under strong inputs.
{"title":"Magnetically coupled flextensional transducer for impulsive energy harvesting","authors":"H. Zou, Wenming Zhang, Wen-Bo Li, G. Meng, Xinsheng Wei, Sen Wang","doi":"10.1109/3M-NANO.2017.8286325","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286325","url":null,"abstract":"Impulsive energy is widespread in civil and industrial environment. Energy harvesting from ambient environment is considered as a promising way to replace the conventional batteries for powering wireless autonomous electronic devices. The combination of nonlinear bistable and flextensional mechanisms for impulsive energy harvesting has the advantages of high equivalent piezoelectric constant, high reliability and high sensitivity. The design consists of a cantilever beam with tip magnet and two magnetically coupled flextensional transducers (MCFTs). The coupled dynamical model is provided to describe the electromechanical transition. Experiments and simulations are carried out to evaluate the performances of the harvesters under different impulsive inputs by fingertip. Results verify that the coupled dynamical model can be used to characterize the harvester under impulsive excitation. The magnetically coupled flextensional impulsive energy harvester can work effectively under weak inputs and is reliable and durable under strong inputs.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"9 1","pages":"138-141"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88461094","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286338
Fenfen Guo, Feifei Wang, Ying Wang, Wenxiao Zhang, Xinyue Wang, Lu Zhao, Zhengxun Song, Zuobin Wang
This paper explores suitable conditions for the imaging of DNA molecules by atomic force microscope (AFM). As a typical biological macro-molecule, DNA with genetic information has attracted extensive attention, which is an important research subject in molecular biology and biomedicine. In this work, 3-Aminopropyl Triethyl Silane (APTES), Ni2+ and Mg2+ were used to modify the surface of mica substrate, and DNA molecules were adhered to the mica surface through the physical interaction of charges. The DNA molecules were imaged using an AFM under both air and liquid conditions. By analyzing the images of DNA molecules obtained in the experiments, it was found that the mica surface modified with Ni2+ had the best imaging quality under the liquid condition. This work will be useful for the study of high quality AFM imaging of DNA molecules, and the manipulation of DNA molecules by AFM mechanical forces.
{"title":"Imaging of DNA molecules by atomic force microscope","authors":"Fenfen Guo, Feifei Wang, Ying Wang, Wenxiao Zhang, Xinyue Wang, Lu Zhao, Zhengxun Song, Zuobin Wang","doi":"10.1109/3M-NANO.2017.8286338","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286338","url":null,"abstract":"This paper explores suitable conditions for the imaging of DNA molecules by atomic force microscope (AFM). As a typical biological macro-molecule, DNA with genetic information has attracted extensive attention, which is an important research subject in molecular biology and biomedicine. In this work, 3-Aminopropyl Triethyl Silane (APTES), Ni2+ and Mg2+ were used to modify the surface of mica substrate, and DNA molecules were adhered to the mica surface through the physical interaction of charges. The DNA molecules were imaged using an AFM under both air and liquid conditions. By analyzing the images of DNA molecules obtained in the experiments, it was found that the mica surface modified with Ni2+ had the best imaging quality under the liquid condition. This work will be useful for the study of high quality AFM imaging of DNA molecules, and the manipulation of DNA molecules by AFM mechanical forces.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"9 1","pages":"315-318"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78254841","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286282
Ruirui Zhang, Jun Luo, Hongcheng Lian, Haobo Liu, L. Qi
Nano-energetic materials have attracted the worldwide attention since they play an important role in fabricating insensitive high-energy explosives, microenergetic devices, and explosive detectors. However, applications of nano-energetic materials are still limited by the low loading accuracy, material-wasting, and complicated steps. To solve this problem, the drop-on-demand inkjet method is proposed to precisely print energetic droplets. We expect to achieve energetic materials with nanoscale particles by integrating the deposition and the nanocrystallization of energetic droplets in one step. A proprietary uniform energetic micro-droplet printing equipment is utilized to reveal the influence of temperature and frequency on the particle size of energetic materials. Finally, a uniform line, with the particle size between nanometer and microns, is successfully obtained, showing the feasibility of the proposed method for preparing the micro scale charge of nano-energetic materials.
{"title":"Control of particle size in energetic drop-on-demand inkjet method","authors":"Ruirui Zhang, Jun Luo, Hongcheng Lian, Haobo Liu, L. Qi","doi":"10.1109/3M-NANO.2017.8286282","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286282","url":null,"abstract":"Nano-energetic materials have attracted the worldwide attention since they play an important role in fabricating insensitive high-energy explosives, microenergetic devices, and explosive detectors. However, applications of nano-energetic materials are still limited by the low loading accuracy, material-wasting, and complicated steps. To solve this problem, the drop-on-demand inkjet method is proposed to precisely print energetic droplets. We expect to achieve energetic materials with nanoscale particles by integrating the deposition and the nanocrystallization of energetic droplets in one step. A proprietary uniform energetic micro-droplet printing equipment is utilized to reveal the influence of temperature and frequency on the particle size of energetic materials. Finally, a uniform line, with the particle size between nanometer and microns, is successfully obtained, showing the feasibility of the proposed method for preparing the micro scale charge of nano-energetic materials.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"501 1","pages":"335-338"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85639574","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2017-08-01DOI: 10.1109/3M-NANO.2017.8286316
Xixian Mo, Bo Zhang
In this paper, we present a novel electromagnetic driving scheme for nano-scale positioning stage with three-degree-of-freedom. Three air bearings are used to provide the suspension force for the stage against gravity. The stage has a +-50nm position resolution over a travel range of 50 × 50 mm in the xy plane. We explain the actuating scheme, the design of mechanical system in detail. The hardware-in-loop simulation scheme is adopted to build the control system of the stage. We describe the dynamic model of the stage and design its controller. We provide the test results to demonstrate the precision positioning capabilities of the proposed stage.
{"title":"Design and driving of a 3-DOF electromagnetic direct-drive nanopositioning stage with long stroke","authors":"Xixian Mo, Bo Zhang","doi":"10.1109/3M-NANO.2017.8286316","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286316","url":null,"abstract":"In this paper, we present a novel electromagnetic driving scheme for nano-scale positioning stage with three-degree-of-freedom. Three air bearings are used to provide the suspension force for the stage against gravity. The stage has a +-50nm position resolution over a travel range of 50 × 50 mm in the xy plane. We explain the actuating scheme, the design of mechanical system in detail. The hardware-in-loop simulation scheme is adopted to build the control system of the stage. We describe the dynamic model of the stage and design its controller. We provide the test results to demonstrate the precision positioning capabilities of the proposed stage.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"7 1","pages":"236-241"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83330206","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
High uniformity of the web tension is of key importance in roll-to-roll printed electronics (R2RPE). A roller support stage with remote center of motion (RCM) is proposed to eliminate the uneven tension which can be transformed into an equivalent force and two equivalent moments. The equivalent force is supported by the rigid structure, then the equivalent moments can be eliminated by adjusting the roller angle, thus the uniformity of the tension can be guaranteed. The stage mainly consists of a high-stiffness spherical air bearing (SAB) and a multi-degree-of-freedom (multi-DOF) compliant mechanism. The roller center and the rotation center of the SAB locate at the same point. Therefore the roller will not produce lateral parasitic movement when the roller angle is changed. Based on the classical beam theory and the pseudo-rigid-body-model (PRBM), the analytical model of the compliant mechanism have been established. Finite element analysis (FEA) is conducted to verify the established model. Both the analytical model and FEA results demonstrate the superior property of the design, which indicates that the proposed mechanism can meet the requirements for the angle adjustment capacity of the roller support stage.
{"title":"A roller support stage with remote center of motion for roll-to-roll printed electronics","authors":"Shasha Chen, Weihai Chen, Jingmeng Liu, Wenjie Chen","doi":"10.1109/3M-NANO.2017.8286260","DOIUrl":"https://doi.org/10.1109/3M-NANO.2017.8286260","url":null,"abstract":"High uniformity of the web tension is of key importance in roll-to-roll printed electronics (R2RPE). A roller support stage with remote center of motion (RCM) is proposed to eliminate the uneven tension which can be transformed into an equivalent force and two equivalent moments. The equivalent force is supported by the rigid structure, then the equivalent moments can be eliminated by adjusting the roller angle, thus the uniformity of the tension can be guaranteed. The stage mainly consists of a high-stiffness spherical air bearing (SAB) and a multi-degree-of-freedom (multi-DOF) compliant mechanism. The roller center and the rotation center of the SAB locate at the same point. Therefore the roller will not produce lateral parasitic movement when the roller angle is changed. Based on the classical beam theory and the pseudo-rigid-body-model (PRBM), the analytical model of the compliant mechanism have been established. Finite element analysis (FEA) is conducted to verify the established model. Both the analytical model and FEA results demonstrate the superior property of the design, which indicates that the proposed mechanism can meet the requirements for the angle adjustment capacity of the roller support stage.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"23 1","pages":"319-324"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84390453","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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