A novel high natural frequency microgripper with symmetric compliance structure is reported in this paper, which is actuated by a piezoelectric actuator (PZT). Two lever mechanisms are utilized to amplify the output displacement of the PZT to achieve a large jaw desired output displacement. The symmetric lever mechanism and the jaws are designed separately and then the microgripper is constructed by assembling the two parts together. So different kinds of objects can be manipulated through designing different jaws, which broaden the application of the microgripper. The analytical model has been established based on pseudo-rigid-body (PRB) modeling method and matrix-based compliance modeling (MCM) method. According to the established model, the performance of the microgripper including amplification ratio, input stiffness and natural frequency are analyzed. Finite element analysis (FEA) is carried out to investigate the performance and validate the theoretical models for further optimum design of the microgripper.
{"title":"Design and Characteristics of a Novel Compliant Symmetric Microgripper Mechanism","authors":"Beichao Shi, Fujun Wang, Zhichen Huo, Yanling Tian, Xingyu Zhao, Dawei Zhang","doi":"10.1109/3M-NANO.2018.8552246","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552246","url":null,"abstract":"A novel high natural frequency microgripper with symmetric compliance structure is reported in this paper, which is actuated by a piezoelectric actuator (PZT). Two lever mechanisms are utilized to amplify the output displacement of the PZT to achieve a large jaw desired output displacement. The symmetric lever mechanism and the jaws are designed separately and then the microgripper is constructed by assembling the two parts together. So different kinds of objects can be manipulated through designing different jaws, which broaden the application of the microgripper. The analytical model has been established based on pseudo-rigid-body (PRB) modeling method and matrix-based compliance modeling (MCM) method. According to the established model, the performance of the microgripper including amplification ratio, input stiffness and natural frequency are analyzed. Finite element analysis (FEA) is carried out to investigate the performance and validate the theoretical models for further optimum design of the microgripper.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"118 1","pages":"65-69"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87606987","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552202
Jian Jin, Si Di, Y. Hua, J. Qi
Fabrication of micro/nano-fluidic channel is the key to micro/nano-fluidic system. Because of its simple equipment, low cost and good bonding strength, bonding technology becomes a suitable technology for sealing micro/nano-fluidic channel. However, during bonding process, the molten polymer will flow into the groove structure inevitably. When the size of the fluid channel decrease, especially when the size reaches the nanometer level, the flowing polymer can easily lead to the channel blockage. It has a negative influence on the precise control of the dimension of the fluid channel. In this paper, the hypothesis of the expansion centerline is put forward by the finite element simulation. According to the hypothesis, a ‘filling-barrier’ structure is designed to reduce the displacement produced by the pressure in the bonding process. Because the amount of filling is diverted, the top filling phenomenon is inhibited and the possibility of blockage is reduced during the bonding process. This paper also gives some design principles of the "filling-barrier" structure, by which we can control the influence of bonding pressure effectively.
{"title":"Controllable Micro/nano-fluidic Channel Bonding Process Based on the Expansion Centerline and “Filling-Barrier” Structure","authors":"Jian Jin, Si Di, Y. Hua, J. Qi","doi":"10.1109/3M-NANO.2018.8552202","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552202","url":null,"abstract":"Fabrication of micro/nano-fluidic channel is the key to micro/nano-fluidic system. Because of its simple equipment, low cost and good bonding strength, bonding technology becomes a suitable technology for sealing micro/nano-fluidic channel. However, during bonding process, the molten polymer will flow into the groove structure inevitably. When the size of the fluid channel decrease, especially when the size reaches the nanometer level, the flowing polymer can easily lead to the channel blockage. It has a negative influence on the precise control of the dimension of the fluid channel. In this paper, the hypothesis of the expansion centerline is put forward by the finite element simulation. According to the hypothesis, a ‘filling-barrier’ structure is designed to reduce the displacement produced by the pressure in the bonding process. Because the amount of filling is diverted, the top filling phenomenon is inhibited and the possibility of blockage is reduced during the bonding process. This paper also gives some design principles of the \"filling-barrier\" structure, by which we can control the influence of bonding pressure effectively.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"108 1","pages":"23-27"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75848907","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Micro-EDM is a non-contact machining method. There is a certain discharge gap between the tool electrode and the workpiece during machining. The size and consistency of the discharge gap have great influences on the machining precision of the micro hole machining, which seriously affects the machining precision of the titanium alloy micropore. In this paper, through the different peak current, peak voltage, pulse width, pulse interval and other parameters of the blind hole processing test, the effects of various factors on the discharge gap. Thus, the size of the tool electrode can be adjusted to compensate for the effect of the discharge gap on the dimensional accuracy.
{"title":"Study on Discharge Gap of Micro-EDM of the Micro Hole in Titanium Alloy","authors":"Guangsheng Ma, Peng Yu, Wanwu Hou, Liankai Wang, Jinkai Xu","doi":"10.1109/3M-NANO.2018.8552250","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552250","url":null,"abstract":"Micro-EDM is a non-contact machining method. There is a certain discharge gap between the tool electrode and the workpiece during machining. The size and consistency of the discharge gap have great influences on the machining precision of the micro hole machining, which seriously affects the machining precision of the titanium alloy micropore. In this paper, through the different peak current, peak voltage, pulse width, pulse interval and other parameters of the blind hole processing test, the effects of various factors on the discharge gap. Thus, the size of the tool electrode can be adjusted to compensate for the effect of the discharge gap on the dimensional accuracy.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"23 1","pages":"253-257"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84974388","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552216
Wenlu Xuan, R. Ramachandran, Changhui Zhao, Fei Wang
Cobalt metal-organic framework (Co-MOF) has been synthesized using a hydrothermal method and applied as Co-MOF modified electrode in supercapacitors. Multiple techniques like scanning electron microscope, transmission electron microscope, X-ray diffraction and Brunauer-Emmett-Teller analyzer were employed to investigate Co-MOF structure and textual characteristics. Co-MOF has high specific surface area due to the hollow structure with mesopore voids. The electrochemical behavior of the as-prepared Co-MOF was analyzed by cyclic voltammetry, galvanostatic charge-discharge tests and electrochemical impedance spectroscopy. The results exhibit good capacitive behavior of Co-MOF because the high specific surface area and numerus mesopore voids promote the transportation of electrolyte ions, which shows good capacitive stability as a supercapacitor electrode.
{"title":"Synthesis of Hollow Nano-Structured Cobalt Metal-Organic Framework for Supercapacitor Electrodes","authors":"Wenlu Xuan, R. Ramachandran, Changhui Zhao, Fei Wang","doi":"10.1109/3M-NANO.2018.8552216","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552216","url":null,"abstract":"Cobalt metal-organic framework (Co-MOF) has been synthesized using a hydrothermal method and applied as Co-MOF modified electrode in supercapacitors. Multiple techniques like scanning electron microscope, transmission electron microscope, X-ray diffraction and Brunauer-Emmett-Teller analyzer were employed to investigate Co-MOF structure and textual characteristics. Co-MOF has high specific surface area due to the hollow structure with mesopore voids. The electrochemical behavior of the as-prepared Co-MOF was analyzed by cyclic voltammetry, galvanostatic charge-discharge tests and electrochemical impedance spectroscopy. The results exhibit good capacitive behavior of Co-MOF because the high specific surface area and numerus mesopore voids promote the transportation of electrolyte ions, which shows good capacitive stability as a supercapacitor electrode.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"6 1","pages":"42-46"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86468948","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552228
Fupeng Liang, Y. Qiao, Mengqin Duan, Na Lu, Jing Tu, Zuhong Lu
Nanofluidic devices have many potential applications in biomedical field. One of the technical barriers of nanofluidics is to drive nanofluids in nanochannels with super-high hydraulic resistance (MPa scale) and super-small volume (fL scale). Electric field driving method (eg. electroosmotic flow) is commonly used in nanofluidics, since the conventional pumps applied in microfluidics are limited by their low pressure and low control precision. However, the electric field driving method is not suitable for all kinds of the nanofluids, which could affect the biochemical reactions, and lead to electrolytic reactions. We have developed a new type of high pressure nanofluidic micro-pump based on electrolysis. The pump system consists of electrolytic chamber, pressure sensor, control circuit, electrolytic electrodes and sample chamber that connects to nanofluidic chip. In our nanofluidic micro-pump system, high pressure gas generated from the electrolytic chamber pushes the liquid sample into the nanochannel, and the driving pressure to the fluidic sample can stably reach to 20MPa. Our high pressure micro-pump is suitable for both microfluidic and nanofluidic applications due to its very high output pressure, high control precision, fast response and wide output range.
{"title":"A High Pressure Nanofluidic Micro-Pump Based on H2O Electrolysis","authors":"Fupeng Liang, Y. Qiao, Mengqin Duan, Na Lu, Jing Tu, Zuhong Lu","doi":"10.1109/3M-NANO.2018.8552228","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552228","url":null,"abstract":"Nanofluidic devices have many potential applications in biomedical field. One of the technical barriers of nanofluidics is to drive nanofluids in nanochannels with super-high hydraulic resistance (MPa scale) and super-small volume (fL scale). Electric field driving method (eg. electroosmotic flow) is commonly used in nanofluidics, since the conventional pumps applied in microfluidics are limited by their low pressure and low control precision. However, the electric field driving method is not suitable for all kinds of the nanofluids, which could affect the biochemical reactions, and lead to electrolytic reactions. We have developed a new type of high pressure nanofluidic micro-pump based on electrolysis. The pump system consists of electrolytic chamber, pressure sensor, control circuit, electrolytic electrodes and sample chamber that connects to nanofluidic chip. In our nanofluidic micro-pump system, high pressure gas generated from the electrolytic chamber pushes the liquid sample into the nanochannel, and the driving pressure to the fluidic sample can stably reach to 20MPa. Our high pressure micro-pump is suitable for both microfluidic and nanofluidic applications due to its very high output pressure, high control precision, fast response and wide output range.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"139 1","pages":"32-36"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86775640","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552229
Si Chen, Henry Francis, Chih-Hua Ho, Kaijun Che, Yun-Ran Wang, M. Hopkinson, Shiyong Zhang, C. Jin, Chaoyuan Jin
Following the demonstration of quality factor (Q-factor) control in coupled photonic crystal nanocavities, we present our new research work on the Q-factor control in laterally coupled vertical cavities. Thermal-optic Q-tuning has been successfully observed when bringing a square-shaped vertical cavity and an adjacent Fabry-Pérot-like cavity into resonance. The approach paves the way towards a few quantum optical applications using vertical cavities.
{"title":"Quality Factor Control in Laterally-Coupled Vertical Cavities","authors":"Si Chen, Henry Francis, Chih-Hua Ho, Kaijun Che, Yun-Ran Wang, M. Hopkinson, Shiyong Zhang, C. Jin, Chaoyuan Jin","doi":"10.1109/3M-NANO.2018.8552229","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552229","url":null,"abstract":"Following the demonstration of quality factor (Q-factor) control in coupled photonic crystal nanocavities, we present our new research work on the Q-factor control in laterally coupled vertical cavities. Thermal-optic Q-tuning has been successfully observed when bringing a square-shaped vertical cavity and an adjacent Fabry-Pérot-like cavity into resonance. The approach paves the way towards a few quantum optical applications using vertical cavities.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"9 1","pages":"60-64"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72728394","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552194
Chunxiang Pan, Jiyu Sun, Zhenpeng Chen
The structure of dragonfly wing, connected by a transition structure, is mainly quadrilateral and hexagonal. The shape of transition structure has significantly influence on the mechanics properties of dragonfly wing structure. In this paper, four bionic models with three different transition structures were designed by comparing and analyzing samples of dragonfly wings. The simulation results of the four bionic models by ANSYS were analyzed and compared, which provided a design basis for the bionic thin solid membrane.
{"title":"The Thin Solid Membrane Structure Design of Imitated Dragonfly Wing Adopting Different Transition Structure","authors":"Chunxiang Pan, Jiyu Sun, Zhenpeng Chen","doi":"10.1109/3M-NANO.2018.8552194","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552194","url":null,"abstract":"The structure of dragonfly wing, connected by a transition structure, is mainly quadrilateral and hexagonal. The shape of transition structure has significantly influence on the mechanics properties of dragonfly wing structure. In this paper, four bionic models with three different transition structures were designed by comparing and analyzing samples of dragonfly wings. The simulation results of the four bionic models by ANSYS were analyzed and compared, which provided a design basis for the bionic thin solid membrane.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"55 1","pages":"126-129"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78621399","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Inorganic particles have been widely used as fillers for stiffness enhancement of polymers. In this paper, the filler particle size is fixed, and relationship between filler fraction and elastic modulus has been studied in Al(OH)3/polyethylene composites. By measuring the elastic moduli of composite samples with different filler content, the highest value of elastic modulus is found around 40% filler weight fraction. In distance-dependent elastic modulus analysis the peak elastic modulus of PE is obtained at a distance of 430 nm to filler center, which corresponds with body-centred cubic packing type. Our research may be helpful in improving mechanical property of polymer materials.
{"title":"Study on Elastic Modulus Enhancement in Particle Filled Polyethylene","authors":"Yangjiang Wu, Dongyan Wu, xiao liu, Zhengzhong Zhang, Hao Liu, Xiaorong Cheng, Xiaohui Li, Zhijun Hu","doi":"10.1109/3M-NANO.2018.8552173","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552173","url":null,"abstract":"Inorganic particles have been widely used as fillers for stiffness enhancement of polymers. In this paper, the filler particle size is fixed, and relationship between filler fraction and elastic modulus has been studied in Al(OH)3/polyethylene composites. By measuring the elastic moduli of composite samples with different filler content, the highest value of elastic modulus is found around 40% filler weight fraction. In distance-dependent elastic modulus analysis the peak elastic modulus of PE is obtained at a distance of 430 nm to filler center, which corresponds with body-centred cubic packing type. Our research may be helpful in improving mechanical property of polymer materials.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"11 1","pages":"47-50"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87216068","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552242
C. Coleman, S. Ncube, I. S. Mosse, A. Irzhak, V. Koledov, S. Gratowski, A. D. Sousa, S. Bhattacharyya
This study is devoted to the creation and characterization of nano-electronic devices fabricated from bundles of functionalized carbon nanotubes as well as multilayer graphene. The fabrication technique focuses on nanointegration utilizing a nano-tweezer created from memory metal. The devices envisioned include crossed junction as well as fine network structures that can be manipulated using nano-probes. As the carbon nanotubes have been functionalized with nanoscale magnetic molecules, such devices are interesting for novel spintronic applications. In addition, the fabrication of multi-layered graphene structures is demonstrated, these devices are particularly interesting for investigating the effect of local deformations which can be induced through the manipulation process.
{"title":"Bottom-Up Nanointegration Technique for Novel Functionalized Carbon Nanotube and Multi-layer Graphene Device Fabrication","authors":"C. Coleman, S. Ncube, I. S. Mosse, A. Irzhak, V. Koledov, S. Gratowski, A. D. Sousa, S. Bhattacharyya","doi":"10.1109/3M-NANO.2018.8552242","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552242","url":null,"abstract":"This study is devoted to the creation and characterization of nano-electronic devices fabricated from bundles of functionalized carbon nanotubes as well as multilayer graphene. The fabrication technique focuses on nanointegration utilizing a nano-tweezer created from memory metal. The devices envisioned include crossed junction as well as fine network structures that can be manipulated using nano-probes. As the carbon nanotubes have been functionalized with nanoscale magnetic molecules, such devices are interesting for novel spintronic applications. In addition, the fabrication of multi-layered graphene structures is demonstrated, these devices are particularly interesting for investigating the effect of local deformations which can be induced through the manipulation process.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"10 1","pages":"177-180"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87250430","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In this paper, SiCp/2024Al composites was drilled by electrical discharge machining (EDM) to investigate the effect of different electrode cross-section shapes on material removal rate (MRR). The material removal mechanism (MRM) at different discharge energy were also analyzed by changing the electrical parameters. It is found that the MRR of EDM with tube electrode is 5 times greater than that of with cylinder electrode. Electro-erosion debris filled in the discharge gap makes the tool electrode retreat frequently, greatly reducing the MRR. The MRM includes thermal spalling, melting/vaporization and oxidation. The MRM varies with different discharge energy. Thermal spalling is the main MRM at low discharge energy, while melting/evaporation occupies a dominant position in MRM at high discharge energy. Either low or high discharge energy, oxidation always occurs.
{"title":"Electrical Discharge Machining of SiCp/2024Al Composites","authors":"Peng Yu, Jinkai Xu, Yiquan Li, Zhanjiang Yu, Zhongxu Lian, Huadong Yu","doi":"10.1109/3M-NANO.2018.8552234","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552234","url":null,"abstract":"In this paper, SiCp/2024Al composites was drilled by electrical discharge machining (EDM) to investigate the effect of different electrode cross-section shapes on material removal rate (MRR). The material removal mechanism (MRM) at different discharge energy were also analyzed by changing the electrical parameters. It is found that the MRR of EDM with tube electrode is 5 times greater than that of with cylinder electrode. Electro-erosion debris filled in the discharge gap makes the tool electrode retreat frequently, greatly reducing the MRR. The MRM includes thermal spalling, melting/vaporization and oxidation. The MRM varies with different discharge energy. Thermal spalling is the main MRM at low discharge energy, while melting/evaporation occupies a dominant position in MRM at high discharge energy. Either low or high discharge energy, oxidation always occurs.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"179 ","pages":"192-196"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91551250","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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