Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808437
Ozgun Civelekoglu, Ningquan Wang, Mert Boya, Tevhide Ozkaya-Ahmadov, Ruxiu Liu, A. F. Sarioglu
Identification of membrane antigens and measurement of their expression within a cell population is of fundamental importance to medical and biological studies. In this work, we present a cytometry approach that is based on magnetophoresis and distributed Coulter sensing in a microfluidic system. Our magnetophoretic cytometer offers quantitative analysis of cell membrane antigens on a portable and disposable platform compared to conventional flow cytometers, which are complex, expensive and large systems. Our tests with human breast cancer cells show the utility of our microfluidic device and its potential as a point-of-care instrument for biomedical testing.
{"title":"Quantitative Measurement of Cell Surface Expression Via Magnetophoretic Cytometry","authors":"Ozgun Civelekoglu, Ningquan Wang, Mert Boya, Tevhide Ozkaya-Ahmadov, Ruxiu Liu, A. F. Sarioglu","doi":"10.1109/TRANSDUCERS.2019.8808437","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808437","url":null,"abstract":"Identification of membrane antigens and measurement of their expression within a cell population is of fundamental importance to medical and biological studies. In this work, we present a cytometry approach that is based on magnetophoresis and distributed Coulter sensing in a microfluidic system. Our magnetophoretic cytometer offers quantitative analysis of cell membrane antigens on a portable and disposable platform compared to conventional flow cytometers, which are complex, expensive and large systems. Our tests with human breast cancer cells show the utility of our microfluidic device and its potential as a point-of-care instrument for biomedical testing.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"61 1","pages":"975-978"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74218517","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808527
Yueyi Jiao, Xinran Wang, Yuncong Chen, M. Castellano, James c. Schnable, P. Schnable, Liang Dong
This paper reports a nutrient microsensor for in-situ detection of nitrate concentration inside plants. The sensor is inserted into the stalk of maize plant for continuous monitoring of dynamic nitrate uptake of the plant. The inserted part of the sensor consists of a nitrate sensing unit that works on the principle of chemical sensitive field effect transistor (chemFET), an integrated metallic thin-film thermorist, and a microscale reference electrode. The sensor enables measurement of nitrate concentration variations under different environmental conditions (e.g., light condition) and irrigation and fertigtation management. This device offers a new method to continuously detect and quantify nitrate levels inside the plants.
{"title":"In-Planta Nitrate Detection Using Insertable Plant Microsensor","authors":"Yueyi Jiao, Xinran Wang, Yuncong Chen, M. Castellano, James c. Schnable, P. Schnable, Liang Dong","doi":"10.1109/TRANSDUCERS.2019.8808527","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808527","url":null,"abstract":"This paper reports a nutrient microsensor for in-situ detection of nitrate concentration inside plants. The sensor is inserted into the stalk of maize plant for continuous monitoring of dynamic nitrate uptake of the plant. The inserted part of the sensor consists of a nitrate sensing unit that works on the principle of chemical sensitive field effect transistor (chemFET), an integrated metallic thin-film thermorist, and a microscale reference electrode. The sensor enables measurement of nitrate concentration variations under different environmental conditions (e.g., light condition) and irrigation and fertigtation management. This device offers a new method to continuously detect and quantify nitrate levels inside the plants.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"26 1","pages":"37-40"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78231312","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808360
Liang Zhou, Huikai Xie
This paper reports an out-of-plane bistable electrothermal microactautor that is comprised of inverted-series-connected (ISC) Cu/W-based multimorphs. S-shaped ISC multimorphs have been previously employed for generating large vertical displacement. In this work, the ISC multimorphs have been engineered into a warped shape via pre-stressed W and unbalanced SiO2 encapsulation layers. Electrothermal bistable actuators based on the warped ISC multimorphs have been fabricated and tested. A bistable vertical displacement of 25 μm has been obtained.
{"title":"A Novel Out-of-Plane Electrothermal Bistable Microactuator","authors":"Liang Zhou, Huikai Xie","doi":"10.1109/TRANSDUCERS.2019.8808360","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808360","url":null,"abstract":"This paper reports an out-of-plane bistable electrothermal microactautor that is comprised of inverted-series-connected (ISC) Cu/W-based multimorphs. S-shaped ISC multimorphs have been previously employed for generating large vertical displacement. In this work, the ISC multimorphs have been engineered into a warped shape via pre-stressed W and unbalanced SiO2 encapsulation layers. Electrothermal bistable actuators based on the warped ISC multimorphs have been fabricated and tested. A bistable vertical displacement of 25 μm has been obtained.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"125 1","pages":"1953-1956"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73459339","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808583
Shan Wang, Kuan-Hua Huang, Y. Yang
This work presents a polymer-based capacitive sensor array capable of measuring both normal and shear forces. The capacitive sensing element consists of polydimethylsiloxane (PDMS) dielectric layers and gold electrode arrays. The PDMS dielectric layers were patterned with microdome structures using a simple micromachining technique with nylon membrane filters. Further, by using membranes with different pore sizes, the pressure sensitivity of the capacitive tactile sensor can be adjusted with ease. The measured relationship of capacitance versus pressure indicates that the sensitivity of sensors with interlocked interfaces is much higher than that of the sensor with planar films.
{"title":"A Highly Sensitive Capacitive Pressure Sensor with Microdome Structure for Robot Tactile Detection","authors":"Shan Wang, Kuan-Hua Huang, Y. Yang","doi":"10.1109/TRANSDUCERS.2019.8808583","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808583","url":null,"abstract":"This work presents a polymer-based capacitive sensor array capable of measuring both normal and shear forces. The capacitive sensing element consists of polydimethylsiloxane (PDMS) dielectric layers and gold electrode arrays. The PDMS dielectric layers were patterned with microdome structures using a simple micromachining technique with nylon membrane filters. Further, by using membranes with different pore sizes, the pressure sensitivity of the capacitive tactile sensor can be adjusted with ease. The measured relationship of capacitance versus pressure indicates that the sensitivity of sensors with interlocked interfaces is much higher than that of the sensor with planar films.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"21 1","pages":"458-461"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83460814","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808237
Yongkui Tang, E. S. Kim
This paper describes acoustic thruster and lifter capable of generating propulsion force on-demand from synthetic air jets generated by acoustic waves passing through orifices on a thin plastic (shaped with laser-machining) covering a sound source (audio speaker). The orifice array pattern was optimized through experiments to produce large thrust force. By varying driving condition and operating frequency, the transducer that weighs 603 mg can rotate, or jump 2.8 mm high and 100 mm far, propelled by the air jets. When tested as an acoustic lifter, the transducer is capable of lifting a plastic piece of 299 mg and rotating a metal piece of 20.4 g. The device could also be driven with acoustic signal instead of electrical power.
{"title":"Acoustic Propeller Based on Air Jets from Acoustic Streaming","authors":"Yongkui Tang, E. S. Kim","doi":"10.1109/TRANSDUCERS.2019.8808237","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808237","url":null,"abstract":"This paper describes acoustic thruster and lifter capable of generating propulsion force on-demand from synthetic air jets generated by acoustic waves passing through orifices on a thin plastic (shaped with laser-machining) covering a sound source (audio speaker). The orifice array pattern was optimized through experiments to produce large thrust force. By varying driving condition and operating frequency, the transducer that weighs 603 mg can rotate, or jump 2.8 mm high and 100 mm far, propelled by the air jets. When tested as an acoustic lifter, the transducer is capable of lifting a plastic piece of 299 mg and rotating a metal piece of 20.4 g. The device could also be driven with acoustic signal instead of electrical power.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"41 1","pages":"2068-2071"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82562070","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808248
Dong Yang, Wenpeng Xun, H. Feng, Honglong Chang
This paper presents a new method to fabricate low-melting point alloy (LMPA) electrodes inside polydimethylsiloxane (PDMS) microfluidic channels. The melting alloy is injected into a subchannel designed as a hydrophobic valve, which provides a threshold pressure to flow through. Thus, with an appropriate control of the injecting pressure, the melting alloy can fully fill the subchannel without passing through it and blocking the main channel. After the solidification, an LMPA microelectrode is formed and automatically aligned on the side of main channel. A Coulter counter microfluidic chip is fabricated using this method and a coefficient variation (CV) of 1.99% is obtained for 10-μm beads. The results show that the proposed method is a feasible solution to fabricate robust microelectrodes in polymer-based microfluidic chips without the expensive lithography or sputtering.
{"title":"Low-Melting Alloy Microfluidic Electrode Based on Hydrophobic Valve and its Application in Coulter Counter","authors":"Dong Yang, Wenpeng Xun, H. Feng, Honglong Chang","doi":"10.1109/TRANSDUCERS.2019.8808248","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808248","url":null,"abstract":"This paper presents a new method to fabricate low-melting point alloy (LMPA) electrodes inside polydimethylsiloxane (PDMS) microfluidic channels. The melting alloy is injected into a subchannel designed as a hydrophobic valve, which provides a threshold pressure to flow through. Thus, with an appropriate control of the injecting pressure, the melting alloy can fully fill the subchannel without passing through it and blocking the main channel. After the solidification, an LMPA microelectrode is formed and automatically aligned on the side of main channel. A Coulter counter microfluidic chip is fabricated using this method and a coefficient variation (CV) of 1.99% is obtained for 10-μm beads. The results show that the proposed method is a feasible solution to fabricate robust microelectrodes in polymer-based microfluidic chips without the expensive lithography or sputtering.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"11 1","pages":"1029-1032"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83688167","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808773
Sang-Myun Lee, Hong-Lae Kim, H. Kwon, Kyong-Gi Kim, S. Yoo, U. Hong, Jungho Hwang, Yong-Jun Kim
This paper reports a MEMS based particle size analyzer using electrostatic measuring techniques. The MEMS based particle size analyzer is able to classify particles of same diameter by using electrical mobility and measure particle size distribution in the size range of 50 to 300 nm. The performance of the proposed device was evaluated through measurements of particle size distribution and compared with commercial high precision instruments.
{"title":"MEMS Based Particle Size Analyzer Using Electrostatic Measuring Techniques","authors":"Sang-Myun Lee, Hong-Lae Kim, H. Kwon, Kyong-Gi Kim, S. Yoo, U. Hong, Jungho Hwang, Yong-Jun Kim","doi":"10.1109/TRANSDUCERS.2019.8808773","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808773","url":null,"abstract":"This paper reports a MEMS based particle size analyzer using electrostatic measuring techniques. The MEMS based particle size analyzer is able to classify particles of same diameter by using electrical mobility and measure particle size distribution in the size range of 50 to 300 nm. The performance of the proposed device was evaluated through measurements of particle size distribution and compared with commercial high precision instruments.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"632 1","pages":"1289-1292"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74726511","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808749
Randall P. Williams, N. Hall, B. Avenson
We have developed an optically-read inertial sensor, where microfabricated diffractive optics are used to read the displacement of a macroscale proof mass. The measured noise floor of the sensor is 3 ng/√Hz from 0.1 Hz to 100 Hz. Feedback is implemented with a macroscale motor coil and rare earth magnets, achieving a dynamic range of 176 dB. This allows the sensor to target planetary seismic applications, with field expeditions completed in Alaska and Greenland. Optical models were developed to explore the optical design space, resulting in innovate stepped grating designs which will facilitate optoelectronic integration for microscale devices.
{"title":"Grating-Based Acceleration Sensors with Optical Interferometric Readout and Closed-Loop Control","authors":"Randall P. Williams, N. Hall, B. Avenson","doi":"10.1109/TRANSDUCERS.2019.8808749","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808749","url":null,"abstract":"We have developed an optically-read inertial sensor, where microfabricated diffractive optics are used to read the displacement of a macroscale proof mass. The measured noise floor of the sensor is 3 ng/√Hz from 0.1 Hz to 100 Hz. Feedback is implemented with a macroscale motor coil and rare earth magnets, achieving a dynamic range of 176 dB. This allows the sensor to target planetary seismic applications, with field expeditions completed in Alaska and Greenland. Optical models were developed to explore the optical design space, resulting in innovate stepped grating designs which will facilitate optoelectronic integration for microscale devices.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"1 1","pages":"507-510"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89466282","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808261
Sebastian Urban, J. Kieninger, Benedikt J. Deschner, M. Kraut, R. Dittmeyer, G. Urban, A. Weltin
We present an electrochemical microsensor system for the multiparametric detection of dissolved concentrations of hydrogen peroxide (H2O2) and oxygen (O2) inside a direct synthesis membrane microreactor. Both reactants are detected with high sensitivity on the same Pt-based electrode by changing the applied measurement potential in a chronoamperometric protocol. The robust integration of the electrochemical cell in the microreactor was demonstrated and allowed for in situ detection of the spatial gradient of the changing oxygen concentration diffusing through a membrane into the microreactor, emphasizing the capabilities of our monitoring system.
{"title":"Multiparametric, Spatially Resolved Detection of H2O2 and O2 with Electrochemical Microsensor Array in Synthesis Membrane Microreactors","authors":"Sebastian Urban, J. Kieninger, Benedikt J. Deschner, M. Kraut, R. Dittmeyer, G. Urban, A. Weltin","doi":"10.1109/TRANSDUCERS.2019.8808261","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808261","url":null,"abstract":"We present an electrochemical microsensor system for the multiparametric detection of dissolved concentrations of hydrogen peroxide (H2O2) and oxygen (O2) inside a direct synthesis membrane microreactor. Both reactants are detected with high sensitivity on the same Pt-based electrode by changing the applied measurement potential in a chronoamperometric protocol. The robust integration of the electrochemical cell in the microreactor was demonstrated and allowed for in situ detection of the spatial gradient of the changing oxygen concentration diffusing through a membrane into the microreactor, emphasizing the capabilities of our monitoring system.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"24 23","pages":"1297-1300"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91404705","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808712
Michitaka Yamamoto, K. Hiraoka, S. Takamatsu, T. Itoh
We developed a micro-corrugation process to fabricate a vertically wavy thin film piezoelectric sensor for highly stretchable human motion sensors. Wavy structure is formed by micro-corrugation process where thin functional film is bent with gears. A continuous wavy structured polyvinylidene difluoride film with 600-µm pitch and 140-µm height was successfully fabricated. The fabricated sensor sustains 15% strain and successfully detects the bending motion of the human finger.
{"title":"Stretchable Wavy Piezoelectric Sensor Fabricated by Micro-Corrugation Process","authors":"Michitaka Yamamoto, K. Hiraoka, S. Takamatsu, T. Itoh","doi":"10.1109/TRANSDUCERS.2019.8808712","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808712","url":null,"abstract":"We developed a micro-corrugation process to fabricate a vertically wavy thin film piezoelectric sensor for highly stretchable human motion sensors. Wavy structure is formed by micro-corrugation process where thin functional film is bent with gears. A continuous wavy structured polyvinylidene difluoride film with 600-µm pitch and 140-µm height was successfully fabricated. The fabricated sensor sustains 15% strain and successfully detects the bending motion of the human finger.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"201 1","pages":"1792-1795"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76978937","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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