Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808781
Furkan Gökçe, Paolo S. Ravaynia, A. Kaestli, M. Modena, A. Hierlemann, K. Renggli
Based on recent advances in the field of microphysiological systems, we established a Leukemiaon-chip concept to mimic blood cancer in vitro by continuously circulating leukemia cells in a microfluidic system. This platform is complemented by an integrated electrical-impedance-spectroscopy (EIS) unit that enables to monitor the flowing cancer cells in real-time. The electric parameters, such as membrane conductivity and dielectric properties, alter upon the death of leukemia cells. Thus, drug-cancer interactions can be studied online and label-free by means of EIS. In this study, we present proof-of-concept experimental results that show the potential of EIS for real-time drug efficacy research.
{"title":"Leukemia On Chip – Electrical Impedance Spectroscopy As An Online Readout To Investigate Drug-Cancer Interaction","authors":"Furkan Gökçe, Paolo S. Ravaynia, A. Kaestli, M. Modena, A. Hierlemann, K. Renggli","doi":"10.1109/TRANSDUCERS.2019.8808781","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808781","url":null,"abstract":"Based on recent advances in the field of microphysiological systems, we established a Leukemiaon-chip concept to mimic blood cancer in vitro by continuously circulating leukemia cells in a microfluidic system. This platform is complemented by an integrated electrical-impedance-spectroscopy (EIS) unit that enables to monitor the flowing cancer cells in real-time. The electric parameters, such as membrane conductivity and dielectric properties, alter upon the death of leukemia cells. Thus, drug-cancer interactions can be studied online and label-free by means of EIS. In this study, we present proof-of-concept experimental results that show the potential of EIS for real-time drug efficacy research.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"13 1","pages":"606-608"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79231361","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808493
M. Abdelmejeed, J. Kuo, Adarsh Ravi, A. Lal
This paper presents a demonstration of CMOS driven 1-2 GHz ultrasonic imager that can be monolithically integrated in a single-chip and operate at 1.5V battery voltages. The pulse transmit/receive operation of a single AlN transducer pixel driven by custom 180nm CMOS RF circuits is demonstrated. The pixel transducer is scanned in two dimensions to image fingerprints and leaves with 254 dpi resolution. Based on a single pixel imaging time, frame rate is estimated to be 500 fps at 13.6 μJ/frame. The contrast of returned signal between rubber and air is 3.3:1 for dry rubber and 1.5:1 for wet rubber. This work shows a pathway towards single chip GHz ultrasonic imager.
{"title":"Cmos Controlled Ghz Ultrasonic Impedance Imager","authors":"M. Abdelmejeed, J. Kuo, Adarsh Ravi, A. Lal","doi":"10.1109/TRANSDUCERS.2019.8808493","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808493","url":null,"abstract":"This paper presents a demonstration of CMOS driven 1-2 GHz ultrasonic imager that can be monolithically integrated in a single-chip and operate at 1.5V battery voltages. The pulse transmit/receive operation of a single AlN transducer pixel driven by custom 180nm CMOS RF circuits is demonstrated. The pixel transducer is scanned in two dimensions to image fingerprints and leaves with 254 dpi resolution. Based on a single pixel imaging time, frame rate is estimated to be 500 fps at 13.6 μJ/frame. The contrast of returned signal between rubber and air is 3.3:1 for dry rubber and 1.5:1 for wet rubber. This work shows a pathway towards single chip GHz ultrasonic imager.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"42 4 1","pages":"57-60"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80131941","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808413
J. Kuehn, Y. Manoli
We present a fingertip-shaped tactile sensor system that can measure static forces and slip vibrations using the same sensor. A fully integrated stress sensor ASIC leads to a simple design and assembly of the tactile fingertip. Instead of calibrating the fingertip to quantitatively measure forces, we use machine learning to extract abstract information out of the raw sensor data. Avoiding complex signal processing, this sensor-to-information processing scheme is fast and can have a small footprint. The results show that the system can classify the direction of applied forces with 99.8% accuracy. The combination of the stress sensor array and the machine learning approach allows to detect slip and tangential force direction simultaneously. The combined classification achieves 99.6% accuracy.
{"title":"A Fingertip-Shaped Tactile Sensor with Machine-Learning-Based Sensor-To-Information Processing","authors":"J. Kuehn, Y. Manoli","doi":"10.1109/TRANSDUCERS.2019.8808413","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808413","url":null,"abstract":"We present a fingertip-shaped tactile sensor system that can measure static forces and slip vibrations using the same sensor. A fully integrated stress sensor ASIC leads to a simple design and assembly of the tactile fingertip. Instead of calibrating the fingertip to quantitatively measure forces, we use machine learning to extract abstract information out of the raw sensor data. Avoiding complex signal processing, this sensor-to-information processing scheme is fast and can have a small footprint. The results show that the system can classify the direction of applied forces with 99.8% accuracy. The combination of the stress sensor array and the machine learning approach allows to detect slip and tangential force direction simultaneously. The combined classification achieves 99.6% accuracy.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"410 1","pages":"1811-1814"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76469399","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808257
Jinwon Jeong, S. Chung, Jeong‐Bong Lee, Daeyoung Kim
This paper presents the electric field-based on-demand size controllable droplet generation, falling direction manipulation, and repulsion. We controlled the size of the generated gallium-based liquid metal droplets by adjusting the amplitude of the applied electric field. The volume and the number of the generated liquid metal droplet depending on flow rate and applied voltage were measured. We also studied time-dependent falling velocity of the generated liquid metal droplet according to various applied voltages. In addition, by changing the electric field which was achieved by controlling the position of the circular-shaped electrode, the falling direction of liquid metal droplet can be manipulated. Finally, the electro-hydrodynamic repulsion of the liquid metal was demonstrated.
{"title":"Electro-Hydrodynamic Droplet Generation, Manipulation, and Repulsion of Oxidized Gallium-Based Liquid Metal","authors":"Jinwon Jeong, S. Chung, Jeong‐Bong Lee, Daeyoung Kim","doi":"10.1109/TRANSDUCERS.2019.8808257","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808257","url":null,"abstract":"This paper presents the electric field-based on-demand size controllable droplet generation, falling direction manipulation, and repulsion. We controlled the size of the generated gallium-based liquid metal droplets by adjusting the amplitude of the applied electric field. The volume and the number of the generated liquid metal droplet depending on flow rate and applied voltage were measured. We also studied time-dependent falling velocity of the generated liquid metal droplet according to various applied voltages. In addition, by changing the electric field which was achieved by controlling the position of the circular-shaped electrode, the falling direction of liquid metal droplet can be manipulated. Finally, the electro-hydrodynamic repulsion of the liquid metal was demonstrated.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"362 1","pages":"2337-2339"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76485102","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808445
Keitaro Kasahara, Yuta Kurashina, S. Miura, S. Miyata, H. Onoe
This paper describes an analytical platform to investigate the cell response against mechanical stimuli in in vitro 3D tissues. The system is capable of live-imaging cells in 3D tissues at a single cell level under mechanical stimuli, which makes this system similar to the in vivo environment and suitable for analysis of maturation mechanism. We succeeded in imaging various shapes of cells in 3D tissue under mechanical stimuli and observed that the stretch-induced deformation was distributed non-uniformly inside cells. We believe that our system could contribute to a further understanding of the tissue maturation mechanism induced by mechanical stimuli, which is highly useful for the development of tissue reconstruction.
{"title":"Shape Deformation Analysis of Single Cell in 3d Tissue Under Mechanical Stimuli","authors":"Keitaro Kasahara, Yuta Kurashina, S. Miura, S. Miyata, H. Onoe","doi":"10.1109/TRANSDUCERS.2019.8808445","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808445","url":null,"abstract":"This paper describes an analytical platform to investigate the cell response against mechanical stimuli in in vitro 3D tissues. The system is capable of live-imaging cells in 3D tissues at a single cell level under mechanical stimuli, which makes this system similar to the in vivo environment and suitable for analysis of maturation mechanism. We succeeded in imaging various shapes of cells in 3D tissue under mechanical stimuli and observed that the stretch-induced deformation was distributed non-uniformly inside cells. We believe that our system could contribute to a further understanding of the tissue maturation mechanism induced by mechanical stimuli, which is highly useful for the development of tissue reconstruction.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"128 1","pages":"413-416"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85735592","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808567
K. Kawai, Harada Keita, Ryota Nakamura, Kenta Arima, K. Yamamura, O. Tabata
DNA nanostructures, called DNA origami, are self-assembled through DNA hybridization by annealing process. DNA origami consists of a long single-strand DNA, scaffold, and hundreds of complementary oligonucleotides, staple, and constructs various 2D or 3D nanostructures. For DNA origami folding, it is necessary to denature DNAs and annealed them slowly. Although in general annealing process using microtube and commercial thermal cycler, it takes a long time for DNA hybridization due to large scale reactor. Here, We present an effect of temperature distribution during a rapid folding of DNA nanostructures, called DNA origami. DNA origami can fabricate various designs and sizes of 2D/3D nanostructures by self-assembly of DNA hybridization. Based on results of computational fluid dynamics (CFD) simulation, time-dependent temperature distribution in microtube effects the yield of DNA origami. Triangle DNA origami can be folded at -30 °C/min in microfluidic channel whereas no DNA nanostructures were observed by general annealing process. We confirmed 20 times-faster self-assembly of DNA nanostructures in microfluidic channel, compared to general annealing process in microtube by thermal cycler.
{"title":"Rapid Assembly of DNA Origami in Microfluidic Temperature Gradient","authors":"K. Kawai, Harada Keita, Ryota Nakamura, Kenta Arima, K. Yamamura, O. Tabata","doi":"10.1109/TRANSDUCERS.2019.8808567","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808567","url":null,"abstract":"DNA nanostructures, called DNA origami, are self-assembled through DNA hybridization by annealing process. DNA origami consists of a long single-strand DNA, scaffold, and hundreds of complementary oligonucleotides, staple, and constructs various 2D or 3D nanostructures. For DNA origami folding, it is necessary to denature DNAs and annealed them slowly. Although in general annealing process using microtube and commercial thermal cycler, it takes a long time for DNA hybridization due to large scale reactor. Here, We present an effect of temperature distribution during a rapid folding of DNA nanostructures, called DNA origami. DNA origami can fabricate various designs and sizes of 2D/3D nanostructures by self-assembly of DNA hybridization. Based on results of computational fluid dynamics (CFD) simulation, time-dependent temperature distribution in microtube effects the yield of DNA origami. Triangle DNA origami can be folded at -30 °C/min in microfluidic channel whereas no DNA nanostructures were observed by general annealing process. We confirmed 20 times-faster self-assembly of DNA nanostructures in microfluidic channel, compared to general annealing process in microtube by thermal cycler.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"32 1","pages":"398-401"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73316227","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808375
Yang Gao, Toshiki Ema, Zeyuan Cao, Sheng Ni, Elena Chan, O. Tabata, T. Tsuchiya, X. Wang, M. Wong
Described presently is a micro-fabricated planar bi-stable mechanical switch driven using only one compliant electro-thermal actuator. The state-defining bi-stable mechanism is connected to the actuator via a displacement lever-amplifier and an electrically/thermally insulating linkage structure. More robust state-locking is achieved using a latch-lock rather than the commonly employed buckled-mode mechanism. Realized on a silicon-on-insulator substrate, the device could be switched between the "set" and the "reset" mechanical states with respective actuation-voltage of 11 and 6 V.
{"title":"A Planar Single-Actuator Bi-Stable Switch Based on Latch-Lock Mechanism","authors":"Yang Gao, Toshiki Ema, Zeyuan Cao, Sheng Ni, Elena Chan, O. Tabata, T. Tsuchiya, X. Wang, M. Wong","doi":"10.1109/TRANSDUCERS.2019.8808375","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808375","url":null,"abstract":"Described presently is a micro-fabricated planar bi-stable mechanical switch driven using only one compliant electro-thermal actuator. The state-defining bi-stable mechanism is connected to the actuator via a displacement lever-amplifier and an electrically/thermally insulating linkage structure. More robust state-locking is achieved using a latch-lock rather than the commonly employed buckled-mode mechanism. Realized on a silicon-on-insulator substrate, the device could be switched between the \"set\" and the \"reset\" mechanical states with respective actuation-voltage of 11 and 6 V.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"15 1","pages":"705-708"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75801555","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808259
Xiaoke Ding, Chao Song, L. Que
Drug delivery is a difficult task in ocular therapeutics due to the physiological and anatomical constraints of the eye. The correct therapeutic concentration of a drug at the required site of action is difficult to obtain. For instance, only <1% of a topically administered drug reaches the aqueous humor. Herein, we report a new type of contact lens device with integrated microtubes as drug containers, which can provide a simple, noninvasive, extended drug release up to 40 days with higher bioavailability and lower risk for adverse effects.
{"title":"Fabrication of Contact Lens Device with Integrated Microtubes for in Situ Extended Drug Delivery for Ocular Disease Treatment","authors":"Xiaoke Ding, Chao Song, L. Que","doi":"10.1109/TRANSDUCERS.2019.8808259","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808259","url":null,"abstract":"Drug delivery is a difficult task in ocular therapeutics due to the physiological and anatomical constraints of the eye. The correct therapeutic concentration of a drug at the required site of action is difficult to obtain. For instance, only <1% of a topically administered drug reaches the aqueous humor. Herein, we report a new type of contact lens device with integrated microtubes as drug containers, which can provide a simple, noninvasive, extended drug release up to 40 days with higher bioavailability and lower risk for adverse effects.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"5 1","pages":"306-309"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74710496","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808333
S. Bütefisch, T. Weimann, A. Vierheller, V. Nesterov, A. Dietzel
This article presents the design and micro manufacture of a novel silicon pendulum to be used at the German National Metrology Institute (PTB) for the measurement of ultra-small forces. The nanoforce standard facility with the previous pendulum, manufactured by precision engineering methods, together with the constructive requirements are described. The particularities of wetchemical anisotropic silicon etching and their benefits and challenges when used for the manufacturing of the new pendulum are discussed. Finally, two design variants that were realized are discussed. One of the variants proved to be more robust against variations in the silicon raw wafer material and promises to offer an advantageous replacement for the precision engineered pendulums.
{"title":"Design and Manufacture of A Silicone Pendulum for PTB’S Nanoforce Standard Facility","authors":"S. Bütefisch, T. Weimann, A. Vierheller, V. Nesterov, A. Dietzel","doi":"10.1109/TRANSDUCERS.2019.8808333","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808333","url":null,"abstract":"This article presents the design and micro manufacture of a novel silicon pendulum to be used at the German National Metrology Institute (PTB) for the measurement of ultra-small forces. The nanoforce standard facility with the previous pendulum, manufactured by precision engineering methods, together with the constructive requirements are described. The particularities of wetchemical anisotropic silicon etching and their benefits and challenges when used for the manufacturing of the new pendulum are discussed. Finally, two design variants that were realized are discussed. One of the variants proved to be more robust against variations in the silicon raw wafer material and promises to offer an advantageous replacement for the precision engineered pendulums.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"98 1","pages":"186-189"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74327919","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2019-06-23DOI: 10.1109/TRANSDUCERS.2019.8808723
Katja Meinel, C. Stoeckel, M. Melzer, S. Zimmermann, R. Forke, K. Hiller, T. Otto
In this paper micromirrors based on piezoelectric thin film aluminum nitride (AlN) are presented. The microsystems with a 6 mm² footprint are fabricated successfully in 150 mm SOI technology. A large tilt angle is achieved by FEM-based optimization of the lever arm parameters. Three micromirror types with varied spring widths are characterized, achieving tilt angles up to 51.3° at 1.9 kHz, 31.6° at 4.6 kHz, and 16.5° at 12.5 kHz for an actuation voltage of less than 5 V. For higher actuation voltages up to 20 V, a maximum scan angle of 104.9° is reached, limited by the measurement setup.
{"title":"Piezoelectric Scanning Micromirror with Large Scan Angle Based on Thin Film Aluminum Nitride","authors":"Katja Meinel, C. Stoeckel, M. Melzer, S. Zimmermann, R. Forke, K. Hiller, T. Otto","doi":"10.1109/TRANSDUCERS.2019.8808723","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2019.8808723","url":null,"abstract":"In this paper micromirrors based on piezoelectric thin film aluminum nitride (AlN) are presented. The microsystems with a 6 mm² footprint are fabricated successfully in 150 mm SOI technology. A large tilt angle is achieved by FEM-based optimization of the lever arm parameters. Three micromirror types with varied spring widths are characterized, achieving tilt angles up to 51.3° at 1.9 kHz, 31.6° at 4.6 kHz, and 16.5° at 12.5 kHz for an actuation voltage of less than 5 V. For higher actuation voltages up to 20 V, a maximum scan angle of 104.9° is reached, limited by the measurement setup.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"19 1","pages":"1518-1521"},"PeriodicalIF":0.0,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80051982","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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