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2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)最新文献

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Kirigami Cross-Shaped 3D Buckling Active Sensor for Detecting Stretching and Bending 用于检测拉伸和弯曲的Kirigami十字形三维屈曲主动传感器
Liming Miao, Ji Wan, Hang Guo, Haobin Wang, Yu Song, Xuexian Chen, Haixia Zhang
Stretchable and movable 3D structure is a great choice for sensing stretching and bending. This paper reports a novel cross-shaped 3D buckling strain sensor based on polydimethylsiloxane (PDMS) substrate for detecting stretching and bending. Using pre-stretched PDMS, cross-shaped Polyimide (PI) film with conductive silver paint on its top surface as a 2D precursor can pop up as a dynamic 3D structure and possesses capacitive effect and triboelectric effect under different stretching and bending, which can detect stretching directions, strain value, bending axis direction and radius of curvature simultaneously, showing great potential in human and robot applications.
可拉伸和可移动的三维结构是感知拉伸和弯曲的一个很好的选择。本文报道了一种基于聚二甲基硅氧烷(PDMS)基板的新型十字形三维屈曲应变传感器,用于检测拉伸和弯曲。利用预拉伸的PDMS,表面涂有导电银漆的十字形聚酰亚胺(PI)薄膜作为二维前驱体,在不同拉伸和弯曲情况下,可形成动态的三维结构,具有电容效应和摩擦电效应,可同时检测拉伸方向、应变值、弯曲轴方向和曲率半径,在人体和机器人应用中具有很大的潜力。
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引用次数: 0
Picoliter Droplet Generation for Fast Monitoring the Brain Chemistry with Scaled Silicon Nanodyalisis Probe 用硅纳米探针快速监测脑化学的皮升液滴生成
Yan Zhang, Ari Esters, O. Bi, Y. Vlasov
To monitor neurochemicals while minimizing brain damage, a microdialysis system is developed with fluidic channels scaled to 5 μm-radius to fit into 15x50 μm2 silicon neural probe. Droplet generation is utilized to halt Taylor dispersion to achieve high temporal resolution. To extend the stability region for monodisperse droplet generation in such a space-limited probe at ultra-low nL/min flow rates, we varied the T-junction angle, parameter that is typically omitted from consideration for larger channels. In a series of experiments, we found that increase of the T-junction angle increases the critical capillary number separating squeezing and jetting segmentation regimes. With optimized geometry, we demonstrated generation of monodisperse pL-volume droplets in silicon nanofluidic channels. Finite element analysis indicated that these effects are due to interplay between differential pressure and viscous shear forces.
为了监测神经化学物质,同时最大限度地减少脑损伤,开发了一种微透析系统,其流体通道尺寸为5 μm-半径,可容纳在15x50 μm2的硅神经探针中。利用液滴生成来阻止泰勒色散,以获得高时间分辨率。为了扩大在这样一个空间有限的探针中以超低nL/min流速产生单分散液滴的稳定区域,我们改变了t结角,这一参数通常在考虑较大通道时被忽略。在一系列的实验中,我们发现t结角的增加增加了分离挤压和喷射分割的临界毛细数。通过优化几何结构,我们展示了在硅纳米流体通道中产生单分散的pl体积液滴。有限元分析表明,这些影响是由于压差和粘性剪切力之间的相互作用。
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引用次数: 1
Effects of Disc-Shaped Piezoelectric Size Reduction on Resonant Inductorless DC-DC Converter 圆盘形压电尺寸减小对谐振式无电感DC-DC变换器的影响
B. Pollet, Mustapha Touhami, G. Despesse, F. Costa
This paper studies the impact of disc-shaped piezoelectric resonator dimensions on a non-isolated inductorless piezoelectric DC-DC converter. An analytical model, linking geometrical parameters to output power and efficiency is introduced. This later reveals the benefits of reducing the thickness and diameter of the piezoelectric disk. Five piezoelectric discs with different dimensions are tested and compared in experimental works, giving very high efficiency up to 98% and output power up to 1.7 W. An exceptional power density of 366 W.cm-3 was measured at 450 kHz for a 25-30 Volt conversion with an efficiency of 81%.
本文研究了盘形压电谐振腔尺寸对非隔离无电感式压电DC-DC变换器的影响。介绍了将几何参数与输出功率和效率联系起来的解析模型。这揭示了减小压电片的厚度和直径的好处。在实验工作中对5个不同尺寸的压电片进行了测试和比较,效率高达98%,输出功率高达1.7 W。在450 kHz下,在25-30伏特转换时,测量到的功率密度为366 w - cm-3,效率为81%。
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引用次数: 2
Therapeutic and Side Effects Modeling of Electrolytic Cancer Ablation Therapy Using Organ-on-a-Chip 基于芯片器官的电解癌症消融治疗及副作用建模
Moonchul Park, Jong man Yoo, Albert Kim
Minimal invasive ablation therapy is an emerging treatment that enables locoregional tumor removal. One promising modality is electrolytic ablation therapy which induces cell death through local delivery of low-energy direct current. However, the realization of electrolytic ablation in the clinic has hampered by not-well-defined efficacy and mechanism. In this paper, we introduce a Multi-Organoid-on-a-Chip (MOC) that enables the modeling of electrolytic ablation therapy. The evaluated efficacy of electrolytic ablation on pancreatic cancer organoids revealed a 0.14 %/min cell death, while the side effects on neighboring, normal liver organoids inflicted minimal cell death (0.001 %/min). The in vitro results demonstrate a mechanism of the cell death is mainly due to locoregional pH change, and side effects due to byproducts of the electrochemical reaction are minimal.
微创消融术是一种新兴的治疗方法,可以切除局部肿瘤。一种很有前景的方式是电解消融疗法,它通过局部输送低能量的直流电诱导细胞死亡。然而,电解消融的疗效和机制尚不明确,阻碍了其在临床上的实现。在本文中,我们介绍了一个多器官芯片(MOC),使电解消融治疗的建模。电解消融对胰腺癌类器官的疗效评估显示,细胞死亡率为0.14% /min,而对邻近正常肝类器官的副作用造成的细胞死亡率最小(0.001 %/min)。体外实验结果表明,细胞死亡的机制主要是由局部pH变化引起的,电化学反应的副产物引起的副作用很小。
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引用次数: 0
Fabrication of Partly Encapsulated Vertical Nanoelectrodes for an Intracellular Microelectrode Array 细胞内微电极阵列部分封装垂直纳米电极的制备
Sonja Allani, A. Jupe, H. Kappert, H. Vogt
In this work, a concept and proof of principle regarding a fabrication technique for vertical nanoelectrodes is presented. CMOS-compatible processes for the fabrication of three-dimensional tubes which are partly encapsulated by an insulation layer are conceived. An extended sacrificial layer technique using deep reactive ion etching (DRIE) and atomic layer deposition (ALD) of encapsulation and electrode material was developed. Additional spacing techniques for tapering of electrode diameter and tip post-lithographically are investigated. Finally, free-standing nanoelectrodes and test structures were produced. The resulting tunable nanoelectrode array can lead to a novel device for a bidirectional interface between integrated circuits and living cells.
在这项工作中,提出了一个关于垂直纳米电极制造技术的概念和原理证明。设计了一种与cmos兼容的三维管制造工艺,该三维管部分被绝缘层封装。提出了一种基于深度反应离子刻蚀(DRIE)和原子层沉积(ALD)的扩展牺牲层技术。另外间距技术的电极直径锥形和尖端后光刻进行了研究。最后,制作了独立的纳米电极和测试结构。由此产生的可调谐纳米电极阵列可用于集成电路和活细胞之间的双向接口。
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引用次数: 0
Ultra-Sensitive OPTO-Piezoresistive Sensors Utilising 3C-SiC/Si Heterostructures 利用3C-SiC/Si异质结构的超灵敏光电压阻传感器
T. Nguyen, T. Dinh, Abu Riduan Md Foisal, Hoang‐Phuong Phan, Tuan‐Khoa Nguyen, N. Nguyen, D. Dao
Here we report for the first time an ultra-sensitive opto-piezoresistive effect in cubic silicon carbide (3C-SiC) nanofilms grown on silicon (Si). The sensitivity of the sensor was significantly enhanced by coupling the photovoltaic effect and controlling distribution of hole/electron in semiconductors. By applying this method, the gauge factor (GF) of strain sensors can be improved at least three orders of magnitude compared to conventional MEMS sensor. A GF of approximately 58,000 was observed, which is the highest GF reported for semiconductor piezoresistive sensors to date. Consequently, our findings can be deployed to develop ultra-sensitive mechanical sensors and MEMS/NEMS sensing applications.
本文首次报道了在硅(Si)上生长的立方碳化硅(3C-SiC)纳米膜的超灵敏光压阻效应。通过耦合光电效应和控制半导体中空穴/电子的分布,显著提高了传感器的灵敏度。与传统MEMS传感器相比,该方法可将应变传感器的测量因子(GF)提高至少三个数量级。观察到的GF约为58,000,这是迄今为止半导体压阻式传感器报道的最高GF。因此,我们的研究结果可以用于开发超灵敏的机械传感器和MEMS/NEMS传感应用。
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引用次数: 2
Fabrication and Integration of Binary Phased Fresnel Lens and Micro Linear Actuator for IR Laser Beam Scanning Application 用于红外激光束扫描的二元相位菲涅耳透镜和微线性驱动器的制造与集成
Hsueh-Yu Lu, Chi-En Lu, Zi-Rong Huang, Shihwei Lin, Sung-Cheng Lo, Rongshun Chen, W. Fang
This study presents a MEMS IR-laser beam scanning system consisted of the micro Fresnel lens and linear comb actuators. The merits of this study is to fabricate and further integrate the binary phase Fresnel lens, micro springs, and micro electrostatic actuators through the silicon micromachining processes to achieve the proposed IR-laser beam scanning system. Thus, the difficulty and problem resulted from assembly can be prevented. The proposed IR-laser beam scanner is a spring-mass system driven by linear comb-drive actuators, and operates at the resonant frequency to enlarge the scanning angle. Measurements indicate the scanner has a resonant frequency of ~2 kHz (exceeds the millisecond minimum response time requirement for application), and a displacement of greater than ±20μm at a driving voltage of VDC=12.5V, Vpp=18V. Moreover, the 1550 nm infrared laser beam has a deflection angle of ±6.84°.
提出了一种由微菲涅耳透镜和线性梳状驱动器组成的MEMS红外激光束扫描系统。本研究的优点在于通过硅微加工工艺将二相菲涅耳透镜、微弹簧和微静电致动器制作并进一步集成,以实现所提出的红外激光束扫描系统。这样,就可以避免装配带来的困难和问题。本文提出的红外激光束扫描器是由线性梳状驱动器驱动的弹簧-质量系统,在谐振频率下工作以扩大扫描角度。测量结果表明,在VDC=12.5V, Vpp=18V的驱动电压下,该扫描仪的谐振频率为~2 kHz(超过应用所需的毫秒级最小响应时间要求),位移大于±20μm。1550 nm红外激光束的偏转角为±6.84°。
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引用次数: 4
A 3-Axis Catch-and-Release Gyroscope with Pantograph Vibration for Low-Power and Fast Start-Up Applications 用于低功耗和快速启动应用的具有受电弓振动的三轴捕获和释放陀螺仪
A. Yuzawa, R. Gando, K. Masunishi, E. Ogawa, Hiroki Hiraga, Y. Tomizawa, T. Itakura, T. Ikehashi
This paper presents the first 3-axis MEMS gyroscope that employs intermittent free vibration realized by a "Catch-and-Release (CR)" method. While CR enables drive power reduction and instant start-up, its application to multi-axis tuning-fork (TF) gyroscope is not straightforward, since the increased degrees-of-freedom is likely to induce hazardous beat during the free vibration. To prevent this, a pantograph structure is introduced, in which drive motion is constrained by fixed-length joints, thereby eliminating the spurious beat. The fabricated gyroscope shows 3-axis sensitivities of 0.3-0.6 aF/dps and <2% cross-axis sensitivities. The consecutive CR operation with a release DC voltage at 25 V and a high Q factor of 440k at 20 kHz of pantograph mode are confirmed.
本文提出了首个采用“抓放”方法实现间歇自由振动的三轴MEMS陀螺仪。虽然CR可以降低驱动功率和即时启动,但它在多轴音叉陀螺仪上的应用并不简单,因为增加的自由度可能会在自由振动期间产生危险的振动。为了防止这种情况,引入了受电弓结构,其中驱动运动受到固定长度关节的约束,从而消除了虚假节拍。所制备的陀螺仪三轴灵敏度为0.3 ~ 0.6 aF/dps,跨轴灵敏度<2%。在受电弓模式下,在释放直流电压为25 V和高Q因数为440k的情况下,连续CR操作得到了证实。
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引用次数: 2
High-Temperature Piezoelectric Pressure Sensors for Hypersonic Flow Measurements 用于高超声速流量测量的高温压电压力传感器
Yoonho Seo, Donghwan Kim, N. Hall
This paper presents a microelectromechanical-system (MEMS) piezoelectric pressure sensor for measurements in hypersonic flows at extreme temperatures (>1000 °C). 700-µm diameter diaphragms are surface- and bulk-micromachined and employ aluminum nitride as the sensing material due to its potential for high-temperature operation. Novelty claims include the following: (1) First demonstration of MEMS piezoelectric pressure sensor to capture hypersonic-flow-specific features in field measurements, including shock waves and second-mode instabilities associated with laminar-to-turbulent transition, (2) Successful audio capture while the sensor is immersed in a butane flame, demonstrating operation at extreme temperatures, and (3) First dynamic pressure sensor to include on-diaphragm thin-film platinum temperature sensors for high-temperature readout.
本文提出了一种用于测量极端温度(>1000°C)高超声速流动的微机电系统(MEMS)压电压力传感器。直径700微米的膜片采用表面和本体微机械加工,并采用氮化铝作为传感材料,因为它具有高温操作的潜力。新颖性权利要求包括以下内容:(1)首次展示了MEMS压电压力传感器在现场测量中捕捉高超声速流动特征,包括激波和与层流到湍流过渡相关的第二模不稳定性;(2)在传感器浸入丁烷火焰时成功捕获音频,演示了在极端温度下的操作;(3)首次展示了包括膜片薄膜铂温度传感器的动态压力传感器,用于高温读数。
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引用次数: 8
Strain Sensor Based on Optical Intensity Change Through the Carbon Nanotube Embedded Elastomer 基于碳纳米管嵌入弹性体光强变化的应变传感器
Jimin Gu, D. Kwon, Junseong Ahn, I. Park
In this research, the 3D printed package for optical transmittance change base strain sensor was developed. Optical transmittance based strain sensor is consisted by light source, light detector and functional film which transmittance changed by the external strain. Functional film is carbon nanotube embedded elastomer and it changes its visible light transmittance by the strain. To adjust the optical strain sensor on the human motion detection, we positioned light source and detector in the sensor package. To achieve this problem, we adopted the 3D printed polylactic acid (PLA) package for fabricating ring type strain sensor for finger bending detection.
在本研究中,开发了用于光学透射率变化基应变传感器的3D打印封装。基于光透过率的应变传感器是由光源、光探测器和透过率随外部应变变化的功能薄膜组成。功能薄膜是碳纳米管嵌入弹性体,通过应变改变其可见光透过率。为了调整人体运动检测上的光学应变传感器,我们将光源和探测器放置在传感器封装中。为了解决这一问题,我们采用3D打印聚乳酸(PLA)封装制造用于手指弯曲检测的环形应变传感器。
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引用次数: 1
期刊
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
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