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2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)最新文献

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In-Situ Transmission Electron Microscopy Coupled with Resonant Microcantilever for Comprehensive Evaluating Sulfurization Performance of Zinc Oxide Nanowires 原位透射电镜耦合谐振微悬臂综合评价氧化锌纳米线的硫化性能
Xueqing Wang, P. Xu, Haitao Yu, Xinxin Li
This paper reports a new technique with in-situ transmission electron microscopy (in-situ TEM) and resonant microcantilever to comprehensively evaluate sulfurization performance of ZnO nanowires. Herein, in-situ TEM is used to real-time observe the sulfurization process of ZnO nanowires under SO2-contained atmosphere. Based on temperature-varying micro-gravimetric method, thermodynamic interaction between ZnO nanowires and SO2 molecules is quantitatively evaluated by resonant microcantilever. By exposing the ZnO nanowires sample to SO2-contained atmosphere, a thick shell layer of ZnSO3 can be formed onto the surface of ZnO nanowires and a novel core-shell nanowire structure of ZnO@ZnSO3 is obtained finally. According to our comprehensive evaluation results, the ZnO nanowires sample with 100 nm diameter exhibits high reactive to SO2 molecules and is suitable for SO2 capture and storage.
本文报道了一种利用原位透射电镜和谐振微悬臂综合评价氧化锌纳米线硫化性能的新技术。本文采用原位透射电镜实时观察了ZnO纳米线在so2气氛下的硫化过程。基于变温微重法,利用谐振微悬臂定量评价了ZnO纳米线与SO2分子之间的热力学相互作用。将ZnO纳米线样品暴露在含so2的气氛中,可以在ZnO纳米线表面形成一层较厚的ZnSO3壳层,最终得到一种新型的ZnO@ZnSO3核壳纳米线结构。综合评价结果表明,直径为100 nm的ZnO纳米线样品对SO2分子具有较高的反应性,适合于SO2的捕获和储存。
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引用次数: 0
Nanoelectromechanical Logical Gates Utilising Selective Tungsten Chemical Vapor Deposition 利用选择性钨化学气相沉积的纳米机电逻辑门
N. Toan, Dong Zhao, N. Inomata, M. Toda, Yunheub Song, T. Ono
NAND and NOR logical gates based on the electrostatically driven silicon nanoelectromechanical (NEM) switches coated tungsten (W) are designed, fabricated and evaluated. A selectively conformal W deposition on high aspect ratio silicon structures is investigated. Logical gates are successfully fabricated and all their functions have been proved. This work opens the possibility not only for producing the complex mechanical logic systems but also for a way to reducing capacitive gap width.
设计、制作并评价了基于涂覆钨的静电驱动硅纳米机电(NEM)开关的NAND和NOR逻辑门。研究了高纵横比硅结构上的选择性保形W沉积。成功地制作了逻辑门,并对其功能进行了验证。这项工作不仅为制造复杂的机械逻辑系统提供了可能性,而且为减小电容间隙宽度开辟了途径。
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引用次数: 0
Temperature Difference Measurement Across Mems Based Nanogap Created by Cleavage of Silicon for Thermionic Generation 热离子产生用硅解理产生的基于Mems纳米隙的温差测量
Masaki Shimofuri, Y. Hirai, T. Tsuchiya, O. Tabata
Thermionic generation using nanogaps may use for energy harvesting at room temperature. Thermionic generation requires nanogap with a gap distance of several nm to several tens nm, and it is desirable that the opposing surfaces of the gap be parallel and smooth with a large area. We fabricated a 57 nm nanogap of 21.6(4.32×5.0) μm2 by cleaving a single crystal silicon beam installed in MEMS and measured the temperature difference between gap by Raman microscopy. In the experiment, the heat transfer via nanogap was confirmed to be very small.
利用纳米隙产生热离子可用于室温下的能量收集。热离子的产生需要具有几nm到几十nm的间隙距离的纳米隙,并且希望间隙的相对表面平行且光滑且面积大。我们在MEMS中切割单晶硅光束,制造出21.6(4.32×5.0) μm2的57 nm纳米间隙,并用拉曼显微镜测量了间隙之间的温差。实验证实,通过纳米间隙的换热很小。
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引用次数: 0
Novel All-Solid-State Soil Nutrient Sensor Using Nanocomposite of Poly(3-Octyl-Thiophene) and Molybdenum Sulfate 基于聚(3-辛基-噻吩)和硫酸钼纳米复合材料的新型全固态土壤养分传感器
Md. Azahar Ali, Xinran Wang, Yuncong Chen, Yueyi Jiao, M. Castellano, James c. Schnable, P. Schnable, Liang Dong
Nitrate is a major macronutrient for plant growth. There is a high demand to develop robust, reliable, and maintenance-free soil sensors for long-term monitoring of nitrate variations in field. An ion-selective membrane-based solid-state nitrate sensor is developed using poly(3-octyl-thiophene)-molybdenum disulfide nanocomposite as an ion-to-electron transducing layer. The sensor offers a high sensitivity of 64 mV/decade, a dynamic range of 1–1500 ppm NO3--N, and an improved selectivity for nitrate detection in soils. The sensor has demonstrated the ability to continuously monitor soil nitrate concentrations over a period of four weeks.
硝酸盐是植物生长的重要营养元素。开发可靠、耐用、免维护的土壤传感器用于田间硝酸盐变化的长期监测是一个迫切需要。采用聚3-辛基噻吩-二硫化钼纳米复合材料作为离子-电子转导层,研制了一种离子选择性薄膜固体硝酸盐传感器。该传感器具有64 mV/ 10年的高灵敏度,1-1500 ppm NO3—N的动态范围,并提高了土壤中硝酸盐检测的选择性。该传感器已经证明能够在四周内连续监测土壤硝酸盐浓度。
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引用次数: 2
Strain-Insensitive Soft Pressure Sensor for Health Monitoring Application Using 3D-Printed Microchannel Mold and Liquid Metal 应变不敏感软压力传感器用于健康监测应用,使用3d打印微通道模具和液态金属
Kyuyoung Kim, Jungrak Choi, Y. Jeong, Minseong Kim, I. Cho, Seunghwan Kim, Y. Oh, I. Park
In this research, we introduce a strain-insensitive soft pressure sensor using 3D-printed microchannel mold and liquid metal for health monitoring applications. Our soft pressure sensor consists of elastomer and liquid metal for its intrinsic stretchable property. Also, serpentine geometric pattern of the microchannel enabled the sensor to be strain-insensitive for stable signal response and recovery in wearable applications. Various experiments for sensor characterizations were conducted and the study of FEM simulation verified the strain-insensitive behavior of serpentine pattern. As a health monitoring application, body pressure distribution was monitored using several pressure sensors attached on the clothes and the body pressures were compared according to various lying conditions.
在这项研究中,我们介绍了一种应变不敏感的软压力传感器,该传感器采用3d打印微通道模具和液态金属,用于健康监测应用。我们的软压力传感器由弹性体和液态金属组成,具有固有的可拉伸特性。此外,微通道的蛇形几何图案使传感器对应变不敏感,可以在可穿戴应用中实现稳定的信号响应和恢复。进行了各种传感器表征实验和有限元模拟研究,验证了蛇形图案的应变不敏感特性。作为一种健康监测应用,我们利用附着在衣服上的多个压力传感器来监测人体压力的分布,并根据不同的躺卧条件对人体压力进行比较。
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引用次数: 3
Novel Concept for Room Temperature NO2 Detection: Using Metal Oxides as Resistive Gas Dosimeters 室温NO2检测的新概念:使用金属氧化物作为电阻气体剂量计
Ricarda Wagner, D. Schönauer-Kamin, R. Moos
In this work, a novel concept for resistive room temperature NO2 sensing is introduced with special respect to concentrations in the ppb-range. The sensor measures directly the dose of a target gas. The actual concentration can be obtained from the time derivative. ZnO, a well-known material for gas sensing, is used to demonstrate the feasibility.
在这项工作中,引入了一种新的概念,用于电阻室温NO2传感,特别是在ppb范围内的浓度。传感器直接测量目标气体的剂量。实际浓度可由时间导数得到。氧化锌是一种众所周知的气体传感材料,用于证明其可行性。
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引用次数: 0
Droplet Delivery Control for Surface Acoustic Wave Nebulization Mass Spectrometry 表面声波雾化质谱的液滴输送控制
Di Sun, K. Böhringer, Matthew Sorensen, Erik Nilsson, D. Goodlett
We present a novel atomizer using standing wave type surface acoustic wave nebulization (SAWN). Compared with progressive wave SAWN, the standing wave SAWN creates smaller drop sizes. We integrate droplet delivery control functionality with anisotropic ratchet conveyors (ARC) on top of the SAWN surface, which employs micro-sized hydrophilic patterns on hydrophobic Cytop coatings. By adopting Parylene-C as a stencil mask, the hydrophobicity of Cytop does not degrade during fabrication. Droplet movement, merging, mixing and nebulizing are demonstrated as a lab-on-chip platform.
提出了一种新型的驻波式表面声波雾化(SAWN)雾化器。与进行波锯相比,驻波锯产生的液滴尺寸更小。我们将液滴输送控制功能与SAWN表面上的各向异性棘轮输送机(ARC)集成在一起,SAWN表面在疏水性Cytop涂层上采用微型亲水图案。通过采用聚苯乙烯- c作为模板掩膜,Cytop的疏水性在制作过程中不会降低。液滴运动、合并、混合和雾化在芯片实验室平台上进行了演示。
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引用次数: 1
Film Morphology Effect on VOC Sensor Performance Fabricated by Drop-On-Demand Inkjet-Printing 薄膜形态对按需喷墨打印制造VOC传感器性能的影响
M. Kiaee, T. Maeder, J. Brugger
This paper presents a sensor for detecting volatile organic compounds with an inkjet-printed composite. The sensing material is composed of polystyrene (35 kg/mol molecular weight) and a high structure carbon black, Ketjenblack EC-600JD. We used a dual-solvent system for ink formulation and compared its print morphology, and sensing performance with a single-solvent system. The dual solvent system improved droplet formation and minimized coffee ring formation. The sensor response to acetone and ethanol was studied. We observed a 2-fold improved sensitivity due to the absence of the coffee ring effect, which is presumably linked to more uniformity of the surface and fewer variations in the film thickness. Moreover, a superior sensor response/recovery time was obtained by using a dedicated print strategy, e.g., inter-droplet spacing and print pattern layout.
本文介绍了一种用于检测挥发性有机化合物的喷墨打印复合材料传感器。传感材料由聚苯乙烯(35 kg/mol分子量)和高结构炭黑Ketjenblack EC-600JD组成。我们使用双溶剂系统作为油墨配方,并将其打印形态和传感性能与单溶剂系统进行了比较。双溶剂体系改善了液滴的形成,减少了咖啡环的形成。研究了传感器对丙酮和乙醇的响应。由于没有咖啡环效应,我们观察到灵敏度提高了2倍,这可能与表面更均匀和膜厚度变化更少有关。此外,通过使用专用的打印策略,如液滴间距和打印图案布局,获得了优越的传感器响应/恢复时间。
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引用次数: 2
Fluidic Self-Assembly Transfer Technology for Micro-Led Display 微型led显示屏的流体自组装传输技术
Seongkyu Cho, Daewon Lee, Sunghoon Kwon
In this paper, we present a demonstration of high yield Fluidic Self-Assembly (FSA) technology to transfer gallium nitride (GaN) microchips which can be used for Micro-LED display. The low melting point alloy on the substrate and the metal electrode of the chip were assembled in heated solution by a simple shaking motion. More than 19,000 blue GaN microchips with 45um in diameter were precisely assembled at 99.90% yield within 1 min. At the chip sizes below 50um, this dramatic improvement in assembly yield was achieved by using a new assembly solution and chip designs. This low cost and fast demonstration has proven that FSA is a suitable mass transfer technology which is applicable to Micro-LED display after some further development.
在本文中,我们展示了一种高产量流体自组装(FSA)技术来转移氮化镓(GaN)微芯片,该芯片可用于微型led显示。在加热的溶液中,通过简单的摇动运动组装衬底上的低熔点合金和芯片的金属电极。19,000多个直径为45um的蓝色GaN微芯片在1分钟内以99.90%的良率精确组装。在芯片尺寸小于50um的情况下,通过使用新的组装解决方案和芯片设计,组装良率得到了显着提高。这一低成本、快速的演示证明了FSA是一种适合于微型led显示的传质技术。
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引用次数: 3
A Novel Out-of-Plane Electrothermal Bistable Microactuator 一种新型面外电热双稳态微执行器
Liang Zhou, Huikai Xie
This paper reports an out-of-plane bistable electrothermal microactautor that is comprised of inverted-series-connected (ISC) Cu/W-based multimorphs. S-shaped ISC multimorphs have been previously employed for generating large vertical displacement. In this work, the ISC multimorphs have been engineered into a warped shape via pre-stressed W and unbalanced SiO2 encapsulation layers. Electrothermal bistable actuators based on the warped ISC multimorphs have been fabricated and tested. A bistable vertical displacement of 25 μm has been obtained.
本文报道了一种面外双稳态电热微致动器,该微致动器由铜钨基反串联多晶片组成。s形ISC多晶片以前被用于产生大的垂直位移。在这项工作中,ISC多晶片通过预应力W和不平衡SiO2封装层被设计成翘曲形状。制作并测试了基于翘曲ISC多晶片的电热双稳致动器。得到了25 μm的双稳态垂直位移。
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引用次数: 0
期刊
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
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