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2019 20th International Conference on Electronic Packaging Technology(ICEPT)最新文献

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Three-dimensional ceramic substrate prepared by repeated lithography and electroforming 通过重复光刻和电铸制备三维陶瓷基板
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245775
Zizhou Yang, Yang Peng, Hao-Chun Cheng, Chen Liu, Mingxiang Chen
In this work, three dimensional direct plated copper (3DPC) ceramic substrate prepared by repeated ultraviolet (UV) depth lithography and electroforming is proposed. The effects of different electroforming parameters including current density, stirring speed, and temperature were evaluated by internal stress and electroforming rate using a L9(34) orthogonal experiment. Range analysis and analysis of variance (ANOVA) were employed to estimate the contribution of each factor to the overall response. The optimal electrodeposition parameters were the current density of 4 ASD, the stirring speed of 1200 rpm, and the temperature of 50 °C. Furthermore, the microstructure, hermeticity, and thermal reliability of 3DPC substrate were researched. The results showed the 3DPC substrate had excellent hermeticity and the strong bonding strength between dam and flat DPC substrate even after 30 thermal cycles. The above results demonstrated that 3DPC substrate could be considered as a reliable substrate for UV-LED hermetic packaging.
本文提出了用重复紫外深度光刻和电铸法制备三维直接镀铜(3DPC)陶瓷基板。采用L9(34)正交试验,考察了电流密度、搅拌速度、温度等不同电铸参数对合金内应力和电铸速率的影响。采用极差分析和方差分析(ANOVA)来估计每个因素对总体反应的贡献。最佳电沉积参数为电流密度为4 ASD,搅拌速度为1200 rpm,温度为50℃。进一步研究了三维pc基板的微观结构、密封性和热可靠性。结果表明,经过30次热循环后,3DPC基板仍具有良好的密封性,且与平板DPC基板之间的粘结强度较强。以上结果表明,3DPC基板可以作为UV-LED密封封装的可靠基板。
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引用次数: 1
Analysis of residual stress after reflow soldering of QFN package QFN封装回流焊后残余应力分析
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245833
Sheng-jun Zhao, Chunyue Huang, Xiang-qiong Tang, Ying Liang
The finite element analysis model of residual stress after reflow soldering of QFN lead-free solder joints is established in this paper, and the residual stress after reflow soldering was analyzed under thermal structural coupling conditions. With the solder joint height, lead pitch, chip thickness and PCB thickness as design factors, 9 solder joints model of QFN with different levels combination were designed and the maximum residual stress values of the 9 solder joints model of QFN were obtained by simulation analysis. And carried out the range analysis for structural parameters of the QFN solder joints model. The results show that the residual stress of QFN solder joints is unevenly distributed. The maximum residual stress appears in the contact point between the solder joints and the chip and farthest from the chip center. The order of the influence for residual stress after reflow soldering from large to small is solder joint height, chip thickness, PCB thickness and lead pitch. Provides theoretical guidance for controlling residual stress after reflow soldering of QFN.
建立了QFN无铅焊点回流焊后残余应力的有限元分析模型,分析了热结构耦合条件下的回流焊后残余应力。以焊点高度、引脚间距、芯片厚度和PCB厚度为设计因素,设计了9种不同层次组合的QFN焊点模型,并通过仿真分析得到了9种QFN焊点模型的最大残余应力值。并对QFN焊点模型的结构参数进行了极差分析。结果表明:QFN焊点残余应力分布不均匀;最大残余应力出现在焊点与芯片的接触点和离芯片中心最远的地方。对回流焊后残余应力的影响从大到小依次为焊点高度、芯片厚度、PCB板厚度、引脚间距。为QFN回流焊后残余应力的控制提供理论指导。
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引用次数: 0
Development of Laser-Induced Deep Etching Process for Through Glass Via 玻璃通孔激光诱导深度蚀刻工艺的研究进展
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245208
Li Chen, Heng Wu, Mingchuan Zhang, Feng Jiang, Tian Yu, Daquan Yu
2.5D glass interposer technology based on through glass via (TGV) becomes a hot research topic on account of good electrical property and CTE (coefficient of thermal expansion) mismatch [1]. In this paper, the Laser-Induced Deep Etching (LIDE) technology is used to manufacture TGVs on glass substrate. The LIDE process can be mainly divided into two steps: Initially, picosecond laser is used to modified the glass substrate. Then, using 10% HF etch the modified glass substrate. On account of denaturation of the laser irradiation area, the area where is exposed to the laser will be etched more quickly than unexposed area in the process of wet etching. In consideration of the properties of various glass, SCHOTT AF 32® eco glass and CORNING HPFS 7980 fused silica glass is selected as the substrate of this study. The result show that the LIDE process is a promising high-speed TGVs manufacturing process which can fabricate TGV of high verticality (the taper angle is approximately 9° on AF 32® eco glass and 1° on CORNING HPFS 7980 fused silica glass) at a high speed (289 TGV/s). Ultimately, the stability of the break strength of the LIDE processed glass substrates is verified by the results of ANSYS simulation and three-point bending test.
基于透玻璃通孔(TGV)的2.5D玻璃中间体技术因其良好的电性能和热膨胀系数(CTE)失配而成为研究热点[1]。本文采用激光诱导深度刻蚀(LIDE)技术在玻璃基板上制备tgv。LIDE工艺主要分为两个步骤:首先,使用皮秒激光对玻璃基板进行修饰。然后,用10% HF蚀刻改性玻璃基板。在湿法蚀刻过程中,由于激光照射区域的变性,激光照射区域的蚀刻速度比未照射区域快。考虑到各种玻璃的性能,我们选择SCHOTT AF 32®生态玻璃和康宁HPFS 7980熔融石英玻璃作为本研究的基板。结果表明,LIDE工艺是一种很有前途的高速TGV制造工艺,可在高速(289 TGV/s)下制造高垂直度TGV (AF 32®生态玻璃的锥度角约为9°,康宁HPFS 7980熔融石英玻璃的锥度角约为1°)。最后,通过ANSYS仿真和三点弯曲试验结果验证了LIDE加工玻璃基板断裂强度的稳定性。
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引用次数: 3
Study on the Effect of Thin Resistive Film’s Structure on the Reliability of Automotive Electronics 电阻薄膜结构对汽车电子可靠性影响的研究
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245146
Lin Daotan, Wang Yong, Xie Zhenfeng, Wu Qin, He Shengzong
Thin film resistor as a passive component, is widely used in automotive electronics, because of its smaller size, lower cost, high precision and low temperature coefficient. With the continuous development of new energy vehicle, the reliability of automotive electronics comes to be a focus. As a result, the stability and reliability of thin film resistor is being paid more and more attention nowadays. In this paper, the structure and manufacturing process of thin film resistor would be briefly introduced. The common failure modes of thin film resistor would be summarized. Moreover, a case study would be presented in this paper to show the effect of thin resistive film’s structure on the reliability of automotive electronics applications. In this case, the voltage of resistor under different working conditions was tested, and the generation of abnormal voltage in circuit was explained. According to the case, with the decrease of the number of resistor unit, the reliability of the resistor decreased. In order to improve the reliability of thin film resistor, the structural consistency of resistive film should be emphasized.
薄膜电阻器作为一种无源元件,因其体积小、成本低、精度高、温度系数低而广泛应用于汽车电子产品中。随着新能源汽车的不断发展,汽车电子的可靠性成为人们关注的焦点。因此,薄膜电阻器的稳定性和可靠性越来越受到人们的重视。本文简要介绍了薄膜电阻器的结构和制作工艺。总结了薄膜电阻器常见的失效模式。此外,本文还将通过一个实例来说明电阻薄膜的结构对汽车电子应用可靠性的影响。在这种情况下,测试了电阻器在不同工作条件下的电压,并解释了电路中异常电压的产生。根据实例,随着电阻器单元数量的减少,电阻器的可靠性降低。为了提高薄膜电阻器的可靠性,应重视电阻膜的结构一致性。
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引用次数: 0
Automatic production test separating system of ASIC with package ID detection 带封装ID检测的ASIC自动生产测试分离系统
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245269
Xiao Jun, Yi Wenshuang, Zhang Yuming, Yang Xiaoqiang, Huang Cheng, Ye Da
With the continuous development of IC (Integrated Circuit) technology, it has been widely used in all aspects of manufacture, production, consumption and so on, and IC filter as an important part of its production testing is directly related to the quality of IC, and with the wide application of automatic separating system of IC, production testing efficiency and quality was improved greatly. Domestic and international industrial separating systems are mainly developed for mass production and are suitable for civilian products in a single package. Due to its special requirements such as small batch size, multiple varieties, and data traceability, the research institutes ASIC(application-speciflc integrated circuit) is difficult to directly use industrial separating system. At the present time, package ID(identification) number was mainly detected by the naked eye and manual separating method was basically used in China. Therefore, there are many disadvantages such as low efficiency, error-prone, high cost, and the influence of human factors on the quality of IC.Due to the characteristics of the research institutes ASIC production, there are a large number of problems in product separating. In order to improve the production test efficiency and ensure the product quality, an automatic production test separating system of ASIC with package ID number detection has been developed. The system is based on the architecture of the embedded system platform and is mainly composed of the upper computer, the lower computer and the mechanical implementation. First of all, the upper computer software is implemented by the Virtual Basic language in the Virtual Studio platform. Secondly, The lower computer is based on the STM32F407IGH6 of ARM7 architecture, and is implemented by μC/OS III embedded OS(operating system) for mechanical part controlling and host computer interaction. At last, the mechanical part guarantees the test separating of different types of IC through high-magnification cameras, highresolution servo motors and high-precision screw mechanisms. Specially the package ID number detection system is implemented the detection algorithm through the NI-VDM module.Practical application has proved that the system is very stable and reliable, which greatly facilitates the detection of package ID number of IC, greatly reduces or avoids the occurrence of ASIC quality problems, greatly improves the efficiency of production testing, greatly meet the requirements of production, and has far-reaching practical significance.
随着IC (Integrated Circuit)技术的不断发展,已广泛应用于制造、生产、消费等各个方面,而IC滤波器作为其生产检测的重要组成部分,直接关系到IC的质量,而随着IC自动分离系统的广泛应用,生产检测效率和质量得到了极大的提高。国内外工业分离系统主要是为大批量生产而开发的,适用于单一包装的民用产品。由于其批量小、品种多、数据可追溯等特殊要求,科研院所专用集成电路(ASIC)难以直接应用于工业分离系统。目前国内主要以肉眼检测包裹ID(识别)号为主,基本采用人工分离方法。因此,存在着效率低、易出错、成本高、人为因素影响集成电路质量等诸多弊端。由于科研院所ASIC生产的特点,在产品分离方面存在着大量的问题。为了提高生产测试效率,保证产品质量,开发了一种具有封装ID号检测功能的ASIC自动生产测试分离系统。该系统基于嵌入式系统平台架构,主要由上位机、下位机和机械实现三部分组成。首先,上位机软件在Virtual Studio平台上使用Virtual Basic语言实现。其次,下位机基于ARM7架构的STM32F407IGH6,采用μC/OS III嵌入式操作系统实现机械部件控制和上位机交互。最后,机械部分通过高倍率摄像头、高分辨率伺服电机和高精度螺杆机构保证不同类型IC的测试分离。具体来说,包裹ID号检测系统是通过NI-VDM模块实现检测算法的。实际应用证明,该系统非常稳定可靠,极大地方便了IC封装ID号的检测,极大地减少或避免了ASIC质量问题的发生,极大地提高了生产检测的效率,极大地满足了生产的要求,具有深远的实际意义。
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引用次数: 0
Gate and barrier layer design of E-mode GaN HEMT with p-GaN gate structure p-GaN栅极结构的e模GaN HEMT的栅极和势垒层设计
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245737
Wanjie Li, Xianping Chen, Liming Wang, Xu Zhang, Xian-dong Li, Luqi Tao
Excellent material properties of gallium nitride (GaN) make it have broad application prospects in the fields of medium and low voltage consumer power, new energy vehicles, charging piles. The conventional GaN high electron mobility transistor (GaN HEMT) is in the ON-state at zero gate bias, which is inconsistent with the actual application requirements. So the regulation of the threshold voltage of GaN devices is currently the research hotspot. Among the existing methods, the p-GaN structure is relatively mature and has been applied in practical products, but there are still many problems in related research. This paper mainly studies the influence of some structural parameters of the device on its threshold voltage and saturation current. The structural parameters considered in this paper mainly include the barrier layer Al composition and the length of the p-GaN layer. The breakdown characteristics of the device after optimizing the structural parameters are simulated. The optimized device threshold voltage is 1.4V and the breakdown voltage is 650V.
氮化镓(GaN)优异的材料性能使其在中低压消费电源、新能源汽车、充电桩等领域具有广阔的应用前景。传统的GaN高电子迁移率晶体管(GaN HEMT)在零栅极偏置下处于on状态,这与实际应用要求不一致。因此氮化镓器件阈值电压的调节是目前研究的热点。在现有的方法中,p-GaN结构相对成熟,并已在实际产品中得到应用,但在相关研究中仍存在许多问题。本文主要研究了器件的一些结构参数对其阈值电压和饱和电流的影响。本文考虑的结构参数主要包括阻挡层Al的组成和p-GaN层的长度。对结构参数优化后的器件击穿特性进行了仿真。优化后的器件阈值电压为1.4V,击穿电压为650V。
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引用次数: 2
Effect of Er2O3 on the properties of AlN ceramics by tape casting Er2O3对带铸AlN陶瓷性能的影响
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245173
Hong-bo Bai, Xiao-hui Zhang, Ya-guang Wu, Yi-zheng Zhang, D. Zhao, Ling-su Gao
AlN is considered to be a promising substrate and packaging material for high power integrated circuits because of its high thermal conductivity, low dielectric constant, and thermal expansion coefficient close to that of silicon. In this paper, AlN green tape was manufactured by tape casting method. The effect of Er2O3 on the phase composition, thermal conductivity, microstructure and mechanical properties of AlN ceramics has been studied. X-ray diffraction was employed to identify the phases formed during sintering. The results showed that Er2O3 promoted the densification of AlN ceramics due to the formation of liquid phase Er3Al5O12 and ErAlO3. As the sintering temperature increased, one of the second phases Er3Al5O12 disappeared, reacting with Er2O3, and left the other second phase ErAlO3. AlN ceramics, sintered at 1820°C for 3h, presented improved thermal conductivity of 181W/(m•K) and bending strength up to 402MPa.
AlN具有导热系数高、介电常数低、热膨胀系数接近硅的特点,被认为是一种很有前途的大功率集成电路衬底和封装材料。本文采用铸模法制备了AlN绿带。研究了Er2O3对AlN陶瓷的相组成、导热性、显微组织和力学性能的影响。采用x射线衍射鉴定烧结过程中形成的相。结果表明:Er2O3通过液相Er3Al5O12和ErAlO3的形成促进了AlN陶瓷的致密化;随着烧结温度的升高,其中一种第二相Er3Al5O12消失,与Er2O3反应,留下另一种第二相ErAlO3。AlN陶瓷在1820℃下烧结3h,导热系数提高到181W/(m•K),抗弯强度达到402MPa。
{"title":"Effect of Er2O3 on the properties of AlN ceramics by tape casting","authors":"Hong-bo Bai, Xiao-hui Zhang, Ya-guang Wu, Yi-zheng Zhang, D. Zhao, Ling-su Gao","doi":"10.1109/ICEPT47577.2019.245173","DOIUrl":"https://doi.org/10.1109/ICEPT47577.2019.245173","url":null,"abstract":"AlN is considered to be a promising substrate and packaging material for high power integrated circuits because of its high thermal conductivity, low dielectric constant, and thermal expansion coefficient close to that of silicon. In this paper, AlN green tape was manufactured by tape casting method. The effect of Er<inf>2</inf>O<inf>3</inf> on the phase composition, thermal conductivity, microstructure and mechanical properties of AlN ceramics has been studied. X-ray diffraction was employed to identify the phases formed during sintering. The results showed that Er<inf>2</inf>O<inf>3</inf> promoted the densification of AlN ceramics due to the formation of liquid phase Er<inf>3</inf>Al<inf>5</inf>O<inf>12</inf> and ErAlO<inf>3</inf>. As the sintering temperature increased, one of the second phases Er<inf>3</inf>Al<inf>5</inf>O<inf>12</inf> disappeared, reacting with Er<inf>2</inf>O<inf>3</inf>, and left the other second phase ErAlO<inf>3</inf>. AlN ceramics, sintered at 1820°C for 3h, presented improved thermal conductivity of 181W/(m•K) and bending strength up to 402MPa.","PeriodicalId":6676,"journal":{"name":"2019 20th International Conference on Electronic Packaging Technology(ICEPT)","volume":"39 23","pages":"1-3"},"PeriodicalIF":0.0,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91404912","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Microstructural and mechanical reliability of a GaN/DBA die-attached module with Ag sinter joining in harsh thermal environments 恶劣热环境下银烧结连接GaN/DBA模附模块的显微组织和机械可靠性
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245830
Dongjin Kim, Chuantong Chen, K. Suganuma
This study was carried out to evaluate the high-temperature and long-term reliability of a GaN/DBA die-attached module with Ag sinter joining and with high temperature solder in a harsh thermal aging process. And its performance compared with high temperature Pb-5Sn solder. A GaN die was structurally sound bonded on a DBA substrate by using a micron/submicron Ag sinter paste and a high content lead solder, respectively. The assembled specimens were subjected to a thermal aging test up to 500 storage hours at 250 °C, then die-shear tested. The initial shear strength of the Ag sinter joint achieved above 42 MPa, the Pb-5Sn joint was above 37MPa. In case of the sintered Ag structure sustained durable die shear strength after 250 hours of the thermal aging. On the other hand, the Pb-5Sn joints exhibited significantly decreased shear strength after 250 and 500 hours of the thermal aging by 60%. Consequently, the Ag sinter joints strengthen during isothermal aging with a necking growth without any defects. Pb-5Sn solder joints formed the NixSnx IMCs by thermal aging. These microstructure characteristics have an important influence on the fracture mechanism, the tendency of fracture path was investigated by SEM-EDX. The thermal aging behavior of a GaN/DBA die-attached module will be addressed further in this paper.
本研究旨在评估一种采用银烧结和高温焊料的GaN/DBA模附模块在严酷热老化过程中的高温和长期可靠性。并将其性能与高温Pb-5Sn焊料进行了比较。采用微米/亚微米银烧结膏和高含量铅焊料分别在DBA衬底上结合了结构良好的GaN模具。将组装好的试样在250℃下进行长达500小时的热老化试验,然后进行模剪试验。Ag烧结接头初始抗剪强度达到42 MPa以上,Pb-5Sn接头初始抗剪强度达到37MPa以上。在经过250小时的热时效后,烧结的Ag结构具有持久的模抗剪强度。另一方面,Pb-5Sn接头在热时效250和500小时后,抗剪强度明显下降了60%。结果表明,在等温时效过程中,银烧结接头以颈状生长,无任何缺陷。Pb-5Sn焊点通过热时效形成NixSnx imc。这些微观结构特征对断裂机理有重要影响,利用SEM-EDX对断裂路径趋势进行了研究。本文将进一步研究GaN/DBA模附模的热老化行为。
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引用次数: 1
Color Purity Enhancement of Green Quantum Dot Light-Emitting Diodes Using the Blue Light Absorber Packaging Structure 利用蓝光吸收封装结构增强绿色量子点发光二极管的色纯度
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245160
Cunjiang Song, Xuewei Du, Jie Xuan, Zongtao Li, Jiasheng Li, Xinrui Ding
Quantum dots (QDs) have broad application prospects in display such as full color light-emitting diode (LED) devices due to their narrow emission half-peak width and high quantum yield. However, an ultra-high concentration of QD is required to eliminate the pumping light (typical blue light with short wavelength) for achieving high color purity, leading to significant reduction in the optical power of QDs. In this paper, we have introduced the blue light absorber (BLA) in green quantum dot-light emitting diodes (GQD-LEDs) to adjust the color coordinates. Results indicate that the increase of the QD concentration can eliminate the blue light and increase the color purity, while it simultaneously decreases of the optical power of QDs owing the reabsorption loss. The BLA layer has high absorption for short-wavelength light (less than 460 nm), which greatly reduces the optical power of blue light by 74% and leads to a large shift in the color coordinates from (0.17, 0.22) to (0.18, 0.47). Moreover, the BLA layer has a high transmittance for the long-wavelength light, thereby ensuring a high green optical power for BLA devices. Consequently, the proposed method has great potential for the future application of QD-LED in full color display.
量子点以其较窄的发射半峰宽度和较高的量子产率在全彩发光二极管等显示器件中具有广阔的应用前景。然而,为了实现高颜色纯度,需要超高浓度的量子点来消除泵浦光(典型的短波蓝光),导致量子点的光功率显著降低。本文介绍了绿色量子点发光二极管(gqd - led)中的蓝光吸收剂(BLA)来调节颜色坐标。结果表明,增加量子点浓度可以消除蓝光,提高颜色纯度,但同时由于重吸收损失,量子点的光功率降低。BLA层对短波长光(小于460 nm)有很高的吸收,使蓝光的光功率大大降低74%,导致色坐标从(0.17,0.22)到(0.18,0.47)的大位移。此外,BLA层对长波长的光具有较高的透过率,从而保证了BLA器件具有较高的绿色光功率。因此,该方法在未来的全彩色显示中具有很大的应用潜力。
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引用次数: 0
Sinterability improvement of hybrid silver sinter joining paste by adding silver nanoparticles 添加纳米银粒子改善杂化银烧结连接膏的烧结性能
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245827
T. Egawa, Hao Zhang, Takanori Kobatake, Yasuyuki Akai, Chuantong Chen, K. Suganuma
Silver sinter joining paste has been seen as the most promising candidate for die-attachment materials of next-generation power devices. However, there are still technique issues to be overcome before its actual utilization such as sinterability under various atmosphere and the lack of rapid sintering ability. In this research, on the basis of reported silver hybrid paste, an optimized paste composition which is composed of silver micron flakes, silver submicron particles, silver nanoparticles and ether-type solvent has been established. The newly developed paste has proper viscosity which can inhibit the leakage tendency of solvent during mask-printing. Its sintering property has been systematically evaluated and an omnipotent sinterability under various atmosphere has been observed. Moreover, the rapid sintering property drastically shorten the sintering temperature from at least 30 min to 10 min. These results suggest that the modified silver hybrid sinter joining paste can accelerate the further application of next-generation power devices owing to its obvious process advantage and excellent performance.
银烧结接浆料被认为是下一代电源器件中最有前途的模接材料。但在实际应用前,还存在各种气氛下的烧结性和快速烧结能力不足等技术问题。本研究在已有报道的银杂化浆料的基础上,建立了由银微米片、银亚微米颗粒、银纳米颗粒和醚型溶剂组成的最佳浆料结构。该浆料具有合适的粘度,可以抑制掩模印刷过程中溶剂的泄漏倾向。对其烧结性能进行了系统的评价,并观察到其在各种气氛下的全方位烧结性能。此外,其快速烧结性能将烧结温度从至少30 min大幅缩短至10 min。这些结果表明,改性银杂化烧结连接膏具有明显的工艺优势和优异的性能,可以加速下一代功率器件的进一步应用。
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引用次数: 0
期刊
2019 20th International Conference on Electronic Packaging Technology(ICEPT)
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