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2019 20th International Conference on Electronic Packaging Technology(ICEPT)最新文献

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On-chip heat dissipation design for high-power SiP modules with LTCC substrates 采用LTCC基板的大功率SiP模块片上散热设计
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245096
Pengfei Yin, Yujie Li, Peng Zhang, Gang Xiao, Hai Yuan
In a system-in-package (SiP), a large number of devices with different functions are integrated in a single package. A good cooling system is crucial for the performance of the SiP, especially when high-power devices are included. In this work, cooling for high-power SiP modules with low temperature co-fired ceramic (LTCC) substrates were studied. Metal pillar arrays as well as microfluidic cooling channels were embedded in the LTCC substrates to enhance the heat transfer process both passively and actively. The finite element method was used to perform multi-physics coupling simulations. The temperature distribution throughout the substrate and the chip as well as the fluid flow field distribution in the microchannel was analyzed. Various cooling strategies for the SiP were compared. When metal pillar arrays with a simple square-shaped microchannel were embedded in the substrate, the most efficient cooling was achieved under a hybrid cooling mechanism including high-efficiency heat conduction and liquid convection.
在SiP (system-in-package)协议中,将大量不同功能的设备集成到一个封装中。良好的冷却系统对于SiP的性能至关重要,特别是当包含高功率器件时。本文研究了低温共烧陶瓷(LTCC)衬底下大功率SiP模块的冷却问题。在LTCC基板中嵌入金属柱阵列和微流控冷却通道,以增强被动和主动传热过程。采用有限元方法进行了多物理场耦合仿真。分析了整个衬底和芯片的温度分布以及微通道内的流体流场分布。对SiP的不同冷却策略进行了比较。当将具有简单方形微通道的金属柱阵列嵌入衬底时,在高效热传导和液体对流的混合冷却机制下实现了最有效的冷却。
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引用次数: 2
Shear performance of microscale BGA structure Cu/Sn-3.0Ag-0.5Cu/Cu joints with shrinking volume at low and cryogenic temperatures 低温和低温下体积收缩的微型BGA结构Cu/Sn-3.0Ag-0.5Cu/Cu接头的剪切性能
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245195
Wang-yun Li, Guanghua Peng, Tianwen Cheng, H. Qin, Jia-Qiang Huang, Dao-Guo Yang
Shear deformation and fracture behavior of microscale BGA structure Cu/Sn-3.0Ag-0.5Cu/Cu joints with a pad diameter 320 μm and a joint height 220 μm and different solder ball diameters 600, 500 and 400 μm (i.e., different solder volumes) were investigated at a temperature from 25 to -120 ºC in this study. Results show that, when the solder ball diameter of the solder joint is 600 μm, the shear strength increases with the descending temperature; while, as the solder ball diameter of the solder joint decreases to 500 and 400 μm, a peak shear strength appeared at -100 and -80 ºC, respectively. Moreover, the fracture behavior of all the joints is temperature dependent. Regardless of the solder ball diameter, the joint fracture position keeps in the solder matrix at a higher temperature, which shifts to the interface between the solder and the interfacial Cu6Sn5 layer at a lower temperature, and the fracture mode shows a ductile-to-brittle transition with the descending temperature. Moreover, the temperature of the ductile-to-brittle transition is joint size dependent, which is lowered as the solder ball diameter decreases.
研究了焊盘直径为320 μm、焊头高度为220 μm、焊料球直径为600、500和400 μm(即不同焊料体积)的微尺度BGA结构Cu/Sn-3.0Ag-0.5Cu/Cu接头在25 ~ -120℃温度下的剪切变形和断裂行为。结果表明:当钎料球直径为600 μm时,钎料的抗剪强度随温度的降低而升高;当钎料球直径减小至500 μm和400 μm时,钎料抗剪强度在-100℃和-80℃出现峰值。此外,所有接头的断裂行为都与温度有关。无论焊料球直径如何,在较高温度下,接头断裂位置保持在焊料基体中,在较低温度下,断裂位置转移到焊料与界面Cu6Sn5层之间的界面上,并且随着温度的下降,断裂模式呈现韧脆转变。此外,韧脆转变的温度与接头尺寸有关,随着焊料球直径的减小而降低。
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引用次数: 2
Plasma Applications for Wafer Level Packaging Part 1 等离子体在晶圆级封装中的应用
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245794
Jack Q. Zhao
In this paper, typical plasma applications for WLP, such as improving Cu-PI interface adhesion, increasing the PI surface roughness, reducing the current leakage in WLP, the oxide removal from bump surface, avoiding microvoids between Cu seed layer and electric Cu plating layer, TSV cleaning, EMC removal from solder balls on wafer, and wafer-on-frame treatment, are mentioned. Some first-hand data are shown and discussed in the part 1 of this paper. The results indicate that plasma treatment is the recommended process for enhancing interface adhesion, roughening the surface, removing oxide on bumps, and avoiding microvoids in WLP.
本文介绍了等离子体在WLP中的典型应用,如提高Cu-PI界面的附着力、提高PI表面的粗糙度、减少WLP中的电流泄漏、去除凹凸表面的氧化物、避免Cu种层与电镀Cu层之间的微空洞、TSV清洗、去除晶圆上焊球的EMC以及晶圆上框处理。本文第一部分给出并讨论了一些第一手资料。结果表明,等离子体处理可以增强WLP的界面附着力,使表面粗糙化,去除凸起处的氧化物,避免微空洞。
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引用次数: 0
Thermal simulation and analysis of WBBGA packaging High-end Relay Protection Chip WBBGA封装高端继电保护芯片热仿真与分析
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245115
S. F. Han, X. Tang, D. J. Li, Y. Guan, B. Li, X. Y. Wang, D. Yang
The package of the High-end Relay Protection Chip is Wire Bonding BGA (WBBGA) with 257 inputs/outputs (I/Os). This paper investigated the thermal performance of the High-end Relay Protection Chip using a computational fluid dynamics (CFD) tool. Firstly, according to the initial thermal simulation results, the junction temperature of the package was 115.29 °C appeared on the Relay Protection chip as the environment temperature was 25 C. Then a parametric study was performed to investigate the junction temperatures. We analysed the influence of different parameters on the thermal performance, including Via count, Via coating thickness, Substrate area, Copper coating rate of substrate, Printed Circuit Board (PCB) area, Heat transfer coefficient of epoxy molding compound (EMC) and die attach (DA). Finally, an orthogonal experiment was designed. It’s found that the heat transfer coefficient of DA was the most significant factor on the thermal performance by variance analysis, in addition, an optimal collocation of the package structure and material parameters was obtained by range analysis. The junction temperature of the optimal package was reduced to 95.69 °C by 17%. The results of these simulations give a reasonable indication of how the package would perform in a Relay Protection equipments
高端继电保护芯片的封装是带257个输入/输出(I/ o)的线键合BGA (WBBGA)。本文利用计算流体动力学(CFD)工具研究了高端继电保护芯片的热性能。首先,根据初始热模拟结果,在环境温度为25℃时,继电保护芯片上出现的封装结温为115.29℃,然后对结温进行参数化研究。分析了通孔数、通孔涂层厚度、基板面积、基板铜涂层率、印刷电路板面积、环氧成型复合材料(EMC)传热系数和贴片(DA)等参数对热性能的影响。最后设计了正交试验。方差分析发现,DA的换热系数是影响热性能的最显著因素,极差分析得出了封装结构与材料参数的最优搭配。最优封装的结温降低了17%,达到95.69℃。这些模拟结果给出了一个合理的指示,如何封装将在继电保护设备
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引用次数: 0
Research on the influence of cover plate on structural reliability of the ceramic package for packaging SIP 盖板对SIP封装陶瓷封装结构可靠性的影响研究
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245260
Zhen-tao Yang, Bo Peng, Ling Gao
During the reliability experiment, the stress will be transferred to the ceramic package through the elastic deformation of the cover plate, because of the large size of the cover plate of the ceramic package for system in package, resulting in an obvious stress concentration phenomenon on the side wall of the package. The reliability test of the ceramic package after sealed was simulated and analyzed by using the finite element method. the material and the structure of cover plate for influence on the package structure reliability was studied , analyzed the influence of different plate structure on the form and distribution of stress of the ceramic package, evaluated the cover plate structure on the influence of the package structure reliability. It provides a reliable theoretical basis for the design of the cover plate of this kind of package. The problems such as porcelain crack of package or device failure caused by cover plate deformation due to unreasonable cover plate design are avoided. Reasonable cover plate structure plays an important role in solving the failure problem in reliability test and improving the reliability of devices.
在可靠性实验过程中,由于系统用陶瓷封装的盖板尺寸较大,应力会通过盖板的弹性变形传递到陶瓷封装上,导致封装侧壁出现明显的应力集中现象。采用有限元法对陶瓷封装密封后的可靠性试验进行了仿真分析。研究了盖板材料和盖板结构对封装结构可靠性的影响,分析了不同盖板结构对陶瓷封装应力形态和分布的影响,评价了盖板结构对封装结构可靠性的影响。为该类包装盖板的设计提供了可靠的理论依据。避免了由于盖板设计不合理导致的盖板变形造成的包装瓷裂或器件失效等问题。合理的盖板结构对解决可靠性试验中的失效问题,提高设备的可靠性具有重要作用。
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引用次数: 0
Research on Preparation Technology of Nano Glass-Particles for High Density TGV Application 高密度TGV用纳米玻璃颗粒制备技术研究
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245181
Xiaohui Du, Shuai Liu, Minjie Zhu
This paper reports a batch-mode preparation process of nano glass-particles for high density through glass via application. Compared to the state of the through glass via art, this preparation process allows the electrodes and the packaged structure to be same material, as well as the gap between the packaging electrodes to be less than 1 μm in theory. This process produces nano glass-particles in batches with wet ball grinding technology, and the purity of nano glass-particles can reach to be over 95%. The glass particles are filled in 20 μm electrodes gaps, and a high temperature step reflows the glass particles to a bulk. A high-density silicon column array is hermetically sealed to illustrate application of the process.
本文报道了一种通过应用批量制备高密度纳米玻璃颗粒的方法。与目前的透玻璃工艺相比,该工艺允许电极和封装结构使用相同的材料,并且封装电极之间的间隙在理论上小于1 μm。该工艺采用湿球磨技术批量生产纳米玻璃颗粒,纳米玻璃颗粒纯度可达95%以上。将玻璃颗粒填充在20 μm的电极间隙中,并通过高温步骤将玻璃颗粒回流成块体。高密度硅柱阵列是密封的,以说明该工艺的应用。
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引用次数: 1
Study on single-event burnout of SiC VDMOSFET: failure mechanism and influence factors SiC VDMOSFET单次烧坏的研究:失效机理及影响因素
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245733
Qiumei Li, Xianping Chen, Houcai Luo, Xian-dong Li, Xiaosong Ma, Luqi Tao, Jing Qian, Chun-Jian Tan
SiC VDMOSFET is a kind of significant power device in the supply system of spacecraft. However, it is very susceptible to space radiation particles causing catastrophic single-event burnout (SEB) occurred. In this paper, we present the 2D numerical simulation results of the SEB failure mechanism, influence factors and the most sensitive region to SEB in SiC VDMOSFET. The results show that when the transient current generated by collision ionization is large enough the SEB will occur. The magnitude of the transient current is related to the incident point, linear energy transfer (LET) and drain voltage. The occurrence of SEB increases with the LET and the drain voltage. The middle of the gate is the most sensitive region to SEB in 4H-SiC VDMOSFET.
SiC VDMOSFET是航天器供电系统中一种重要的功率器件。然而,它很容易受到空间辐射粒子的影响,造成灾难性的单次烧毁(SEB)。本文给出了SiC VDMOSFET中SEB失效机理、影响因素和SEB最敏感区域的二维数值模拟结果。结果表明,当碰撞电离产生的瞬态电流足够大时,就会发生SEB。瞬态电流的大小与入射点、线性能量转移(LET)和漏极电压有关。SEB的发生随着LET和漏极电压的增加而增加。栅极中间是4H-SiC VDMOSFET中对SEB最敏感的区域。
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引用次数: 6
Analysis on the Thermal Fatigue Behavior of Single SnAgCu Solder Joint 单根SnAgCu焊点热疲劳性能分析
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245143
Jibing Chen, Yuandan Xie, Zhanwen He, Nong Wan, Yiping Wu
To verify whether the results of rapid thermal fatigue of solder joint are consistent with that of the conventional fatigue method, the repeated thermal cycling condition of alternating temperature should be created. In this paper, an experiment, which heat rapidly a metal boss under the single solder joint in 10 seconds by the induced eddy current effect of electromagnetic field and then stop to heat it at the same time in sequence, was implemented. That is to say, the single solder joint above the boss was heated and cooled through heat conduction of the boss where the heat quantity is generated by the electromagnetic induction heating. The condition of rapid thermal cycle was realized by this method. When the single solder joint was subjected to rapid thermal cycling, the interfacial microstructure between the solder ball and Cu substrate was observed and analyzed by SEM. The results indicated that this method supplying rapid heat source by induction heating is feasible to investigate the rapid thermal fatigue behavior of single solder joint. This method can provide more experience for fatigue failure to effectively improve the reliability of the electronic packaging devices.
为了验证焊点快速热疲劳的结果与常规疲劳法的结果是否一致,需要创建交替温度的反复热循环条件。本文进行了利用电磁场的感应涡流效应在10秒内对单个焊点下的金属凸台进行快速加热,然后同时停止依次加热的实验。也就是说,焊台上方的单个焊点通过焊台的热传导进行加热和冷却,其中的热量是通过电磁感应加热产生的。该方法实现了快速热循环的条件。采用扫描电镜对单焊点快速热循环过程中钎料球与Cu衬底界面的微观结构进行了观察和分析。结果表明,采用感应加热提供快速热源的方法研究单个焊点的快速热疲劳行为是可行的。该方法可为疲劳失效提供更多经验,有效提高电子封装器件的可靠性。
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引用次数: 3
The effect of Ag3Sn and Cu3Sn nanoparticles on the IMC morphology of Sn-3.0Ag-0.5Cu solder Ag3Sn和Cu3Sn纳米颗粒对Sn-3.0Ag-0.5Cu钎料IMC形貌的影响
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245778
Hangting Shao, Ming Li, A. Hu
In electronic packaging, the interface reaction between solder and substrate directly determines the reliability of the solder joint. An interfacial reaction occurs at the interface between solder and substrate to form an interfacial intermetallic compound (IMC). The growth of the interface IMC has a positive effect on improving the strength of the solder joints, preventing solder diffusion and oxidation, However, if the interface IMC is overmuch, the non-uniform distribution of IMC will adversely affect the performance of the solder joint. Researches have shown that adding nanoparticles to the Sn-Ag-Cu alloy can improve the structure and slow the growth of interfacial IMC, which benefits the performance of the solder. In our work, Sn-3.0Ag-0.5Cu solder was selected as the matrix, and nano-Ag3Sn and Cu3Sn particles were used as additive components. The composite solder paste with different content of nanoparticles was prepared and reflowed. The growth of IMC was observed by Hitachi TM-3000 benchtop scanning electron microscope and FEI Sirion 200 scanning electron microscope (SEM). The morphology of IMC was observed to study the effect of additive nanoparticles on IMC growth. The results show that the addition of 0.3% nano-Ag3Sn and Cu3Sn particles to Sn-3.0Ag-0.5Cu alloy solder can improve the growth of IMC at the solder joint interface, making the IMC morphology of the scallop body shape gentler and more uniform, while adding an excessive amount of Ag3Sn nanoparticles makes the IMC morphology non-uniform.
在电子封装中,焊料与衬底之间的界面反应直接决定了焊点的可靠性。在钎料与衬底之间的界面处发生界面反应,形成界面金属间化合物(IMC)。界面IMC的生长对提高焊点强度、防止焊料扩散和氧化有积极作用,但如果界面IMC过多,则IMC分布不均匀将对焊点性能产生不利影响。研究表明,在Sn-Ag-Cu合金中加入纳米颗粒可以改善钎料结构,减缓界面IMC的生长,有利于钎料性能的提高。本文选择Sn-3.0Ag-0.5Cu钎料为基体,纳米ag3sn和Cu3Sn颗粒作为添加剂。制备了不同纳米颗粒含量的复合锡膏并进行了回流。采用日立TM-3000台式扫描电镜和FEI Sirion 200扫描电镜观察IMC的生长情况。通过观察IMC的形貌,研究纳米颗粒对IMC生长的影响。结果表明:在Sn-3.0Ag-0.5Cu合金钎料中添加0.3%的纳米Ag3Sn和Cu3Sn颗粒可以改善钎料界面处IMC的生长,使扇贝体形状的IMC形貌更温和、更均匀,而添加过量的Ag3Sn纳米颗粒则使IMC形貌不均匀。
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引用次数: 1
Reliability and Simulation of composite BGA solder joint connecting LTCC substrates LTCC基板复合BGA焊点的可靠性与仿真
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245774
Xiaorong Wang, Guoqing Yong, Yan Zhang, Yunfei Chen
Due to the rapid development of the miniature microwave module, package-on-package (PoP) configuration is extensively used. The interconnection providing both signal and mechanical support is the significant area to investigate. This paper focuses on the relationship between the arrangement of solder joints and the reliability of vertical interconnection concatenating two low temperature co-fired ceramic (LTCC) substrates at the cooling stage of the reflow soldering. A thermal-mechanical model is established, while the technology of "Element Birth and Death" is applied for simulating the phase change of solders. It is found that the arrangement of solder joints matters in the temperature and thermal stress response of the microwave module. The results show that arranging some solder joints in the middle of substrates and distributing solder joints uniformly are benificial for the reliabilty of interconnection.
由于微型微波模块的快速发展,封装对封装(PoP)配置被广泛使用。同时提供信号和机械支持的互连是研究的重要领域。本文重点研究了回流焊冷却阶段两个低温共烧陶瓷(LTCC)衬底垂直互连的可靠性与焊点排列的关系。建立了热-力学模型,采用“元素生灭”技术对焊料相变进行了模拟。研究发现,焊点的排列对微波模块的温度和热应力响应有重要影响。结果表明,在衬底中间布置一些焊点并均匀分布焊点有利于互连的可靠性。
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引用次数: 1
期刊
2019 20th International Conference on Electronic Packaging Technology(ICEPT)
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