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2019 20th International Conference on Electronic Packaging Technology(ICEPT)最新文献

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Investigation on the Interface Thermal Resistance of Copper-Titanium 铜-钛界面热阻研究
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245729
Yixin Xu, F. Zhu, Miaocao Wang, Zilin Lu, Jianxiong Hu, Pengjun Zeng
The heat interface thermal resistance between the dielectric layer (Cu) and the barrier layer (Ti) in the Through-silicon via (TSV) are studied with molecular dynamics (MD) methods. The Cu/Ti interface thermal resistance is temperature dependent. Within the temperature from 293 K to 693 K, the resistance increases as the temperature rises. The increase in temperature causes an increase in atomic vacancy defects at the interface, and the interfacial voids degrade the heat transfer performance. However, when the temperature is higher than 693 K, the vacancies transfer from the interface to the second nearest or further neighbor on the adjacent atomic layers, which reduces the lattice mismatches at high temperatures. Besides, the single Ti atoms cross through the interface to match the Cu lattice vacancy when the temperature is higher than 693 K. As a result, interface thermal resistance decreases as temperature rises from 693 K to 1093 K.
用分子动力学方法研究了通硅孔(TSV)中介电层(Cu)和势垒层(Ti)之间的热界面热阻。Cu/Ti界面热阻与温度有关。在293 ~ 693 K温度范围内,电阻随温度升高而增大。温度升高导致界面原子空位缺陷增多,界面空位降低了传热性能。然而,当温度高于693 K时,空位从界面转移到相邻原子层上的第二近邻或更远的相邻原子层上,从而减少了高温下的晶格错配。此外,当温度高于693 K时,单个Ti原子穿过界面以匹配Cu晶格空位。结果表明,当温度从693 K升高到1093 K时,界面热阻减小。
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引用次数: 0
Research on Vacuum Soldering Technology of Military IGBT Module 军用IGBT模块真空焊接技术研究
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245342
Tao Chen, Jun Zhang, Jing-ming Fei, Bin-bin Zhang, Xiaofeng Sun, Nana Rong
Insulated Gate Bipolar Transistor (IGBT)module is the core device of power electronics which integrates Metal Oxide Semiconductor Field Effect Transistor (MOSFET) and Giant Transistor(GTR)together. It has fast switching speed, reduced saturation voltage, soft-off characteristics and short-circuit resistance. IGBT has been widely used in industrial, aerospace, defense and military industries and rail transit, smart grid and new energy vehicles. As the power density of IGBTs continues to increase, the reliability requirements for IGBT packages are becoming higher and higher, and any failure may cause paralysis of the entire system. The soldering process of the MOSFET and GTR and the substrate is important to the IGBT module packaging. A high quality soldering process can reduce the interface thermal resistance and increase the welding strength and the long-term reliablility. The defects of the solder layer may lead to the increasing of the interface thermal resistance and reducing the product life. At the same time, the defective solder layer will easily cause fatigue failure such as solder layer peeling, chip and substrate crack under the action of ambient temperature cycle and power cycle.This paper is mainly studying the vacuumsoldering process of IGBT module .Using the vacuum soldering process with solder pre-form and formic acid, the low-cavity soldering layer can be achieved. Through material pretreatment, tooling fixture and solder selection, the precise positioning of two sintering and chip, DBC (Direct Bonding Copper) substrate and copper substrate is solved. The control of temperature curve in different temperature zones is optimized, and the vacuum in the soldering process is ensured. Temperature, vacuum rate, vacuum holding time control accuracy, while systematic research on formic acid concentration, activation time, activation temperature control, etc., and non-wetting, soldering, solder overflow, chip substrate Evasion methods such as offset and hole exceeding the standard are proposed. Finally, the high strength, low void rate and position consistency of the soldering interface are realized through the visual inspection, X-ray photography and shear force test to which are shown that the IGBT soldering process has high reliability. (Abstract)
绝缘栅双极晶体管(IGBT)模块是将金属氧化物半导体场效应晶体管(MOSFET)和巨型晶体管(GTR)集成在一起的电力电子器件的核心器件。它具有开关速度快、饱和电压低、软关断特性和抗短路性能。IGBT已广泛应用于工业、航空航天、国防军工以及轨道交通、智能电网、新能源汽车等领域。随着IGBT功率密度的不断提高,对IGBT封装的可靠性要求越来越高,任何一个故障都可能导致整个系统瘫痪。MOSFET、GTR和基板的焊接工艺对IGBT模块封装非常重要。高质量的焊接工艺可以降低界面热阻,提高焊接强度和长期可靠性。焊料层的缺陷会导致界面热阻增大,降低产品寿命。同时,有缺陷的焊料层在环境温度循环和功率循环的作用下,容易造成焊料层剥落、芯片和衬底裂纹等疲劳失效。本文主要研究了IGBT模块的真空焊接工艺,采用焊料预成型和甲酸的真空焊接工艺,实现了低空腔的焊接层。通过材料预处理、工装夹具和焊料选择,解决了烧结和贴片、DBC (Direct Bonding Copper)基板和铜基板的精确定位问题。优化了不同温度区域的温度曲线控制,保证了焊接过程中的真空。温度、真空度、真空保持时间控制精度,同时系统研究甲酸浓度、活化时间、活化温度控制等,并提出了不润湿、焊接、焊料溢出、芯片衬底漏泄等偏移和孔超标等方法。最后,通过目测、x射线照相和剪切力测试,实现了焊接界面的高强度、低空穴率和位置一致性,表明IGBT焊接工艺具有较高的可靠性。(抽象)
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引用次数: 1
Study on warpage evolution for six-side molded WLCSP based on finite element analysis 基于有限元分析的六面成型WLCSP翘曲演化研究
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245281
Shuai Zhao, F. Qin, Mengke Yang, Min Xiang, Daquan Yu
Wafer warpage has been an important problem to affect the manufacturability and reliability in Wafer Level Chip Scale package (WLCSP). In this paper, wafer warpage evolution is studied for a six-side molded WLCSP using finite element model. A method to mimic the actual fabricating process is presented based on the "Element birth & death" and "Restart" technology. Key process such as topside molding, backside grinding and backside molding is taken into account and the results match with the experiment well. The effect of the parameters and structural parameters on wafer warpage characteristics is analyzed.
晶圆翘曲是影响晶圆级芯片封装(WLCSP)可制造性和可靠性的重要问题。本文采用有限元模型研究了六面型WLCSP的晶圆翘曲演变过程。提出了一种基于“元件生死”和“重启”技术模拟实际制造过程的方法。计算结果与实验结果吻合较好,计算结果与实验结果吻合较好。分析了参数和结构参数对晶圆翘曲特性的影响。
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引用次数: 3
Study on conductive paste of silver particles for power semiconductor devices package 功率半导体器件封装用银颗粒导电浆料的研究
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245247
Jianwen Zhou, Gang Li, Pengli Zhu, R. Sun, C. Wong
Sintered silver has been used as an interconnect material for power electronic components in recent years. In the early days of development, micron-sized Ag particles were used for the silver conductive paste, however, high temperature and high pressures of up to 40 MPa were needed to achieve high performance sintered joints, which may damage the electrical component.Therefore,low pressure sintering using Ag nanoparticles has received great interest. In our work, we evaluated the properties of the silver nanoparticle conductive paste as a low-temperature, low-pressure interconnect material. Shear strength test showed that the silver paste with 60%wt Ag loading sintered under 10MPa for 20 min can achieve the best result among 10min, 20min, 30min and 40min.Moreover, as the sintering pressure increases, Cu-Cu joints clearly increased. Silver content is also an important factor affecting the shear strength. When we increase the silver loading from 60%wt to 80%wt, shear strength increases simultaneous. Shear test results show that a high shear strength of 57MPa can be achieved for the 80wt% Ag loading under 10MP at 300° C. which indicates that our silver nanoparticle conductive paste has excellent mechanical properties.
近年来,烧结银被用作电力电子元件的互连材料。在开发初期,银导电浆料采用微米级的银颗粒,但要实现高性能的烧结接头,需要高达40 MPa的高温和高压,这可能会损坏电气元件。因此,利用银纳米颗粒进行低压烧结受到了极大的关注。在我们的工作中,我们评估了银纳米颗粒导电浆料作为低温、低压互连材料的性能。抗剪强度试验表明,负载60%wt Ag的银浆在10MPa下烧结20min,在10min、20min、30min和40min中效果最好。随着烧结压力的增大,Cu-Cu接头明显增多。银含量也是影响抗剪强度的重要因素。当含银量从60%wt增加到80%wt时,抗剪强度同时提高。剪切试验结果表明,在300℃、10MP、80wt% Ag载荷下,纳米银导电浆料的抗剪强度可达57MPa,表明纳米银导电浆料具有优良的力学性能。
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引用次数: 0
Thermal Cycling Durability Assessment and Enhancement of FBGA Package for Automotive Applications 汽车用FBGA封装热循环耐久性评估与改进
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245280
Yiyi Ma, Jefferson Talledo, J. Luan
The essential functions provided by electronic packaging are, among many others, mechanical protection of the fragile electrical device subjected to harsh environmental and operational loads, electrical connection and isolation for electronic components within a system, and thermal dissipation paths for the functioning heat generating silicon chip. In the past, these functions had normally been achieved by traditional lead frame based packages such as SOIC, DIP, QFP and QFN. In many cases, while addressing reliability and thermal issues a traditional lead frame based package can easily consume 4-5 times more space than the active device it contains, resulting in a remarkable waste of the precious package footprint. In this regard, BGA (Ball Grid Array) technology is a more desirable packaging alternative due to its intrinsic size reduction capability and highly favorable electrical performance. Nevertheless, it is well known that the board level ATC (Accelerated Thermal Cycling) test performance of BGA packages is worse than its lead frame counterparts since its interconnects are much more rigid. Therefore, to ensure the reliability and durability of its solder joints is a critical task when developing a BGA package for automotive applications, where safety is extremely demanding.This paper initially investigates the solder joint reliability of the FBGA package for automotive applications during board level ATC test through Finite Element Analysis (FEA). Experiments were then carried out to assess the accuracy of the FEA model. It is found that the predictions made by the FEA simulation do not match the actual test result. The failure pattern suggests that it could be related to the excessive package warpage during testing. Viscoelastic behavior of the polymer based materials was then characterized and taken into account. The updated FEA model is found to have much better simulation result. To validate this approach, packages with standard and low CTE core materials were built and tested. Good agreement is found between the simulation and testing results. Significant improvement of the package fatigue life is observed with low CTE substrate core materials.
电子封装提供的基本功能是,在许多其他功能中,脆弱的电气设备受到恶劣环境和操作负载的机械保护,系统内电子元件的电气连接和隔离,以及功能发热硅芯片的散热路径。过去,这些功能通常是通过传统的基于引线框架的封装(如SOIC, DIP, QFP和QFN)来实现的。在许多情况下,在解决可靠性和热问题的同时,传统的引线框架封装很容易消耗比其包含的有源器件多4-5倍的空间,从而导致宝贵的封装占地面积的显著浪费。在这方面,BGA(球栅阵列)技术是一个更理想的包装替代方案,由于其固有的尺寸缩小能力和非常有利的电气性能。然而,众所周知,BGA封装的板级ATC(加速热循环)测试性能比其引线框架同行更差,因为它的互连更加刚性。因此,在为安全性要求极高的汽车应用开发BGA封装时,确保其焊点的可靠性和耐用性是一项关键任务。本文通过有限元分析(FEA)对汽车用FBGA封装在板级ATC测试中的焊点可靠性进行了初步研究。然后进行了实验,以评估有限元模型的准确性。结果表明,有限元模拟所作的预测与实际试验结果不相符。故障模式表明,这可能与测试过程中过度的包装翘曲有关。然后对聚合物基材料的粘弹性行为进行了表征和考虑。结果表明,改进后的有限元模型具有较好的仿真效果。为了验证这种方法,使用标准和低CTE核心材料构建和测试了封装。仿真结果与试验结果吻合较好。采用低CTE基板芯材料可显著提高封装疲劳寿命。
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引用次数: 1
Discussion and failure analysis of PCB warpage PCB翘曲的讨论与失效分析
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245186
Ying Yang
In current trend of miniaturization and integration of electronic devices, surface mount technology process puts higher demands on the demands on the flatness of printed circuit boards. It is a very important topic to minimize the warpage of PCB by optimizing process technology. This article discusses the main causes of PCB warpage and presents a failure analysis case for PCB warpage.
在当前电子器件小型化、集成化的趋势下,表面贴装工艺对印刷电路板的平面度提出了更高的要求。通过优化工艺工艺,使PCB板翘曲量最小化是一个非常重要的课题。本文讨论了PCB板翘曲的主要原因,并给出了一个PCB板翘曲的失效分析案例。
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引用次数: 4
Reliability analysis of sintered Cu joints under power cycle condition 功率循环工况下烧结铜接头可靠性分析
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245323
Yue Gao, Chuantong Chen, S. Nagao, K. Suganuma, A. Bahman, F. Iannuzzo
A Cu particles paste was developed as a candidate of die attach materials for next generation power devices. The evaluation including thermal shock and power cycling test were performed on SiC-DBC die-attach structure to test the reliability of sintered Cu joints. The thermal shock reliability of SiC die-attached on a DBC substrate was carried out from -50 °C to 250 °C in the ambient atmosphere. SiC MOSFETs bonded by the Cu paste were evaluated by power cycle test from 25 °C to 200 °C. In both test condition, the sintered Cu joints showed good stability. The shear strength increased with the thermal shock cycles increased, which can be attributed to Cu oxidation during test. The power cycle test also showed no obvious deterioration occurred.
研制了一种铜颗粒浆料,作为下一代电力器件的模具贴附材料。对SiC-DBC模接结构进行了热冲击评价和功率循环试验,验证了烧结铜接头的可靠性。在-50°C ~ 250°C的环境气氛下,研究了贴附在DBC衬底上的SiC模的热冲击可靠性。通过25 ~ 200℃的功率循环测试,对Cu膏体键合的SiC mosfet进行了评价。在两种试验条件下,烧结铜接头均表现出良好的稳定性。剪切强度随热冲击循环次数的增加而增加,这可能是由于试验过程中Cu氧化所致。功率循环试验也没有出现明显的劣化现象。
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引用次数: 1
Design, fabrication and measurement of TSV interposer integrated X-band microstrip filter TSV插片集成x波段微带滤波器的设计、制造与测量
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245748
Yunheng Sun, Yufeng Jin, Han Cai, Shengli Ma, Liu-lin Hu, Shuwei He
In this paper, we present a TSV interposer integrated X-band microstrip filter. It designed as working at X band with an insertion loss (IL) of 2.2dB, measuring 2.8mm×3.7mm in size. With processed sample, the measured bandwidth (BW) is about 2.33GHz, the passband insertion loss is about 2.2dB.
在本文中,我们提出了一种TSV中间体集成x波段微带滤波器。它设计为工作在X波段,插入损耗(IL)为2.2dB,尺寸为2.8mm×3.7mm。经过处理的样品,测量带宽(BW)约为2.33GHz,通带插入损耗约为2.2dB。
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引用次数: 1
The failure analysis of 30um*200um TSV interposer 30um*200um TSV介面失效分析
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245315
Rui Cao, Fengwei Dai
With the development of 3D SIP, TSV interposers are more and more widely used, and its reliability receives broader concern. As CTEs of copper and silicon are different in TSV interposer, it is easy to be affected by thermal stress and lead to failure in the process of processing and use. Therefore, an annealing treatment is usually conducted after electroplating to release stress. Different sizes and distributions of TSV produce different stress effects in the production process. In this paper, an interposer with low opening rate and large size TSV , frequently cracks after annealing, is simulated and analyzed.
随着三维SIP技术的发展,TSV中介器的应用越来越广泛,其可靠性受到越来越广泛的关注。由于TSV中间体中铜和硅的cte不同,在加工和使用过程中容易受到热应力的影响而导致失效。因此,电镀后通常进行退火处理以释放应力。不同尺寸和分布的TSV在生产过程中产生不同的应力效应。本文对一种开孔率低、TSV尺寸大、退火后经常出现裂纹的中间体进行了模拟和分析。
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引用次数: 0
Facile Preparation of Cu Micro-Nano Composite Particle Paste for Low Temperature Bonding 低温键合用铜微纳复合颗粒浆料的简易制备
Pub Date : 2019-08-01 DOI: 10.1109/ICEPT47577.2019.245766
Yun Mou, Yang Peng, Junjie Li, Jiaxin Liu, Qinglei Sun, Mingxiang Chen
To solve the problems of high cost and agglomeration of nanoparticle paste, a novel and inexpensive Cu micro-nano composite paste was prepared and demonstrated for low temperature Cu-Cu bonding. The composite paste was mainly composed of micro particles (1 μm), nanoparticles (10 nm), and organic solvents, and the micron particles as the nucleation sites were coated by the prepared nanoparticles. Moreover, the influences of sintering temperature on the shear strength and microstructure of the bonded joints were investigated. Consequently, the shear strengths of the bonded joints are more than 30 MPa at the sintering temperature of 225°C, 250°C, and 275°C, respectively. Furthermore, their fracture surfaces show significant ductile deformation, and the bonded interfaces between the composite particles and substrates achieve the high purity metallurgical interconnection without the cracks.
为解决纳米颗粒浆料成本高、团聚难等问题,制备了一种新型廉价的Cu微纳复合浆料,并进行了低温Cu-Cu键合实验。复合浆料主要由微颗粒(1 μm)、纳米颗粒(10 nm)和有机溶剂组成,微米颗粒作为成核位点被制备的纳米颗粒包裹。此外,还研究了烧结温度对接头抗剪强度和微观组织的影响。结果表明,烧结温度为225℃、250℃和275℃时,粘结接头的抗剪强度均大于30 MPa。复合材料的断口呈现出明显的韧性变形,复合颗粒与基体的结合界面实现了高纯的金相连接而不产生裂纹。
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引用次数: 0
期刊
2019 20th International Conference on Electronic Packaging Technology(ICEPT)
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