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Molybdenum Disulfide Membrane-based Ultrasensitive Temperature Sensor 基于二硫化钼膜的超灵敏温度传感器
Pub Date : 2021-10-31 DOI: 10.1109/SENSORS47087.2021.9639750
Nishta Arora, A. Naik
We report an ultrathin molybdenum disulfide (MoS2) membrane-based temperature sensor with sensitivity in the sub-Kelvin range. The resonant frequency of ultrathin MoS2 resonators is extremely sensitive to the intrinsic strain of the membrane. We utilize the resonant frequency shift caused due to change in strain to demonstrate the potential of these devices for ultrasensitive temperature sensing. The temperature coefficient of frequency (TCf) of the MoS2 drum resonator is estimated to be −283 ppm/K. We also report the first study on the frequency stability of MoS2 resonators at room temperature. The Allan deviation of these resonators is ~5 × 10−5 at an integration time of 1 second. This study estimates the ultimate temperature detection limit of MoS2 membrane-based device.
我们报道了一种灵敏度在亚开尔文范围内的超薄二硫化钼(MoS2)膜温度传感器。超薄二硫化钼谐振器的谐振频率对薄膜的本征应变极为敏感。我们利用应变变化引起的谐振频移来证明这些器件在超灵敏温度传感方面的潜力。二硫化钼鼓腔的频率温度系数(TCf)估计为−283 ppm/K。我们还报道了MoS2谐振器在室温下频率稳定性的首次研究。在1秒的积分时间内,这些谐振器的艾伦偏差为~5 × 10−5。本研究估计了MoS2膜基器件的极限温度检测极限。
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引用次数: 1
High strength piezoelectric materials for extreme environments 适用于极端环境的高强度压电材料
Pub Date : 2021-10-31 DOI: 10.1109/SENSORS47087.2021.9639604
T. Comyn, P. Cowin, T. Stevenson
Most piezoelectric sensors are based on PZT and have been for many years. PZT and all conventional piezoelectric materials are weak, and prone to fracture. In addition, PZT is not able to withstand high temperatures. High temperature materials are available, but these are also extremely fragile and have low piezoelectric coefficients, in particular, the shear mode sensitivity. We report here on a new class of piezoelectric materials, the Ionix HPZ family, far stronger than PZT, which allows engineers to use them in a high shock environment, at significantly higher temperatures, in both thickness and shear mode. These materials have excellent compatibility with other engineering materials in sensor manufacture, such as steel and titanium.
大多数压电传感器都是基于压电陶瓷的,并且已经发展了很多年。PZT和所有传统的压电材料都很弱,容易断裂。此外,PZT不能承受高温。高温材料是可用的,但这些材料也非常脆弱,具有低压电系数,特别是剪切模式灵敏度。我们在这里报道了一种新型压电材料,Ionix HPZ系列,它比PZT强得多,这使得工程师可以在高冲击环境中使用它们,在更高的温度下,在厚度和剪切模式下。这些材料在传感器制造中与其他工程材料(如钢和钛)具有良好的兼容性。
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引用次数: 2
Dual-Printed Soil Sensors for Nitrate and Moisture Monitoring 用于硝酸盐和水分监测的双打印土壤传感器
Pub Date : 2021-10-31 DOI: 10.1109/SENSORS47087.2021.9639688
Shenwei Yin, M. Tursunniyaz, Jingyi Huang, J. Andrews
Printing electronics has been identified as a key manufacturing scheme for enabling low-cost, high-volume sensors. These printed sensors can allow for data acquisition within industries transitioning to data-informed decision-making. One such industry is agriculture, where soil data can inform decisions to increase crop yield while protecting the environment. In this work, we demonstrate a novel, dual-printed multi-functional soil sensor that can detect nitrate levels in saturated soil while also quantifying the moisture level. The nitrate sensor utilizes an electrochemical approach and can detect nitrate values from 5 to 400 mg/L within a saturated silt loam soil. The moisture sensor uses capacitance proximity sensing to measure the moisture of the soil based on changes in the dielectric permittivity and was able to measure moisture in sandy soil ranging from 0.1 to 0.25 m3/m3. The dual-printed sensor is expected to allow for quantifiable nitrate leaching when placed in a distributed manner through multiple direct nitrate and moisture measurements.
印刷电子已被确定为实现低成本,大批量传感器的关键制造方案。这些印刷传感器可以允许数据采集行业过渡到数据知情的决策。农业就是这样一个行业,土壤数据可以为在保护环境的同时提高作物产量的决策提供信息。在这项工作中,我们展示了一种新型的双打印多功能土壤传感器,它可以检测饱和土壤中的硝酸盐水平,同时还可以量化水分水平。硝酸盐传感器采用电化学方法,可以检测饱和粉壤土中5至400mg /L的硝酸盐值。该湿度传感器采用电容接近感测法,根据介质介电常数的变化来测量土壤的湿度,能够测量0.1 ~ 0.25 m3/m3的沙土湿度。双打印传感器预计允许可量化的硝酸盐浸出时,放置在一个分布式的方式,通过多个直接硝酸盐和水分测量。
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引用次数: 0
Multi-Magnet Tracking Method using Extended Kalman Filter* 基于扩展卡尔曼滤波的多磁体跟踪方法*
Pub Date : 2021-10-31 DOI: 10.1109/SENSORS47087.2021.9639620
Han Ge, Shuang Song, Jiaole Wang, M. Q. Meng
Permanent magnet-based localization can provide a wireless and low-cost solution for tracking surgical instruments in Minimally Invasive Surgery (MIS). To meet the requirement of simultaneously tracking of multiple surgical instruments in clinical application scenarios, we propose a probabilistic filtering approach to realize multi-magnet positioning. The tracking system includes a magnetic sensor array and magnetic targets. Random walk model has been used to formulate the system equation, and the measurement equation is established with the magnetic dipole model. Based on the Extended Kalman Filter (EKF) algorithm, the nonlinear problem can be solved by estimating the positions and orientations of multiple magnets. The feasibility of the proposed method is verified by both static and dynamic experiments. The results show that the filtering-based multi-target magnetic tracking algorithm enables low-latency tracking with reasonable accuracy.
基于永磁体的定位可以为微创手术(MIS)中手术器械的跟踪提供一种无线和低成本的解决方案。为了满足临床应用场景中多台手术器械同时跟踪的需求,我们提出了一种概率滤波方法来实现多磁体定位。跟踪系统包括磁传感器阵列和磁目标。系统方程采用随机游走模型,测量方程采用磁偶极子模型建立。基于扩展卡尔曼滤波(EKF)算法,可以通过估计多个磁体的位置和方向来解决非线性问题。通过静态和动态实验验证了该方法的可行性。结果表明,基于滤波的多目标磁跟踪算法能够实现低延迟的跟踪,并具有合理的精度。
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引用次数: 4
High electron mobility transistor-based hydrogen sensor using ITO as a sensing layer 基于高电子迁移率晶体管的氢传感器,采用ITO作为传感层
Pub Date : 2021-10-31 DOI: 10.1109/SENSORS47087.2021.9639820
Md. Iktiham Bin Taher, Y. Halfaya, R. Alrammouz, M. Lazerges, A. Randi, T. Moudakir, N. Sama, Thomas Guermont, Nicolas Pelissier, T. Pichler, M. Piedevache, J. Pironon, S. Gautier
Gas sensors based on AlGaN/GaN high-electron-mobility transistors (HEMTs) with indium tin oxide (ITO) gates as functional layers were fabricated to detect hydrogen gas. Several sensing metrics such as the changes in current, sensitivity, and response time confirmed the dependence of the sensing response on the gas concentration.
以氧化铟锡(ITO)栅极为功能层,制备了基于AlGaN/GaN高电子迁移率晶体管(HEMTs)的氢气传感器。几个传感指标,如电流、灵敏度和响应时间的变化,证实了传感响应对气体浓度的依赖性。
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引用次数: 1
Orthogonal fluxgate sensor noise depends on annealing-induced magnetostriction of the core 正交磁通门传感器噪声依赖于铁芯的退火致磁致伸缩
Pub Date : 2021-10-31 DOI: 10.1109/SENSORS47087.2021.9639470
M. Butta, Alexander Valeriano Inchausti, M. Dressler, M. Janošek
For long time amorphous microwires with (Co94Fe6)72.5Si12.5B15 composition have been extensively used for magnetic sensors, such as fluxgates but also magnetoimpedance, due to their vanishing magnetostriction. In fluxgate sensors we want to minimize the magnetostriction because it couples any mechanical stress (for instance due to thermal expansion) to the magnetic characteristic of the wire making the noise of the fluxgate sensor rise. In this paper we compared two magnetic wires, one with slightly negative and one with slightly positive magnetostriction in their as cast state and we anneal them measuring then how the magnetostriction and the noise evolves as we increase the annealing time.
长期以来,由(Co94Fe6)72.5Si12.5B15组成的非晶微导线由于其磁致伸缩消失而广泛用于磁通门和磁阻抗等磁传感器。在磁通门传感器中,我们希望最小化磁致伸缩,因为它将任何机械应力(例如由于热膨胀)耦合到导线的磁特性上,从而使磁通门传感器的噪声上升。在本文中,我们比较了两种磁性线,一种是微负磁致伸缩的,另一种是微正磁致伸缩的,在它们的铸态下,我们对它们进行了退火,然后测量了随着退火时间的增加,磁致伸缩和噪声是如何演变的。
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引用次数: 0
Influence of Lanthanum Oxycarbonate Deposition on Carbon Dioxide Detection 碳酸氧镧沉积对二氧化碳检测的影响
Pub Date : 2021-10-31 DOI: 10.1109/SENSORS47087.2021.9639835
F. Pennec, Ludovic Le Roy, C. Perrin-Pellegrino, M. Bendahan, S. Bernardini
This work aims to compare two deposition methods to highlight the strong influence of the induced morphology on the sensitive film conductivity. Lanthanum oxycarbonate films have been deposited by drop coating and screen printing for carbon dioxide detection. The measurements are based on a change in resistance and provide sensitive responses to carbon dioxide concentrations in a humid environment maintained at 50%. Electrical measurements were made under 5 000 ppm of carbon dioxide in synthetic air. Our results highlighted the close link between the morphology of the sensitive layers and the electrical responses of the sensors, and therefore the need to master the deposition technique.
本工作旨在比较两种沉积方法,以突出诱导形貌对敏感膜电导率的强烈影响。采用滴涂法和丝网印刷法制备了用于二氧化碳检测的碳酸氧镧薄膜。测量是基于电阻的变化,并提供敏感的响应二氧化碳浓度在潮湿的环境中保持在50%。在合成空气中二氧化碳含量为5 000 ppm的情况下进行电气测量。我们的结果强调了敏感层的形态和传感器的电响应之间的密切联系,因此需要掌握沉积技术。
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引用次数: 0
Sensitivity Enhancement of MEMS Tactile Sensor by Redesign of Microcantilever and Strain Gauge 微悬臂梁和应变片的再设计提高MEMS触觉传感器的灵敏度
Pub Date : 2021-10-31 DOI: 10.1109/SENSORS47087.2021.9639799
Ren Kaneta, Takumi Hasegawa, Takashi Abe, Masayuki Sohgawa
In our previous work, MEMS tactile sensor using microcantilevers embedded in the elastomer has been developed. The gripping control of a soft object and the data acquisition which reflected the texture of the object surface have been carried out using this sensor. However, improvement of its sensitivity for more precise control or texture information is an important issue. In this work, cantilever size and strain-gauge arrangement in the sensor are newly designed for sensitivity improvement. As a result of fabrication based on the new design, it is demonstrated that a drastic sensitivity improvement is achieved. Furthermore, it is found that the sensitivity depends on the size of the cantilever.
在我们之前的工作中,已经开发了使用嵌入弹性体的微悬臂梁的MEMS触觉传感器。利用该传感器实现了对软物体的抓握控制和反映物体表面纹理的数据采集。然而,提高其灵敏度以获得更精确的控制或纹理信息是一个重要的问题。为了提高传感器的灵敏度,本文对传感器的悬臂梁尺寸和应变片布置进行了新的设计。基于新设计的制造结果表明,灵敏度得到了极大的提高。此外,还发现灵敏度与悬臂梁的尺寸有关。
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引用次数: 0
Development of a Flexible and Conformable EEG Sensors Using 3D Printing Process 基于3D打印技术的柔性、适形脑电信号传感器的研制
Pub Date : 2021-10-31 DOI: 10.1109/SENSORS47087.2021.9639806
Adam Schuhknecht, Evan Fadanelli, Mohit Patel, A. Hanson, D. Maddipatla, M. Atashbar
A novel electroencephalography (EEG) sensor was developed for monitoring and recording the electrical activity of the brain. A sensing electrode were developed by 3D printing Formlabs 80A flexible resin and coated with silver epoxy as well as a silver spray paint to make the electrodes conductive. The conductivity of the sensors was measured at 7.70 E+03 S/m. The electrodes are flexible and conformable enough to be worn on the head for extended periods of time without causing strain to the user. The current sensing electrodes in the market are stiff and cause headaches after extended periods of testing. The 3D printed sensing electrodes generated similar signal quality when compared to commercial electrodes while providing a far higher level of comfort.
研制了一种新型脑电图传感器,用于监测和记录脑电活动。通过3D打印Formlabs 80A柔性树脂开发了一种传感电极,并涂有银环氧树脂和银喷漆,使电极导电。测得传感器电导率为7.70 E+03 S/m。电极具有足够的柔韧性和适应性,可以长时间佩戴在头上,而不会对使用者造成压力。目前市场上的传感电极很硬,在长时间的测试后会引起头痛。与商用电极相比,3D打印的传感电极产生的信号质量相似,同时提供更高的舒适度。
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引用次数: 0
An approach towards development of point of care diagnostics using ELISA 一种利用酶联免疫吸附法(ELISA)进行即时诊断的方法
Pub Date : 2021-10-31 DOI: 10.1109/SENSORS47087.2021.9639773
Nidhi Gupta, S. Dhanekar, S. Chattopadhyay, Shradha Suman Panda, Harpal Singh
This paper shows the capability of the nanostructured silicon as sensitive ELISA substrates. Crystalline silicon was etched to make porous silicon and all the samples were functionalized so as to get GAR (Goat anti- rabbit) IgG antibody and RAG (Rabbit anti-goat) IgG analytes and they further get attached to the substrates. The optical density was measured after completion of ELISA tests. Simultaneously the pictures of the ELISA wells were captured using a phone camera and these were processed using image processing techniques. It was observed that the RGB index was in sync with the optical density. Maximum OD and RGB index were found from salinized porous silicon substrates. This work is being extended to capture the cancer antigens by using antibody - antigen reactions and ELISA for point of care diagnostics.
本文展示了纳米硅作为ELISA敏感底物的性能。将晶体硅蚀刻成多孔硅,将所有样品功能化,得到GAR(山羊抗兔)IgG抗体和RAG(兔抗山羊)IgG分析物,并进一步附着在底物上。酶联免疫吸附试验完成后测定光密度。同时,用手机相机捕捉酶联免疫吸附测定孔的图像,并使用图像处理技术对这些图像进行处理。观察到RGB指数与光密度是同步的。盐碱化多孔硅衬底的OD值和RGB指数最大。这项工作正在扩展到利用抗体-抗原反应和酶联免疫吸附法(ELISA)在护理点诊断中捕获癌症抗原。
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引用次数: 0
期刊
2021 IEEE Sensors
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