Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056201
Qiyong Liuo, Fei Feng, Xuelei Yang, Bin Zhao, Yangyang Zhao, Haimei Zhou, Guiyang Zhang, Xinxin Li
In this paper, the separation performance of two kinds of micro-fabricated gas chromatographic columns ($mumathrm{GC}$-columns) with different numbers of serpentine turns, respectively 51 and 101, had been studied. These two kinds of $mumathrm{GC}$-columns had the same inner structure, column length and stationary phase (alumina). The test results of C10 demonstrated that the $mu mathrm{GC}$-column with 51 serpentine turns had better the numbers of theoretical plates and shorter separation time compared with the 101 serpentine turns. Particularly, the improvement of number of theoretical plates of C10 could reach up to 251% at under 22.2 kPa inlet pressure, which contributed to less “race track effect” caused by less serpentine turns.
{"title":"The Performance of Micro-Fabricated Gas Chromatographic Columns with Different Number of Serpentine Turns","authors":"Qiyong Liuo, Fei Feng, Xuelei Yang, Bin Zhao, Yangyang Zhao, Haimei Zhou, Guiyang Zhang, Xinxin Li","doi":"10.1109/MEMS46641.2020.9056201","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056201","url":null,"abstract":"In this paper, the separation performance of two kinds of micro-fabricated gas chromatographic columns ($mumathrm{GC}$-columns) with different numbers of serpentine turns, respectively 51 and 101, had been studied. These two kinds of $mumathrm{GC}$-columns had the same inner structure, column length and stationary phase (alumina). The test results of C10 demonstrated that the $mu mathrm{GC}$-column with 51 serpentine turns had better the numbers of theoretical plates and shorter separation time compared with the 101 serpentine turns. Particularly, the improvement of number of theoretical plates of C10 could reach up to 251% at under 22.2 kPa inlet pressure, which contributed to less “race track effect” caused by less serpentine turns.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"24 1","pages":"1141-1144"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84963882","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056241
Craig R. Copeland, C. McGray, B. Ilic, J. Geist, S. M. Stavis
We make use of the intrinsic aberrations of an optical microscope to track single particles in three dimensions, and we combine information from multiple particles on a rigid body of a microelectromechanical system to measure its motion in six degrees of freedom. Our tracking method provides an extraordinary amount of information from an ordinary imaging system, revealing unintentional motion of the microsystem due to fabrication tolerance and nanoscale clearance between parts in sliding contact. Our work facilitates quantification and study of the actuation performance and reliability of complex microsystems.
{"title":"Particle Tracking of a Complex Microsystem in Three Dimensions and Six Degrees of Freedom","authors":"Craig R. Copeland, C. McGray, B. Ilic, J. Geist, S. M. Stavis","doi":"10.1109/MEMS46641.2020.9056241","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056241","url":null,"abstract":"We make use of the intrinsic aberrations of an optical microscope to track single particles in three dimensions, and we combine information from multiple particles on a rigid body of a microelectromechanical system to measure its motion in six degrees of freedom. Our tracking method provides an extraordinary amount of information from an ordinary imaging system, revealing unintentional motion of the microsystem due to fabrication tolerance and nanoscale clearance between parts in sliding contact. Our work facilitates quantification and study of the actuation performance and reliability of complex microsystems.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"20 1","pages":"1314-1317"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85082489","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056276
R. Matsuda, S. Mizuguchi, Fumika Nakamura, Takuma Endo, Go Inamori, Yutaka Isoda, H. Ota
In this study, a stretchable array of resistive pressure sensors which could ignore the effect of stretch deformation was demonstrated. In terms of stretchable pressure sensors composed of elastic materials, pressure sensors itself are deformed during strain of the devices, which becomes large error of the pressure measurement. Our resistive sensors in a array are based on patterned porous conductive silicone (Ecoflex). The substrate consists of hetero-silicone rubbers of two different elastic silicones. In addition, resistances of column and row electrodes in the matrix of mapping are much lower than the pressure sensors. This substrate and control of electrode resistances can prevent stretch deformation of the device from affecting the sensing of pressure. The error of the pressure sensor in our device during 150% strain was one sixth less than the one by conventional elastic pressure sensor composed of organic materials. This result suggests possibility to apply stretchable pressure sensor on largely deformed area of body, and soft robots.
{"title":"Stretchable Array of Resistive Pressure Sensors Ignoring the Effect of Strain-Induced Deformation","authors":"R. Matsuda, S. Mizuguchi, Fumika Nakamura, Takuma Endo, Go Inamori, Yutaka Isoda, H. Ota","doi":"10.1109/MEMS46641.2020.9056276","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056276","url":null,"abstract":"In this study, a stretchable array of resistive pressure sensors which could ignore the effect of stretch deformation was demonstrated. In terms of stretchable pressure sensors composed of elastic materials, pressure sensors itself are deformed during strain of the devices, which becomes large error of the pressure measurement. Our resistive sensors in a array are based on patterned porous conductive silicone (Ecoflex). The substrate consists of hetero-silicone rubbers of two different elastic silicones. In addition, resistances of column and row electrodes in the matrix of mapping are much lower than the pressure sensors. This substrate and control of electrode resistances can prevent stretch deformation of the device from affecting the sensing of pressure. The error of the pressure sensor in our device during 150% strain was one sixth less than the one by conventional elastic pressure sensor composed of organic materials. This result suggests possibility to apply stretchable pressure sensor on largely deformed area of body, and soft robots.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"3 1","pages":"803-805"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80839133","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056366
Arnob Islam, Jaesung Lee, P. Feng
We report on the first experimental demonstration of two-dimensional (2D) black phosphorus (P) resonant nano-electromechanical systems (NEMS) for infrared (IR) detection, enabled by black P vibrating channel transistors (VCTs). Resonant motions of the black P NEMS are excited and read out all-electrically, thanks to black P crystal's high field-effect mobility and highly efficient channel conductance modulation via resonant motion. Given the narrow direct bandgap ($E_{mathrm{g}}approx 0.3text{eV}$) intrinsically suited for infrared (IR) detection, the black P crystalline NEMS resonators are highly responsive, and readily detect IR radiation by utilizing resonance frequency shift upon absorption of incident IR. The measurements achieve excellent IR responsivity, $Re=-0.31 text{kHz}/mumathrm{W}$, from a 2D black P drumhead NEMS resonator, at 785nm near infrared (NIR) wavelength. Toward enabling real-time IR sensing, we further demonstrate sensitive all-electrical transduction of resonances of 2D black P NEMS, in direct two-port transmission measurement of VCTs, by employing a local gate, thus evading the need of any conventional frequency down-mixing or conversion techniques.
{"title":"Black Phosphorus NEMS Resonant Infrared (IR) Detector","authors":"Arnob Islam, Jaesung Lee, P. Feng","doi":"10.1109/MEMS46641.2020.9056366","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056366","url":null,"abstract":"We report on the first experimental demonstration of two-dimensional (2D) black phosphorus (P) resonant nano-electromechanical systems (NEMS) for infrared (IR) detection, enabled by black P vibrating channel transistors (VCTs). Resonant motions of the black P NEMS are excited and read out all-electrically, thanks to black P crystal's high field-effect mobility and highly efficient channel conductance modulation via resonant motion. Given the narrow direct bandgap ($E_{mathrm{g}}approx 0.3text{eV}$) intrinsically suited for infrared (IR) detection, the black P crystalline NEMS resonators are highly responsive, and readily detect IR radiation by utilizing resonance frequency shift upon absorption of incident IR. The measurements achieve excellent IR responsivity, $Re=-0.31 text{kHz}/mumathrm{W}$, from a 2D black P drumhead NEMS resonator, at 785nm near infrared (NIR) wavelength. Toward enabling real-time IR sensing, we further demonstrate sensitive all-electrical transduction of resonances of 2D black P NEMS, in direct two-port transmission measurement of VCTs, by employing a local gate, thus evading the need of any conventional frequency down-mixing or conversion techniques.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"142 1 1","pages":"826-829"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80980283","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056456
Jun Ying Tan, M. Ahn, Hassan Al-Thuwaini, Seong-O Choi, J. Kim
This paper presents a diffraction ultra-violet (UV) lithography method for fabricating various micro-cone shape microneedle structures. A direct UV exposure to a liquid state photosensitive resin through a photomask generates a unique diffraction pattern of the light, in which the exposed area of the photosensitive resin becomes the needle structures. The change of liquid to solid-state of the resin by crosslinking also works as a light waveguide to create a novel sharp tip on top of the cone. Secondary and tertiary harmonic cone shapes are formed with further UV energy exposure. The proposed method is unique and versatile as it enables the formation of various cone-shaped microstructures with a straight or curved sidewall, such as tip-integrated cone and multiple harmonic cones having different heights and base shapes. The relationship between the microneedle height formed at different exposure energy and the corresponding geometry was also discussed. Insertion test and force-displacement test were conducted to demonstrate the functionality of the fabricated microneedle, and the results showed that the tip of each tested microneedle can withstand up to 0.15 N before breakage occurs. The fabricated cone-shaped microneedle with a sharp tip has a great potential for transdermal drug delivery microneedle application.
{"title":"Diffraction Lithography for 3-D Microneedle Fabrication","authors":"Jun Ying Tan, M. Ahn, Hassan Al-Thuwaini, Seong-O Choi, J. Kim","doi":"10.1109/MEMS46641.2020.9056456","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056456","url":null,"abstract":"This paper presents a diffraction ultra-violet (UV) lithography method for fabricating various micro-cone shape microneedle structures. A direct UV exposure to a liquid state photosensitive resin through a photomask generates a unique diffraction pattern of the light, in which the exposed area of the photosensitive resin becomes the needle structures. The change of liquid to solid-state of the resin by crosslinking also works as a light waveguide to create a novel sharp tip on top of the cone. Secondary and tertiary harmonic cone shapes are formed with further UV energy exposure. The proposed method is unique and versatile as it enables the formation of various cone-shaped microstructures with a straight or curved sidewall, such as tip-integrated cone and multiple harmonic cones having different heights and base shapes. The relationship between the microneedle height formed at different exposure energy and the corresponding geometry was also discussed. Insertion test and force-displacement test were conducted to demonstrate the functionality of the fabricated microneedle, and the results showed that the tip of each tested microneedle can withstand up to 0.15 N before breakage occurs. The fabricated cone-shaped microneedle with a sharp tip has a great potential for transdermal drug delivery microneedle application.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"81 1","pages":"921-924"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81215090","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056361
Tetsuya Yamada, Hirotaka Sugiura, Hisatoshi Mimura, K. Kamiya, T. Osaki, S. Takeuchi
This work describes a gas flow system for an odorant sensor based on a droplet interface bilayer (DIB) device. In the previous study, the olfactory receptor (OR) was reconstituted in DIB device and odorant, 1-octen-3-ol (octenol), was successfully detected. As a next challenge, we aimed at the continuous monitoring of odorant. Here, we designed a gas flow pathway at the bottom of the droplet forming the bilayer, to effectively absorb the gas into the aqueous phase. The pathway consisted of a microchannel and a slit-structure at the bottom of a well that kept the droplet on top. This gas flow system was integrated as a 16-ch DIB device. By sequentially infusing the octenol gas and air into the channel, we confirmed the increase and decrease of octenol concentration in the droplet. Thus, the designed system was able to absorb and exchange odorant in the droplet. Remarkably, the controlled gas flow stirred inside the droplet, resulting in promoting the gas absorption.
{"title":"Odorant Sensor Using Olfactory Receptor Reconstituted in a Lipid Bilayer Membrane with Gas Flow System","authors":"Tetsuya Yamada, Hirotaka Sugiura, Hisatoshi Mimura, K. Kamiya, T. Osaki, S. Takeuchi","doi":"10.1109/MEMS46641.2020.9056361","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056361","url":null,"abstract":"This work describes a gas flow system for an odorant sensor based on a droplet interface bilayer (DIB) device. In the previous study, the olfactory receptor (OR) was reconstituted in DIB device and odorant, 1-octen-3-ol (octenol), was successfully detected. As a next challenge, we aimed at the continuous monitoring of odorant. Here, we designed a gas flow pathway at the bottom of the droplet forming the bilayer, to effectively absorb the gas into the aqueous phase. The pathway consisted of a microchannel and a slit-structure at the bottom of a well that kept the droplet on top. This gas flow system was integrated as a 16-ch DIB device. By sequentially infusing the octenol gas and air into the channel, we confirmed the increase and decrease of octenol concentration in the droplet. Thus, the designed system was able to absorb and exchange odorant in the droplet. Remarkably, the controlled gas flow stirred inside the droplet, resulting in promoting the gas absorption.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"7 1","pages":"92-93"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84089842","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056194
Chaomin Zhang, Duli Yu, Xiaoxing Xing
Dielectrophoresis (DEP) as a label free technique has been widely accepted as one of the most effective tool for cell separation once integrated with microfluidic platform. Advanced DEP activated cell separators target for low-cost and fast cell separation with high separation efficiency. Recently microfluidic platforms incorporating microelectrodes made of conducting polymers leverage dielectrophoretic cell separation through replica molded volumetric electrodes that inherit the merit of 3D electrodes to generated highly effective DEP force field throughout the channel depth, and meanwhile allow cost-effective fabrication. Yet, such electrodes have limited way of configuration, being discretely embedded within fluidic sidewalls, which leads to compromised cell velocity for sufficient time of cell deflection under DEP force. This work for the first time presents long-range sidewall electrode made of conducting PDMS extending the full channel length and achieves continuous-flow dielectrophoretic separation of mammalian cells traveling at high velocity of 23.5 mm/s. We demonstrate the unique design and fabrication process of the long-range electrode featuring sidewall undercut and the DEP response of mammalian cells with distinctive dielectric property. We also carried out parametric study regarding the device capability of high velocity cell separation at varying voltage and cell loading density.
{"title":"High Velocity Dielectrophoretic Cell Separation Using Continuously Extended Sidewall Electrode Featuring Undercut Profile","authors":"Chaomin Zhang, Duli Yu, Xiaoxing Xing","doi":"10.1109/MEMS46641.2020.9056194","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056194","url":null,"abstract":"Dielectrophoresis (DEP) as a label free technique has been widely accepted as one of the most effective tool for cell separation once integrated with microfluidic platform. Advanced DEP activated cell separators target for low-cost and fast cell separation with high separation efficiency. Recently microfluidic platforms incorporating microelectrodes made of conducting polymers leverage dielectrophoretic cell separation through replica molded volumetric electrodes that inherit the merit of 3D electrodes to generated highly effective DEP force field throughout the channel depth, and meanwhile allow cost-effective fabrication. Yet, such electrodes have limited way of configuration, being discretely embedded within fluidic sidewalls, which leads to compromised cell velocity for sufficient time of cell deflection under DEP force. This work for the first time presents long-range sidewall electrode made of conducting PDMS extending the full channel length and achieves continuous-flow dielectrophoretic separation of mammalian cells traveling at high velocity of 23.5 mm/s. We demonstrate the unique design and fabrication process of the long-range electrode featuring sidewall undercut and the DEP response of mammalian cells with distinctive dielectric property. We also carried out parametric study regarding the device capability of high velocity cell separation at varying voltage and cell loading density.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"2 1","pages":"1044-1047"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73177430","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056394
Caleb A. Berry, Zachary R. Smith, S. Collins, Rosemary L. Smith
Microfabricated needle arrays for minimally invasive bioassay and drug delivery have been the subject of a great deal of excitement and research for nearly two decades. In particular, the application of microneedles to accessing and analyzing dermal interstitial fluid, in lieu of venous blood, could greatly facilitate point-of-care diagnosis and health monitoring in austere environments. However, there have been only a few successful demonstrations of in vivo collection of ISF from human skin using a microfabricated needle array. In this paper we present an empirically determined requisite feature of microfabricated hollow silicon needles that enable collection of ISF from human skin during in vivo testing. Success was only achieved by microneedles with this specific geometric feature, or shape. To inform microneedle design and fabrication, a silicon etch simulation program was developed to predict 3D shape evolution. The microfabrication process, a simulation example and in vivo test results are presented.
{"title":"Dermal ISF Collection Using a Si Microneedle Array","authors":"Caleb A. Berry, Zachary R. Smith, S. Collins, Rosemary L. Smith","doi":"10.1109/MEMS46641.2020.9056394","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056394","url":null,"abstract":"Microfabricated needle arrays for minimally invasive bioassay and drug delivery have been the subject of a great deal of excitement and research for nearly two decades. In particular, the application of microneedles to accessing and analyzing dermal interstitial fluid, in lieu of venous blood, could greatly facilitate point-of-care diagnosis and health monitoring in austere environments. However, there have been only a few successful demonstrations of in vivo collection of ISF from human skin using a microfabricated needle array. In this paper we present an empirically determined requisite feature of microfabricated hollow silicon needles that enable collection of ISF from human skin during in vivo testing. Success was only achieved by microneedles with this specific geometric feature, or shape. To inform microneedle design and fabrication, a silicon etch simulation program was developed to predict 3D shape evolution. The microfabrication process, a simulation example and in vivo test results are presented.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"26 1","pages":"365-368"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87899078","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056221
Feng Wen, Tianyiyi He, Qiongfeng Shi, Ting Zhang, Chengkuo Lee
Smart textile paves the way to a new generation of wearable electronics of Internet of Things (IoTs). However, the battery-dependent and hygroscopic limitations restrict the practical applications of self-powered textile-based electronics. To solve these problems, here we report a superhydrophobic textile based TENG using a facile coating approach to assemble CNTs/TPE onto textile. With improved anti-humidity and quick recovery capabilities from high moisture environment, the functionalized textile based-TENG enables relatively efficient biomechanical energy harvesting, anti-sweat human motion monitoring, especially gesture recognition of words of sign language based on superhydrophobic glove interface by using deep learning technology, maintaining high recognition accuracy even in high humidity atmosphere.
{"title":"Superhydrophobic Triboelectric Textile for Sensing and Energy Harvesting Applications","authors":"Feng Wen, Tianyiyi He, Qiongfeng Shi, Ting Zhang, Chengkuo Lee","doi":"10.1109/MEMS46641.2020.9056221","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056221","url":null,"abstract":"Smart textile paves the way to a new generation of wearable electronics of Internet of Things (IoTs). However, the battery-dependent and hygroscopic limitations restrict the practical applications of self-powered textile-based electronics. To solve these problems, here we report a superhydrophobic textile based TENG using a facile coating approach to assemble CNTs/TPE onto textile. With improved anti-humidity and quick recovery capabilities from high moisture environment, the functionalized textile based-TENG enables relatively efficient biomechanical energy harvesting, anti-sweat human motion monitoring, especially gesture recognition of words of sign language based on superhydrophobic glove interface by using deep learning technology, maintaining high recognition accuracy even in high humidity atmosphere.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"41 9 1","pages":"582-585"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88071222","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056196
Hsu-Hsiang Cheng, Sung-Cheng Lo, Yi-Jia Wang, Yu-Chen Chen, W. Lai, Meng-Lin Hsieh, Mingching Wu, W. Fang
This study presents a novel approach and the electrode design to drive two particular vibration modes of the structure to improve the frequency range of the piezoelectric MEMS microspeaker. Extending the advantage of the spring-diaphragm structure to enhance low-frequency sound pressure level (SPL) in the previous work [1], the proposed design in this study not only sustains low-frequency SPL by the piston mode of the diaphragm actuating by the edge electrodes, but also further increases high-frequency SPL to improve frequency range by the drum mode excited by the central electrode on the diaphragm. Measurements in the standard ear simulator depict that the proposed design has a significant SPL enhancement after the first resonant peak and meanwhile maintains the performance at low frequencies. From 2.6 kHz ∼ 20 kHz, the proposed design shows an improvement of more than 15 dB SPL over the reference design.
本研究提出了一种新的方法和电极设计来驱动结构的两种特定振动模式，以提高压电MEMS微扬声器的频率范围。本文的设计延续了前人研究[1]中簧膜结构提高低频声压级的优势，既通过边缘电极驱动膜片的活塞模式维持低频声压级，又通过膜片上中心电极激励的鼓式模式进一步提高高频声压级以提高频率范围。在标准耳模拟器中的测量表明，所提出的设计在第一个谐振峰之后具有显著的声压级增强，同时保持了低频的性能。在2.6 kHz ~ 20 kHz范围内，所提出的设计比参考设计提高了15 dB SPL以上。
{"title":"Piezoelectric Microspeaker Using Novel Driving Approach and Electrode Design for Frequency Range Improvement","authors":"Hsu-Hsiang Cheng, Sung-Cheng Lo, Yi-Jia Wang, Yu-Chen Chen, W. Lai, Meng-Lin Hsieh, Mingching Wu, W. Fang","doi":"10.1109/MEMS46641.2020.9056196","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056196","url":null,"abstract":"This study presents a novel approach and the electrode design to drive two particular vibration modes of the structure to improve the frequency range of the piezoelectric MEMS microspeaker. Extending the advantage of the spring-diaphragm structure to enhance low-frequency sound pressure level (SPL) in the previous work [1], the proposed design in this study not only sustains low-frequency SPL by the piston mode of the diaphragm actuating by the edge electrodes, but also further increases high-frequency SPL to improve frequency range by the drum mode excited by the central electrode on the diaphragm. Measurements in the standard ear simulator depict that the proposed design has a significant SPL enhancement after the first resonant peak and meanwhile maintains the performance at low frequencies. From 2.6 kHz ∼ 20 kHz, the proposed design shows an improvement of more than 15 dB SPL over the reference design.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"166 1","pages":"513-516"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83887193","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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