Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056417
M. M. Torunbalci, S. Bhave
This paper demonstrates piezo-mechanical manipulation of magnetic anisotropy in a thin-film CoFeB ferromagnet (FM) via magnetostriction effect. A 20 nm thick CoFeB resistor is fabricated at the base of an AlN cantilever and its magnetization change is detected by measuring anisotropic magnetoresistance (AMR). The uniaxial strain induced in the CoFeB strip by cantilever bending exhibits a 22% change in AMR and rotates the magnetic anisotropy by 20°.
{"title":"Mechanical Tuning of Magnetic Anisotropy","authors":"M. M. Torunbalci, S. Bhave","doi":"10.1109/MEMS46641.2020.9056417","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056417","url":null,"abstract":"This paper demonstrates piezo-mechanical manipulation of magnetic anisotropy in a thin-film CoFeB ferromagnet (FM) via magnetostriction effect. A 20 nm thick CoFeB resistor is fabricated at the base of an AlN cantilever and its magnetization change is detected by measuring anisotropic magnetoresistance (AMR). The uniaxial strain induced in the CoFeB strip by cantilever bending exhibits a 22% change in AMR and rotates the magnetic anisotropy by 20°.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"120 1","pages":"1145-1148"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87721431","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056442
K. Nishimura, Minghao Nie, S. Takeuchi
We propose a 3D spheroid trapping device featured with a gel formed in the proximity with the spheroids to facilitate spheroid adhesion and perfusion. The device is composed of an upper channel to introduce pre-gel solutions, a bridge region to form a gel and a lower channel to trap a spheroid and perfuse culture media. Due to surface-tension-assisted microfluidic functions, a gel is formed only in the bridge region. The gel performs as an anchoring scaffold for spheroids and enables media perfusion. As a result of spheroid culture, angiogenic vascular sprouts were formed and the sprouts had branched lumen structure. We believe this device will contribute widely to biomedical studies.
{"title":"3D Microfluidic Device for Perfusion Culture of Spheroids","authors":"K. Nishimura, Minghao Nie, S. Takeuchi","doi":"10.1109/MEMS46641.2020.9056442","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056442","url":null,"abstract":"We propose a 3D spheroid trapping device featured with a gel formed in the proximity with the spheroids to facilitate spheroid adhesion and perfusion. The device is composed of an upper channel to introduce pre-gel solutions, a bridge region to form a gel and a lower channel to trap a spheroid and perfuse culture media. Due to surface-tension-assisted microfluidic functions, a gel is formed only in the bridge region. The gel performs as an anchoring scaffold for spheroids and enables media perfusion. As a result of spheroid culture, angiogenic vascular sprouts were formed and the sprouts had branched lumen structure. We believe this device will contribute widely to biomedical studies.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"75 1","pages":"998-1001"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85723707","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056409
Jongwan Lee, Kyunghun Lee, Cong Wang, Dogyeong Ha, Jungyul Park, Taesung Kim
We introduce a micro-/nanofluidic platform enabling the comprehensive analysis and control of diffusioosmosis (DO)-driven ionic transport through a nanochannel network. The nanochannel network is fabricated in the microfluidic channel by forming a membrane via the self-assembly of nanoparticles (i.e., self-assembled particle membrane, SAPM). This fabrication method allows to use various and different nanoparticles so that it is possible to modulate the material properties of the nanochannel network. Using the platform, we analyze the thermal effect on DO-driven ionic transport with various concentrations of electrolyte solutions with the aid of a temperature switching device (TSD).
{"title":"Comprehensive Analysis and Control of Diffusioosmosis-Driven Ionic Transport Through Interconnected Nanoporous Membranes","authors":"Jongwan Lee, Kyunghun Lee, Cong Wang, Dogyeong Ha, Jungyul Park, Taesung Kim","doi":"10.1109/MEMS46641.2020.9056409","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056409","url":null,"abstract":"We introduce a micro-/nanofluidic platform enabling the comprehensive analysis and control of diffusioosmosis (DO)-driven ionic transport through a nanochannel network. The nanochannel network is fabricated in the microfluidic channel by forming a membrane via the self-assembly of nanoparticles (i.e., self-assembled particle membrane, SAPM). This fabrication method allows to use various and different nanoparticles so that it is possible to modulate the material properties of the nanochannel network. Using the platform, we analyze the thermal effect on DO-driven ionic transport with various concentrations of electrolyte solutions with the aid of a temperature switching device (TSD).","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"18 1","pages":"1134-1136"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86007312","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056265
M. Bestetti, V. Zega, G. Langfelder
The work presents a detailed modeling and the first-ever characterization of a frequency modulated (FM) yaw gyroscope in presence of vibrations from low frequency (30 Hz), through the main modes, and up to 40 kHz. The gyroscope two in-plane axes (around 25 kHz) are operated under a Lissajous trajectory (70 Hz period) by an integrated circuit (IC) including oscillators, frequency digitization, and digital demodulation stages. In presence of $2-g_{pk-pk}$ vibrations, no effects are visible across the spectrum apart from the region including the modes. In this range, as predicted by theory, for each axis no effect is observed for accelerations at the axis resonance (< 0.1 dps/g), but a huge effect (tens of dps/g) is visible for accelerations at an offset frequency from resonance corresponding to the mode split.
{"title":"Modeling and First Characterization of Broad-Spectrum Vibration Rejection of Frequency Modulated Gyroscopes","authors":"M. Bestetti, V. Zega, G. Langfelder","doi":"10.1109/MEMS46641.2020.9056265","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056265","url":null,"abstract":"The work presents a detailed modeling and the first-ever characterization of a frequency modulated (FM) yaw gyroscope in presence of vibrations from low frequency (30 Hz), through the main modes, and up to 40 kHz. The gyroscope two in-plane axes (around 25 kHz) are operated under a Lissajous trajectory (70 Hz period) by an integrated circuit (IC) including oscillators, frequency digitization, and digital demodulation stages. In presence of $2-g_{pk-pk}$ vibrations, no effects are visible across the spectrum apart from the region including the modes. In this range, as predicted by theory, for each axis no effect is observed for accelerations at the axis resonance (< 0.1 dps/g), but a huge effect (tens of dps/g) is visible for accelerations at an offset frequency from resonance corresponding to the mode split.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"23 1","pages":"259-262"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75072469","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056198
Chenchen Zhang, H. Mao, Meng Shi, J. Xiong, Kewen Long, Dapeng Chen
In this work, a fiber-Si3N4 composite nanoforest with high absorption in 7.6 to $11.6 mu mathrm{m}$ wavelength range is presented. Especially, when thickness of a Si3N4 coating reaches 300 nm, the nanoforest can achieve an average absorption as high as 88.12%. Such a composite nanoforest is fabricated based on an extremely simple process, including spin-coating and plasma treating of a polyimide layer, followed by deposition of a Si3N4 film. The process is fully compatible with conventional micromachining, thus the nanoforest can be integrated onto MEMS infrared (IR) sensors as an additional absorber. Furthermore, with such a composite nanoforest-based absorber, the IR sensors are expected to achieve higher performance, especially for human IR sensing.
在这项工作中，提出了一种在7.6 ~ 11.6 mu mathm {m}$波长范围内具有高吸收的光纤-氮化硅复合纳米森林。特别是当Si3N4涂层厚度达到300 nm时，纳米森林的平均吸收率高达88.12%。这种复合纳米森林是基于一个极其简单的过程制造的，包括自旋涂层和等离子体处理聚酰亚胺层，然后沉积一层氮化硅薄膜。该工艺与传统的微加工完全兼容，因此纳米森林可以集成到MEMS红外(IR)传感器上，作为额外的吸收器。此外，利用这种基于纳米森林的复合吸收剂，红外传感器有望实现更高的性能，特别是用于人体红外传感。
{"title":"A Fiber-Si3N4 Composite Nanoforest with High 7.6 to $11.6 mumathrm{m}$ Absorption for MEMS Infrared Sensors","authors":"Chenchen Zhang, H. Mao, Meng Shi, J. Xiong, Kewen Long, Dapeng Chen","doi":"10.1109/MEMS46641.2020.9056198","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056198","url":null,"abstract":"In this work, a fiber-Si3N4 composite nanoforest with high absorption in 7.6 to $11.6 mu mathrm{m}$ wavelength range is presented. Especially, when thickness of a Si3N4 coating reaches 300 nm, the nanoforest can achieve an average absorption as high as 88.12%. Such a composite nanoforest is fabricated based on an extremely simple process, including spin-coating and plasma treating of a polyimide layer, followed by deposition of a Si3N4 film. The process is fully compatible with conventional micromachining, thus the nanoforest can be integrated onto MEMS infrared (IR) sensors as an additional absorber. Furthermore, with such a composite nanoforest-based absorber, the IR sensors are expected to achieve higher performance, especially for human IR sensing.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"10 1","pages":"949-952"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74473396","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056287
Pietro Simeoni, Matteo Castellani, G. Piazza
We report on the first implementation of a long-range wake-up receiver (WuRx) enabled by an aggressively scaled 100 nm thick aluminum nitride transducer that occupies an area of only $100 mu mathrm{m} times 100 mu mathrm{m}$. This piezoelectric Nanoscale Ultrasound Transducer (pNUT) offers the same sensitivity and characteristic impedance of its microscale counterparts but enables “dust-like” WuRx because of its dramatically reduced size. We validate this concept by synthesizing a WuRx using a pNUT and off-the-shelf electronic components forming a voltage amplifier, an envelope detector and a comparator (Fig. 1). We demonstrate robust data transfer over a range of 0.5 m when operating with a 40 kHz carrier signal modulated at 250Hz. Based on these measurements we extrapolate the device performance at resonance to show that communication over> 10m is possible without increasing the WuRx area.
我们报告了远程唤醒接收器(WuRx)的第一个实现，该接收器由一个积极缩放的100纳米厚氮化铝传感器实现，该传感器仅占用$100 mu mathm {m} 乘以 100 mu mathm {m}$的面积。这种压电纳米级超声换能器(pNUT)提供了与微级同类产品相同的灵敏度和特性阻抗，但由于其尺寸显着减小，因此可以实现“粉尘状”的WuRx。我们通过使用pNUT和现成的电子元件合成WuRx来验证这一概念，这些电子元件组成了电压放大器、包络检测器和比较器(图1)。我们展示了在以250Hz调制的40 kHz载波信号下工作时，在0.5 m范围内的稳健数据传输。根据这些测量结果，我们推断出设备在共振时的性能，表明在不增加WuRx面积的情况下，通信超过10米是可能的。
{"title":"Long-Rangeultrasound Wake-Up Receiver with a Piezoelectric Nanoscale Ultrasound Transducer (pNUT)","authors":"Pietro Simeoni, Matteo Castellani, G. Piazza","doi":"10.1109/MEMS46641.2020.9056287","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056287","url":null,"abstract":"We report on the first implementation of a long-range wake-up receiver (WuRx) enabled by an aggressively scaled 100 nm thick aluminum nitride transducer that occupies an area of only $100 mu mathrm{m} times 100 mu mathrm{m}$. This piezoelectric Nanoscale Ultrasound Transducer (pNUT) offers the same sensitivity and characteristic impedance of its microscale counterparts but enables “dust-like” WuRx because of its dramatically reduced size. We validate this concept by synthesizing a WuRx using a pNUT and off-the-shelf electronic components forming a voltage amplifier, an envelope detector and a comparator (Fig. 1). We demonstrate robust data transfer over a range of 0.5 m when operating with a 40 kHz carrier signal modulated at 250Hz. Based on these measurements we extrapolate the device performance at resonance to show that communication over> 10m is possible without increasing the WuRx area.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"849-852"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78240346","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056115
Tobias Weber, C. Zgierski-Johnston, Eric Klein, S. Ayub, P. Kohl, O. Paul, P. Ruther
This paper reports on the fabrication, assembly, characterization and validation of a novel opto-electrical cardiac stimulator designed to augment a mechanical pacing device. The integration of miniaturized electrodes and blue light-emitting diode (LED) chips on the pacer tip with a diameter of 1 mm enables the application of multimodal stimuli in one location on the surface of isolated murine hearts. The opto-electrical stimulator is based on two separate polyimide (PI) substrates each with a thickness of $10 mu mathrm{m}$ combined into a functional unit based on dedicated assembly and encapsulation processes using silicone rubber. The experimental validation in isolated, whole hearts compares electrical, optical and mechanical stimuli exerted at frequencies of up to 8 Hz on Langen-dorff-perfused hearts expressing channelrhodopsin-2. The integrated iridium oxide electrodes implemented above the LED chips enable simultaneous electrical recordings of local cardiac electrical activity.
本文报道了一种新型光电心脏刺激器的制造、组装、表征和验证，该装置旨在增强机械起搏装置。微型电极和直径为1毫米的蓝色发光二极管(LED)芯片集成在起搏器尖端，可以在孤立的小鼠心脏表面的一个位置应用多模态刺激。光电刺激器基于两个独立的聚酰亚胺(PI)衬底，每个衬底的厚度为$10 mu mathm {m}$，结合成一个基于专用组装和使用硅橡胶封装工艺的功能单元。在分离的全心脏中进行的实验验证比较了以高达8赫兹的频率施加在表达通道视紫红质-2的兰根-多尔夫灌注心脏上的电、光和机械刺激。集成的氧化铱电极实现在LED芯片之上，可以同时记录局部心脏电活动。
{"title":"Concentric, Mems-Based Optoelectromechanical Pacer for Multimodal Cardiac Excitation","authors":"Tobias Weber, C. Zgierski-Johnston, Eric Klein, S. Ayub, P. Kohl, O. Paul, P. Ruther","doi":"10.1109/MEMS46641.2020.9056115","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056115","url":null,"abstract":"This paper reports on the fabrication, assembly, characterization and validation of a novel opto-electrical cardiac stimulator designed to augment a mechanical pacing device. The integration of miniaturized electrodes and blue light-emitting diode (LED) chips on the pacer tip with a diameter of 1 mm enables the application of multimodal stimuli in one location on the surface of isolated murine hearts. The opto-electrical stimulator is based on two separate polyimide (PI) substrates each with a thickness of $10 mu mathrm{m}$ combined into a functional unit based on dedicated assembly and encapsulation processes using silicone rubber. The experimental validation in isolated, whole hearts compares electrical, optical and mechanical stimuli exerted at frequencies of up to 8 Hz on Langen-dorff-perfused hearts expressing channelrhodopsin-2. The integrated iridium oxide electrodes implemented above the LED chips enable simultaneous electrical recordings of local cardiac electrical activity.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"6 1","pages":"361-364"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80162608","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056395
Yuha Koike, Hiroki Wada, Y. Yokoyama, T. Hayakawa
We propose drive method of on-chip gel actuator using light irradiation for massive integration of gel actuators. The gel actuator is made of temperature responsive gel and patterned on a chip with light absorbing material. Thus, it can be driven by irradiation of light to control its temperature. By using this method, we can selectively drive an actuator among massively integrated actuators by irradiating patterned light and it can be applied to high-throughput cell manipulations. In this study, we demonstrated an example of cell manipulation by using this method. We made a flow channel for cell transportation by irradiating light. We succeeded in making straight channel by irradiating actuators with sheet laser. In this channel, we observed that motile cells moved and we succeeded in trapping the motile cells by turning off the laser and swelling the actuators.
{"title":"Massive Integration of Light Driving Gel Actuator for Single Cell Manipulation","authors":"Yuha Koike, Hiroki Wada, Y. Yokoyama, T. Hayakawa","doi":"10.1109/MEMS46641.2020.9056395","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056395","url":null,"abstract":"We propose drive method of on-chip gel actuator using light irradiation for massive integration of gel actuators. The gel actuator is made of temperature responsive gel and patterned on a chip with light absorbing material. Thus, it can be driven by irradiation of light to control its temperature. By using this method, we can selectively drive an actuator among massively integrated actuators by irradiating patterned light and it can be applied to high-throughput cell manipulations. In this study, we demonstrated an example of cell manipulation by using this method. We made a flow channel for cell transportation by irradiating light. We succeeded in making straight channel by irradiating actuators with sheet laser. In this channel, we observed that motile cells moved and we succeeded in trapping the motile cells by turning off the laser and swelling the actuators.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"41 1","pages":"1094-1097"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81737390","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056111
Seungmin Lee, Youngbin Hyun, Kang-Young Lee, Jeongmin Lee, S. Chung
This paper presents self-cleaning drop free glass (DFG) through acoustic atomization and oscillation for autonomous driving and IoT technology. The behavior of an oscillating droplet actuated by a ring-piezoactuator is investigated by high-speed images in a wide range of acoustic amplitudes and frequencies. The atomization and oscillation of a droplet are separately tested using prepared DFG samples. The droplet atomization remains tiny satellite droplets on the surface of the DFG after the operation, while the droplet oscillation clearly removes the droplet from the surface. The DFG can be used to efficiently clean water and viscous droplets generated on the surface of various optical sensors.
{"title":"Self-Cleaning Drop Free Glass Operated by Acoustic Atomization/Oscillation for Autonomous Driving and IoT Technology","authors":"Seungmin Lee, Youngbin Hyun, Kang-Young Lee, Jeongmin Lee, S. Chung","doi":"10.1109/MEMS46641.2020.9056111","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056111","url":null,"abstract":"This paper presents self-cleaning drop free glass (DFG) through acoustic atomization and oscillation for autonomous driving and IoT technology. The behavior of an oscillating droplet actuated by a ring-piezoactuator is investigated by high-speed images in a wide range of acoustic amplitudes and frequencies. The atomization and oscillation of a droplet are separately tested using prepared DFG samples. The droplet atomization remains tiny satellite droplets on the surface of the DFG after the operation, while the droplet oscillation clearly removes the droplet from the surface. The DFG can be used to efficiently clean water and viscous droplets generated on the surface of various optical sensors.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"3 1","pages":"36-37"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82466971","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
扫码关注我们
求助内容：
应助结果提醒方式：