Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056417
M. M. Torunbalci, S. Bhave
This paper demonstrates piezo-mechanical manipulation of magnetic anisotropy in a thin-film CoFeB ferromagnet (FM) via magnetostriction effect. A 20 nm thick CoFeB resistor is fabricated at the base of an AlN cantilever and its magnetization change is detected by measuring anisotropic magnetoresistance (AMR). The uniaxial strain induced in the CoFeB strip by cantilever bending exhibits a 22% change in AMR and rotates the magnetic anisotropy by 20°.
{"title":"Mechanical Tuning of Magnetic Anisotropy","authors":"M. M. Torunbalci, S. Bhave","doi":"10.1109/MEMS46641.2020.9056417","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056417","url":null,"abstract":"This paper demonstrates piezo-mechanical manipulation of magnetic anisotropy in a thin-film CoFeB ferromagnet (FM) via magnetostriction effect. A 20 nm thick CoFeB resistor is fabricated at the base of an AlN cantilever and its magnetization change is detected by measuring anisotropic magnetoresistance (AMR). The uniaxial strain induced in the CoFeB strip by cantilever bending exhibits a 22% change in AMR and rotates the magnetic anisotropy by 20°.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"120 1","pages":"1145-1148"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87721431","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056442
K. Nishimura, Minghao Nie, S. Takeuchi
We propose a 3D spheroid trapping device featured with a gel formed in the proximity with the spheroids to facilitate spheroid adhesion and perfusion. The device is composed of an upper channel to introduce pre-gel solutions, a bridge region to form a gel and a lower channel to trap a spheroid and perfuse culture media. Due to surface-tension-assisted microfluidic functions, a gel is formed only in the bridge region. The gel performs as an anchoring scaffold for spheroids and enables media perfusion. As a result of spheroid culture, angiogenic vascular sprouts were formed and the sprouts had branched lumen structure. We believe this device will contribute widely to biomedical studies.
{"title":"3D Microfluidic Device for Perfusion Culture of Spheroids","authors":"K. Nishimura, Minghao Nie, S. Takeuchi","doi":"10.1109/MEMS46641.2020.9056442","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056442","url":null,"abstract":"We propose a 3D spheroid trapping device featured with a gel formed in the proximity with the spheroids to facilitate spheroid adhesion and perfusion. The device is composed of an upper channel to introduce pre-gel solutions, a bridge region to form a gel and a lower channel to trap a spheroid and perfuse culture media. Due to surface-tension-assisted microfluidic functions, a gel is formed only in the bridge region. The gel performs as an anchoring scaffold for spheroids and enables media perfusion. As a result of spheroid culture, angiogenic vascular sprouts were formed and the sprouts had branched lumen structure. We believe this device will contribute widely to biomedical studies.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"75 1","pages":"998-1001"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85723707","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056409
Jongwan Lee, Kyunghun Lee, Cong Wang, Dogyeong Ha, Jungyul Park, Taesung Kim
We introduce a micro-/nanofluidic platform enabling the comprehensive analysis and control of diffusioosmosis (DO)-driven ionic transport through a nanochannel network. The nanochannel network is fabricated in the microfluidic channel by forming a membrane via the self-assembly of nanoparticles (i.e., self-assembled particle membrane, SAPM). This fabrication method allows to use various and different nanoparticles so that it is possible to modulate the material properties of the nanochannel network. Using the platform, we analyze the thermal effect on DO-driven ionic transport with various concentrations of electrolyte solutions with the aid of a temperature switching device (TSD).
{"title":"Comprehensive Analysis and Control of Diffusioosmosis-Driven Ionic Transport Through Interconnected Nanoporous Membranes","authors":"Jongwan Lee, Kyunghun Lee, Cong Wang, Dogyeong Ha, Jungyul Park, Taesung Kim","doi":"10.1109/MEMS46641.2020.9056409","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056409","url":null,"abstract":"We introduce a micro-/nanofluidic platform enabling the comprehensive analysis and control of diffusioosmosis (DO)-driven ionic transport through a nanochannel network. The nanochannel network is fabricated in the microfluidic channel by forming a membrane via the self-assembly of nanoparticles (i.e., self-assembled particle membrane, SAPM). This fabrication method allows to use various and different nanoparticles so that it is possible to modulate the material properties of the nanochannel network. Using the platform, we analyze the thermal effect on DO-driven ionic transport with various concentrations of electrolyte solutions with the aid of a temperature switching device (TSD).","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"18 1","pages":"1134-1136"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86007312","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056207
Binbin Cui, Chunchen Liu, S. Yao
The dysregulation of the microRNAs, small noncoding RNA around 22 bases, accounts for a wide range of diseases including cancer. However, current methods technologies for of the microRNA the detection and analysis of microRNA are limited to the analysis of bulk exosomes, which fails to depict the heterogeneity of the exosome population as individual vesicles. In this work, we developed a reverse transcription polymerase chain reaction (RT-PCR) protocol on a droplet microfluidic platform. We employed the synthetic hsa-miR-21-5p and exosomes extracted from lung cancer patients in the proof-of-concept experiments. The results indicated that our method can detect as low as a single molecule of microRNA per droplet, which is promising for single exosome microRNA assays.
{"title":"One-Step RT-PCR for Detection of Micrornas in Exosomes Using Droplet Microfluidics","authors":"Binbin Cui, Chunchen Liu, S. Yao","doi":"10.1109/MEMS46641.2020.9056207","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056207","url":null,"abstract":"The dysregulation of the microRNAs, small noncoding RNA around 22 bases, accounts for a wide range of diseases including cancer. However, current methods technologies for of the microRNA the detection and analysis of microRNA are limited to the analysis of bulk exosomes, which fails to depict the heterogeneity of the exosome population as individual vesicles. In this work, we developed a reverse transcription polymerase chain reaction (RT-PCR) protocol on a droplet microfluidic platform. We employed the synthetic hsa-miR-21-5p and exosomes extracted from lung cancer patients in the proof-of-concept experiments. The results indicated that our method can detect as low as a single molecule of microRNA per droplet, which is promising for single exosome microRNA assays.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"53 1","pages":"142-146"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88760047","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056109
Takumi Yamada, Minghao Nie, A. Shima, Y. Morimoto, S. Takeuchi
We present a system for measuring electrical resistance of a cellular barrier consisting of < 100 cells. We fabricated a parylene membrane with pores etched by photolithography technique and bonded it to Polydimethylsiloxane (PDMS) wells by H2O vapor plasma treatment. This membrane separated the well into two compartments. In our system, since the placement and number of pores were easy to control, the pore-etched part of the membrane was fully covered with cells. Thus, electrical resistance was easily measured using only a small number of cells. As a demonstration of the measurement with the system, Caco-2 cells were seeded on an upper side of the membrane, and the resistance was measured using a volt-ohm meter.
{"title":"Locally-Patterned Parylene Membrane Enables Electrical Resistance Measurement for a Cellular Barrier Consisting of < 100 Cells","authors":"Takumi Yamada, Minghao Nie, A. Shima, Y. Morimoto, S. Takeuchi","doi":"10.1109/MEMS46641.2020.9056109","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056109","url":null,"abstract":"We present a system for measuring electrical resistance of a cellular barrier consisting of < 100 cells. We fabricated a parylene membrane with pores etched by photolithography technique and bonded it to Polydimethylsiloxane (PDMS) wells by H2O vapor plasma treatment. This membrane separated the well into two compartments. In our system, since the placement and number of pores were easy to control, the pore-etched part of the membrane was fully covered with cells. Thus, electrical resistance was easily measured using only a small number of cells. As a demonstration of the measurement with the system, Caco-2 cells were seeded on an upper side of the membrane, and the resistance was measured using a volt-ohm meter.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"325-327"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88891792","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056193
Tai Nguyen, Noureddine Adjeroud, S. Glinšek, Y. Fleming, J. Guillot, J. Polesel-Maris
This work presents a novel process of magnetoelectric (ME) stacks composed of a highly (002)-oriented aluminum nitride (AlN) film grown by plasma-enhanced atomic layer deposition (PEALD) on magnetostrictive nickel, iron, and cobalt foils. We report an efficient methodology to process high quality piezoelectric AlN films by PEALD at low temperatures. The effective transverse piezoelectric coefficient $e_{31,f}$ was evaluated to be 0.37 C/m2 for the highly (002)-oriented AlN film. Moreover, by the conformal coating obtained by PEALD, a strong ME coupling of 2.8 V.cm−1. Oe−1 is obtained out of resonance on 2–2 composites of a (002)-oriented AlN film on nickel. This ME device could open a novel way for energy harvesting of microsystems.
{"title":"Strong Magnetoelectric Effects of 2–2 Composites Made of AlN Films Grown by Plasma-Enhanced Atomic Layer Deposition on Magnetostrictive Foils for Energy Harvesting Applications","authors":"Tai Nguyen, Noureddine Adjeroud, S. Glinšek, Y. Fleming, J. Guillot, J. Polesel-Maris","doi":"10.1109/MEMS46641.2020.9056193","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056193","url":null,"abstract":"This work presents a novel process of magnetoelectric (ME) stacks composed of a highly (002)-oriented aluminum nitride (AlN) film grown by plasma-enhanced atomic layer deposition (PEALD) on magnetostrictive nickel, iron, and cobalt foils. We report an efficient methodology to process high quality piezoelectric AlN films by PEALD at low temperatures. The effective transverse piezoelectric coefficient $e_{31,f}$ was evaluated to be 0.37 C/m2 for the highly (002)-oriented AlN film. Moreover, by the conformal coating obtained by PEALD, a strong ME coupling of 2.8 V.cm−1. Oe−1 is obtained out of resonance on 2–2 composites of a (002)-oriented AlN film on nickel. This ME device could open a novel way for energy harvesting of microsystems.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"33 1","pages":"578-581"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81249599","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056231
C. Vélez, Sukjun Kim, M. Babaei, D. Patel, C. Knick, Gabriel L. Smith, S. Bergbreiter
This work demonstrates the first sputtered thin-film nickel-titanium (NiTi) shape-memory alloy (SMA) actuators combined with direct 3D printing of polymeric structures. Resulting actuators are fast to prototype, reliable and stable (up to 5000 cycles), and can utilize complex geometries challenging to achieve with conventional MEMS microfabrication. The actuator design uses 3D printed polymer as the passive layer in unimorph actuators, adding significant versatility to the actuator design. An actuator designed for high force-displacement was fabricated with a $15 mu mathrm{m}$ thick polymer layer and characterized by applying currents up to 18 ma (7.3 mW, producing ∼156°C) resulting in a maximum displacement of $3.3 mu mathrm{m}$ and ∼0.9 mN blocking force. Dynamic operation with falling/rising times of 20.1 ms/9.8 ms and 33.5 Hz maximum operation frequency was also demonstrated.
这项工作展示了第一个与聚合物结构直接3D打印相结合的溅射薄膜镍钛(NiTi)形状记忆合金(SMA)致动器。由此产生的致动器具有快速原型，可靠和稳定(高达5000次循环)，并且可以利用传统MEMS微加工难以实现的复杂几何形状。执行器设计使用3D打印聚合物作为单形执行器的被动层，为执行器设计增加了显著的多功能性。采用厚度为15 mu mathm {m}$的聚合物层制备了一种用于高力-位移的致动器，其特点是施加电流高达18 ma (7.3 mW，产生~ 156°C)，最大位移为3.3 mu mathm {m}$，阻塞力为~ 0.9 mN。实验还证明了该系统的动态运行速度为20.1 ms/9.8 ms，最大工作频率为33.5 Hz。
{"title":"Rapid Prototyping of Microactuators by Integrating 3D Printed Polymeric Structures with NiTi Thin Film","authors":"C. Vélez, Sukjun Kim, M. Babaei, D. Patel, C. Knick, Gabriel L. Smith, S. Bergbreiter","doi":"10.1109/MEMS46641.2020.9056231","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056231","url":null,"abstract":"This work demonstrates the first sputtered thin-film nickel-titanium (NiTi) shape-memory alloy (SMA) actuators combined with direct 3D printing of polymeric structures. Resulting actuators are fast to prototype, reliable and stable (up to 5000 cycles), and can utilize complex geometries challenging to achieve with conventional MEMS microfabrication. The actuator design uses 3D printed polymer as the passive layer in unimorph actuators, adding significant versatility to the actuator design. An actuator designed for high force-displacement was fabricated with a $15 mu mathrm{m}$ thick polymer layer and characterized by applying currents up to 18 ma (7.3 mW, producing ∼156°C) resulting in a maximum displacement of $3.3 mu mathrm{m}$ and ∼0.9 mN blocking force. Dynamic operation with falling/rising times of 20.1 ms/9.8 ms and 33.5 Hz maximum operation frequency was also demonstrated.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"34 1","pages":"893-896"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88354179","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056382
Pen-Sheng Lin, Ting-Wei Shen, Kai-Chieh Chang, W. Fang
This study monolithically integrates a metal-insulator-metal-based (MIM) plasmonic metamaterial absorber (PMA) with a thermoelectric (TE) infrared (IR) sensor using standard TSMC CMOS platform. The proposed design extends the strip-via releasing hole structure in [1] to further integrate MIM absorber with TE IR sensor. Such design exhibits three merits: (1) the line width requirement of MIM absorber is achieved by CMOS process, (2) the absorption peaks of MIM absorbers can be modulated by pattern designs in the epsilon-near-pole region, and (3) the MIM absorbers can be designed to broaden the absorption spectrum of IR sensor. In application, the absorption spectrum of IR sensor is designed within $8-14mu mathrm{m}$ in this study for human detection application. Measurement result demonstrates the integration of MIM absorber and IR sensor can achieve 21% responsivity improvement and the measured absorption spectrum matches with simulation.
{"title":"Monolithic Integration of Plasmonic Meta-Material Absorber with CMOS-MEMs Infrared Sensor for Responsivity Enhancement and Human Detection Application","authors":"Pen-Sheng Lin, Ting-Wei Shen, Kai-Chieh Chang, W. Fang","doi":"10.1109/MEMS46641.2020.9056382","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056382","url":null,"abstract":"This study monolithically integrates a metal-insulator-metal-based (MIM) plasmonic metamaterial absorber (PMA) with a thermoelectric (TE) infrared (IR) sensor using standard TSMC CMOS platform. The proposed design extends the strip-via releasing hole structure in [1] to further integrate MIM absorber with TE IR sensor. Such design exhibits three merits: (1) the line width requirement of MIM absorber is achieved by CMOS process, (2) the absorption peaks of MIM absorbers can be modulated by pattern designs in the epsilon-near-pole region, and (3) the MIM absorbers can be designed to broaden the absorption spectrum of IR sensor. In application, the absorption spectrum of IR sensor is designed within $8-14mu mathrm{m}$ in this study for human detection application. Measurement result demonstrates the integration of MIM absorber and IR sensor can achieve 21% responsivity improvement and the measured absorption spectrum matches with simulation.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"58 1","pages":"157-160"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86798429","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056252
Tomoya Nakamura, Y. Hirai, O. Tabata, T. Tsuchiya
A new design of arrayed micro mirror device for a high performance spatial light modulator of high resonant frequency, large deflection angle with high mechanical reliability has been proposed. The mirror has $100-mu mathrm{m}$ square plate of $5 mu mathrm{m}$ thick, which is suspended by thin silicon nanowire of about $1 mu mathrm{m}$ thick and wide. The device was fabricated using Bosch process and isotropic plasma etching. We successfully demonstrated array operation of $4times 4$ devices at relatively low actuation voltage (∼20 Vpp) and large mechanical deflection amplitude (∼9°). However, the deviation of vibration amplitude was large among unit resonators. By fitting the frequency response to the Duffing equation we found that self-enhancing actuation force caused by nonlinearity of the vertical combs was a main reason.
为实现高谐振频率、大偏转角、高机械可靠性的高性能空间光调制器，提出了一种新的阵列微镜器件设计方案。镜子有$100- mu mathm {m}$厚的$5 mu mathm {m}$方板，由约$1 mu mathm {m}$粗和宽的细硅纳米线悬浮。该器件采用博世工艺和各向同性等离子体刻蚀技术制备。我们成功地演示了在相对低的驱动电压(~ 20 Vpp)和大的机械偏转幅度(~ 9°)下，$4 × 4$器件的阵列操作。但单元谐振器之间的振动幅值偏差较大。通过对Duffing方程的频响拟合，发现垂直梳子非线性引起的自增强作动力是主要原因。
{"title":"Electrostatic Micro Mirror Array with Batch-Fabricated Torsion Beam of Silicon Nanowire","authors":"Tomoya Nakamura, Y. Hirai, O. Tabata, T. Tsuchiya","doi":"10.1109/MEMS46641.2020.9056252","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056252","url":null,"abstract":"A new design of arrayed micro mirror device for a high performance spatial light modulator of high resonant frequency, large deflection angle with high mechanical reliability has been proposed. The mirror has $100-mu mathrm{m}$ square plate of $5 mu mathrm{m}$ thick, which is suspended by thin silicon nanowire of about $1 mu mathrm{m}$ thick and wide. The device was fabricated using Bosch process and isotropic plasma etching. We successfully demonstrated array operation of $4times 4$ devices at relatively low actuation voltage (∼20 Vpp) and large mechanical deflection amplitude (∼9°). However, the deviation of vibration amplitude was large among unit resonators. By fitting the frequency response to the Duffing equation we found that self-enhancing actuation force caused by nonlinearity of the vertical combs was a main reason.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"6 1","pages":"1157-1160"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86963191","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056180
A. Mahmoud, T. Mukherjee, G. Piazza
This paper is the first to investigate the long-term stability of Surface Acoustic Wave Gyroscopes (SAWG) using an ovenized control system. Monolithic integration of a MEMS heater adjacent to SAW devices on Lithium Niobate over insulator substrate (LNOI) tightly couples frequency-based temperature detection with heating for temperature and frequency stabilization. This first prototype demonstrates the ability to minimize the temperature variations of the SAWG to below $pm 10 mumathrm{K}$ and stabilize the SAWG resonance frequency to ±0.2 ppm. This approach thus eliminates the thermal drift in a SAWG and enables the development of a new generation of MEMS-based gyroscopes with long-term stability.
本文首次研究了表面声波陀螺仪(SAWG)的长期稳定性。在绝缘体衬底上的铌酸锂(LNOI)上，MEMS加热器的单片集成与SAW器件相邻，将基于频率的温度检测与加热紧密耦合，以实现温度和频率稳定。第一个原型证明了将SAWG的温度变化最小化到$pm 10 mu maththrm {K}$以下的能力，并将SAWG的谐振频率稳定在±0.2 ppm。因此，这种方法消除了SAWG中的热漂移，并使新一代基于mems的陀螺仪具有长期稳定性。
{"title":"Investigating Long-Term Stability of Wide Bandwidth Surface Acoustic Waves Gyroscopes Using a Monolithically Integrated Micro-Oven","authors":"A. Mahmoud, T. Mukherjee, G. Piazza","doi":"10.1109/MEMS46641.2020.9056180","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056180","url":null,"abstract":"This paper is the first to investigate the long-term stability of Surface Acoustic Wave Gyroscopes (SAWG) using an ovenized control system. Monolithic integration of a MEMS heater adjacent to SAW devices on Lithium Niobate over insulator substrate (LNOI) tightly couples frequency-based temperature detection with heating for temperature and frequency stabilization. This first prototype demonstrates the ability to minimize the temperature variations of the SAWG to below $pm 10 mumathrm{K}$ and stabilize the SAWG resonance frequency to ±0.2 ppm. This approach thus eliminates the thermal drift in a SAWG and enables the development of a new generation of MEMS-based gyroscopes with long-term stability.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"33 1","pages":"252-254"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85635607","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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