Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056453
T. Uchida, H. Yasuga, T. Tachi, E. Iwase, H. Onoe
This study describes a self-folding origami technique that enables acute angle folding by surface bending force for the first time. We patterned plus-shaped “+” carbon black patterns on a shrinking sheet and achieved self-folding of the 2D sheet quite sharply (more than 160°) trigger with infrared (IR) light irradiation. We investigated the folding angle of our sheet with “+” pattern comparing to the sheet with slit pattern on a crease, and confirmed that our sheet could be folded at larger folding angle than the sheet with slit pattern. Next, we examined the folding angle of the sheet that had “+” pattern with different width and found that the folding angle increased when the surface bending force increased. Finally, we demonstrated this “+” pattern to fabricate 3D word objects “MEMS”. Our surface bending approach to Origami folding could open a new avenue to widen the variety and controllability of self-folding objects.
{"title":"Self-Folding Acute-Angle Origami Driven by Surface Bending Force","authors":"T. Uchida, H. Yasuga, T. Tachi, E. Iwase, H. Onoe","doi":"10.1109/MEMS46641.2020.9056453","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056453","url":null,"abstract":"This study describes a self-folding origami technique that enables acute angle folding by surface bending force for the first time. We patterned plus-shaped “+” carbon black patterns on a shrinking sheet and achieved self-folding of the 2D sheet quite sharply (more than 160°) trigger with infrared (IR) light irradiation. We investigated the folding angle of our sheet with “+” pattern comparing to the sheet with slit pattern on a crease, and confirmed that our sheet could be folded at larger folding angle than the sheet with slit pattern. Next, we examined the folding angle of the sheet that had “+” pattern with different width and found that the folding angle increased when the surface bending force increased. Finally, we demonstrated this “+” pattern to fabricate 3D word objects “MEMS”. Our surface bending approach to Origami folding could open a new avenue to widen the variety and controllability of self-folding objects.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"19 1","pages":"992-993"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83147821","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056449
Tanya Bennet, Brenda Shen, Jeremy Siwik, Stephanie Pan, Cheng Wei Tony Yang, D. Sin, T. Hackett, K. Cheung
We report a microfluidic cell culture model that incorporates a novel 3-dimensional extracellular matrix composed of a biodegradable membrane and lumen-patterned, cell-embedded hydrogel. Additionally, we developed a novel approach to produce a hydrogel mixture containing gelatin methacrylate (GelMA) and ultrasonicated Matrigel microparticles. The novel fabrication approach creates a hybrid hydrogel where the Matrigel is well distributed within the GelMA, it promotes fibroblast cell elongation, and it does not affect the photopolymerization of GelMA.
{"title":"Airway-on-a-Chip: Development and in Vitro Validation of a Microfluidic Cell Culture Model for Chronic Obstructive Pulmonary Disease","authors":"Tanya Bennet, Brenda Shen, Jeremy Siwik, Stephanie Pan, Cheng Wei Tony Yang, D. Sin, T. Hackett, K. Cheung","doi":"10.1109/MEMS46641.2020.9056449","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056449","url":null,"abstract":"We report a microfluidic cell culture model that incorporates a novel 3-dimensional extracellular matrix composed of a biodegradable membrane and lumen-patterned, cell-embedded hydrogel. Additionally, we developed a novel approach to produce a hydrogel mixture containing gelatin methacrylate (GelMA) and ultrasonicated Matrigel microparticles. The novel fabrication approach creates a hybrid hydrogel where the Matrigel is well distributed within the GelMA, it promotes fibroblast cell elongation, and it does not affect the photopolymerization of GelMA.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"65 1","pages":"440-443"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83242693","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056376
Takafumi Yamaguchi, T. Arie, S. Akita, K. Takei
This study proposes a wearable and flexible heart pulse sensor detected from a wrist using the tactile pressure sensor film. In general, it is difficult to monitor heart pulse stably under movement of wrist due to the change of position and pressure of the sensors on a wrist. To address this issue, soft pneumatic pump and actuator are integrated to fix the sensor on a wrist even under movement of body. Fundamental properties of pneumatic pump and tactile pressure sensor are studied in addition to the heart pulse monitoring.
{"title":"Wearable and Flexible Heart Pulse Sensor Integrated with a Soft Pump and Actuator","authors":"Takafumi Yamaguchi, T. Arie, S. Akita, K. Takei","doi":"10.1109/MEMS46641.2020.9056376","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056376","url":null,"abstract":"This study proposes a wearable and flexible heart pulse sensor detected from a wrist using the tactile pressure sensor film. In general, it is difficult to monitor heart pulse stably under movement of wrist due to the change of position and pressure of the sensors on a wrist. To address this issue, soft pneumatic pump and actuator are integrated to fix the sensor on a wrist even under movement of body. Fundamental properties of pneumatic pump and tactile pressure sensor are studied in addition to the heart pulse monitoring.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"881-884"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83324103","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056389
Ji-Tzuoh Lin, Peng Wang, P. Shuvra, S. Mcnamara, Mike McCurdy, J. Davidson, K. Walsh, M. Alles, B. Alphenaar
We present electrical measurements of gallium nitride/Aluminum nitride (GaN/AlN) microelectromechanical system (MEMS) beams under the combined influence of strain and X-ray radiation. These results are used to understand the mechanism for the observed piezoresistive gauge factor in GaN devices. Exposure with X-ray radiation decreases the electrical resistance while strongly suppressing the gauge factor. Upon removal of the X-ray, the gauge factor quickly returns to its pre-radiated value, while the electrical resistance remains low for a long period of time. These results suggest that the piezoresistance is mainly due to the generation of piezoelectric fields, which are screened by the mobile charge excited by the X-ray radiation. Preliminary results are also presented for HEMT devices; here, piezoelectric fields shifts the threshold voltage of the transistor resulting in an increase in drain current.
{"title":"Impact of X-Ray Radiation on GaN/AlN MEMS Structure and GaN HEMT Gauge Factor Response","authors":"Ji-Tzuoh Lin, Peng Wang, P. Shuvra, S. Mcnamara, Mike McCurdy, J. Davidson, K. Walsh, M. Alles, B. Alphenaar","doi":"10.1109/MEMS46641.2020.9056389","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056389","url":null,"abstract":"We present electrical measurements of gallium nitride/Aluminum nitride (GaN/AlN) microelectromechanical system (MEMS) beams under the combined influence of strain and X-ray radiation. These results are used to understand the mechanism for the observed piezoresistive gauge factor in GaN devices. Exposure with X-ray radiation decreases the electrical resistance while strongly suppressing the gauge factor. Upon removal of the X-ray, the gauge factor quickly returns to its pre-radiated value, while the electrical resistance remains low for a long period of time. These results suggest that the piezoresistance is mainly due to the generation of piezoelectric fields, which are screened by the mobile charge excited by the X-ray radiation. Preliminary results are also presented for HEMT devices; here, piezoelectric fields shifts the threshold voltage of the transistor resulting in an increase in drain current.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"53 1","pages":"968-971"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88773055","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056157
J. Cui, Mengxia Liu, Haibing Yang, Dong Li, Qiancheng Zhao
This paper presents a novel silicon resonant accelerometer (SRA) with a stress isolation frame mounted on axis-symmetrical anchors to improve the temperature performance. The stress-insensitive design prevents the thermal stress produced by the mismatch of the thermal expansion coefficients (CTE) of the heterogeneous materials in the device from transmitting to double-ended tuning forks (DETF), resulting in reducing the thermal sensitivity of SRA. The results show the scale factor is 516 Hz/g and the average nominal frequency of the two DETFs is ∼138.4 kHz with the closely matched temperature coefficients of frequency (TCF) 5.72 Hz/°C and 5.92 Hz/ °C, respectively. The bias thermal sensitivity and compensated stability are 0.42 mg/°C and 0.6 mg over the temperature range from −40 °C to 40 °C, which is competitive compared with previously reported results in literatures.
{"title":"Temperature Robust Silicon Resonant Accelerometer with Stress Isolation Frame Mounted on Axis-Symmetrical Anchors","authors":"J. Cui, Mengxia Liu, Haibing Yang, Dong Li, Qiancheng Zhao","doi":"10.1109/MEMS46641.2020.9056157","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056157","url":null,"abstract":"This paper presents a novel silicon resonant accelerometer (SRA) with a stress isolation frame mounted on axis-symmetrical anchors to improve the temperature performance. The stress-insensitive design prevents the thermal stress produced by the mismatch of the thermal expansion coefficients (CTE) of the heterogeneous materials in the device from transmitting to double-ended tuning forks (DETF), resulting in reducing the thermal sensitivity of SRA. The results show the scale factor is 516 Hz/g and the average nominal frequency of the two DETFs is ∼138.4 kHz with the closely matched temperature coefficients of frequency (TCF) 5.72 Hz/°C and 5.92 Hz/ °C, respectively. The bias thermal sensitivity and compensated stability are 0.42 mg/°C and 0.6 mg over the temperature range from −40 °C to 40 °C, which is competitive compared with previously reported results in literatures.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"10 1","pages":"791-794"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86579080","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056205
N. Fujimoto, T. Kanda, K. Omori, Naohiro Tahara, Y. Sakata, Norihisa Seno, S. Wakimoto, Y. Nakazaki, T. Otoyama
High quality nanoparticles have been required in many industrial fields. By a principle of re-crystallization process, nanoparticles can be formed by quenching a solution. Thus, the quenching of micro droplets is effective for nanoparticle generation. In this study, we have developed a flow-type system for nanoparticles generation. In the system, generated micro droplets are quenched in continuous phase with small thermal conductivity using a microchannel device. We have successfully maintained the temperature of droplets before the quenching process and obtained fine nanoparticles.
{"title":"A Flow-Type Nanoparticle Generation System Using a Microchannel Device for Generating and Quenching Droplets","authors":"N. Fujimoto, T. Kanda, K. Omori, Naohiro Tahara, Y. Sakata, Norihisa Seno, S. Wakimoto, Y. Nakazaki, T. Otoyama","doi":"10.1109/MEMS46641.2020.9056205","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056205","url":null,"abstract":"High quality nanoparticles have been required in many industrial fields. By a principle of re-crystallization process, nanoparticles can be formed by quenching a solution. Thus, the quenching of micro droplets is effective for nanoparticle generation. In this study, we have developed a flow-type system for nanoparticles generation. In the system, generated micro droplets are quenched in continuous phase with small thermal conductivity using a microchannel device. We have successfully maintained the temperature of droplets before the quenching process and obtained fine nanoparticles.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"9 1","pages":"1075-1078"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89468557","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056433
A. Takei, S. Tsukamoto, Yusuke Komazaki, Yuichi Watanabe, Y. Kusaka, M. Yoshida
In general, flexible devices are manufactured by laminating and patterning several layers on a plastic film or an elastomeric substrate. In particular, elastomeric substrates have been used for flexible devices due to their high deformability. However, the fabrication of devices on elastomeric substrates requires complicated processes, such as the transfer process, because the low adhesion and difference in the thermal expansion values between the elastomer and the device layers limit the fabrication methods. In this study, we prepare composites of elastomer and functional particles (functional elastomer) and deposit electrodes on the functional elastomer. Our proposed flexible devices comprise only elastomer, electrode layers, and adhesive layers between them. By simplifying device structures, we facilitate the production of flexible devices. Inorganic electroluminescent powder, or CaCl2 solution, was mixed with polydimethylsiloxane, and flexible light emitting devices and a flexible gas (exhalation) sensor were achieved.
{"title":"Functional Elastomer for Flexible Electronics: Light Emitting Device and Gas Sensor","authors":"A. Takei, S. Tsukamoto, Yusuke Komazaki, Yuichi Watanabe, Y. Kusaka, M. Yoshida","doi":"10.1109/MEMS46641.2020.9056433","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056433","url":null,"abstract":"In general, flexible devices are manufactured by laminating and patterning several layers on a plastic film or an elastomeric substrate. In particular, elastomeric substrates have been used for flexible devices due to their high deformability. However, the fabrication of devices on elastomeric substrates requires complicated processes, such as the transfer process, because the low adhesion and difference in the thermal expansion values between the elastomer and the device layers limit the fabrication methods. In this study, we prepare composites of elastomer and functional particles (functional elastomer) and deposit electrodes on the functional elastomer. Our proposed flexible devices comprise only elastomer, electrode layers, and adhesive layers between them. By simplifying device structures, we facilitate the production of flexible devices. Inorganic electroluminescent powder, or CaCl2 solution, was mixed with polydimethylsiloxane, and flexible light emitting devices and a flexible gas (exhalation) sensor were achieved.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"22 1","pages":"940-942"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89658781","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056234
Takami Ishida, Kazuki Komaki, T. Harigai, R. Takayama, Takuma Katayama
We present a novel MEMS mirror with a unique scheme of the Double-Tuning-Fork (DTF) in which the central mirror is sandwiched between a pair of “fork” like structure that can realize a highly efficient vibro-rotational coupling in the anti-phase and, as a result, can generate a high torque as the source of high rotation power with a high driving efficiency. The developed DTF Si-MEMS mirror can scan a wide-optical angle of over 120 degrees which is close to the human viewing angle at driving frequency higher than 10 kHz demonstrating excellent characteristics surpassing the reported data of scanning angles at their high-frequency driving conditions.
{"title":"Wide Angle and High Frequency (>120 Degrees@ 10 KHZ/90 Degrees@ 30 KHZ) Resonant Si-MEMS Mirror Using a Novel Tuning-Fork Driving","authors":"Takami Ishida, Kazuki Komaki, T. Harigai, R. Takayama, Takuma Katayama","doi":"10.1109/MEMS46641.2020.9056234","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056234","url":null,"abstract":"We present a novel MEMS mirror with a unique scheme of the Double-Tuning-Fork (DTF) in which the central mirror is sandwiched between a pair of “fork” like structure that can realize a highly efficient vibro-rotational coupling in the anti-phase and, as a result, can generate a high torque as the source of high rotation power with a high driving efficiency. The developed DTF Si-MEMS mirror can scan a wide-optical angle of over 120 degrees which is close to the human viewing angle at driving frequency higher than 10 kHz demonstrating excellent characteristics surpassing the reported data of scanning angles at their high-frequency driving conditions.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"527-531"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76565148","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056222
Danny A. Kassie, D. Elata
For the first time ever, we experimentally demonstrate auto-resonance driving of an electrostatic resonator. This simple driving scheme, instantaneously locks on to the resonance frequency from the very first cycle, and the amplitude of the harmonic oscillation rapidly converges to the stable, fully-developed response. We demonstrate that even if the resonator is nonlinear and its resonance frequency is affected by motion amplitude, the auto-resonance driving scheme naturally tracks the nonlinear backbone of the dynamic response. We demonstrate that auto-resonance driving eliminates the bifurcation instability, which appears when a nonlinear resonator is driven in frequency sweeps. This means that nonlinear resonators can be operated at large amplitudes without any concern of instability. Auto-resonance is therefore a simple and practical alternative to phase-lock-loop driving of resonators.
{"title":"Auto-Resonance - A New Paradigm for Driving Linear and Nonlinear Electrostatic Resonators","authors":"Danny A. Kassie, D. Elata","doi":"10.1109/MEMS46641.2020.9056222","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056222","url":null,"abstract":"For the first time ever, we experimentally demonstrate auto-resonance driving of an electrostatic resonator. This simple driving scheme, instantaneously locks on to the resonance frequency from the very first cycle, and the amplitude of the harmonic oscillation rapidly converges to the stable, fully-developed response. We demonstrate that even if the resonator is nonlinear and its resonance frequency is affected by motion amplitude, the auto-resonance driving scheme naturally tracks the nonlinear backbone of the dynamic response. We demonstrate that auto-resonance driving eliminates the bifurcation instability, which appears when a nonlinear resonator is driven in frequency sweeps. This means that nonlinear resonators can be operated at large amplitudes without any concern of instability. Auto-resonance is therefore a simple and practical alternative to phase-lock-loop driving of resonators.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"205 1","pages":"1183-1186"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78586154","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-01-01DOI: 10.1109/MEMS46641.2020.9056364
Liang Zhou, Xiaomin Yu, Huikai Xie
This paper reports a compact lens scanner with large tunable range and high stiffness. A tunable range of over $100 mu mathrm{m}$ has been achieved by using a unique serpentine inverted-series-connected (ISC) electrothermal bimorph actuator design, and a high stiffness of 10 N/m is obtained by integrating 36 ISC actuators equally distributed along the perimeter of the central ring-shaped platform. This stiffness is approximately 43 times of that previously reported in [1]. The clear aperture is 1.8 mm in diameter and the diameter of the entire scanner is only 4.4 mm. This MEMS lens scanner can be used as miniature depth scanning engines for confocal or multiphoton endomicroscopic imaging.
本文报道了一种可调范围大、刚度高的紧凑型透镜扫描仪。采用独特的蛇形反串联(ISC)电热双晶片致动器设计，实现了超过$100 mu maththrm {m}$的可调范围，并通过集成沿中心环形平台周长均匀分布的36个ISC致动器，获得了10 N/m的高刚度。该刚度约为先前文献[1]报道的43倍。透明孔径直径为1.8 mm，整个扫描仪的直径仅为4.4 mm。该MEMS透镜扫描仪可作为微型深度扫描引擎用于共聚焦或多光子内窥镜成像。
{"title":"A Robust Compact Lens Scanner with Large Tunable Range","authors":"Liang Zhou, Xiaomin Yu, Huikai Xie","doi":"10.1109/MEMS46641.2020.9056364","DOIUrl":"https://doi.org/10.1109/MEMS46641.2020.9056364","url":null,"abstract":"This paper reports a compact lens scanner with large tunable range and high stiffness. A tunable range of over $100 mu mathrm{m}$ has been achieved by using a unique serpentine inverted-series-connected (ISC) electrothermal bimorph actuator design, and a high stiffness of 10 N/m is obtained by integrating 36 ISC actuators equally distributed along the perimeter of the central ring-shaped platform. This stiffness is approximately 43 times of that previously reported in [1]. The clear aperture is 1.8 mm in diameter and the diameter of the entire scanner is only 4.4 mm. This MEMS lens scanner can be used as miniature depth scanning engines for confocal or multiphoton endomicroscopic imaging.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"47 1","pages":"1149-1152"},"PeriodicalIF":0.0,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75163248","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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