2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)最新文献
Pub Date : 2020-07-01DOI: 10.1109/IFCS-ISAF41089.2020.9234863
Wen-Hung Tseng, Shinn-Yan Lin
In this paper, we introduce a cost-effective calibration procedure of moving a portable cesium clock to meet the requirements of remote time-scale calibration in Taiwan. By setting some reasonable limits, e.g., a limit of 30 hours allowed for the elapsed round-trip time, the expanded time uncertainty with a coverage factor of $mathrm{k}=2$ is estimated as 7.36 ns for the calibration. The procedure also allows us to complete a calibration trip between TL and one of the most laboratories in the western part of Taiwan with a car.
{"title":"Remote Calibration of Time Scale Difference by Moving a Portable Cesium Clock","authors":"Wen-Hung Tseng, Shinn-Yan Lin","doi":"10.1109/IFCS-ISAF41089.2020.9234863","DOIUrl":"https://doi.org/10.1109/IFCS-ISAF41089.2020.9234863","url":null,"abstract":"In this paper, we introduce a cost-effective calibration procedure of moving a portable cesium clock to meet the requirements of remote time-scale calibration in Taiwan. By setting some reasonable limits, e.g., a limit of 30 hours allowed for the elapsed round-trip time, the expanded time uncertainty with a coverage factor of $mathrm{k}=2$ is estimated as 7.36 ns for the calibration. The procedure also allows us to complete a calibration trip between TL and one of the most laboratories in the western part of Taiwan with a car.","PeriodicalId":6872,"journal":{"name":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","volume":"21 1","pages":"1-3"},"PeriodicalIF":0.0,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86288317","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-07-01DOI: 10.1109/IFCS-ISAF41089.2020.9234878
F. Constantin
Precision measurements of the molecular iodine optical transitions can be exploited for constraining a possible time variation of the fundamental constants. The sensitivities of the molecular frequencies to a variation of the proton-to-electron mass ratio and of the fine structure constant are calculated. Compact molecular iodine clocks, designed for space applications with improved stability performances, enable fractional frequency reproducibility at the 10−15 level. The comparison of the optical iodine clocks based on transitions at 532 nm, 514 nm and 502 nm with the Cs frequency standard can constrain a fractional time variation of the proton-to-electron mass ratio and of the fine structure constant at the 10−14 yr−1 level.
{"title":"Towards Probing a Variation of Fundamental Constants with Optical Clock Transitions of 127I2","authors":"F. Constantin","doi":"10.1109/IFCS-ISAF41089.2020.9234878","DOIUrl":"https://doi.org/10.1109/IFCS-ISAF41089.2020.9234878","url":null,"abstract":"Precision measurements of the molecular iodine optical transitions can be exploited for constraining a possible time variation of the fundamental constants. The sensitivities of the molecular frequencies to a variation of the proton-to-electron mass ratio and of the fine structure constant are calculated. Compact molecular iodine clocks, designed for space applications with improved stability performances, enable fractional frequency reproducibility at the 10−15 level. The comparison of the optical iodine clocks based on transitions at 532 nm, 514 nm and 502 nm with the Cs frequency standard can constrain a fractional time variation of the proton-to-electron mass ratio and of the fine structure constant at the 10−14 yr−1 level.","PeriodicalId":6872,"journal":{"name":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","volume":"63 1","pages":"1-3"},"PeriodicalIF":0.0,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91085356","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-07-01DOI: 10.1109/IFCS-ISAF41089.2020.9234842
H. Pak, Adam Michael Jarrett
This paper reports the development and optimization of a 9x7mm OCXO using an AT strip crystal mounted within an isothermal envelope to minimize the effects of mechanical stress on the crystal blank. This concept can be realized by using Finite Element Method (FEM) as a design aid to achieve low and symmetrical thermal gradients across the quartz blank. As a result, it yields stability suitable for high-volume, low-cost telecommunication applications.
{"title":"Design Optimization for High-Volume, Low-Cost 9x7 OCXO","authors":"H. Pak, Adam Michael Jarrett","doi":"10.1109/IFCS-ISAF41089.2020.9234842","DOIUrl":"https://doi.org/10.1109/IFCS-ISAF41089.2020.9234842","url":null,"abstract":"This paper reports the development and optimization of a 9x7mm OCXO using an AT strip crystal mounted within an isothermal envelope to minimize the effects of mechanical stress on the crystal blank. This concept can be realized by using Finite Element Method (FEM) as a design aid to achieve low and symmetrical thermal gradients across the quartz blank. As a result, it yields stability suitable for high-volume, low-cost telecommunication applications.","PeriodicalId":6872,"journal":{"name":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","volume":"62 1","pages":"1-3"},"PeriodicalIF":0.0,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78699168","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-07-01DOI: 10.1109/IFCS-ISAF41089.2020.9234909
Bryan Hemingway, T. G. Akin, Jennifer A. Taylor, Steven Eric Peil
We assess the limits to long-term frequency stability of a thermal calcium-beam optical clock from a variety of experimental parameters by measuring the change in clock frequency with changes in that parameter's value. Required regulation of the parameters to keep the contributed instability at the 10−17 level are extracted from these measurements and the implications discussed.
{"title":"Stability Budget for Thermal Calcium-Beam Optical Clock","authors":"Bryan Hemingway, T. G. Akin, Jennifer A. Taylor, Steven Eric Peil","doi":"10.1109/IFCS-ISAF41089.2020.9234909","DOIUrl":"https://doi.org/10.1109/IFCS-ISAF41089.2020.9234909","url":null,"abstract":"We assess the limits to long-term frequency stability of a thermal calcium-beam optical clock from a variety of experimental parameters by measuring the change in clock frequency with changes in that parameter's value. Required regulation of the parameters to keep the contributed instability at the 10−17 level are extracted from these measurements and the implications discussed.","PeriodicalId":6872,"journal":{"name":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","volume":"57 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79078480","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-07-01DOI: 10.1109/IFCS-ISAF41089.2020.9234860
Tzu-Hsuan Hsu, Ming-Huang Li, A. Zope, Sheng-Shian Li
In this work, a sub-mW/pixel monolithic zero-bias CMOS-MEMS capacitive micromachined ultrasound transducer (CMUT) receiver front-end is demonstrated based on a titanium nitride composite (TiN-C) structure for low-voltage applications. The fabricated CMUT device exhibits a center frequency of 3 MHz immersed in water while having an operation bandwidth of roughly 90%. The front-end low noise amplifier of each CMUT pixel ($180times 550 mu mathrm{m}^{2}$) features gain of 25 dB and bandwidth of 14 MHz while only consuming 0.965 mW from a 2.5V supply, showing a great potential for high speed and low power imaging applications. The sensitivity of the proposed CMUT front-end was characterized with 0.4 mV/kPa and 1.4 mV/kPa with DC-bias of 0V (i.e., zero-bias) and 2V, respectively, which is benefitted from the efficient electrostatic transduction offered by TiN-C MEMS platform (transducer gap size < 400 nm) in $0.35 mu mathrm{m}$ CMOS.
在这项工作中，基于氮化钛复合材料(TiN-C)结构，展示了一种用于低压应用的亚毫瓦/像素单片零偏CMOS-MEMS电容式微机械超声换能器(CMUT)接收器前端。所制备的CMUT器件浸入水中的中心频率为3mhz，而工作带宽约为90%。每个CMUT像素的前端低噪声放大器($180times 550 mu maththrm {m}^{2}$)具有25 dB增益和14 MHz带宽，而在2.5V电源下仅消耗0.965 mW，显示出高速低功耗成像应用的巨大潜力。CMUT前端的灵敏度分别为0.4 mV/kPa和1.4 mV/kPa，直流偏置分别为0V(即零偏置)和2V，这得益于TiN-C MEMS平台(传感器间隙尺寸< 400 nm)在$0.35 mu maththrm {m}$ CMOS中提供的高效静电转导。
{"title":"A Sub-mW/Pixel Zero-Bias CMUT-in-CMOS Receiver Front-End with TiN Electrode","authors":"Tzu-Hsuan Hsu, Ming-Huang Li, A. Zope, Sheng-Shian Li","doi":"10.1109/IFCS-ISAF41089.2020.9234860","DOIUrl":"https://doi.org/10.1109/IFCS-ISAF41089.2020.9234860","url":null,"abstract":"In this work, a sub-mW/pixel monolithic zero-bias CMOS-MEMS capacitive micromachined ultrasound transducer (CMUT) receiver front-end is demonstrated based on a titanium nitride composite (TiN-C) structure for low-voltage applications. The fabricated CMUT device exhibits a center frequency of 3 MHz immersed in water while having an operation bandwidth of roughly 90%. The front-end low noise amplifier of each CMUT pixel ($180times 550 mu mathrm{m}^{2}$) features gain of 25 dB and bandwidth of 14 MHz while only consuming 0.965 mW from a 2.5V supply, showing a great potential for high speed and low power imaging applications. The sensitivity of the proposed CMUT front-end was characterized with 0.4 mV/kPa and 1.4 mV/kPa with DC-bias of 0V (i.e., zero-bias) and 2V, respectively, which is benefitted from the efficient electrostatic transduction offered by TiN-C MEMS platform (transducer gap size < 400 nm) in $0.35 mu mathrm{m}$ CMOS.","PeriodicalId":6872,"journal":{"name":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","volume":"35 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79658638","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-07-01DOI: 10.1109/IFCS-ISAF41089.2020.9234898
Ryoma Miyake, M. Kiuchi, S. Yoshida, Shuji Tanaka, G. Fox
A commercially produced monocrystalline-like epitaxial PZT film is described for piezoelectric MEMS applications. Films with a thickness of $1 mu mathrm{m}$ to $2 mu mathrm{m}$ exhibit a typical transverse piezoelectric d31 coefficient of −185 pm/V, relative dielectric permittivity of 430 and dielectric loss of 0.015. These films are commercially available for piezoelectric MEMS device development and production.
描述了一种用于压电MEMS应用的商业生产的单晶样外延PZT薄膜。厚度为$1 mu mathm {m}$至$2 mu mathm {m}$的薄膜，典型的横向压电d31系数为- 185 pm/V，相对介电常数为430，介电损耗为0.015。这些薄膜可用于压电MEMS器件的开发和生产。
{"title":"Commercial Production of Epitaxial PZT for Piezoelectric MEMS Applications","authors":"Ryoma Miyake, M. Kiuchi, S. Yoshida, Shuji Tanaka, G. Fox","doi":"10.1109/IFCS-ISAF41089.2020.9234898","DOIUrl":"https://doi.org/10.1109/IFCS-ISAF41089.2020.9234898","url":null,"abstract":"A commercially produced monocrystalline-like epitaxial PZT film is described for piezoelectric MEMS applications. Films with a thickness of $1 mu mathrm{m}$ to $2 mu mathrm{m}$ exhibit a typical transverse piezoelectric d31 coefficient of −185 pm/V, relative dielectric permittivity of 430 and dielectric loss of 0.015. These films are commercially available for piezoelectric MEMS device development and production.","PeriodicalId":6872,"journal":{"name":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","volume":"27 1","pages":"1-3"},"PeriodicalIF":0.0,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79126491","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-07-01DOI: 10.1109/IFCS-ISAF41089.2020.9234816
Hyunwook Park, J. Tallant, Xianli Zhang, J. Noble, D. Guan, N. Dao, K. Overstreet
Ion traps are a rugged, proven technology that supports high-performance and manufacturable time keeping solutions. Our approach to this implementation is based on the 12.6 GHz hyperfine transition of 171Yb+ ions confined in a linear Paul trap. We report an instability of $6times 10^{-13} tau^{-1/2}$ up to averaging time $tau=100 mathrm{s}$ in the presence of buffer gas, which is a 40% improvement from our previous report. The ion trap is implemented in a 2U-compatible enclosure, which is characterized by ion storage times >95 days and Allan deviation down to $4 times 10^{-15}$ at $tau=2times 10^{5} mathrm{s}$.
{"title":"171Yb+ Microwave Clock for Military and Commercial Applications","authors":"Hyunwook Park, J. Tallant, Xianli Zhang, J. Noble, D. Guan, N. Dao, K. Overstreet","doi":"10.1109/IFCS-ISAF41089.2020.9234816","DOIUrl":"https://doi.org/10.1109/IFCS-ISAF41089.2020.9234816","url":null,"abstract":"Ion traps are a rugged, proven technology that supports high-performance and manufacturable time keeping solutions. Our approach to this implementation is based on the 12.6 GHz hyperfine transition of 171Yb+ ions confined in a linear Paul trap. We report an instability of $6times 10^{-13} tau^{-1/2}$ up to averaging time $tau=100 mathrm{s}$ in the presence of buffer gas, which is a 40% improvement from our previous report. The ion trap is implemented in a 2U-compatible enclosure, which is characterized by ion storage times >95 days and Allan deviation down to $4 times 10^{-15}$ at $tau=2times 10^{5} mathrm{s}$.","PeriodicalId":6872,"journal":{"name":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","volume":"31 1","pages":"1-4"},"PeriodicalIF":0.0,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79131255","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-07-01DOI: 10.1109/IFCS-ISAF41089.2020.9234885
A. Mahmoud, T. Mukherjee, G. Piazza
This paper is the first to investigate the quality factor (Q) in surface acoustic wave (SAW) resonators for SAW gyroscopes (SAWG) applications. This constitutes the first analytical and experimental evaluation of SAW loss mechanisms for orthogonal crystal symmetric Y-cut ±45° direction relative to Z-axis on both Lithium Niobate (LN) and Lithium Niobate on Insulator substrate (LNOI). This study demonstrates the ability to minimize the radiation, diffraction, beam steering and bulk scattering loss while exciting the SAW resonators with extremely thick tungsten electrodes (> 2% of acoustic wavelength), which are required to maximize the SAWG sensitivity. This investigation results in SAW devices exhibiting $Q_{total}$ approaching 15,000 and more than 14 × higher than conventional designs. This approach is the first step towards understanding and eliminating the sources of losses in SAWG, enabling the development of a new generation of high-performance MEMS SAW-based gyroscopes with high sensitivity and stability.
{"title":"A Study of Quality Factor in SAW Resonators for SAW Gyroscope Applications","authors":"A. Mahmoud, T. Mukherjee, G. Piazza","doi":"10.1109/IFCS-ISAF41089.2020.9234885","DOIUrl":"https://doi.org/10.1109/IFCS-ISAF41089.2020.9234885","url":null,"abstract":"This paper is the first to investigate the quality factor (Q) in surface acoustic wave (SAW) resonators for SAW gyroscopes (SAWG) applications. This constitutes the first analytical and experimental evaluation of SAW loss mechanisms for orthogonal crystal symmetric Y-cut ±45° direction relative to Z-axis on both Lithium Niobate (LN) and Lithium Niobate on Insulator substrate (LNOI). This study demonstrates the ability to minimize the radiation, diffraction, beam steering and bulk scattering loss while exciting the SAW resonators with extremely thick tungsten electrodes (> 2% of acoustic wavelength), which are required to maximize the SAWG sensitivity. This investigation results in SAW devices exhibiting $Q_{total}$ approaching 15,000 and more than 14 × higher than conventional designs. This approach is the first step towards understanding and eliminating the sources of losses in SAWG, enabling the development of a new generation of high-performance MEMS SAW-based gyroscopes with high sensitivity and stability.","PeriodicalId":6872,"journal":{"name":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","volume":"32 1","pages":"1-3"},"PeriodicalIF":0.0,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78100783","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-07-01DOI: 10.1109/IFCS-ISAF41089.2020.9234858
R. Ciocan
A software based instrumentation system was designed to measure the transient frequency response for a 50 MHz signal with a precision better than 0.3 ppm. Long short-term memory (LSTM), an artificial recurrent neural network (RNN) architecture was used to detect and classify features on signals generated by this system. Dropouts in signal were detected and characterized with an accuracy better than 78%. The concept of software based instrumentation was implemented using a PXI based instrumentation system. The software solution was implemented in LabVIEW, Matlab and LabWindows/CVI.
{"title":"Use of Artificial Intelligence in Classification and Monitoring of VHF Signals in a Software Based Instrumentation System","authors":"R. Ciocan","doi":"10.1109/IFCS-ISAF41089.2020.9234858","DOIUrl":"https://doi.org/10.1109/IFCS-ISAF41089.2020.9234858","url":null,"abstract":"A software based instrumentation system was designed to measure the transient frequency response for a 50 MHz signal with a precision better than 0.3 ppm. Long short-term memory (LSTM), an artificial recurrent neural network (RNN) architecture was used to detect and classify features on signals generated by this system. Dropouts in signal were detected and characterized with an accuracy better than 78%. The concept of software based instrumentation was implemented using a PXI based instrumentation system. The software solution was implemented in LabVIEW, Matlab and LabWindows/CVI.","PeriodicalId":6872,"journal":{"name":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","volume":"30 1","pages":"1-3"},"PeriodicalIF":0.0,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77053104","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2020-07-01DOI: 10.1109/IFCS-ISAF41089.2020.9234831
Jialin Wang, Mingyo Park, S. Mertin, T. Pensala, F. Ayazi, A. Ansari
This work demonstrates the hysteresis behavior and temperature characterization of an AlScN Film bulk acoustic resonator (FBAR) with ∼30% $text{Sc}/(text{Al}+text{Sc})$ ratio. Operating at ∼3 GHz, the as-fabricated FBAR exhibits a record high effective electromechanical coupling ($k_{t}{}^{2}$) of 18% with a mechanical quality factor ($Q_{m}$) of 328. The polarization of the FBAR can be switched from N-polar to Al-polar by using a triangular-wave signal with a peak voltage of −350 V, applied for 6 seconds at 1 kHz across a 900 nm-thick Al0.7Sc0.3N film. It is shown that the polarization switching of AlScN film not only changes the polarity of the piezoelectric coefficient (e33), but also changes the series resistance of the metal-ferroelectric-metal (MFM) stack and leads to an effective “switching” of the FBAR. The frequency response of the switchable FBAR is investigated after polarization switching during 4 cycles and at elevated temperatures up to 600 K.
{"title":"A High-$k_{t}{}^{2}$ Switchable Ferroelectric Al0.7Sc0.3N Film Bulk Acoustic Resonator","authors":"Jialin Wang, Mingyo Park, S. Mertin, T. Pensala, F. Ayazi, A. Ansari","doi":"10.1109/IFCS-ISAF41089.2020.9234831","DOIUrl":"https://doi.org/10.1109/IFCS-ISAF41089.2020.9234831","url":null,"abstract":"This work demonstrates the hysteresis behavior and temperature characterization of an AlScN Film bulk acoustic resonator (FBAR) with ∼30% $text{Sc}/(text{Al}+text{Sc})$ ratio. Operating at ∼3 GHz, the as-fabricated FBAR exhibits a record high effective electromechanical coupling ($k_{t}{}^{2}$) of 18% with a mechanical quality factor ($Q_{m}$) of 328. The polarization of the FBAR can be switched from N-polar to Al-polar by using a triangular-wave signal with a peak voltage of −350 V, applied for 6 seconds at 1 kHz across a 900 nm-thick Al0.7Sc0.3N film. It is shown that the polarization switching of AlScN film not only changes the polarity of the piezoelectric coefficient (e33), but also changes the series resistance of the metal-ferroelectric-metal (MFM) stack and leads to an effective “switching” of the FBAR. The frequency response of the switchable FBAR is investigated after polarization switching during 4 cycles and at elevated temperatures up to 600 K.","PeriodicalId":6872,"journal":{"name":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","volume":"38 1","pages":"1-3"},"PeriodicalIF":0.0,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80010598","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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