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Design of Piezoelectric Micromachined Ultrasonic Transducers Using High-Order Mode With High Performance and High Frequency 高性能高频高阶压电微机械超声换能器的设计
Pub Date : 2023-08-21 DOI: 10.1109/OJUFFC.2023.3307085
Kangfu Liu;Yaoqing Lu;Sheng Wu;Xinxin Li;Tao Wu
This work proposes the piezoelectric micromachined ultrasonic transducer (pMUT) design using high-order mode. Analytical models are established and used to estimate the performance of pMUT in ${n} ^{text {th}}$ -order axisymmetric mode. To prove the concept, a comprehensive analysis is conducted on the $3^{text {rd}}$ -order pMUT by finite element method (FEM). The analytical models give guidance for the design of electrode configuration and geometric dimensions, which are verified by FEM. With optimized electrode configuration and thickness, the proposed pMUT design shows extraordinary performance improvement in transmitting and round-trip sensitivity. Approximately $10.2times $ and $4.12times $ improvements in transmitting sensitivity and round-trip sensitivity have been achieved compared to the traditional $1^{text {st}}$ -order pMUT in the same radius, while there is an $8.6times $ improvement of the receiving voltage in the pulse-echo analysis. The high frequency, round-trip sensitivity, and directivity features of the proposed high-order pMUT design shown in FEM make it very promising for forming a high-frequency large-scale pMUT array.
本文提出了基于高阶模态的压电微机械超声换能器的设计。在${n} ^{text {th}}$ -阶轴对称模态下,建立了pMUT的解析模型并对其性能进行了估计。为了证明这一概念,采用有限元法对$3^{text {rd}}$ -阶pMUT进行了综合分析。该分析模型为电极结构和几何尺寸的设计提供了指导,并通过有限元方法进行了验证。通过优化电极结构和厚度,pMUT在传输和往返灵敏度方面表现出显著的性能提高。在相同半径下,与传统的$1^{text {st}}$阶pMUT相比,发射灵敏度和往返灵敏度分别提高了$10.2和$4.12倍,而在脉冲回波分析中,接收电压提高了$8.6倍。本文所提出的高阶pMUT设计具有高频、往返灵敏度高、指向性强等特点,在构建高频大规模pMUT阵列中具有广阔的应用前景。
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引用次数: 0
IEEE OPEN JOURNAL OF ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL Ieee超音波学、铁电学与频率控制开放期刊
Pub Date : 2023-07-06 DOI: 10.1109/OJUFFC.2023.3263281
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引用次数: 0
Modeling and Characterization of Pre-Charged Collapse-Mode CMUTs 预充电坍缩模式cmut的建模与表征
Pub Date : 2023-01-30 DOI: 10.1109/OJUFFC.2023.3240699
Marta Saccher;Shinnosuke Kawasaki;Johan H. Klootwijk;Rob Van Schaijk;Ronald Dekker
Recently, the applications of ultrasound transducers expanded from high-end diagnostic tools to point of care diagnostic devices and wireless power receivers for implantable devices. These new applications additionally require that the transducer technology must comply to biocompatibility and manufacturing scalability. In this respect, Capacitive Micromachined Ultrasound Transducers (CMUTs) have a strong advantage compared to the conventional PZT based transducers. However, current CMUTs require a large DC bias voltage for their operation, which limits the miniaturizability of these devices. In this study, we propose a pre-charged collapse-mode CMUT for immersive applications that can operate without an external bias by means of a charge trapping Al2O3 layer embedded in the dielectrics between the top and bottom electrodes. The built-in charge layer was analytically modeled and four layer stack combinations were investigated and characterized. The measurement results of the CMUTs were then used to fit the model and to quantify the amount and type of trapped charge. It was found that these devices polarize due to the ferroelectric-like behavior of the Al2O3, and the amount of charge stored in the charge-trapping layer was estimated to be approximately 0.02 C/m2. Their acoustic performance shows a transmit and receive sensitivity of 8.8 kPa/V and 13.1 V/MPa respectively. In addition, we show that increasing the charging temperature, the charging duration, and the charging voltage results in a higher amount of stored charge. Finally, results of ALT tests showed that these devices have a lifetime of more than 2.5 years at body temperature.
最近,超声换能器的应用从高端诊断工具扩展到护理点诊断设备和用于植入式设备的无线功率接收器。这些新的应用还要求换能器技术必须符合生物相容性和制造可扩展性。在这方面,与传统的基于PZT的换能器相比,电容式微机械超声换能器(CMUT)具有强大的优势。然而,当前CMUT的操作需要大的DC偏置电压,这限制了这些器件的小型化。在这项研究中,我们提出了一种用于沉浸式应用的预充电塌陷模式CMUT,该模式可以通过嵌入顶部和底部电极之间的电介质中的电荷捕获Al2O3层在没有外部偏压的情况下操作。对内置电荷层进行了分析建模,并对四层堆叠组合进行了研究和表征。然后使用CMUT的测量结果来拟合模型并量化捕获电荷的量和类型。发现这些器件由于Al2O3的类铁电行为而极化,并且存储在电荷捕获层中的电荷量估计为大约0.02C/m2。它们的声学性能分别显示出8.8kPa/V和13.1V/MPa的发射和接收灵敏度。此外,我们发现,增加充电温度、充电持续时间和充电电压会导致更高的存储电荷量。最后,ALT测试结果表明,这些设备在体温下的使用寿命超过2.5年。
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引用次数: 3
Fiber-Optic Frequency and Timing Transfer Over an Urban Optical Fiber Link 城市光纤链路上的光纤频率和定时传输
Pub Date : 2023-01-01 DOI: 10.1109/OJUFFC.2023.3284781
Miho Fujieda;Motohiro Kumagai
We have developed a fiber-optic frequency and timing transfer system. It has been installed to provide timing synchronization between NICT and a distant university site connected by a 58-km urban optical fiber link. The timing signal generated at the remote site is derived from a frequency source that is stabilized using the link, and it is synchronized by a transferred timing marker. A second, separate fiber link confirms a timing synchronization uncertainty of 5.7 ns and a 10-MHz frequency instability of less than $10^{-16}$ at $10^{5}$ s averaging time. We additionally demonstrate a timing marker delivery using a code-based signal, which combines nanosecond-level uncertainty with the simplicity and compactness suitable for a system that can be deployed for synchronization across numerous sites.
我们开发了一种光纤频率和定时传输系统。安装它是为了在NICT和一个由58公里的城市光纤连接的遥远的大学站点之间提供时间同步。在远程站点产生的授时信号来自使用链路稳定的频率源,并由传输的授时标记进行同步。另一个独立的光纤链路证实了5.7 ns的定时同步不确定性和10- mhz频率不稳定性,在10^{5}$ s的平均时间下小于10^{-16}$。我们还演示了使用基于代码的信号的定时标记传递,该信号将纳秒级的不确定性与简单性和紧凑性相结合,适合用于跨多个站点同步部署的系统。
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引用次数: 1
Quantification of Flow Rates and Flow Volumes in Valve Regurgitation Using 3-D High Frame-Rate Ultrasound 利用三维高帧率超声定量测量瓣膜返流的流量和流量
Pub Date : 2023-01-01 DOI: 10.1109/OJUFFC.2023.3259941
Stefano Fiorentini;Erik Andreas Rye Berg;Hans Torp;Svend Aakhus;Jørgen Avdal
Valve regurgitation is a cardiac condition caused by the incomplete closure of a cardiac valve. Untreated, this condition may result in cardiac failure. Regular monitoring of this condition is essential in guiding the decision process for surgical intervention. Current guidelines recommend a multi-parametric assessment of valve regurgitation using echocardiography, which is both time consuming and heavily dependent on the experience of the examiner. Several methods have been proposed to provide quantitative markers to facilitate the assessment of valve regurgitation, most notably the Proximal Isovelocity Surface Area (PISA) method and methods based on the quantification of the total Regurgitant Volume (RVol) from the power of backscattered blood signal. In this work, we propose a framework based on trans-thoracic 3-D high frame-rate acquisitions for the simultaneous estimation of the jet cross-sectional area and jet velocity directly at the jet core, which are then combined to estimate the instantaneous flow rate and RVol patients with aortic or mitral insufficiency. We compare two methods for the segmentation of the jet cross-sectional area from the power Doppler signal. Validation on simulated data indicates good segmentation accuracy for the best method ( $beta $ = 0.97, ${R}^{{2}}$ = 0.91). Validation on recordings from a flow phantom shows good agreement ( $beta $ = 1.2, ${R}^{{2}}$ = 0.88) with an external flow rate meter. Clinical feasibility of the method is also shown in a patient with mitral regurgitation.
瓣膜反流是由心脏瓣膜关闭不完全引起的一种心脏疾病。如果不治疗,这种情况可能会导致心力衰竭。定期监测这种情况对于指导手术干预的决策过程至关重要。目前的指南建议使用超声心动图对瓣膜返流进行多参数评估,这既耗时又严重依赖于检查者的经验。已经提出了几种方法来提供定量标记以促进瓣膜反流的评估,最值得注意的是近端等流速表面积(PISA)方法和基于反向散射血液信号功率的总反流体积(RVol)量化的方法。在这项工作中,我们提出了一个基于经胸三维高帧率采集的框架,用于同时估计直接在射流核心处的射流截面积和射流速度,然后将其结合起来估计主动脉或二尖瓣功能不全患者的瞬时流速和RVol。我们比较了两种从功率多普勒信号中分割射流截面积的方法。仿真数据验证表明,最佳分割方法的分割精度较好($beta $ = 0.97, ${R}^{{2}}$ = 0.91)。对流量幻象记录的验证显示,与外部流量计具有良好的一致性($beta $ = 1.2, ${R}^{{2}}$ = 0.88)。该方法在二尖瓣反流患者中也显示了临床可行性。
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引用次数: 0
Two-Scale Sparse Spiral Array Design for 3D Ultrasound Imaging in Air 空气中三维超声成像的双尺度稀疏螺旋阵列设计
Pub Date : 2023-01-01 DOI: 10.1109/OJUFFC.2023.3303132
Gianni Allevato;Christoph Haugwitz;Matthias Rutsch;Raphael Müller;Marius Pesavento;Mario Kupnik
Sparse array designs are a promising approach to improve the beam pattern and imaging quality, especially for applications, where hardware resources are severely limited. In particular, spiral sunflower arrays become increasingly popular due to their excellent point-spread-function (PSF) characteristics and their simple, deterministic and scalable design. Therefore, several sunflower modifications for further improvement have been investigated, e.g. density tapering based on window functions adapted from apodization techniques. In this article, we introduce a two-scale spiral array design concept, which exploits the specific PSF structure of the sunflower geometry, instead of relying on window functions. The modification proposed combines two nested sunflower sub-arrays featuring two different spatial element densities such that the locations of their respective main, side and grating lobe zones differ, resulting in a balanced and improved composite one-way PSF in terms of main lobe width (MLW) and maximum side lobe level (MSLL) under far-field and narrow-band conditions. First, we provide an analysis of the unmodified classic sunflower geometry, describe its PSF zones and show how their locations in the PSF can be estimated based on the array design parameters, which finally leads to the two-scale concept. Second, we examine a specific well-matching combination of nested sub-arrays to discuss the advantages and limitations of the resulting PSF. Third, we benchmark the respective optimum arrays of the classic sunflower and density tapering strategies with the two-scale method, where the latter shows an improved performance of the one-way PSF in terms of MLW and MSLL. Fourth, the two-scale design strategy is validated using a real-world 64-element prototype for narrow-band ultrasound imaging in air. We conduct two experiments to analyze the resulting PSF and angular resolution. Overall, the results demonstrate that the proposed flexible four-parameter concept is particularly valuable for high frame rate imaging as well as for transmit-only and receive-only applications.
稀疏阵列设计是一种很有前途的方法,可以改善波束方向图和成像质量,特别是在硬件资源严重受限的应用中。螺旋向日葵阵列由于其优异的点扩展函数(PSF)特性以及简单、确定和可扩展的设计而越来越受欢迎。因此,为了进一步改进向日葵,研究了几种改良方法,例如,基于窗函数的密度逐渐减小。在本文中,我们介绍了一种双尺度螺旋阵列的设计概念,它利用了向日葵几何形状的特定PSF结构,而不是依赖于窗口函数。提出的改进方法将两个具有不同空间元密度的向日葵子阵列组合在一起,使得它们各自的主瓣区、边瓣区和光栅瓣区的位置不同,从而在远场和窄带条件下,在主瓣宽度(MLW)和最大旁瓣电平(MSLL)方面实现了平衡和改进的复合单向PSF。首先,我们对未修改的经典向日葵几何结构进行了分析,描述了其PSF区域,并展示了如何根据阵列设计参数估计其在PSF中的位置,最终导致了双尺度概念。其次,我们研究了嵌套子数组的特定良好匹配组合,以讨论由此产生的PSF的优点和局限性。第三,我们用双尺度方法对经典向日葵和密度渐变策略各自的最优阵列进行了基准测试,其中后者在MLW和MSLL方面表现出单向PSF的改进性能。第四,使用实际的64单元原型验证了双尺度设计策略,用于空气中窄带超声成像。我们进行了两个实验来分析所得的PSF和角分辨率。总体而言,结果表明所提出的灵活的四参数概念对于高帧率成像以及仅发送和仅接收应用特别有价值。
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引用次数: 0
3-D High Frame Rate Imaging With Motion Compensation (3-D HFR With MoCo): An Experimental Evaluation 带有运动补偿的3-D高帧率成像(3-D HFR With MoCo):一种实验评估
Pub Date : 2023-01-01 DOI: 10.1109/OJUFFC.2023.3308486
Sebastien Salles;François Varray;Damien Garcia;Hervé Liebgott;Barbara Nicolas
Improving the image quality of 3D high-frame-rate (HFR) echocardiography has become an important research focus. Diverging Waves techniques have already shown promising results in 3D ultrasound imaging. However, phase delays induced by large tissue displacements between ultrasound transmission can deteriorate the compounding process. Motion compensation (MoCo) approaches have been introduced and integrated into the compounding process in 2-D and in 3-D simulated ultrasound volume. Here, we propose to investigate the influence of the MoCo approach on different scenarios, including several 3-D diverging wave strategies and configurations of virtual sources. First, we proposed to formalize the placement of virtual sources according to different scenarios. Then the proposed method has been tested on numerical simulations using Field II, and in vitro experimentations with a homemade rotating phantom. The nine approaches were compared quantitatively by estimating the contrast to noise (CNR) and contrast ratio (CR). The results confirmed that MoCo increased the CNR and CR for each case. On average, the MoCo algorithm increased the CNR/CR by ${mathcal {C}}$ 3.2/8.4 dB in silico, and of ${mathcal {C}}$ 1.4/1.8 dB in vitro, respectively.
提高三维高帧率超声心动图的图像质量已成为一个重要的研究热点。散波技术已经在三维超声成像中显示出有希望的结果。然而,在超声传输之间由大的组织位移引起的相位延迟会使复合过程恶化。运动补偿(MoCo)方法已被引入并集成到二维和三维模拟超声体积的合成过程中。在这里,我们提出研究MoCo方法在不同场景下的影响,包括几种三维发散波策略和虚拟源的配置。首先,我们建议根据不同的场景形式化虚拟源的放置。然后,在Field II的数值模拟和自制旋转体的体外实验中对所提出的方法进行了验证。通过估计噪声对比度(CNR)和对比度(CR)对这九种方法进行定量比较。结果证实,MoCo增加了每个病例的CNR和CR。MoCo算法在体外平均使CNR/CR分别提高${mathcal {C}}$ 3.2/8.4 dB和${mathcal {C}}$ 1.4/1.8 dB。
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引用次数: 0
Microbubble Identification Based on Decision Theory for Ultrasound Localization Microscopy 基于决策理论的超声定位显微微泡识别
Pub Date : 2023-01-01 DOI: 10.1109/OJUFFC.2023.3274512
Alexandre Corazza;Pauline Muleki-Seya;Adrian Basarab;Barbara Nicolas
Ultrasound localization microscopy (ULM) enables the evaluation of the vascular microstructure by detecting, localizing, and tracking microbubbles (MBs) in the vascular network. ULM provides a vascular map of the network with improved spatial resolution but with an acquisition time of several minutes. Thus, it is of great importance to increase the number of MBs detected in order to limit the acquisition time. The standard MB detection method in ULM assumes that the contrast agents are the highest-intensity structures on the ultrasound images. However, in vivo data show that MB intensity may be lower than residual tissue or even noise. Thus, to facilitate the detection of these MBs, an MB detector based on decision theory is proposed in this paper. In this study, the proposed method based on the Neyman–Pearson criterion is compared with the standard intensity-based and the normalized cross-correlation detection methods on simulated and in vivo rat brain and kidney data. The new detection method makes it possible to control the false positive detection rate without degrading the MB detection rate on simulated data, to enhance the ULM vessel map resolution on in vivo brain data and to detect more vessels on in vivo kidney data.
超声定位显微镜(ULM)能够通过检测、定位和跟踪血管网络中的微气泡(MB)来评估血管微观结构。ULM提供了具有改进的空间分辨率但具有几分钟的采集时间的网络的血管图。因此,增加检测到的MB的数量以限制获取时间是非常重要的。ULM中的标准MB检测方法假设造影剂是超声图像上强度最高的结构。然而,体内数据显示MB强度可能低于残留组织甚至噪声。因此,为了便于检测这些MB,本文提出了一种基于决策理论的MB检测器。在本研究中,在模拟和体内大鼠大脑和肾脏数据上,将所提出的基于Neyman–Pearson标准的方法与基于标准强度和归一化互相关检测方法进行了比较。新的检测方法可以在不降低模拟数据MB检测率的情况下控制假阳性检测率,提高体内大脑数据的ULM血管图分辨率,并在体内肾脏数据上检测更多血管。
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引用次数: 1
Pulsing and Detection Strategies for Contrast-Enhanced Ultrasound: A Narrative Review 脉冲和检测策略的对比增强超声:叙述回顾
Pub Date : 2023-01-01 DOI: 10.1109/OJUFFC.2023.3275936
Sapna R. Bisht;Vishwas V. Trivedi;Rohit Bhardwaj;Chandan K. Jha;Debabrata Ghosh;Himanshu Shekhar
Contrast-enhanced imaging has grown significantly in the past two decades. Technology has evolved from imaging based on linear principles to elaborate pulsing and microbubble-specific detection strategies. This review provides a broad overview of the research published on these topics, emphasizing the progress made, current challenges, and future research considerations. We cover the physical and conceptual underpinnings of imaging based on ultrasound contrast agents, focused on pulsing and detection strategies. The techniques proposed are categorized according to the underlying fundamental physical and signal processing principles. We revisit methods that were previously only of academic interest and may now be clinically feasible with advances in computation and hardware. We discuss unmet challenges and opportunities originating from developments in other sub-fields of ultrasound imaging to enable wider clinical adoption of contrast-enhanced ultrasound.
对比度增强成像在过去二十年中有了显著的发展。技术已经从基于线性原理的成像发展到复杂的脉冲和微气泡特异性检测策略。这篇综述对就这些主题发表的研究进行了广泛的概述,强调了所取得的进展、当前的挑战和未来的研究考虑。我们介绍了基于超声造影剂的成像的物理和概念基础,重点是脉冲和检测策略。所提出的技术是根据基本的物理和信号处理原理进行分类的。我们重新审视了以前只对学术感兴趣的方法,随着计算和硬件的进步,这些方法现在可能在临床上可行。我们讨论了超声成像其他子领域的发展所带来的未满足的挑战和机遇,以使超声造影在临床上得到更广泛的应用。
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引用次数: 0
The Formation of a Chip Scale Atomic Clock Ensemble Using Software Defined Radios 用软件定义无线电形成芯片级原子钟集成
Pub Date : 2023-01-01 DOI: 10.1109/OJUFFC.2023.3285204
Christopher Flood;Penina Axelrad;Joanna Hinks
Low size, weight, and power (SWaP) clocks are expected to play a key role in new positioning, navigation, and timing (PNT) systems, providing augmentations or alternatives to conventional global navigation satellite systems (GNSS). Distributing high-quality PNT services from payloads with more limited resources than GNSS satellites requires signal generation from low SWaP hardware. This paper describes stable signal synthesis based on a low cost clock ensemble using software defined radio (SDR) metrology techniques and clock ensemble algorithms. First, the capacity to accurately characterize the stability of different clocks using the SDR is demonstrated. Experimental results then establish the ability to steer an oven controlled crystal oscillator (OCXO), initially to a single reference clock signal, and then to the implicit ensemble mean (IEM) of three chip scale atomic clocks (CSACs). This steered output signal has noise comparable to the short term stability of the OCXO and long term stability similar to the best clock in the ensemble.
低尺寸、重量和功耗(SWaP)时钟有望在新的定位、导航和授时(PNT)系统中发挥关键作用,为传统的全球导航卫星系统(GNSS)提供增强或替代方案。利用比GNSS卫星资源更有限的有效载荷分配高质量的PNT服务,需要使用低SWaP硬件产生信号。本文介绍了基于软件定义无线电(SDR)计量技术和时钟集成算法的低成本时钟集成的稳定信号合成。首先,证明了利用SDR精确表征不同时钟稳定性的能力。实验结果建立了将烤箱控制晶体振荡器(OCXO)转向单个参考时钟信号的能力,然后转向三个芯片级原子钟(CSACs)的隐式集成平均值(IEM)的能力。这种转向输出信号具有可与OCXO的短期稳定性相媲美的噪声和与集成中最好的时钟相似的长期稳定性。
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引用次数: 0
期刊
IEEE open journal of ultrasonics, ferroelectrics, and frequency control
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