Pub Date : 2023-08-21DOI: 10.1109/OJUFFC.2023.3307085
Kangfu Liu;Yaoqing Lu;Sheng Wu;Xinxin Li;Tao Wu
This work proposes the piezoelectric micromachined ultrasonic transducer (pMUT) design using high-order mode. Analytical models are established and used to estimate the performance of pMUT in ${n} ^{text {th}}$