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Novel Phased Array Piezoelectric Micromachined Ultrasound Transducers (pMUTs) for Medical Imaging 用于医学成像的新型相控阵压电微机械超声换能器
Pub Date : 2022-09-15 DOI: 10.1109/OJUFFC.2022.3207128
Sina Sadeghpour;Sanjog Vilas Joshi;Chen Wang;Michael Kraft
Two kinds of 128 channels pMUT-based phased array ultrasound transducers are described in this paper, one with a high frequency of around 6 MHz and another with a low frequency of around 1.5 MHz. The active area of the transducer is around 25 mm long and 10 mm wide. There are in total 6270 pMUT elements in the reported arrays. For the transducer with a center frequency of 6 MHz, each pMUT has a membrane diameter of 85 $mu text{m}$ and the pitch between every two channels is 200 $mu text{m}$ . The transducer benefits from a high transmission and receive sensitivity of 44 kPa/V/Channel @ 3 cm and 204 mV/MPa, respectively. For the transducer with a center frequency of 1.5 MHz, each pMUT has a membrane diameter of $160~mu text{m}$ and the pitch between every two elements is 214 $mu text{m}$ . The proposed transducer obtained a transmit and receive sensitivity of 430 Pa/V/Channel @ 3 cm and 190 mV/MPa, respectively. The transducer has a −3dB and −6dB bandwidth of 118% and 184%, respectively. The bandwidth is higher than any previously reported transducer in any technology, such as bulk-PZT, pMUT, or capacitive MUT (cMUT). The functionality of the transducer arrays is confirmed by obtaining B-mode images in water medium.
本文介绍了两种基于pmut的128通道相控阵超声换能器,一种高频约为6 MHz,另一种低频约为1.5 MHz。换能器的有效区域约为25毫米长,10毫米宽。在报告的数组中总共有6270个pMUT元素。对于中心频率为6 MHz的传感器,每个pMUT的膜直径为85 $mu text{m}$,每两个通道之间的基音为200 $mu text{m}$。该换能器的高传输和接收灵敏度分别为44 kPa/V/通道@ 3 cm和204 mV/MPa。对于中心频率为1.5 MHz的换能器,每个pMUT的膜直径为$160~mu text{m}$,每两个元件之间的节距为214 $mu text{m}$。该传感器的发射和接收灵敏度分别为430 Pa/V/通道@ 3 cm和190 mV/MPa。换能器的- 3dB和- 6dB带宽分别为118%和184%。带宽高于任何技术中任何先前报道的传感器,例如大块pzt, pMUT或电容MUT (cMUT)。通过在水介质中获得b模图像,验证了传感器阵列的功能。
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引用次数: 9
Thermal-Mechanical Noise Modeling and Measurements of a Row-Column Addressed CMUT Probe 行列寻址CMUT探头的热机械噪声建模与测量
Pub Date : 2022-08-16 DOI: 10.1109/OJUFFC.2022.3197104
Tony Merrien;Audren Boulmé;Dominique Certon
Thermal-Mechanical (T-M) noise is a natural phenomenon occurring in Capacitive Micromachined Ultrasonic Transducers (CMUT). T-M noise is a value of great interest because it is linked to the minimal detectable pressure of a transducer and can also serve as a convenient characterization tool. Indeed, the general behavior of a CMUT array is translated through its T-M noise which does not require any external applied source to be assessed. However, T-M noise is difficult to measure, often time requires a dedicated measurement chain and is mostly based on spectrum analyzers in a carefully controlled environment. In this paper, we present a temporal technique to characterize the T-M noise of CMUT-based arrays with a commercially available amplifier and a digital oscilloscope. The approach is applied to an air coupled Row-Column Addressed (RCA) matrix array, for which the elements cannot be measured with traditional micro-probes systems. This task is performed using a Printed Circuit Board (PCB) dedicated to the characterization of RCA arrays and designed to drive rows and columns individually. Noise Power Spectral Density (PSD) modeling of the complete measurement chain is achieved using a lumped-parameter model of the RCA array element and using the amplifier gain, electrical impedance, and noise characteristics. Measurements obtained with the signal analyzer and the temporal method are in good agreement with the model. The presented characterization technique can be extended to other micromachined ultrasonic transducer probe architectures, technologies, and amplification systems.
热-机械噪声是电容式微机械超声换能器(CMUT)的一种自然现象。T-M噪声是一个非常有趣的值,因为它与传感器的最小可检测压力有关,也可以作为方便的表征工具。事实上,CMUT阵列的一般行为是通过它的T-M噪声来转换的,它不需要任何外部应用源来评估。然而,T-M噪声很难测量,通常时间需要专用的测量链,并且主要基于在精心控制的环境中的频谱分析仪。在本文中,我们提出了一种时序技术,利用商用放大器和数字示波器来表征基于cmut的阵列的T-M噪声。该方法应用于传统微探针系统无法测量的空气耦合行列寻址(RCA)矩阵阵列。该任务使用专门用于表征RCA阵列的印刷电路板(PCB)执行,并设计为单独驱动行和列。整个测量链的噪声功率谱密度(PSD)建模是使用RCA阵列元件的集总参数模型并使用放大器增益、电阻抗和噪声特性来实现的。用信号分析仪和时间法测量的结果与模型吻合较好。所提出的表征技术可以扩展到其他微机械超声换能器探头结构、技术和放大系统。
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引用次数: 1
Assessing the Microfabrication-Related Variability of the Performance of CMUT Arrays 评估微加工相关的CMUT阵列性能变异性
Pub Date : 2022-08-11 DOI: 10.1109/OJUFFC.2022.3198390
Monica La Mura;Alvise Bagolini;Patrizia Lamberti;Alessandro Stuart Savoia
This paper addresses the assessment of the variability of CMUT arrays’ electro-mechanical and acoustic performance, as related to the tolerance of the CMUT vertical dimensions due to the microfabrication process. A 3-factors 3-levels factorial sensitivity analysis is carried out to compute the main effects and the interaction effects of the moving plate thickness, the passivation layers thickness, and the sacrificial layer thickness, on the CMUT resonance frequency, collapse voltage, and static capacitance, as well as on the transmission and reception sensitivity amplitude and bandwidth and time delay in water-coupled condition. The analysis is performed by means of FEM simulations of the CMUT static behavior and dynamic response, and the findings are compared to experimental data.
本文讨论了CMUT阵列机电和声学性能可变性的评估,这与由于微加工过程导致的CMUT垂直尺寸公差有关。通过3因素3水平的析因灵敏度分析,计算了水耦合条件下动板厚度、钝化层厚度和牺牲层厚度对CMUT谐振频率、崩溃电压、静态电容以及收发灵敏度幅值、带宽和时延的主效应和交互效应。采用有限元模拟方法对CMUT的静态性能和动态响应进行了分析,并与实验数据进行了比较。
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引用次数: 2
32 Element Piezoelectric Micromachined Ultrasound Transducer (PMUT) Phased Array for Neuromodulation 用于神经调节的32元压电微机械超声换能器相控阵
Pub Date : 2022-08-05 DOI: 10.1109/OJUFFC.2022.3196823
Pannawit Tipsawat;Sheikh Jawad Ilham;Jung In Yang;Zeinab Kashani;Mehdi Kiani;Susan Trolier-Mckinstry
Interest in utilizing ultrasound (US) transducers for non-invasive neuromodulation treatment, including for low intensity transcranial focused ultrasound stimulation (tFUS), has grown rapidly. The most widely demonstrated US transducers for tFUS are either bulk piezoelectric transducers or capacitive micromachine transducers (CMUT) which require high voltage excitation to operate. In order to advance the development of the US transducers towards small, portable devices for safe tFUS at large scale, a low voltage array of US transducers with beam focusing and steering capability is of interest. This work presents the design methodology, fabrication, and characterization of 32-element phased array piezoelectric micromachined ultrasound transducers (PMUT) using $1.5~mu text{m}$ thick Pb(Zr0.52Ti $_{{mathrm {0.48}}})text{O}_{3}$ films doped with 2 mol% Nb. The electrode/piezoelectric/electrode stack was deposited on a silicon on insulator (SOI) wafer with a $2~mu text{m}$ silicon device layer that serves as the passive elastic layer for bending-mode vibration. The fabricated 32-element PMUT has a central frequency at 1.4 MHz. Ultrasound beam focusing and steering (through beamforming) was demonstrated where the array was driven with 14.6 V square unipolar pulses. The PMUT generated a maximum peak-to-peak focused acoustic pressure output of 0.44 MPa at a focal distance of 20 mm with a 9.2 mm and 1 mm axial and lateral resolution, respectively. The maximum pressure is equivalent to a spatial-peak pulse-average intensity of 1.29 W/cm2, which is suitable for tFUS application.
利用超声(US)换能器进行非侵入性神经调节治疗,包括低强度经颅聚焦超声刺激(tFUS),已经迅速增长。用于tFUS的最广泛演示的美国换能器是体压电换能器或电容式微机械换能器(CMUT),它们需要高压激励才能工作。为了推动US换能器向小型、便携式的大规模安全tFUS设备的发展,具有波束聚焦和转向能力的低压US换能器阵列引起了人们的兴趣。本文介绍了32元相控阵压电微机械超声换能器(PMUT)的设计方法、制造和表征,该换能器使用掺杂2mol % Nb的1.5~mu text{m}$厚Pb(Zr0.52Ti $_{ mathm {0.48}}})text{O}_{3}$薄膜。电极/压电/电极堆栈沉积在绝缘体硅(SOI)晶圆上,其中$2~mu text{m}$硅器件层作为弯曲模振动的被动弹性层。制造的32元PMUT的中心频率为1.4 MHz。在14.6 V方单极脉冲驱动下,演示了超声波束聚焦和转向(通过波束形成)。在焦距为20 mm时,PMUT产生的最大峰对峰聚焦声压输出为0.44 MPa,轴向分辨率为9.2 mm,横向分辨率为1mm。最大压力相当于1.29 W/cm2的空间峰值脉冲平均强度,适合于tFUS应用。
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引用次数: 4
Data-Over-Sound With PMUTs pmut的声音数据传输
Pub Date : 2022-08-05 DOI: 10.1109/OJUFFC.2022.3197126
Harshvardhan Gupta;Bibhas Nayak;Anuj Ashok;Rudra Pratap
Data-over-sound is an emerging technology for digital communication which uses frequencies at the upper bounds of human hearing, usually between 15 kHz to 25 kHz. We report a successful development of Piezoelectric Micromachined Ultrasound Transducers (PMUTs) for low-power data-over-sound applications. Piezoelectric thin films used in PMUTs can have high residual tensile stresses ranging from 300 MPa to 1.5 GPa. These stresses have the effect of increasing the resonant frequencies of the transducers, making it a challenge to fabricate low frequency devices. Using the optimum dimensions by estimating the net residual stress in the fabricated diaphragms, transducers suitable for a frequency range of 17 kHz to 21 kHz were fabricated, capable of generating as much as 83 dB of sound pressure level at a distance of 5 cm in continuous operation.
声音数据传输是一种新兴的数字通信技术,它使用人类听觉上限的频率,通常在15khz到25khz之间。我们报告了用于低功耗数据声应用的压电微机械超声换能器(PMUTs)的成功开发。用于pmut的压电薄膜具有300 MPa至1.5 GPa的高残余拉伸应力。这些应力增加了换能器的谐振频率,使制造低频器件成为一个挑战。通过估算制造膜片的净残余应力,利用最佳尺寸,制造出适用于17 kHz至21 kHz频率范围的换能器,能够在5厘米距离上连续工作时产生高达83 dB的声压级。
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引用次数: 1
Erratum to “Characterization of Multilayer Piezoelectric Stacks Down to 100K” [2022 65-82] “多层压电堆的表征降至100K”的勘误[2022 65-82]
Pub Date : 2022-07-08 DOI: 10.1109/OJUFFC.2022.3184056
Stewart Sherrit;Mircea Badescu;John B. Steeves;William E. Krieger;Clifford A. Klein;Otto R. Polanco;Carey Louise Weisberg;David Van Buren;Joseph Sauvageau;Keith Coste
In the above article [1], on the top line in Table 3, a decimal place was dropped in the piezoelectric charge coefficient d33( $mu$ m/V) at 100 K. The data reported is 10 times larger than the measured data from the slope in Figure 6 for all three maximum voltages. Here, we provide the correct table.
在上述文章[1]中,表3的上一行,在100 K时压电电荷系数d33($mu$ m/V)减少了一个小数点。对于所有三个最大电压,报告的数据比图6中斜率的测量数据大10倍。这里,我们提供了正确的表。
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引用次数: 0
Laser Micromachined Flexible Ultrasound Line Array and Subplanar Multimodal Imaging Applications 激光微加工柔性超声线阵列及亚平面多模态成像应用
Pub Date : 2022-07-08 DOI: 10.1109/OJUFFC.2022.3188746
Jianzhong Chen;Wei Liu;Dawei Wu;Hu Ye
Flexible ultrasound array with phased array configurations have individually controllable array element emission and reception acoustic properties, however array conventional processes and array design are too complex. It is necessary to explore rapid creation methods and potential ultrasound applications for flexible arrays. In this paper, we provide a method for rapid fabrication of flexible transducers based on laser micromachining and verify the performance of the line array by multi-mode positioning imaging under curved surfaces. The proposed single-layered and double-sided conductive stretchable electrode configuration eliminated the blockage of acoustic waves,and ’island bridge’ structures are compatible with array flexibility and array excitation for row addressing.The mechanical, acoustic and electrical interconnections of the array are verified.Based on the Verasonics system, the ultrasonic line array scans multiple steel column targets in multiple modalities under curved surfaces for imaging and localization.The results show that the ultrasonic line array can obtain clear visual localization images in A-scan, B-scan and E-scan poses.In addition, the artifacts in the images can be effectively suppressed by adjusting the depth of focus of E-scan and optimizing the sparse line array structure. It is verified that laser micromachining for rapid creation of flexible ultrasonic line array has potential applications in the field of localization imaging.
采用相控阵结构的柔性超声阵列具有独立可控的阵元发射和接收声学特性,但阵元常规工艺和阵元设计过于复杂。有必要探索柔性阵列的快速制作方法和潜在的超声应用。本文提出了一种基于激光微加工的柔性换能器快速制造方法,并通过曲面下多模定位成像验证了线阵的性能。提出的单层和双面导电可拉伸电极结构消除了声波的阻塞,“岛桥”结构与阵列灵活性和阵列激励相兼容,用于行寻址。验证了阵列的机械、声学和电气互连性。基于Verasonics系统,超声线阵在曲面下以多模态扫描多个钢柱目标进行成像和定位。结果表明,超声线阵在a扫描、b扫描和e扫描姿态下均能获得清晰的视觉定位图像。此外,通过调整e扫描的聚焦深度和优化稀疏线阵列结构,可以有效地抑制图像中的伪影。验证了激光微加工快速制造柔性超声线阵在定位成像领域具有潜在的应用前景。
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引用次数: 0
Spatial Coherence Adaptive Clutter Filtering in Color Flow Imaging—Part II: Phantom and In Vivo Experiments 彩色流成像中的空间相干自适应杂波滤波——第二部分:幻像和体内实验
Pub Date : 2022-06-21 DOI: 10.1109/OJUFFC.2022.3184909
Will Long;David Bradway;Rifat Ahmed;James Long;Gregg E. Trahey
Conventional color flow processing is associated with a high degree of operator dependence, often requiring the careful tuning of clutter filters and priority encoding to optimize the display and accuracy of color flow images. In a companion paper, we introduced a novel framework to adapt color flow processing based on local measurements of backscatter spatial coherence. Through simulation studies, the adaptive selection of clutter filters using coherence image quality characterization was demonstrated as a means to dynamically suppress weakly-coherent clutter while preserving coherent flow signal in order to reduce velocity estimation bias. In this study, we extend previous work to evaluate the application of coherence-adaptive clutter filtering (CACF) on experimental data acquired from both phantom and in vivo liver and fetal vessels. In phantom experiments with clutter-generating tissue, CACF was shown to increase the dynamic range of velocity estimates and decrease bias and artifact from flash and thermal noise relative to conventional color flow processing. Under in vivo conditions, such properties allowed for the direct visualization of vessels that would have otherwise required fine-tuning of filter cutoff and priority thresholds with conventional processing. These advantages are presented alongside various failure modes identified in CACF as well as discussions of solutions to mitigate such limitations.
传统的彩色流处理具有高度的算子依赖性,通常需要仔细调整杂波滤波器和优先编码,以优化彩色流图像的显示和准确性。在另一篇论文中,我们引入了一种新的框架来适应基于后向散射空间相干性的局部测量的颜色流处理。通过仿真研究,证明了利用相干图像质量特性自适应选择杂波滤波器是一种动态抑制弱相干杂波,同时保持相干流信号以减小速度估计偏差的方法。在这项研究中,我们扩展了先前的工作,以评估相干自适应杂波滤波(CACF)在从幻影和体内肝脏和胎儿血管获得的实验数据中的应用。在产生杂波的组织的幻影实验中,与传统的色流处理相比,CACF增加了速度估计的动态范围,减少了闪烁和热噪声的偏差和伪影。在体内条件下,这些特性允许血管的直接可视化,否则需要在常规处理中微调滤波截止和优先阈值。这些优点与CACF中确定的各种故障模式以及减轻此类限制的解决方案的讨论一起展示。
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引用次数: 0
Spatial Coherence Adaptive Clutter Filtering in Color Flow Imaging—Part I: Simulation Studies 彩色流成像中的空间相干自适应杂波滤波——第一部分:仿真研究
Pub Date : 2022-06-21 DOI: 10.1109/OJUFFC.2022.3184914
Will Long;David Bradway;Rifat Ahmed;James Long;Gregg E. Trahey
The appropriate selection of a clutter filter is critical for ensuring the accuracy of velocity estimates in ultrasound color flow imaging. Given the complex spatio-temporal dynamics of flow signal and clutter, however, the manual selection of filters can be a significant challenge, increasing the risk for bias and variance introduced by the removal of flow signal and/or poor clutter suppression. We propose a novel framework to adaptively select clutter filter settings based on color flow image quality feedback derived from the spatial coherence of ultrasonic backscatter. This framework seeks to relax assumptions of clutter magnitude and velocity that are traditionally required in existing adaptive filtering methods to generalize clutter filtering to a wider range of clinically-relevant color flow imaging conditions. In this study, the relationship between color flow velocity estimation error and the spatial coherence of clutter filtered channel signals was investigated in Field II simulations for a wide range of flow and clutter conditions. This relationship was leveraged in a basic implementation of coherence-adaptive clutter filtering (CACF) designed to dynamically adapt clutter filters at each imaging pixel and frame based on local measurements of spatial coherence. In simulation studies with known scatterer and clutter motion, CACF was demonstrated to reduce velocity estimation bias while maintaining variance on par with conventional filtering.
在超声彩色血流成像中,杂波滤波器的选择对保证速度估计的准确性至关重要。然而,考虑到流量信号和杂波的复杂时空动态,手动选择滤波器可能是一个重大挑战,增加了由于去除流量信号和/或杂波抑制不良而引入的偏差和方差的风险。提出了一种基于超声后向散射空间相干性的彩色流图像质量反馈自适应选择杂波滤波器设置的新框架。该框架旨在放宽现有自适应滤波方法传统上需要的杂波大小和速度的假设,将杂波滤波推广到更广泛的临床相关彩色血流成像条件。在本研究中,在广泛的流量和杂波条件下,研究了杂波滤波通道信号的彩色流速估计误差与空间相干性的关系。这种关系被利用在相干自适应杂波滤波(CACF)的基本实现中,CACF设计用于基于空间相干性的局部测量动态地适应每个成像像素和帧的杂波滤波器。在已知散射体和杂波运动的仿真研究中,CACF被证明可以减少速度估计偏差,同时保持与传统滤波相同的方差。
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引用次数: 1
Design for Acoustic Wave Multiplexers With Single Inductor Matching Network Using Frequency Response Fitting Method 基于频率响应拟合方法的单电感匹配网络声波复用器设计
Pub Date : 2022-06-13 DOI: 10.1109/OJUFFC.2022.3182321
Shu-Yuan Tseng;Min-Yuan Yang;Chin-Chung Hsiao;Yung-Yu Chen;Ruey-Beei Wu
This study proposes a new acoustic wave (AW) multiplexer topology with a single-inductor matching network for carrier aggregation (CA) in the fifth-generation communication systems. To satisfy the desired specifications of all the multiplexer ports based on ladder-type filters, the frequency response fitting method (FRFM) is proposed to obtain the BVD parameters for each AW resonator. Using the proposed computer-aided method, a parameter solution can be obtained under practical design limitations, such as the selection of the piezoelectric material, properties of the manufacturing process, and used circuit topology. Furthermore, a measurement of a band 1 and 3 surface acoustic wave (SAW) multiplexer is set up to confirm the feasibility of the proposed FRFM. The designed SAW multiplexer based on the lithium tantalate with Euler angle (0, −38, 0), 42°YX-LiTaO3, is arranged. The designed quadplexer achieves high selectively with a return loss (RL), stopband reflection, and isolation better than −12 dB, −43 dB, and −50 dB, respectively, in a $2.15times2.65$ mm2 occupation. The measurement results confirm the feasibility of the multiplexer topology and the proposed FRFM. The approach is also extended to a quadplexer design with band 4 and 25 and a hexaplexer design with band 1, 3, and 7 for CA applications, demonstrating its flexibility and simplicity.
针对第五代通信系统中的载波聚合(CA),提出了一种新的基于单电感匹配网络的声波多路复用拓扑。为了满足基于梯形滤波器的所有多路复用器端口的期望规格,提出了频率响应拟合方法(FRFM)来获得每个AW谐振器的BVD参数。利用所提出的计算机辅助方法,可以在实际设计限制下获得参数解,例如压电材料的选择,制造工艺的性质以及所使用的电路拓扑。此外,对波段1和波段3表面声波(SAW)多路复用器进行了测量,以验证所提出的频响调频的可行性。设计了基于欧拉角为(0,−38,0)42°的钽酸锂的SAW多路复用器- x - litao3。所设计的四向复用器在2.15times2.65$ mm2的占用下,回波损耗(RL)、阻带反射和隔离度分别优于- 12 dB、- 43 dB和- 50 dB,具有高选择性。测试结果证实了多路复用器拓扑结构和所提出的频域调频的可行性。该方法还扩展到带4和25的四向复用器设计以及带1、3和7的六向复用器设计,用于CA应用,展示了其灵活性和简单性。
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引用次数: 3
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IEEE open journal of ultrasonics, ferroelectrics, and frequency control
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