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Laser Micromachined Flexible Ultrasound Line Array and Subplanar Multimodal Imaging Applications 激光微加工柔性超声线阵列及亚平面多模态成像应用
Pub Date : 2022-07-08 DOI: 10.1109/OJUFFC.2022.3188746
Jianzhong Chen;Wei Liu;Dawei Wu;Hu Ye
Flexible ultrasound array with phased array configurations have individually controllable array element emission and reception acoustic properties, however array conventional processes and array design are too complex. It is necessary to explore rapid creation methods and potential ultrasound applications for flexible arrays. In this paper, we provide a method for rapid fabrication of flexible transducers based on laser micromachining and verify the performance of the line array by multi-mode positioning imaging under curved surfaces. The proposed single-layered and double-sided conductive stretchable electrode configuration eliminated the blockage of acoustic waves,and ’island bridge’ structures are compatible with array flexibility and array excitation for row addressing.The mechanical, acoustic and electrical interconnections of the array are verified.Based on the Verasonics system, the ultrasonic line array scans multiple steel column targets in multiple modalities under curved surfaces for imaging and localization.The results show that the ultrasonic line array can obtain clear visual localization images in A-scan, B-scan and E-scan poses.In addition, the artifacts in the images can be effectively suppressed by adjusting the depth of focus of E-scan and optimizing the sparse line array structure. It is verified that laser micromachining for rapid creation of flexible ultrasonic line array has potential applications in the field of localization imaging.
采用相控阵结构的柔性超声阵列具有独立可控的阵元发射和接收声学特性,但阵元常规工艺和阵元设计过于复杂。有必要探索柔性阵列的快速制作方法和潜在的超声应用。本文提出了一种基于激光微加工的柔性换能器快速制造方法,并通过曲面下多模定位成像验证了线阵的性能。提出的单层和双面导电可拉伸电极结构消除了声波的阻塞,“岛桥”结构与阵列灵活性和阵列激励相兼容,用于行寻址。验证了阵列的机械、声学和电气互连性。基于Verasonics系统,超声线阵在曲面下以多模态扫描多个钢柱目标进行成像和定位。结果表明,超声线阵在a扫描、b扫描和e扫描姿态下均能获得清晰的视觉定位图像。此外,通过调整e扫描的聚焦深度和优化稀疏线阵列结构,可以有效地抑制图像中的伪影。验证了激光微加工快速制造柔性超声线阵在定位成像领域具有潜在的应用前景。
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引用次数: 0
Spatial Coherence Adaptive Clutter Filtering in Color Flow Imaging—Part II: Phantom and In Vivo Experiments 彩色流成像中的空间相干自适应杂波滤波——第二部分:幻像和体内实验
Pub Date : 2022-06-21 DOI: 10.1109/OJUFFC.2022.3184909
Will Long;David Bradway;Rifat Ahmed;James Long;Gregg E. Trahey
Conventional color flow processing is associated with a high degree of operator dependence, often requiring the careful tuning of clutter filters and priority encoding to optimize the display and accuracy of color flow images. In a companion paper, we introduced a novel framework to adapt color flow processing based on local measurements of backscatter spatial coherence. Through simulation studies, the adaptive selection of clutter filters using coherence image quality characterization was demonstrated as a means to dynamically suppress weakly-coherent clutter while preserving coherent flow signal in order to reduce velocity estimation bias. In this study, we extend previous work to evaluate the application of coherence-adaptive clutter filtering (CACF) on experimental data acquired from both phantom and in vivo liver and fetal vessels. In phantom experiments with clutter-generating tissue, CACF was shown to increase the dynamic range of velocity estimates and decrease bias and artifact from flash and thermal noise relative to conventional color flow processing. Under in vivo conditions, such properties allowed for the direct visualization of vessels that would have otherwise required fine-tuning of filter cutoff and priority thresholds with conventional processing. These advantages are presented alongside various failure modes identified in CACF as well as discussions of solutions to mitigate such limitations.
传统的彩色流处理具有高度的算子依赖性,通常需要仔细调整杂波滤波器和优先编码,以优化彩色流图像的显示和准确性。在另一篇论文中,我们引入了一种新的框架来适应基于后向散射空间相干性的局部测量的颜色流处理。通过仿真研究,证明了利用相干图像质量特性自适应选择杂波滤波器是一种动态抑制弱相干杂波,同时保持相干流信号以减小速度估计偏差的方法。在这项研究中,我们扩展了先前的工作,以评估相干自适应杂波滤波(CACF)在从幻影和体内肝脏和胎儿血管获得的实验数据中的应用。在产生杂波的组织的幻影实验中,与传统的色流处理相比,CACF增加了速度估计的动态范围,减少了闪烁和热噪声的偏差和伪影。在体内条件下,这些特性允许血管的直接可视化,否则需要在常规处理中微调滤波截止和优先阈值。这些优点与CACF中确定的各种故障模式以及减轻此类限制的解决方案的讨论一起展示。
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引用次数: 0
Spatial Coherence Adaptive Clutter Filtering in Color Flow Imaging—Part I: Simulation Studies 彩色流成像中的空间相干自适应杂波滤波——第一部分:仿真研究
Pub Date : 2022-06-21 DOI: 10.1109/OJUFFC.2022.3184914
Will Long;David Bradway;Rifat Ahmed;James Long;Gregg E. Trahey
The appropriate selection of a clutter filter is critical for ensuring the accuracy of velocity estimates in ultrasound color flow imaging. Given the complex spatio-temporal dynamics of flow signal and clutter, however, the manual selection of filters can be a significant challenge, increasing the risk for bias and variance introduced by the removal of flow signal and/or poor clutter suppression. We propose a novel framework to adaptively select clutter filter settings based on color flow image quality feedback derived from the spatial coherence of ultrasonic backscatter. This framework seeks to relax assumptions of clutter magnitude and velocity that are traditionally required in existing adaptive filtering methods to generalize clutter filtering to a wider range of clinically-relevant color flow imaging conditions. In this study, the relationship between color flow velocity estimation error and the spatial coherence of clutter filtered channel signals was investigated in Field II simulations for a wide range of flow and clutter conditions. This relationship was leveraged in a basic implementation of coherence-adaptive clutter filtering (CACF) designed to dynamically adapt clutter filters at each imaging pixel and frame based on local measurements of spatial coherence. In simulation studies with known scatterer and clutter motion, CACF was demonstrated to reduce velocity estimation bias while maintaining variance on par with conventional filtering.
在超声彩色血流成像中,杂波滤波器的选择对保证速度估计的准确性至关重要。然而,考虑到流量信号和杂波的复杂时空动态,手动选择滤波器可能是一个重大挑战,增加了由于去除流量信号和/或杂波抑制不良而引入的偏差和方差的风险。提出了一种基于超声后向散射空间相干性的彩色流图像质量反馈自适应选择杂波滤波器设置的新框架。该框架旨在放宽现有自适应滤波方法传统上需要的杂波大小和速度的假设,将杂波滤波推广到更广泛的临床相关彩色血流成像条件。在本研究中,在广泛的流量和杂波条件下,研究了杂波滤波通道信号的彩色流速估计误差与空间相干性的关系。这种关系被利用在相干自适应杂波滤波(CACF)的基本实现中,CACF设计用于基于空间相干性的局部测量动态地适应每个成像像素和帧的杂波滤波器。在已知散射体和杂波运动的仿真研究中,CACF被证明可以减少速度估计偏差,同时保持与传统滤波相同的方差。
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引用次数: 1
Design for Acoustic Wave Multiplexers With Single Inductor Matching Network Using Frequency Response Fitting Method 基于频率响应拟合方法的单电感匹配网络声波复用器设计
Pub Date : 2022-06-13 DOI: 10.1109/OJUFFC.2022.3182321
Shu-Yuan Tseng;Min-Yuan Yang;Chin-Chung Hsiao;Yung-Yu Chen;Ruey-Beei Wu
This study proposes a new acoustic wave (AW) multiplexer topology with a single-inductor matching network for carrier aggregation (CA) in the fifth-generation communication systems. To satisfy the desired specifications of all the multiplexer ports based on ladder-type filters, the frequency response fitting method (FRFM) is proposed to obtain the BVD parameters for each AW resonator. Using the proposed computer-aided method, a parameter solution can be obtained under practical design limitations, such as the selection of the piezoelectric material, properties of the manufacturing process, and used circuit topology. Furthermore, a measurement of a band 1 and 3 surface acoustic wave (SAW) multiplexer is set up to confirm the feasibility of the proposed FRFM. The designed SAW multiplexer based on the lithium tantalate with Euler angle (0, −38, 0), 42°YX-LiTaO3, is arranged. The designed quadplexer achieves high selectively with a return loss (RL), stopband reflection, and isolation better than −12 dB, −43 dB, and −50 dB, respectively, in a $2.15times2.65$ mm2 occupation. The measurement results confirm the feasibility of the multiplexer topology and the proposed FRFM. The approach is also extended to a quadplexer design with band 4 and 25 and a hexaplexer design with band 1, 3, and 7 for CA applications, demonstrating its flexibility and simplicity.
针对第五代通信系统中的载波聚合(CA),提出了一种新的基于单电感匹配网络的声波多路复用拓扑。为了满足基于梯形滤波器的所有多路复用器端口的期望规格,提出了频率响应拟合方法(FRFM)来获得每个AW谐振器的BVD参数。利用所提出的计算机辅助方法,可以在实际设计限制下获得参数解,例如压电材料的选择,制造工艺的性质以及所使用的电路拓扑。此外,对波段1和波段3表面声波(SAW)多路复用器进行了测量,以验证所提出的频响调频的可行性。设计了基于欧拉角为(0,−38,0)42°的钽酸锂的SAW多路复用器- x - litao3。所设计的四向复用器在2.15times2.65$ mm2的占用下,回波损耗(RL)、阻带反射和隔离度分别优于- 12 dB、- 43 dB和- 50 dB,具有高选择性。测试结果证实了多路复用器拓扑结构和所提出的频域调频的可行性。该方法还扩展到带4和25的四向复用器设计以及带1、3和7的六向复用器设计,用于CA应用,展示了其灵活性和简单性。
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引用次数: 3
Characterization of Multilayer Piezoelectric Stacks Down to 100K 100K以下多层压电堆的特性研究
Pub Date : 2022-03-11 DOI: 10.1109/OJUFFC.2022.3173919
Stewart Sherrit;Mircea Badescu;John B. Steeves;William E. Krieger;Clifford A. Klein;Otto R. Polanco;Carey Louise Weisberg;David Van Buren;Joseph Sauvageau;Keith Coste
A variety of applications require precision control at cryogenic temperatures. The next-generation of telescopes are looking to increase apertures in space telescopes and observations in the mid through far infrared regions enabling new science ranging from exoplanet characterization to precision astronomical observations to further refine astrophysics models. Concepts include segmented telescopes which are capable of observations in UV through IR bands, thus driving the need for UV surface performance at cryogenic temperatures. These telescope’s segments will require actuators for controlled surface displacements capable of operation at cryogenic temperatures ( $le 150text{K}$ ). The work reported in this paper is directed at understanding piezoelectric stack actuator operation down to cryogenic temperatures (100 K) which will provide actuator designers the needed information to model and predict performance. The data reported down to 100 K includes; resonance data, displacement voltage (S vs E) and capacitor voltage (D vs E) curves, stiffness, hysteresis, blocking force, DC resistance measurements, thermal strains and the coefficients of thermal expansion as a function of the electrical boundary conditions. Open-loop control drive strategies and errors are also reported. We apply this data to a surface parallel actuator mirror design.
各种应用需要在低温下进行精确控制。下一代望远镜正在寻求增加空间望远镜的孔径,并在中红外到远红外区域进行观测,从而实现从系外行星表征到精确天文观测的新科学,以进一步完善天体物理模型。概念包括分段望远镜,它能够通过红外波段观察紫外线,从而推动了对低温下紫外线表面性能的需求。这些望远镜的部分将需要能够在低温下操作的控制表面位移的执行器。本文报道的工作旨在了解压电堆叠致动器在低温(100 K)下的操作,这将为致动器设计人员提供建模和预测性能所需的信息。100 K以下报告的数据包括;谐振数据,位移电压(S vs E)和电容电压(D vs E)曲线,刚度,滞后,阻塞力,直流电阻测量,热应变和热膨胀系数作为电边界条件的函数。文中还报道了开环控制驱动策略及其误差。我们将这些数据应用于一个表面平行执行器反射镜的设计。
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引用次数: 0
An Improved Lumped Element Model for Circular-Shape pMUTs 一种改进的圆形pMUTs集总元模型
Pub Date : 2022-01-01 DOI: 10.1109/OJUFFC.2022.3178972
Sedat Pala;Liwei Lin
This paper presents an improved lumped element model for clamped, circular-shape, piezoelectric micromachined ultrasonic transducers (pMUTs). A small signal equivalent circuit is developed to include electrical, mechanical, and acoustic domains, which are analyzed separately and combined with the associated couplings. For the first time, a two-term mode shape approach is adapted to reveal intrinsic and extrinsic properties of a pMUT, such as equivalent circuit parameters, input impedance, velocity, displacement, bandwidth, quality factor, directivity, and the on-axis pressure in the near and far field. These properties are compared with prior reports in the literature and exact solutions, as well as Finite Element Method (FEM) simulations. The errors relative to exact solution for all these properties are below 0.5%. These improvements in error are from 5x to about 3 orders of magnitude better than those of prior works. As such, the improved model could be helpful in design and simulation tools for pMUTs.
本文提出了一种改进的圆形夹紧型压电微机械超声换能器的集总元模型。开发了一个小信号等效电路,包括电气,机械和声学域,它们分别进行分析,并与相关的耦合组合在一起。首次采用两项模态振型方法来揭示pMUT的内在和外在特性,如等效电路参数、输入阻抗、速度、位移、带宽、质量因子、指向性以及近场和远场的轴上压力。这些性质与先前的文献报告和精确解以及有限元法(FEM)模拟进行了比较。相对于所有这些属性的精确解的误差都在0.5%以下。这些误差的改善从5倍到大约3个数量级比以前的工作。因此,改进的模型可以为pmut的设计和仿真工具提供帮助。
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引用次数: 4
Lumped-Parameter Equivalent Circuit Modeling of CMUT Array Elements CMUT阵列元件集总参数等效电路建模
Pub Date : 2022-01-01 DOI: 10.1109/OJUFFC.2021.3134938
Tony Merrien;Audren Boulmé;Dominique Certon
Design and modeling are key steps in the value chain of Capacitive Micromachined Ultrasonic Transducer (CMUT) arrays. Although CMUT array element models are very powerful, most of them are still limited in their use as tools for electronic design assistance. The electroacoustic equivalent circuits developed are mainly based on a distributed-element approach while lumped-parameter electrical circuits are better suited for electronic software design tools interoperations. To meet this need, the present study aims to implement an electroacoustic equivalent scheme of a full array element, based on a two-port network representation made of lumped-parameters. After an extensive bibliographical review of CMUT models, the new model is set-up from a fully distributed approach using Foldy’s electroacoustic definitions at the element level. Transmit and receive modes are implemented using scalar equations given by the lumped parameters. Moreover, based on a reciprocity analysis, the performance of the complete measurement chain in emission and reception will be defined using the relevant transfer functions. Finally, to help one design CMUT array elements for a given application, a method based on the computation of membranes thickness-size master curves is proposed. The two-port network representation of a full CMUT-based array element allowed by the new lumped-parameter modeling opens a wide range of possibilities regarding array design, electronic integration, operations with acoustic propagation simulation tools and more.
设计和建模是电容式微机械超声换能器(CMUT)阵列价值链中的关键环节。尽管CMUT阵列元件模型非常强大,但它们中的大多数在用作电子设计辅助工具方面仍然受到限制。电声等效电路的开发主要基于分布单元方法,而集总参数电路更适合于电子软件设计工具的互操作。为了满足这一需求,本研究旨在基于集总参数组成的双端口网络表示实现全阵列元件的电声等效方案。在对CMUT模型进行广泛的书目审查后,新模型是使用Foldy在元素级别的电声定义从完全分布式的方法建立的。发射和接收模式由集总参数给出的标量方程实现。此外,基于互易分析,将使用相关传递函数定义完整测量链在发射和接收中的性能。最后,提出了一种基于膜厚-尺寸主曲线计算的CMUT阵列元件设计方法。新的集总参数建模所允许的基于cmu的全阵列元件的双端口网络表示,为阵列设计、电子集成、声学传播模拟工具的操作等方面提供了广泛的可能性。
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引用次数: 5
Retrieving Pulsatility in Ultrasound Localization Microscopy 超声定位显微镜脉冲性检索
Pub Date : 2022-01-01 DOI: 10.1109/OJUFFC.2022.3221354
Myrthe Wiersma;Baptiste Heiles;Dylan Kalisvaart;David Maresca;Carlas S. Smith
Ultrasound localization microscopy (ULM) is a vascular imaging method that provides a 10-fold improvement in resolution compared to ultrasound Doppler imaging. Because typical ULM acquisitions accumulate large numbers of synthetic microbubble (MB) trajectories over hundreds of cardiac cycles, transient hemodynamic variations such as pulsatility get averaged out. Here we introduce two independent processing methods to retrieve pulsatile flow characteristics from MB trajectories sampled at kilohertz frame rates and demonstrate their potential on a simulated dataset. The first approach follows a Lagrangian description of the flow. We filter the MB trajectories to eliminate ULM localization grid artifacts and successfully recover the pulsatility fraction $P_{mathrm {f}}$ with a root mean square error (RMSE) of 3.3%. Our second approach follows a Eulerian description of the flow. It relies on the accumulation of MB velocity estimates as observed from a stationary observer. We show that pulsatile flow gives rise to a bimodal velocity distribution with peaks indicating the maximum and minimum velocities of the cardiac cycle. In this second method, we recovered the pulsatility fraction $P_{mathrm {f}}$ by measuring the location of these distribution peaks with a RMSE of 5.2%. We evaluated the impact of the MB localization precision $sigma $ on our ability to retrieve the bimodal signature of a pulsatile flow. Together, our results demonstrate that pulsatility can be retrieved from ULM acquisitions at kilohertz frame rate and that the estimation of the pulsatility fraction improves with localization precision.
超声定位显微镜(ULM)是一种血管成像方法,与超声多普勒成像相比,其分辨率提高了10倍。由于典型的ULM采集在数百个心脏周期中积累了大量的合成微泡(MB)轨迹,因此瞬态血流动力学变化(如脉搏)被平均出来。在这里,我们介绍了两种独立的处理方法,从以千赫兹帧率采样的MB轨迹中检索脉动流特性,并在模拟数据集上展示了它们的潜力。第一种方法遵循流的拉格朗日描述。我们对MB轨迹进行了过滤,以消除ULM定位网格伪像,并成功地恢复了脉动分数$P_{ mathm {f}}$,均方根误差(RMSE)为3.3%。我们的第二种方法遵循流的欧拉描述。它依赖于从静止观测者观测到的MB速度估计的累积。我们表明,脉动流产生双峰速度分布,峰值表明心脏周期的最大和最小速度。在第二种方法中,我们通过测量这些分布峰的位置恢复了脉动分数$P_{ mathm {f}}$, RMSE为5.2%。我们评估了MB定位精度$sigma $对我们检索脉动流双峰特征的能力的影响。总之,我们的研究结果表明,脉动性可以从千赫兹帧率的ULM采集中检索到,并且脉动性分数的估计随着定位精度的提高而提高。
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引用次数: 3
Multipath Flow Metering of High-Velocity Gas Using Ultrasonic Phased-Arrays 高速气体超声相控阵多径流量测量
Pub Date : 2022-01-01 DOI: 10.1109/OJUFFC.2022.3141333
Christoph Haugwitz;Claas Hartmann;Gianni Allevato;Matthias Rutsch;Jan Hinrichs;Johannes Brötz;Dieter Bothe;Peter F. Pelz;Mario Kupnik
In this work we combine a multipath ultrasonic gas flow meter (UFM) with an ultrasonic air-coupled phased-array. This allows complementing the advantages of a multipath UFM, i.e. higher accuracy and more robustness to irregular flow, with the extended velocity measuring range due to sound drift compensation via a phased-array. We created a 3D-printed flow meter consisting of an $8 times 8,,lambda /2$ phased-array for transmission and 14 individual receivers for seven upstream and seven downstream sound paths. Measurements were conducted in a test rig with a maximum gas flow rates of 8.3 m3 s−1 (107 ms−1). A differential pressure nozzle was used as reference sensor. Three configurations were compared: Parallel sound paths with a single transmitter; parallel sound paths with the phased-array as transmitter; and fan-shaped sound paths with the phased-array as transmitter. The signal-to-noise ratio (SNR) and deviation of measured flow were used as comparison criteria. In addition, we measured the optimum steering angles of the phased-array required to compensate the sound drift effect. Using the phased-array with the sound drift effect compensation enabled and disabled, the SNR increases by 10.6 dB and 4.95 dB, respectively, compared to the single transmitter setup at 83 m s−1. Furthermore, the phased-array with compensation active, extends the velocity measuring range by 29%, from 83 ms−1 to 107 m s−1, while maintaining a similar standard deviation of the flow measured. Besides demonstrating that a phased-array in a gas flow meter significantly extends the measurement range, our setup qualifies as versatile research platform for designing future high-velocity gas flow meters.
在这项工作中,我们将多径超声波气体流量计(UFM)与超声波空气耦合相控阵相结合。这可以补充多径UFM的优点,即更高的精度和对不规则流的更强鲁棒性,并通过相控阵进行声漂移补偿,从而扩展了速度测量范围。我们创建了一个3d打印流量计,该流量计由用于传输的$8 × 8,,lambda /2$相控阵和14个单独的接收器组成,分别用于7个上游和7个下游声音路径。测量是在一个最大气体流速为8.3 m3 s - 1 (107 ms - 1)的试验台进行的。采用差压喷嘴作为参考传感器。比较了三种配置:单个发射器的平行声路;以相控阵为发射机的平行声路;以及以相控阵作为发射器的扇形声路。以测量流量的信噪比(SNR)和偏差作为比较标准。此外,我们测量了补偿声漂移效应所需的相控阵的最佳转向角。在启用和禁用声音漂移效应补偿的相控阵中,与83 m s−1的单发射机设置相比,信噪比分别增加了10.6 dB和4.95 dB。此外,具有补偿功能的相控阵将速度测量范围从83 ms−1扩展到107 ms−1,增加了29%,同时保持了测量流量的相似标准偏差。除了证明气体流量计中的相控阵显着扩展了测量范围外,我们的装置还可以作为设计未来高速气体流量计的多功能研究平台。
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引用次数: 8
Nonlinearity of Piezoelectric Micromachined Ultrasonic Transducer Using AlN Thin Film AlN薄膜压电微机械超声换能器的非线性研究
Pub Date : 2022-01-01 DOI: 10.1109/OJUFFC.2022.3182926
Zhifang Luo;Junxiang Cai;Songsong Zhang;Yuandong Gu;Liang Lou;Tao Wu
We present the nonlinearity of Aluminum Nitride (AlN)-based Piezoelectric Micromachined Ultrasonic Transducer (PMUT) utilizing Laser Doppler Vibrometer (LDV) technique. The PMUT working at resonant frequency excite the piezoelectric layer into strong nonlinear region. The nonlinear phenomena are observed, such as frequency shift and nonlinear out-of-plane displacement magnitude. A mathematic model of piezoelectric nonlinearity is employed for analyzing the nonlinear behavior, and the second order piezoelectric coefficient is obtained subsequently. Approximately 120 harmonics, which are generated by PMUT nonlinearity, are obtained experimentally under a single-tone AC signal of a relatively high-level voltage. In addition, the number of harmonics can be controlled meticulously. Three different applications are developed to utilize harmonic generations in acoustic-optical hybrid microsystem and Radio Frequency (RF) field. The observation and analysis of AlN piezoelectric nonlinearity could benefit a further understanding of PMUT based on AlN thin film. We believe the generated harmonics can be potentially used in a wide variety of applications in signal processing and modulation.
利用激光多普勒测振仪(LDV)技术研究了氮化铝(AlN)基压电微机械超声换能器(PMUT)的非线性特性。工作在谐振频率下的PMUT激发压电层进入强非线性区。观察到非线性现象,如频移和非线性面外位移幅度。利用压电非线性的数学模型分析其非线性行为,得到二阶压电系数。在较高电压的单音交流信号下,实验得到了由PMUT非线性产生的约120个谐波。此外,谐波的数量可以很好地控制。在声光混合微系统和射频(RF)领域开发了三种不同的应用。对AlN压电非线性特性的观察和分析有助于进一步理解基于AlN薄膜的PMUT。我们相信产生的谐波可以在信号处理和调制的各种应用中得到潜在的应用。
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引用次数: 1
期刊
IEEE open journal of ultrasonics, ferroelectrics, and frequency control
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