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Development of an Air-Coupled Piezoelectric Micromachined Ultrasonic Transducer Using Sol-Gel PZT Thin Film for Fast-Prototyping 利用溶胶凝胶 PZT 薄膜开发空气耦合压电微机械超声波传感器,实现快速原型制作
Pub Date : 2024-03-06 DOI: 10.1109/OJUFFC.2024.3397630
Ya-Han Liu;Hsiao-Chi Lin;Chih-Ying Li;Chien-Lun Kao;Han-Jen Hsu;Yeong-Her Wang;Chih-Hsien Huang
This study demonstrated the first air-coupled pMUT using sol-gel PZT thin film that could deliver ultrasonic waves to mid-air. First, the deposition conditions for making PZT thin film with high remanent polarization were determined. Then, air-coupled pMUTs with resonance frequencies close to 40 kHz were designed using the circular plate model. According to the design, pMUTs with radii measuring $600~mu $ m to $775~mu $ m were fabricated to evaluate the acoustic output pressure. Among these, the pMUT with the $725~mu $ m radius achieved a maximum sound pressure output of 4.42 Pa at 3 cm above when driven with 10 Vpp, and the resonance frequency was 40.48 kHz. Finally, the output pressure of a phased array consisting of sol-gel PZT-based pMUTs with a $725~mu $ m radius was calculated using the k-Wave toolbox. The output pressure of the $11times 11$ pMUT array reached 365.62 Pa when focused at 3 cm above it. This result revealed that the output pressure of the proposed pMUT array could fulfill the requirement for most mid-air ultrasound applications.
这项研究首次展示了使用溶胶凝胶 PZT 薄膜的空气耦合 pMUT,它可以将超声波传送到半空中。首先,确定了制作高剩磁极化 PZT 薄膜的沉积条件。然后,利用圆板模型设计了共振频率接近 40 kHz 的空气耦合 pMUT。根据设计,制作了半径为 600~mu $ m 至 775~mu $ m 的 pMUT,以评估声输出压力。其中,半径为 725~mu $ m 的 pMUT 在 10 Vpp 的驱动下,3 cm 以上的最大声压输出为 4.42 Pa,共振频率为 40.48 kHz。最后,使用 k-Wave 工具箱计算了由半径为 725~mu $ m 的基于溶胶凝胶 PZT 的 pMUT 组成的相控阵的输出压力。当聚焦在其上方 3 厘米处时,11/times 11$ pMUT 阵列的输出压力达到了 365.62 Pa。这一结果表明,拟议的 pMUT 阵列的输出压力可以满足大多数中空超声应用的要求。
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引用次数: 0
Studying the Effects of Mutual Acoustic Impedance on the Performance of Polymer-Based CMUTs 研究互声阻抗对聚合物基 CMUT 性能的影响
Pub Date : 2024-02-29 DOI: 10.1109/OJUFFC.2024.3371913
Martin Angerer;Jonas Welsch;Carlos D. Gerardo;Nicole V. Ruiter;Edmond Cretu;Robert Rohling
The objective of this work was to investigate changes in the acoustic characteristics of micromachined transducers caused by acoustic cross-coupling between cells. We used hexagonal, polymer-based capacitive micromachined ultrasonic transducers (polyCMUTs) consisting of 127 cells connected in parallel. The distances between the cells were varied, while the cell dimensions and number of cells remained constant. The resulting changes in characteristics were evaluated in terms of peak frequency $f_{pk}$ , fractional bandwidth $FBW$ , peak transmit sensitivity $S_{pk}$ and opening angle $Phi _{t}$ . The study relies on results from an analytic multicell model (MCM) which considers cross-coupling effects between cells through a mutual acoustic impedance matrix. The results are compared with finite element (FE) analyses and measurements on fabricated prototypes. The manufacturing processes used to produce the polyCMUT prototypes are explained in detail. We found significant changes in all acoustic characteristics: as cell spacing increases, $f_{pk}$ and $Phi _{t}$ decrease, while $S_{pk}$ gradually rises to about twice the initial value. The $FBW$ varies due to the change in $f_{pk}$ , peaking at small to intermediate cell-to-cell distances. While both modeling approaches cover the general effects, discrepancies in comparison to the measurements were identified. The FE model provided better fits than the analytic MCM, albeit at significantly higher computational costs. The effects on the acoustic characteristics were found strongest at lower frequencies and if many cells are in close proximity to each other. Hence, rotational symmetric or square transducers operating at lower frequencies are affected most. The results demonstrate that design approaches based on modeling single cells may lead to significant deviations from design goals. Both, analytic and FE models are suitable tools to estimate the effects of acoustic interactions and to predict the performance. This aids in meeting design requirements of micromachined ultrasound transducers consisting of multiple radiators.
这项工作的目的是研究微机械换能器的声学特性因单元间的声学交叉耦合而发生的变化。我们使用的是六边形聚合物电容式微机械超声波传感器(polyCMUT),由 127 个并联单元组成。单元之间的距离可以改变,而单元的尺寸和数量保持不变。所产生的特性变化通过峰值频率 $f_{pk}$、分数带宽 $FBW$、峰值传输灵敏度 $S_{pk}$ 和开口角 $Phi _{t}$ 进行评估。研究依赖于多单元分析模型 (MCM) 的结果,该模型通过相互声阻抗矩阵考虑了单元之间的交叉耦合效应。研究结果与有限元 (FE) 分析和对制造原型的测量结果进行了比较。我们还详细解释了用于生产 polyCMUT 原型的制造工艺。我们发现所有声学特性都发生了明显的变化:随着单元间距的增加,$f_{pk}$ 和 $Phi _{t}$ 下降,而 $S_{pk}$ 逐渐上升到初始值的两倍左右。由于 $f_{pk}$ 的变化,$FBW$ 也随之变化,在较小到中等细胞间距时达到峰值。虽然两种建模方法都涵盖了一般效应,但还是发现了与测量结果之间的差异。FE 模型比分析 MCM 的拟合效果更好,尽管计算成本要高得多。在频率较低、许多单元相互靠近的情况下,对声学特性的影响最大。因此,工作频率较低的旋转对称或方形换能器受到的影响最大。结果表明,基于单细胞建模的设计方法可能会导致与设计目标的重大偏差。分析模型和 FE 模型都是估计声学相互作用影响和预测性能的合适工具。这有助于满足由多个辐射器组成的微机械超声换能器的设计要求。
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引用次数: 0
Automated 3D Velocity Estimation of Natural Mechanical Wave Propagation in the Myocardium 心肌中自然机械波传播的三维速度自动估计
Pub Date : 2023-12-22 DOI: 10.1109/OJUFFC.2023.3344372
Mohammad Mohajery;Sebastien Salles;Torvald Espeland;Solveig Fadnes;Lasse Lovstakken
The mechanical wave (MW) propagation velocity in the heart is related to the tissue stiffness and its measurement mainly relies on manual evaluation of the 1D wave projection. This study presents an automated method for 3D wave visualization and velocity estimation in the heart using 3D ultrasound imaging of the left ventricle (LV). High-quality (HQ, 19 vps) and high-frame-rate (HFR, 823 vps) volumes were acquired. Deep learning models automatically segmented the LV and extracted the apical standard views from the HQ data which were used to derive the anatomical M-lines and myocardial segmentation. The clutter filter wave imaging (CFWI) and tissue Doppler imaging (TDI) generated wave propagation maps from HFR data, and the aortic valve closure (AVC) and atrial contraction/kick (AK) waves were automatically detected. LV segmentation and anatomical M-lines were used for 3D wave propagation extraction and its 1D projection, respectively. The 1D wave propagation velocity was determined through automatic slope detection, while the 3D velocity map was derived from the gradient of the time-of-flight (TOF) map. Results showed varying 1D velocity across views and myocardial regions, with the AVC propagation velocity surpassing that of the AK wave. The pipeline remained stable and generated results consistent with expert measurements. Comparing 3D and 1D propagation highlighted errors from 1D projection and demonstrated the benefits of the 3D method in assessing regional velocities and the validity of the 1D approach. This study demonstrated an automatic evaluation of 3D MW propagation velocities in the entire LV, leading to improved accuracy and standardized measurements of myocardial tissue properties.
心脏中的机械波(MW)传播速度与组织硬度有关,其测量主要依靠人工评估一维波的投影。本研究提出了一种利用左心室三维超声成像进行心脏三维波可视化和速度估算的自动化方法。研究人员采集了高质量(HQ,19 vps)和高帧频(HFR,823 vps)容积。深度学习模型自动分割左心室,并从 HQ 数据中提取心尖标准视图,用于推导解剖 M 线和心肌分割。杂波滤波成像(CFWI)和组织多普勒成像(TDI)从 HFR 数据中生成波传播图,并自动检测主动脉瓣关闭波(AVC)和心房收缩/踢波(AK)。左心室分割和解剖 M 线分别用于三维波传播提取和一维投影。一维波传播速度是通过自动斜率检测确定的,而三维速度图则来自飞行时间(TOF)图的梯度。结果显示,不同视图和心肌区域的一维速度各不相同,AVC 波的传播速度超过了 AK 波。管道保持稳定,生成的结果与专家测量结果一致。对比三维和一维传播,突出了一维投影的误差,证明了三维方法在评估区域速度方面的优势和一维方法的有效性。这项研究证明了三维 MW 传播速度在整个左心室的自动评估,从而提高了心肌组织特性测量的准确性和标准化。
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引用次数: 0
Deep and Complex Vascular Anatomy in the Rat Brain Described With Ultrasound Localization Microscopy in 3D 用三维超声定位显微镜描述大鼠大脑深层复杂的血管解剖结构
Pub Date : 2023-12-21 DOI: 10.1109/OJUFFC.2023.3342751
Arthur Chavignon;Baptiste Heiles;Vincent Hingot;Cyrille Orset;Denis Vivien;Olivier Couture
Ultrasound Localization Microscopy (ULM) enables imaging microvessels in the brain with a resolution of a few tens of micrometers in-vivo. The planar architecture of arterioles and venules was revealed with a 2D ultrasound scanner in the cortex of the rat brain. However, deeper in the brain, where the vascularization becomes tri-dimensional, 2D imaging remains limited by the elevation projection. In this study, volumetric ultrasound imaging was performed in the craniotomized rat brain to yield 3D ULM in vivo within 7.5 min of acquisition with a commercial system. For instance, it highlighted the thalamus or the circle of Willis with small vessels down to $21 ~mu text{m}$ . Microbubbles tracking also gave access to the 3D velocity vector of blood flow allowing to distinguish flow directions. Volumetric ULM resolved deep complex tri-dimensional vascular structures and was compared to 2D ULM. It is a safe, simple and repeatable system to image wide field of view in the brain.
超声定位显微镜(ULM)可对大脑中的微血管进行成像,活体成像分辨率可达几十微米。二维超声扫描仪可显示大鼠大脑皮层中动脉和静脉的平面结构。然而,在大脑深部,血管变成了三维的,二维成像仍然受到仰角投影的限制。在这项研究中,使用商用系统对开颅大鼠大脑进行了容积超声成像,在 7.5 分钟的采集时间内获得了体内三维 ULM。例如,它突出显示了丘脑或威利斯圈的小血管,最小可达 21 ~mu text{m}$ 。微气泡跟踪还可以获得三维血流速度矢量,从而区分血流方向。容积式超短波成像可以解析深部复杂的三维血管结构,并与二维超短波成像进行了比较。这是一种安全、简单、可重复的系统,可用于脑部宽视野成像。
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引用次数: 0
Analysis of Aberration Effects on Flow Imaging and Quantification in Echocardiography 分析畸变对超声心动图血流成像和定量的影响
Pub Date : 2023-12-04 DOI: 10.1109/OJUFFC.2023.3338570
Stefano Fiorentini;Svein-Erik Måsøy;Jørgen Avdal
In medical ultrasound, aberration is a phenomenon that causes distortion of the ultrasound wavefront as it travels through an inhomogeneous medium. Aberration has been investigated since the 1960s and is known as a major cause of image quality loss in several applications, such as abdominal, breast, transcranial, and cardiac imaging. In the attempt to improve image quality in the presence of aberration, research has focused on two fronts: to provide deeper understanding of the physics behind aberration, and to develop robust methods for aberration correction based on such knowledge. However, most of the work found in the literature is focused towards improving BMode image quality, whereas little attention is given to other modalities. The aim of this work is to investigate the effects of aberration on two established blood flow imaging and quantification modalities, Pulsed Wave (PW) Doppler and Color Flow. The study was carried out on phantom and in-vivo recordings, using acquisitions and aberration conditions commonly encountered in cardiac imaging. In this work, aberration was modeled as a near-field phase screen, allowing for easier design and manufacturing compared to more realistic models. The results indicate that, as in BMode imaging, aberration degrades signal-to-noise ratio and resolution. Moreover, the increased sample volume size can significantly affect mean velocity and variance estimates in Color Flow, especially in the presence of strong velocity gradients occurring laterally to the beam direction. Similar effects were observed in PW Doppler. The conclusion is that blood flow imaging and quantification modalities in cardiac applications can potentially benefit from the development of aberration correction methods.
在医用超声波中,像差是指超声波通过不均匀介质时导致波面变形的一种现象。自 20 世纪 60 年代以来,人们一直在研究像差问题,众所周知,像差是导致腹部、乳腺、经颅和心脏成像等多种应用中图像质量下降的主要原因。为了提高像差情况下的图像质量,研究主要集中在两个方面:深入了解像差背后的物理学原理,以及根据这些知识开发可靠的像差校正方法。然而,文献中发现的大部分工作都集中在提高 BMode 图像质量上,而很少关注其他模式。这项工作旨在研究像差对脉冲波(PW)多普勒和彩色血流这两种成熟的血流成像和量化模式的影响。这项研究是利用心脏成像中常见的采集和像差条件,在模型和体内记录中进行的。在这项工作中,畸变被模拟为近场相位屏,与更逼真的模型相比,更易于设计和制造。结果表明,与 BMode 成像一样,像差会降低信噪比和分辨率。此外,增大的样本体积会显著影响彩色流的平均速度和方差估计值,尤其是在光束方向横向出现强速度梯度的情况下。PW 多普勒也有类似的影响。结论是,心脏应用中的血流成像和量化模式有可能从像差校正方法的开发中受益。
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引用次数: 0
Optimization of Nonreciprocal Transmission Through Dissipative Phononic Crystals With Machine Learning Techniques 利用机器学习技术优化通过耗散声晶的非互惠传输
Pub Date : 2023-11-17 DOI: 10.1109/OJUFFC.2023.3334234
Dmitrii Shymkiv;Arnav Mazumder;Jesús Arriaga;Arkadii Krokhin
Transmission through a phononic crystal of metallic rods in a viscous environment is numerically calculated. The cross-section of the rods is selected to be asymmetric to provide very different transmission in opposite directions along a given crystallographic line. Difference in transmission contains the reciprocal part, caused by asymmetry of the scatterers, and the truly nonreciprocal part, related to nonequal viscous losses for sound waves propagating in opposite directions. The rectification ratio for different levels of asymmetry is evaluated and optimized over its value at a fixed frequency, with various machine learning models. The possibility of using asymmetric phononic crystals as acoustic diodes is discussed.
通过数值计算得出了在粘性环境中金属棒通过声子晶体的透射率。金属棒的横截面被选择为非对称的,以便沿着给定的晶体学线在相反方向上提供截然不同的传输。传输差包含由散射体不对称引起的互易部分和真正的非互易部分,后者与声波在相反方向传播时的非等量粘性损耗有关。通过各种机器学习模型,对不同不对称程度的整流比进行了评估,并对其在固定频率下的值进行了优化。讨论了将非对称声子晶体用作声学二极管的可能性。
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引用次数: 0
Generating Patient-Specific Acoustic Simulations for Transcranial Focused Ultrasound Procedures Based on Optical Tracking Information 基于光学跟踪信息的经颅聚焦超声手术患者特异性声学模拟
Pub Date : 2023-09-25 DOI: 10.1109/OJUFFC.2023.3318560
Michelle K. Sigona;Thomas J. Manuel;M. Anthony Phipps;Kianoush Banaie Boroujeni;Robert Louie Treuting;Thilo Womelsdorf;Charles F. Caskey
Optical tracking is a real-time transducer positioning method for transcranial focused ultrasound (tFUS) procedures, but the predicted focus from optical tracking typically does not incorporate subject-specific skull information. Acoustic simulations can estimate the pressure field when propagating through the cranium but rely on accurately replicating the positioning of the transducer and skull in a simulated space. Here, we develop and characterize the accuracy of a workflow that creates simulation grids based on optical tracking information in a neuronavigated phantom with and without transmission through an ex vivo skull cap. The software pipeline could replicate the geometry of the tFUS procedure within the limits of the optical tracking system (transcranial target registration error (TRE): 3.9 ± 0.7 mm). The simulated focus and the free-field focus predicted by optical tracking had low Euclidean distance errors of 0.5 ± 0.1 and 1.2 ± 0.4 mm for phantom and skull cap, respectively, and some skull-specific effects were captured by the simulation. However, the TRE of simulation informed by optical tracking was 4.6 ± 0.2, which is as large or greater than the focal spot size used by many tFUS systems. By updating the position of the transducer using the original TRE offset, we reduced the simulated TRE to 1.1 ± 0.4 mm. Our study describes a software pipeline for treatment planning, evaluates its accuracy, and demonstrates an approach using MR-acoustic radiation force imaging as a method to improve dosimetry. Overall, our software pipeline helps estimate acoustic exposure, and our study highlights the need for image feedback to increase the accuracy of tFUS dosimetry.
光学跟踪是一种实时换能器定位方法,用于经颅聚焦超声(tFUS)手术,但光学跟踪的预测焦点通常不包含受试者特定的头骨信息。声学模拟可以估计通过头盖骨传播时的压力场,但依赖于在模拟空间中精确复制换能器和头盖骨的位置。在这里,我们开发并描述了工作流程的准确性,该工作流程基于神经导航幻影中的光学跟踪信息创建仿真网格,并通过离体颅骨帽进行传输。软件管道可以在光学跟踪系统的限制内复制tFUS过程的几何形状(经颅目标配准误差(TRE): 3.9±0.7 mm)。模拟焦点和光学跟踪预测的自由场焦点对幻影和头盖骨的欧氏距离误差分别为0.5±0.1和1.2±0.4 mm,并且模拟捕获了一些头骨特异性效应。然而,通过光学跟踪获得的模拟TRE为4.6±0.2,与许多tFUS系统使用的焦斑尺寸一样大或更大。通过使用原始的TRE偏移量更新换能器的位置,我们将模拟的TRE减小到1.1±0.4 mm。我们的研究描述了一个用于治疗计划的软件管道,评估了其准确性,并展示了一种使用核磁共振声辐射力成像作为改进剂量学的方法。总的来说,我们的软件管道有助于估计声暴露,我们的研究强调了需要图像反馈来提高tFUS剂量测定的准确性。
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引用次数: 0
Graded Elastic Waveguide Metamaterial Rod for Up-Conversion of Longitudinal Axisymmetric Guided Ultrasonic Wave Modes 纵向轴对称导超声模向上转换的梯度弹性波导超材料棒
Pub Date : 2023-09-20 DOI: 10.1109/OJUFFC.2023.3317363
S. R. Sandeep Kumar;Vineeth P. Ramachandran;Krishnan Balasubramaniam;Prabhu Rajagopal
Cylindrical or circular rod-type waveguides are of much interest in applications such as measurement of flow, temperature, material properties in harsh environments, and also in medical diagnostics. However, multiple waveguide modes exist in such systems, out of which only some are of interest to certain applications. For example, L(0,3) longitudinal mode excitation can optimally transmit elastic waves into the test specimen and help in better sensing and measurement when compared to other modes within the family of longitudinal guided waves. This paper demonstrates the up-conversion of longitudinal modes within the family of guided ultrasonic rod waves (from L(0,2) to L(0,3)), which is of interest to certain waveguide transducer applications. The mode up-conversion is demonstrated using numerical simulations and experiments. An analysis is used to bring more insights and guide the design of the metamaterial in this process.
圆柱形或圆形棒型波导在诸如恶劣环境中的流量、温度、材料特性测量以及医疗诊断等应用中非常有意义。然而,在这种系统中存在多种波导模式,其中只有一些对某些应用感兴趣。例如,与纵导波族中的其他模式相比,L(0,3)纵模激励可以最优地将弹性波传递到试件中,有助于更好地感知和测量。本文演示了导超声棒波族(从L(0,2)到L(0,3))中纵向模式的上转换,这对某些波导换能器应用很有意义。通过数值模拟和实验对模式上转换进行了验证。在此过程中,通过分析可以获得更多的见解,并指导超材料的设计。
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引用次数: 1
Neural Network-Based Inverse Design of Nonlinear Phononic Crystals 基于神经网络的非线性声子晶体反设计
Pub Date : 2023-09-12 DOI: 10.1109/OJUFFC.2023.3314396
Kunqi Huang;Yuanyuan Li;Yun Lai;Xiaozhou Liu
Phononic crystals are artificial periodic structural composites. With the introduction of nonlinearity, nonlinear phononic crystals(NPCs) have shown some novel properties beyond their linear counterparts and thus attracted significant interest recently. Among these novel properties, the second harmonic characteristics have potential applications in the fields of acoustic frequency conversion, non-reciprocal propagation, and nondestructive testing. Therefore, how to accurately manipulate the second harmonic band structure is a main challenge for the design of NPCs. Traditional design methods are based on parametric analysis and continuous trials, leading to low design efficiency and poor performance. Here, we construct the convolutional neural networks(CNNs) and the generalized regression neural networks(GRNNs) to inversely design the physical and geometric parameters of NPCs using the information of harmonic transmission curves. The results show that the inverse design method based on neural networks is effective in designing the NPCs. In addition, the CNNs have better prediction accuracy while the GRNNs have a shorter training time. These methods also can be applied to the design of higher-order harmonic band structures. This work confirms the feasibility of neural networks for designing the NPCs efficiently according to target harmonic band structures and provides a useful reference for inverse design of metamaterials.
声子晶体是一种人造周期性结构复合材料。随着非线性的引入,非线性声子晶体(NPCs)显示出一些超越线性声子晶体的新特性,近年来引起了人们的广泛关注。在这些新特性中,二次谐波特性在声学频率转换、非互易传播和无损检测等领域具有潜在的应用前景。因此,如何准确地控制二次谐波带结构是npc设计的主要挑战。传统的设计方法是基于参数分析和连续试验,导致设计效率低,性能差。在这里,我们构建卷积神经网络(cnn)和广义回归神经网络(grnn),利用谐波传输曲线的信息反设计npc的物理和几何参数。结果表明,基于神经网络的反设计方法对npc的设计是有效的。此外,cnn具有更好的预测精度,而grnn具有更短的训练时间。这些方法也适用于高次谐波带结构的设计。研究结果证实了神经网络根据目标谐波带结构高效设计npc的可行性,为超材料的反设计提供了有益的参考。
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引用次数: 0
Design of Piezoelectric Micromachined Ultrasonic Transducers Using High-Order Mode With High Performance and High Frequency 高性能高频高阶压电微机械超声换能器的设计
Pub Date : 2023-08-21 DOI: 10.1109/OJUFFC.2023.3307085
Kangfu Liu;Yaoqing Lu;Sheng Wu;Xinxin Li;Tao Wu
This work proposes the piezoelectric micromachined ultrasonic transducer (pMUT) design using high-order mode. Analytical models are established and used to estimate the performance of pMUT in ${n} ^{text {th}}$ -order axisymmetric mode. To prove the concept, a comprehensive analysis is conducted on the $3^{text {rd}}$ -order pMUT by finite element method (FEM). The analytical models give guidance for the design of electrode configuration and geometric dimensions, which are verified by FEM. With optimized electrode configuration and thickness, the proposed pMUT design shows extraordinary performance improvement in transmitting and round-trip sensitivity. Approximately $10.2times $ and $4.12times $ improvements in transmitting sensitivity and round-trip sensitivity have been achieved compared to the traditional $1^{text {st}}$ -order pMUT in the same radius, while there is an $8.6times $ improvement of the receiving voltage in the pulse-echo analysis. The high frequency, round-trip sensitivity, and directivity features of the proposed high-order pMUT design shown in FEM make it very promising for forming a high-frequency large-scale pMUT array.
本文提出了基于高阶模态的压电微机械超声换能器的设计。在${n} ^{text {th}}$ -阶轴对称模态下,建立了pMUT的解析模型并对其性能进行了估计。为了证明这一概念,采用有限元法对$3^{text {rd}}$ -阶pMUT进行了综合分析。该分析模型为电极结构和几何尺寸的设计提供了指导,并通过有限元方法进行了验证。通过优化电极结构和厚度,pMUT在传输和往返灵敏度方面表现出显著的性能提高。在相同半径下,与传统的$1^{text {st}}$阶pMUT相比,发射灵敏度和往返灵敏度分别提高了$10.2和$4.12倍,而在脉冲回波分析中,接收电压提高了$8.6倍。本文所提出的高阶pMUT设计具有高频、往返灵敏度高、指向性强等特点,在构建高频大规模pMUT阵列中具有广阔的应用前景。
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IEEE open journal of ultrasonics, ferroelectrics, and frequency control
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