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Identification of nonlinear process described by neural fuzzy Hammerstein-Wiener model using multi-signal processing 基于多信号处理的神经模糊Hammerstein—Wiener模型描述的非线性过程辨识
IF 5.2 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2023-02-23 DOI: 10.1007/s40436-022-00426-w
Feng Li, Li Jia, Ya Gu

In this study, a novel approach for nonlinear process identification via neural fuzzy-based Hammerstein-Wiener model with process disturbance by means of multi-signal processing is presented. The Hammerstein-Wiener model consists of three blocks where a dynamic linear block is sandwiched between two static nonlinear blocks. Multi-signal sources are designed for achieving identification separation of the Hammerstein-Wiener process. The correlation analysis theory is utilized for estimating unknown parameters of output nonlinearity and linear block using separable signals, thus the interference of process disturbance is solved. Furthermore, the immeasurable intermediate variable and immeasurable noise term in identification model is taken over by auxiliary model output and estimate residuals, and then auxiliary model-based recursive extended least squares parameter estimation algorithm is derived to calculate parameters of the input nonlinearity and noise model. Finally, convergence analysis of the suggested identification scheme is derived using stochastic process theory. The simulation results indicate that proposed identification approach yields high identification accuracy and has good robustness.

本文提出了一种基于神经模糊的含过程扰动Hammerstein-Wiener模型的多信号处理非线性过程辨识方法。Hammerstein-Wiener模型由三个块组成,其中一个动态线性块夹在两个静态非线性块之间。多信号源的设计是为了实现汉默斯坦-维纳过程的识别分离。利用相关分析理论,利用可分离信号估计输出非线性和线性块的未知参数,从而解决了过程扰动的干扰。将辨识模型中不可测量的中间变量和不可测量的噪声项用辅助模型输出和估计残差代替,推导出基于辅助模型的递推扩展最小二乘参数估计算法,计算输入非线性和噪声模型的参数。最后,利用随机过程理论对所提出的辨识方案进行收敛性分析。仿真结果表明,该方法具有较高的识别精度和较好的鲁棒性。
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引用次数: 4
Research and application of the angular rolling technology for plate mill 中厚板轧机角轧制技术的研究与应用
IF 5.2 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2023-02-11 DOI: 10.1007/s40436-022-00428-8
Zhi-Jie Jiao, Jun-Yi Luo, Zhi-Qiang Wang, Zhi-Peng Xu, Chun-Yu He, Zhong Zhao

Angular rolling technology can overcome the size limitation of plate mill equipment and product heavy steel plate with large unit weight or improve the production efficiency of small width spreading ratio product. With the DEFORM software, the numerical simulation study of the angular rolling process was carried out, and the relation laws of the width, rolling force and strain of the rolled piece under different angular rolling process conditions were obtained. The simulation results show that with the rotation angle increasing, the width of the rolled piece increases. Comparing with the conventional rolling process, the rolling force changes gradually during the biting and throwing stage of the angular rolling pass. With the rotation angle increasing, both the equivalent strains in the thickness direction and in the width direction gradually increase. According to the pattern and dimension’s changing formula in the double-pass angular rolling process, the prediction model of angle, reduction and width spreading is built. The opening value of side guide is set for the rotation angle controlling. For one 5 000 mm heavy plate mill, the automation control system was modified, and the angular rolling technology was applied online. The absolute deviation of target width does not exceed ± 20 mm and the relative deviation does not exceed 1%. The large unit weight plate that cannot be rolled with traditional process, can be produced now, and the annual output increases by 10 000 t.

角轧制技术可以克服板轧机设备的尺寸限制,生产单位重量大的厚钢板或提高小宽展比产品的生产效率。利用DEFORM软件对角度轧制过程进行了数值模拟研究,得到了不同角度轧制工艺条件下被轧件宽度、轧制力和应变的关系规律。仿真结果表明,随着旋转角度的增大,轧制件的宽度增大。与常规轧制工艺相比,角轧制孔道的咬口和抛口阶段轧制力是逐渐变化的。随着旋转角度的增大,厚度方向和宽度方向的等效应变均逐渐增大。根据双道次角轧制过程中型态和尺寸的变化公式,建立了双道次角轧制过程的角度、缩径和展宽预测模型。设置侧导的开度值,用于控制旋转角度。针对某5 000 mm厚板轧机,对其自动化控制系统进行了改造,并在线应用了角度轧制技术。目标宽度的绝对偏差不超过±20mm,相对偏差不超过1%。传统工艺不能轧制的大单位重量板,现在可以生产,年产量增加10000吨。
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引用次数: 0
Improving the forming performance of incrementally formed sheet parts with customized heat treatment strategies 采用定制的热处理策略提高渐进成形板材的成形性能
IF 5.2 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2023-02-03 DOI: 10.1007/s40436-022-00431-z
Hao Yuan, Yan-Le Li, Yuan-Yu Liu, Gang-Lin Zhao, Fang-Yi Li

Although incremental sheet forming (ISF) is an efficient way to manufacture customized parts, the forming performance and geometric accuracy of formed parts need to be improved to meet industrial application. One feasible solution for these problems is to adopt proper heat treatment strategies for the sheet material both before and during the forming process. In this paper, the effects of heat treatment before forming and heat-assisted forming on the formability and performance of formed parts were experimentally investigated. First, TA1 sheets were heat-treated at different temperatures before forming, and then the sheets were incrementally formed into the target shape with variable angles at different temperatures. After heat treatment, the strength of sheets was decreased due to the occurrence of recrystallization and the growth of grains. Meanwhile, the surface quality of formed parts was also improved with pre-heat treatment before forming. During the heat-assisted forming process, the sheet was softened and the deformation resistance was reduced with the increase of temperature. Therefore, the axial forming force was decreased obviously and the formability of the sheet was increased obviously. Furthermore, by adopting both heat treatment and heat-assisted forming, it was found that the forming force could be further reduced and the formability of the sheet and surface quality could be further improved. As for geometric accuracy, heat treatment has a good effect on improving it, while heat-assisted forming has adverse effect. These findings provide an effective heat treatment strategy for improving the geometric accuracy and surface quality of the incrementally formed parts with lower forming force.

增量板料成形是一种有效的定制零件制造方法,但为了满足工业应用,成形件的成形性能和几何精度有待提高。解决这些问题的一种可行的方法是在成形前和成形过程中对板材材料采取适当的热处理策略。实验研究了成形前热处理和热辅助成形对成形件成形性能和性能的影响。首先对TA1板材在成型前进行不同温度的热处理,然后在不同温度下逐渐成形成不同角度的目标形状。热处理后,由于再结晶的发生和晶粒的长大,使板材的强度降低。同时,通过成形前的预热处理,也提高了成形件的表面质量。在热辅助成形过程中,随着温度的升高,板料软化,抗变形能力降低。因此,轴向成形力明显减小,板材的成形性能明显提高。同时采用热处理和热辅助成形,可进一步降低成形力,提高板材的成形性能和表面质量。在几何精度方面,热处理对提高几何精度有良好的效果,而热辅助成形则有不利的影响。研究结果为在低成形力条件下提高增量成形零件的几何精度和表面质量提供了有效的热处理策略。
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引用次数: 1
A novel predict-prevention quality control method of multi-stage manufacturing process towards zero defect manufacturing 面向零缺陷制造的多阶段制造过程预测-预防质量控制新方法
IF 5.2 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2023-02-02 DOI: 10.1007/s40436-022-00427-9
Li-Ping Zhao, Bo-Hao Li, Yi-Yong Yao

Zero defection manufacturing (ZDM) is the pursuit of the manufacturing industry. However, there is a lack of the implementation method of ZDM in the multi-stage manufacturing process (MMP). Implementing ZDM and controlling product quality in MMP remains an urgent problem in intelligent manufacturing. A novel predict-prevention quality control method in MMP towards ZDM is proposed, including quality characteristics monitoring, key quality characteristics prediction, and assembly quality optimization. The stability of the quality characteristics is detected by analyzing the distribution of quality characteristics. By considering the correlations between different quality characteristics, a deep supervised long-short term memory (SLSTM) prediction network is built for time series prediction of quality characteristics. A long-short term memory-genetic algorithm (LSTM-GA) network is proposed to optimize the assembly quality. By utilizing the proposed quality control method in MMP, unqualified products can be avoided, and ZDM of MMP is implemented. Extensive empirical evaluations on the MMP of compressors validate the applicability and practicability of the proposed method.

零缺陷制造是制造业的追求。然而,在多阶段制造过程中缺乏ZDM的实施方法。在MMP中实施ZDM和控制产品质量仍然是智能制造中亟待解决的问题。针对ZDM,提出了一种新的MMP预测预防质量控制方法,包括质量特性监测、关键质量特性预测和装配质量优化。通过分析质量特征的分布来检测质量特征的稳定性。通过考虑不同质量特征之间的相关性,建立了一个用于质量特征时间序列预测的深度监督长短期记忆(SLSTM)预测网络。提出了一种长短期记忆遗传算法(LSTM-GA)网络来优化装配质量。通过在MMP中使用所提出的质量控制方法,可以避免不合格的产品,并实现MMP的ZDM。对压缩机MMP进行了大量的实证评估,验证了该方法的适用性和实用性。
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引用次数: 6
Deformation characteristics and inertial effect of complex aluminum alloy sheet part under impact hydroforming: experiments and numerical analysis 复杂铝合金板件冲击液压成形的变形特性及惯性效应:实验与数值分析
IF 5.2 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2023-01-30 DOI: 10.1007/s40436-022-00430-0
Liang-Liang Xia, Shi-Hong Zhang, Yong Xu, Shuai-Feng Chen, Boris B. Khina, Artur I. Pokrovsky

Impact hydroforming (IHF), as a novel sheet metal forming technology with the advantages of high strain rate forming and flexible liquid loading, is highly suitable for efficiently manufacturing aluminum complex-shaped sheet parts. In this paper, deformation characteristics of complex sheet parts under IHF are systematically investigated. The mechanical properties of 2024 aluminum alloy under a wide range of strain rates (10−3 s−1–3.3×103 s−1) were studied. It indicated that the elongation of 2024 aluminum alloy was improved by 116.01% under strain rates of 3.306 × 103 s−1, referring to 10−3 s−1. Further, a complex-shaped part with symmetrical and asymmetrical structures was selected. The deformation characteristics of sheet and role of inertial effect under IHF were investigated with well-developed solid–liquid coupling finite element (SLC-FE) model with high accuracy. Differentiating deformation tendency is found for symmetrical structure with notably prior deformation at central zone, showing a “bulging” profile at initial forming stage. Whereas, synchronous deformation is presented for asymmetrical structure with a “flat” profile. Additionally, distinctive inertial effect was observed at different positions change for both symmetrical and asymmetrical structures, in which lower values were resulted at their central regions. Meanwhile, the inertial effect evolved with the impacting speed. Specially, larger difference of inertial effect was observed with increasing impacting speed.

冲击液压成形(IHF)作为一种新型的金属板材成形技术,具有高应变速率成形和柔性液体加载的优点,非常适合于高效制造铝复杂形状的板材。本文系统地研究了复杂板件在IHF作用下的变形特性。研究了2024铝合金在宽应变速率范围(10−3 s−1–3.3×103 s−1)下的力学性能。结果表明,在3.306的应变速率下,2024铝合金的伸长率提高了116.01% × 103 s−1,参见10−3 s−1。此外,选择了具有对称和非对称结构的复杂形状部件。采用完善的高精度固液耦合有限元(SLC-FE)模型,研究了IHF作用下薄板的变形特性和惯性效应的作用。对称结构在中心区有明显的先变形,在初始成形阶段表现出“凸起”轮廓。然而,对于具有“平面”轮廓的非对称结构,提出了同步变形。此外,在对称和非对称结构的不同位置变化处都观察到了独特的惯性效应,其中在其中心区域产生了较低的值。同时,惯性效应随撞击速度的增加而演化。特别是,随着冲击速度的增加,惯性效应的差异越来越大。
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引用次数: 3
Global optimization of process parameters for low-temperature SiNx based on orthogonal experiments 基于正交实验的低温氮化硅工艺参数全局优化
IF 5.2 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2022-12-20 DOI: 10.1007/s40436-022-00423-z
Lian-Qiao Yang, Chi Zhang, Wen-Lei Li, Guo-He Liu, Majiaqi Wu, Jin-Qiang Liu, Jian-Hua Zhang

Low-temperature silicon nitride (SiNx) films deposited by plasma-enhanced chemical vapor deposition (PECVD) have huge application potential in the flexible display. However, the applicability of SiNx largely depends on the film’s general properties, including flexibility, deposition rate, residual stress, elastic modulus, fracture strain, dielectric constant, refraction index, etc. Process optimization towards specific application by conventional experiment design needs lots of work due to the interaction of muti quality and process parameters. Therefore, an efficient global optimization approach for the process technology was proposed based on the Taguchi orthogonal experiment method considering muti-factor muti-responses. First of all, the Taguchi orthogonal experiment design and analysis was used to rank the influences of main process parameters on the quality characteristics, including radio frequency (RF) power, pressure, silane flow rate, ammonia flow rate and nitrogen flow rate. Then, the global optimization approach was carried out utilizing the multi-response optimizer considering the combination target of film formation rate, residual stress, dielectric constant, elastic modulus, fracture strain, refractive index. Finally, the optimal solution of the SiNx film was finally obtained and verified.

等离子体增强化学气相沉积(PECVD)技术制备的低温氮化硅(SiNx)薄膜在柔性显示领域具有巨大的应用潜力。然而,SiNx的适用性在很大程度上取决于薄膜的一般性能,包括柔韧性、沉积速率、残余应力、弹性模量、断裂应变、介电常数、折射率等。由于多种质量参数和工艺参数的相互作用,传统实验设计针对特定应用的工艺优化需要做大量的工作。为此,基于多因素多响应的田口正交试验法,提出了一种高效的工艺技术全局优化方法。首先,采用田口正交试验设计与分析,对射频功率、压力、硅烷流量、氨流量、氮流量等主要工艺参数对质量特性的影响进行排序。然后,考虑成膜率、残余应力、介电常数、弹性模量、断裂应变、折射率等组合目标,利用多响应优化器进行全局优化。最后得到了SiNx膜的最优解并进行了验证。
{"title":"Global optimization of process parameters for low-temperature SiNx based on orthogonal experiments","authors":"Lian-Qiao Yang,&nbsp;Chi Zhang,&nbsp;Wen-Lei Li,&nbsp;Guo-He Liu,&nbsp;Majiaqi Wu,&nbsp;Jin-Qiang Liu,&nbsp;Jian-Hua Zhang","doi":"10.1007/s40436-022-00423-z","DOIUrl":"10.1007/s40436-022-00423-z","url":null,"abstract":"<div><p>Low-temperature silicon nitride (SiN<sub><i>x</i></sub>) films deposited by plasma-enhanced chemical vapor deposition (PECVD) have huge application potential in the flexible display. However, the applicability of SiN<sub><i>x</i></sub> largely depends on the film’s general properties, including flexibility, deposition rate, residual stress, elastic modulus, fracture strain, dielectric constant, refraction index, etc. Process optimization towards specific application by conventional experiment design needs lots of work due to the interaction of muti quality and process parameters. Therefore, an efficient global optimization approach for the process technology was proposed based on the Taguchi orthogonal experiment method considering muti-factor muti-responses. First of all, the Taguchi orthogonal experiment design and analysis was used to rank the influences of main process parameters on the quality characteristics, including radio frequency (RF) power, pressure, silane flow rate, ammonia flow rate and nitrogen flow rate. Then, the global optimization approach was carried out utilizing the multi-response optimizer considering the combination target of film formation rate, residual stress, dielectric constant, elastic modulus, fracture strain, refractive index. Finally, the optimal solution of the SiN<sub><i>x</i></sub> film was finally obtained and verified.</p></div>","PeriodicalId":7342,"journal":{"name":"Advances in Manufacturing","volume":"11 2","pages":"181 - 190"},"PeriodicalIF":5.2,"publicationDate":"2022-12-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://link.springer.com/content/pdf/10.1007/s40436-022-00423-z.pdf","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"46646199","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Novel gripper module and method for automated assembly of miniature parts 一种微型零件自动装配的新型夹持器模块和方法
IF 5.2 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2022-12-20 DOI: 10.1007/s40436-022-00425-x
Zhi-Yong Zhang, Xiao-Dong Wang, Tong-Qun Ren, Tian-Lun Jin

During assembly process, the miniature part needs to be fixed in its assembly position. In some occasions where adhesive is used, the joining force is not established due to the adhesive curing process, in that case the locking of parts is required. Manual locking is difficult to meet the increasing demand for mass production. To solve this problem and realize fully automatic assembly, a novel gripper module was designed and corresponding locking method was proposed. Thanks to the functional integration, the gripper module is capable of manipulating and locking the part. This module is integrated into the assembly system and plays a crucial role in automatic assembly. The locking method for automatic assembly is based on the integration of the part picking up and the locking unit releasing. After being placed accurately at its desired position, the miniature part can be automatically locked by releasing the locking unit. The innovative structure and mechanism of the gripper module convert the spring force into the locking force of the miniature part, ensuring non-rigid locking and suitable small locking force. Locking principle, flexibility and limitations of the proposed method were clarified in detail. Moreover, an effective compensation strategy was used to achieve accurate and stable pickup of the part, which increased the reliability of the assembly process. During automatic locking, the disturbances to the part due to the eccentric load were analyzed. The effectiveness of the gripper module and proposed method was verified by experiment. Experimental results indicated that the modular system integrated with the gripper module could meet the requirements of fully automatic assembly. Manual locking is replaced by automatic locking, and workers are liberated from tedious manual operations. The improvement of automation level enables assembly equipment to be applied to mass production scenarios.

在装配过程中,微型零件需要固定在其装配位置上。在某些使用粘合剂的场合,由于粘合剂固化过程而无法建立连接力,在这种情况下需要锁定部件。手动锁紧难以满足日益增长的大批量生产需求。为解决这一问题,实现全自动装配,设计了一种新型夹持器模块,并提出了相应的锁紧方法。由于功能集成,夹具模块能够对零件进行操纵和锁定。该模块集成在装配系统中,在自动装配中起着至关重要的作用。自动装配的锁定方法是基于零件拾取和锁定单元释放的一体化。在精确放置到所需位置后,微型部件可以通过释放锁定单元自动锁定。夹具模块的创新结构和机构将弹簧力转化为微型零件的锁紧力,保证了非刚性锁紧和合适的小锁紧力。详细阐述了该方法的锁定原理、灵活性和局限性。此外,采用有效的补偿策略实现了零件的准确稳定拾取,提高了装配过程的可靠性。在自动锁紧过程中,分析了偏心载荷对零件的扰动。实验验证了夹持器模块和所提方法的有效性。实验结果表明,与夹持器模块集成的模块化系统可以满足全自动装配的要求。人工锁定被自动锁定取代,工人从繁琐的人工操作中解放出来。自动化水平的提高使装配设备能够应用于批量生产场景。
{"title":"Novel gripper module and method for automated assembly of miniature parts","authors":"Zhi-Yong Zhang,&nbsp;Xiao-Dong Wang,&nbsp;Tong-Qun Ren,&nbsp;Tian-Lun Jin","doi":"10.1007/s40436-022-00425-x","DOIUrl":"10.1007/s40436-022-00425-x","url":null,"abstract":"<div><p>During assembly process, the miniature part needs to be fixed in its assembly position. In some occasions where adhesive is used, the joining force is not established due to the adhesive curing process, in that case the locking of parts is required. Manual locking is difficult to meet the increasing demand for mass production. To solve this problem and realize fully automatic assembly, a novel gripper module was designed and corresponding locking method was proposed. Thanks to the functional integration, the gripper module is capable of manipulating and locking the part. This module is integrated into the assembly system and plays a crucial role in automatic assembly. The locking method for automatic assembly is based on the integration of the part picking up and the locking unit releasing. After being placed accurately at its desired position, the miniature part can be automatically locked by releasing the locking unit. The innovative structure and mechanism of the gripper module convert the spring force into the locking force of the miniature part, ensuring non-rigid locking and suitable small locking force. Locking principle, flexibility and limitations of the proposed method were clarified in detail. Moreover, an effective compensation strategy was used to achieve accurate and stable pickup of the part, which increased the reliability of the assembly process. During automatic locking, the disturbances to the part due to the eccentric load were analyzed. The effectiveness of the gripper module and proposed method was verified by experiment. Experimental results indicated that the modular system integrated with the gripper module could meet the requirements of fully automatic assembly. Manual locking is replaced by automatic locking, and workers are liberated from tedious manual operations. The improvement of automation level enables assembly equipment to be applied to mass production scenarios.</p></div>","PeriodicalId":7342,"journal":{"name":"Advances in Manufacturing","volume":"11 2","pages":"295 - 310"},"PeriodicalIF":5.2,"publicationDate":"2022-12-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"43665523","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Multi-dimensional controllability analysis of precision ball bearing integrity 精密滚珠轴承整体性的多维可控性分析
IF 5.2 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2022-12-17 DOI: 10.1007/s40436-022-00424-y
Lai Hu, Jun Zha, Wei-Hua Zhao, Xiao-Fei Peng, Yao-Long Chen

Many factors affect the integrity of precision ball bearings. In this study, the multi-dimensional controllability of precision ball bearings produced in different company brands (bearing A and bearing B) were studied and compared. The geometric errors (flatness, parallelism, roundness and cylindricity of inner and outer rings, roundness, groove and roughness of inner and outer rings) and vibration errors of bearings were analyzed. Concurrently, the residual stress, residual austenite content, element content ratio, metamorphic layer and temperature-vibration displacement coupling test were also analyzed. Based on the above analysis conclusion, the bearing fatigue life test was carried out for 2 150 h. The reliability of the conclusion is proved again as follows. When the residual austenite content in the raceway of precision ball bearing is 10%, the axial residual stress is 877.4 MPa; the tangential residual stress is 488.1 MPa; the carbon content is 6%; the test temperature of bearing is the lowest; and the service life is prolonged.

影响精密滚珠轴承完整性的因素很多。在本研究中,对不同公司品牌(轴承A和轴承B)生产的精密滚珠轴承的多维可控性进行了研究和比较。分析了轴承的几何误差(内外圈的平整度、平行度、圆度和圆柱度,内外圈的圆度、沟槽和粗糙度)和振动误差。同时对残余应力、残余奥氏体含量、元素含量比、变质层和温度-振动位移耦合试验进行了分析。基于上述分析结论,进行了2 150 h的轴承疲劳寿命试验,再次验证了结论的可靠性。当精密球轴承滚道残余奥氏体含量为10%时,轴向残余应力为877.4 MPa;切向残余应力为488.1 MPa;碳含量为6%;轴承的试验温度最低;延长了使用寿命。
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引用次数: 2
Preparation and atmospheric wet-reflow of indium microbump for low-temperature flip-chip applications 低温倒装用铟微凸块的制备及常压湿回流
IF 5.2 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2022-12-16 DOI: 10.1007/s40436-022-00419-9
Wen-Hui Zhu, Xiao-Yu Xiao, Zhuo Chen, Gui Chen, Ya-Mei Yan, Lian-Cheng Wang, Gang-Long Li

An urgent demand for lowering bonding temperature has been put forward by advanced flip-chip integration such as micro-LED packaging and heterogeneous integration of semiconductor devices. Indium microbump with low-melting point has attracted attention for its potential use as the interconnection intermediate, and the development of its fabrication process is therefore of great attraction. To reveal the critical process factors for successfully fabricating a high-density In microbump array, this paper investigated a simple process flow of In patterning and reflow and detailed the flux-assisted wet reflow process. Critical process conditions, including the patterned In volume, alignment accuracy, reflow reagent liquidity, and temperature profile, were described, with a particular emphasis on the role of surface tension of molten indium film during the formation of spherical microbumps. A high-density indium ball array with an overall yield greater than 99.7% can be obtained, which suggests that the In patterning and wet-reflow processes are robust and that a high-quality microbump array could be readily formed with low equipment requirements. Furthermore, the interfacial reaction characteristics between In microbump and Au adhesion layer were investigated under thermal aging conditions, which revealed lateral intermetallic growth of AuIn2 compound and well-retained interfacial strength even after prolonged aging.

微led封装和半导体器件异质集成等先进的倒装集成技术对降低键合温度提出了迫切的要求。具有低熔点特性的铟微bump因其作为互连中间体的潜力而备受关注,其制备工艺的发展也备受关注。为了揭示成功制备高密度In微凸点阵列的关键工艺因素,本文研究了一种简单的In图像化和回流的工艺流程,并详细介绍了通量辅助湿回流工艺。描述了关键工艺条件,包括图案体积,对准精度,回流试剂流动性和温度分布,特别强调了在球形微凸起形成过程中熔融铟膜表面张力的作用。得到的高密度铟球阵列的总产率大于99.7%,这表明In图图化和湿回流工艺是稳健的,并且可以在较低的设备要求下轻松形成高质量的微凹凸阵列。此外,在热时效条件下,研究了In微凸点与Au粘附层之间的界面反应特征,发现AuIn2化合物在长时间时效后仍有横向金属间生长,界面强度保持良好。
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引用次数: 0
Manufacturability and mechanical reliability study for heterogeneous integration system in display (HiSID) 异构显示集成系统的可制造性与机械可靠性研究
IF 5.2 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2022-12-05 DOI: 10.1007/s40436-022-00420-2
Hao-Hui Long, Hui-Cai Ma, Jia-Ying Gao, Li Zhang, De-Ming Zhang, Jian-Qiu Chen

In this paper, the system on display panel (SoDP) architecture, the primary stage of heterogeneous integration system in display (HiSID), is introduced for the first time. In this architecture, the driving components of display, which are supposed to be on the display flexible print circuit (FPC) in traditional architecture, are innovatively integrated onto the backside of display panel. Through the SoDP architecture, the simulated impact strain in the panel fan-out region can decrease about 30% compared to the traditional architecture, and SoDP provides more the 10 mm extra space in the in-plane Y-direction for holding a larger battery. Also, the SoDP is compatible with the current organic laser emitted diode (OLED) and system in package (SiP) processes. Besides the primary stage, this paper also presents a comprehensive and extensive analysis on the challenges of the manufacturability for the advanced stage of HiSID from four key technologies perspectives: device miniaturization, massive manufacturing, driving technology, and advanced heterogeneous integration.

本文首次介绍了异构显示集成系统(HiSID)的初级阶段——显示面板系统(SoDP)架构。在该架构中,将传统架构中应该在显示柔性印刷电路(FPC)上的显示驱动元件创新地集成到显示面板的背面。通过SoDP架构,与传统架构相比,面板扇形区域的模拟冲击应变降低了约30%,并且SoDP在平面y方向上提供了10 mm的额外空间,可以容纳更大的电池。此外,SoDP与当前的有机激光发射二极管(OLED)和系统级封装(SiP)工艺兼容。除了初级阶段,本文还从器件小型化、大规模制造、驱动技术和先进异构集成四个关键技术角度,全面、广泛地分析了HiSID高级阶段可制造性面临的挑战。
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引用次数: 2
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Advances in Manufacturing
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